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JP1731670S - 基板処理装置用基板保持具 - Google Patents

基板処理装置用基板保持具

Info

Publication number
JP1731670S
JP1731670S JP2022004465F JP2022004465F JP1731670S JP 1731670 S JP1731670 S JP 1731670S JP 2022004465 F JP2022004465 F JP 2022004465F JP 2022004465 F JP2022004465 F JP 2022004465F JP 1731670 S JP1731670 S JP 1731670S
Authority
JP
Japan
Prior art keywords
substrate
processing apparatus
substrate processing
holder
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022004465F
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2022004465F priority Critical patent/JP1731670S/ja
Priority to TW111303487F priority patent/TWD228269S/zh
Priority to US29/848,819 priority patent/USD1053830S1/en
Application granted granted Critical
Publication of JP1731670S publication Critical patent/JP1731670S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本願物品は、基板処理装置の縦型反応室において、複数の基板を水平に保持するための基板保持具である。
JP2022004465F 2022-03-04 2022-03-04 基板処理装置用基板保持具 Active JP1731670S (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022004465F JP1731670S (ja) 2022-03-04 2022-03-04 基板処理装置用基板保持具
TW111303487F TWD228269S (zh) 2022-03-04 2022-07-14 基板處理裝置用基板保持具
US29/848,819 USD1053830S1 (en) 2022-03-04 2022-08-05 Wafer support of semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022004465F JP1731670S (ja) 2022-03-04 2022-03-04 基板処理装置用基板保持具

Publications (1)

Publication Number Publication Date
JP1731670S true JP1731670S (ja) 2025-12-15

Family

ID=84322250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022004465F Active JP1731670S (ja) 2022-03-04 2022-03-04 基板処理装置用基板保持具

Country Status (3)

Country Link
US (1) USD1053830S1 (ja)
JP (1) JP1731670S (ja)
TW (1) TWD228269S (ja)

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (ko) * 1998-06-23 2000-01-15 윤종용 반도체 웨이퍼 보트
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
TWD119911S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD119910S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD130137S1 (zh) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 晶舟
US9153466B2 (en) 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
JP1537629S (ja) * 2014-11-20 2015-11-09
JP1563649S (ja) * 2016-02-12 2016-11-21
JP1597807S (ja) * 2017-08-21 2018-02-19
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1638282S (ja) * 2018-09-20 2019-08-05
JP1640260S (ja) * 2018-11-19 2019-09-02
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
JP1682719S (ja) 2020-06-15 2021-04-05
JP1700777S (ja) * 2021-03-15 2021-11-29 基板処理装置用ボート

Also Published As

Publication number Publication date
TWD228269S (zh) 2023-11-01
USD1053830S1 (en) 2024-12-10

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