JP1678278S - 基板処理装置用ボート - Google Patents
基板処理装置用ボートInfo
- Publication number
- JP1678278S JP1678278S JP2020005341F JP2020005341F JP1678278S JP 1678278 S JP1678278 S JP 1678278S JP 2020005341 F JP2020005341 F JP 2020005341F JP 2020005341 F JP2020005341 F JP 2020005341F JP 1678278 S JP1678278 S JP 1678278S
- Authority
- JP
- Japan
- Prior art keywords
- substrate processing
- boat
- processing equipment
- processing apparatus
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 4
Abstract
本願物品は、基板処理装置に用いられ、基板処理装置の反応室内に複数の基板を水平に保持するためのボートである。
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020005341F JP1678278S (ja) | 2020-03-19 | 2020-03-19 | 基板処理装置用ボート |
| TW109305096F TWD218093S (zh) | 2020-03-19 | 2020-09-09 | 基板處理裝置用晶舟之部分 |
| US29/750,438 USD965542S1 (en) | 2020-03-19 | 2020-09-14 | Boat of substrate processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020005341F JP1678278S (ja) | 2020-03-19 | 2020-03-19 | 基板処理装置用ボート |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1678278S true JP1678278S (ja) | 2021-02-01 |
Family
ID=74312790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020005341F Active JP1678278S (ja) | 2020-03-19 | 2020-03-19 | 基板処理装置用ボート |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD965542S1 (ja) |
| JP (1) | JP1678278S (ja) |
| TW (1) | TWD218093S (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1731670S (ja) * | 2022-03-04 | 2025-12-15 | 基板処理装置用基板保持具 | |
| USD1109710S1 (en) * | 2022-03-22 | 2026-01-20 | Achilles Corporation | Main body of a semiconductor wafer carrying container |
| JP1731674S (ja) * | 2022-05-30 | 2025-12-15 | 半導体製造装置用反応管のインナー管 | |
| JP1731673S (ja) * | 2022-05-30 | 2025-12-15 | 半導体製造装置用反応管のインナー管 | |
| JP1731675S (ja) * | 2022-05-30 | 2025-12-15 | 半導体製造装置用反応管のインナー管 | |
| JP1741513S (ja) * | 2022-09-14 | 2023-04-11 | ||
| JP1741512S (ja) * | 2022-09-14 | 2023-04-11 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| US9153466B2 (en) * | 2012-04-26 | 2015-10-06 | Asm Ip Holding B.V. | Wafer boat |
| USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
| TWD166332S (zh) * | 2013-03-22 | 2015-03-01 | 日立國際電氣股份有限公司 | 基板處理裝置用晶舟之部分 |
| TWD163542S (zh) * | 2013-03-22 | 2014-10-11 | 日立國際電氣股份有限公司 | 基板處理裝置用晶舟 |
| TWD168827S (zh) * | 2013-07-29 | 2015-07-01 | 日立國際電氣股份有限公司 | 半導體製造裝置用晶舟 |
| TWD167988S (zh) * | 2013-07-29 | 2015-05-21 | 日立國際電氣股份有限公司 | 半導體製造裝置用晶舟 |
| TWD165429S (zh) * | 2013-07-29 | 2015-01-11 | 日立國際電氣股份有限公司 | 半導體製造裝置用晶舟 |
| US9343304B2 (en) * | 2014-09-26 | 2016-05-17 | Asm Ip Holding B.V. | Method for depositing films on semiconductor wafers |
| JP1537629S (ja) * | 2014-11-20 | 2015-11-09 | ||
| JP1537313S (ja) * | 2014-11-20 | 2015-11-09 | ||
| JP1537312S (ja) * | 2014-11-20 | 2015-11-09 | ||
| JP1537630S (ja) * | 2014-11-20 | 2015-11-09 | ||
| JP1563649S (ja) * | 2016-02-12 | 2016-11-21 | ||
| JP1597807S (ja) * | 2017-08-21 | 2018-02-19 | ||
| USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| JP1638282S (ja) * | 2018-09-20 | 2019-08-05 | ||
| JP1640260S (ja) * | 2018-11-19 | 2019-09-02 |
-
2020
- 2020-03-19 JP JP2020005341F patent/JP1678278S/ja active Active
- 2020-09-09 TW TW109305096F patent/TWD218093S/zh unknown
- 2020-09-14 US US29/750,438 patent/USD965542S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TWD218093S (zh) | 2022-04-11 |
| USD965542S1 (en) | 2022-10-04 |
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