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JP1731670S - Substrate holder for substrate processing apparatus - Google Patents

Substrate holder for substrate processing apparatus

Info

Publication number
JP1731670S
JP1731670S JP2022004465F JP2022004465F JP1731670S JP 1731670 S JP1731670 S JP 1731670S JP 2022004465 F JP2022004465 F JP 2022004465F JP 2022004465 F JP2022004465 F JP 2022004465F JP 1731670 S JP1731670 S JP 1731670S
Authority
JP
Japan
Prior art keywords
substrate
processing apparatus
substrate processing
holder
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022004465F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2022004465F priority Critical patent/JP1731670S/en
Priority to TW111303487F priority patent/TWD228269S/en
Priority to US29/848,819 priority patent/USD1053830S1/en
Application granted granted Critical
Publication of JP1731670S publication Critical patent/JP1731670S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本願物品は、基板処理装置の縦型反応室において、複数の基板を水平に保持するための基板保持具である。The present article is a substrate holder for horizontally holding a plurality of substrates in a vertical reaction chamber of a substrate processing apparatus.

JP2022004465F 2022-03-04 2022-03-04 Substrate holder for substrate processing apparatus Active JP1731670S (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022004465F JP1731670S (en) 2022-03-04 2022-03-04 Substrate holder for substrate processing apparatus
TW111303487F TWD228269S (en) 2022-03-04 2022-07-14 Substrate holder for substrate processing equipment
US29/848,819 USD1053830S1 (en) 2022-03-04 2022-08-05 Wafer support of semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022004465F JP1731670S (en) 2022-03-04 2022-03-04 Substrate holder for substrate processing apparatus

Publications (1)

Publication Number Publication Date
JP1731670S true JP1731670S (en) 2025-12-15

Family

ID=84322250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022004465F Active JP1731670S (en) 2022-03-04 2022-03-04 Substrate holder for substrate processing apparatus

Country Status (3)

Country Link
US (1) USD1053830S1 (en)
JP (1) JP1731670S (en)
TW (1) TWD228269S (en)

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (en) * 1998-06-23 2000-01-15 윤종용 Semiconductor wafer boat
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
TWD119911S1 (en) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 Wafer boat
TWD119910S1 (en) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 Wafer boat
TWD130137S1 (en) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 Crystal Boat
US9153466B2 (en) 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD163542S (en) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 Wafer boat for substrate processing equipment
TWD166332S (en) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 Part of the wafer boat for substrate processing equipment
TWD168827S (en) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD165429S (en) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD167988S (en) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
JP1537629S (en) * 2014-11-20 2015-11-09
JP1563649S (en) * 2016-02-12 2016-11-21
JP1597807S (en) * 2017-08-21 2018-02-19
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1638282S (en) * 2018-09-20 2019-08-05
JP1640260S (en) * 2018-11-19 2019-09-02
JP1678278S (en) * 2020-03-19 2021-02-01 Boat for substrate processing equipment
JP1682719S (en) 2020-06-15 2021-04-05
JP1700777S (en) * 2021-03-15 2021-11-29 Boat for substrate processing equipment

Also Published As

Publication number Publication date
TWD228269S (en) 2023-11-01
USD1053830S1 (en) 2024-12-10

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