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JP1741175S - サセプタ - Google Patents

サセプタ

Info

Publication number
JP1741175S
JP1741175S JP2022022685F JP2022022685F JP1741175S JP 1741175 S JP1741175 S JP 1741175S JP 2022022685 F JP2022022685 F JP 2022022685F JP 2022022685 F JP2022022685 F JP 2022022685F JP 1741175 S JP1741175 S JP 1741175S
Authority
JP
Japan
Prior art keywords
susceptor
wafer
constitutes
article
serves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022022685F
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2022022685F priority Critical patent/JP1741175S/ja
Priority to US29/888,150 priority patent/USD1095473S1/en
Application granted granted Critical
Publication of JP1741175S publication Critical patent/JP1741175S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットの基台となるサセプタ部品の中央を構成する部品である。
JP2022022685F 2022-10-20 2022-10-20 サセプタ Active JP1741175S (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022022685F JP1741175S (ja) 2022-10-20 2022-10-20 サセプタ
US29/888,150 USD1095473S1 (en) 2022-10-20 2023-03-28 Susceptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022022685F JP1741175S (ja) 2022-10-20 2022-10-20 サセプタ

Publications (1)

Publication Number Publication Date
JP1741175S true JP1741175S (ja) 2023-04-06

Family

ID=85777532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022022685F Active JP1741175S (ja) 2022-10-20 2022-10-20 サセプタ

Country Status (2)

Country Link
US (1) USD1095473S1 (ja)
JP (1) JP1741175S (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1082731S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082728S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082730S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Cover base for susceptors
USD1082729S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor cover

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0834187B2 (ja) * 1989-01-13 1996-03-29 東芝セラミックス株式会社 サセプタ
TW524873B (en) * 1997-07-11 2003-03-21 Applied Materials Inc Improved substrate supporting apparatus and processing chamber
USD404370S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Cap for use in a semiconductor wafer heat processing apparatus
JPH11343571A (ja) * 1998-05-29 1999-12-14 Ngk Insulators Ltd サセプター
US6100505A (en) * 1999-05-27 2000-08-08 Advanced Micro Devices, Inc. Hotplate offset ring
JP4034145B2 (ja) * 2002-08-09 2008-01-16 住友大阪セメント株式会社 サセプタ装置
US7921802B2 (en) * 2002-12-09 2011-04-12 Nxp B.V. System and method for suppression of wafer temperature drift in cold-wall CVD systems
USD525127S1 (en) * 2004-03-01 2006-07-18 Kraft Foods Holdings, Inc. Susceptor ring
US20060005767A1 (en) * 2004-06-28 2006-01-12 Applied Materials, Inc. Chamber component having knurled surface
DE102005045081B4 (de) * 2004-09-29 2011-07-07 Covalent Materials Corp. Suszeptor
KR20070093493A (ko) * 2006-03-14 2007-09-19 엘지이노텍 주식회사 서셉터 및 반도체 제조장치
USD600223S1 (en) * 2008-08-07 2009-09-15 Ravinder Aggarwal Susceptor ring
KR101923050B1 (ko) * 2012-10-24 2018-11-29 어플라이드 머티어리얼스, 인코포레이티드 급속 열 처리를 위한 최소 접촉 에지 링
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
SG10201810390TA (en) * 2014-05-21 2018-12-28 Applied Materials Inc Thermal processing susceptor
US10269614B2 (en) * 2014-11-12 2019-04-23 Applied Materials, Inc. Susceptor design to reduce edge thermal peak
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
US20200109484A1 (en) * 2018-10-03 2020-04-09 Asm Ip Holding B.V. Susceptor and susceptor coating method
USD948463S1 (en) * 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
US11764101B2 (en) * 2019-10-24 2023-09-19 ASM IP Holding, B.V. Susceptor for semiconductor substrate processing
JP7336369B2 (ja) * 2019-11-25 2023-08-31 株式会社Ｓｃｒｅｅｎホールディングス 基板支持装置、熱処理装置、基板支持方法、熱処理方法
JP1711119S (ja) 2021-10-22 2022-03-29 サセプタリング
JP1711120S (ja) 2021-10-22 2022-03-29 サセプタカバー
USD1067204S1 (en) * 2022-05-31 2025-03-18 Asm Ip Holding B.V. Susceptor
USD1030687S1 (en) * 2022-05-31 2024-06-11 Asm Ip Holding B.V. Susceptor
JP1741173S (ja) * 2022-10-20 2023-04-06 半導体ウェハ及びサセプタ加熱用ヒータ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1082731S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082728S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082730S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Cover base for susceptors
USD1082729S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor cover

Also Published As

Publication number Publication date
USD1095473S1 (en) 2025-09-30

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