TWI472871B - Dust-proof film assembly storage container - Google Patents

Description

Dust-proof film assembly storage container

The present invention relates to a pellicle assembly container.

In a semiconductor manufacturing process such as a large-scale integrated circuit (LSI) or a very large-scale integrated circuit, or a liquid crystal display or the like, it is necessary to irradiate light onto a semiconductor wafer or a liquid crystal original plate to form a pattern. The lithography job. At this time, if dust is attached to the photomask or the reticle, deformation of the transfer pattern may occur, or the edges may be unclear and the substrate may be dirty. This is because dust absorbs light or bends it. This type of work is usually carried out in a clean room, but it is difficult to keep the mask clean from time to time. Therefore, a pellicle made of a transparent dust-proof film adhered to the pellicle frame is usually used. For example, when performing photolithography, the pellicle is placed on the photomask to prevent foreign matter from adhering to the photomask, and to expose the pattern on the photomask to be exposed to the pellicle film. Transfer is performed on the influence of dust.

On the other hand, if the dust-proof film module itself adheres to foreign matter, it also causes foreign matter to adhere to the photomask, so it is required to have high cleanliness. Dust film Use a dust-proof membrane module to store containers when storing and transporting components. A resin pellicle film storage container obtained by an injection molding method or a vacuum molding method is usually used. This is because the surface of the resin pellicle container storage container is smooth and the risk of dust generation is small.

In order to keep the inside of the dust-proof film module in a clean state, the dust-proof film assembly storage container is required to have a certain rigidity, so that it is not easily deformed even when subjected to an external force during transportation or the like. However, the rigidity of the resin pellicle container storage container has a certain limit. Therefore, as described in Patent Document 1 and Patent Document 2 below, the following measures are generally taken, that is, a reinforcing member such as a rod or a square tube of an aluminum alloy is used. The "Japanese" shape or the "Mesh" shape is mounted on the outside of the container body to ensure rigidity.

Prior art literature

Patent literature

Patent Document 1: Japanese Patent Laid-Open Publication No. 2005-170507

Patent Document 2: Japanese Patent No. 4391435

In the case where the resin pellicle container storage container has sufficient rigidity and a large number of reinforcing members are attached to the outside of the container body as described in Patent Document 1 and Patent Document 2, the weight of the pellicle assembly container is caused. And the increase in manufacturing costs. For this reason, it is required that the reinforcing member mounted on the pellicle container storage container obtain a sufficient reinforcing effect with a minimum necessity.

As described above, the resin pellicle assembly container is passed through The injection molding method or the vacuum molding method is used for molding, so that the molding stress after molding is gradually released, and the shape and size thereof change with time. The larger the dust-proof membrane module storage container is, the greater the change over time. When the reinforcing member is attached to the container body of the pellicle assembly container after the change of time, there is a case where the mounting hole formed in advance on the container body is displaced, and the reinforcing member cannot be attached.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a dust-proof film which can be easily attached to a resin container body which has been changed over time, and which has a minimum reinforcing member and which is light in weight and high in rigidity. Component storage container.

In order to achieve the above objectives, the following technical solutions are proposed:

1. A pellicle assembly container comprising: a rectangular resin container body on which a pellicle is placed; and a resin cover that is fitted and locked by a peripheral portion thereof to cover the pellicle assembly, A protruding surface of the convex protruding rib formed along an outer peripheral edge of the container body is formed as a mounting surface of the pellicle assembly, and the pellicle assembly container is characterized in that it is attached to an outer bottom surface of the container body And the reinforcing member between the outer periphery and the convex rib is a frame body or an L-shaped body, and the frame body includes a size of a straight rod fixed along each side of the outer circumference. The L-shaped bodies are fixed to each corner of the container body independently of each other.

2. The pellicle assembly container according to the above 1, wherein the frame The shape is composed of the straight rod-shaped body and the L-shaped body disposed at a corner portion of the container body, and the size of the frame-shaped body can be adjusted, and the straight rod-shaped body and the L-shaped body are The installation location is variable.

3. The pellicle assembly container according to the above 1 or 2, wherein the L-shaped body is formed such that a corner portion thereof is a flat surface or a curved surface.

4. The pellicle assembly container according to any one of the above 1 to 3, wherein the pellicle has a length of at least one side of 500 mm or more.

5. The pellicle assembly container according to any one of the above 1 to 4, wherein the bottom surface of the reinforcing member is on the same plane as the outer bottom surface of the container body.

The pellicle assembly container according to any one of the above 1 to 5, wherein a corner rib is formed at each corner portion of a bottom surface region of the container body surrounded by the convex rib, the corner Both ends of the protruding rib are connected to the two convex protruding ribs forming the corner.

The pellicle assembly container according to any one of the above 1 to 6, wherein the reinforcing member attached to the opposite sides of the container body is provided with the pellicle for carrying The holding mechanism of the component storage container.

8. The pellicle container storage container according to any one of the above 1 to 7, which is provided with a plate body covering the entire outer bottom surface of the container body.

According to the present invention, it is possible to provide a minimum installation of a resin pellicle assembly container which has a change in size and the like over time. A pellicle assembly container having a solid member and a light weight and high rigidity.

10‧‧‧Plastic membrane assembly storage container

12‧‧‧Dust film assembly

12a‧‧‧Plastic membrane assembly frame

12b‧‧‧Plastic film

12c‧‧‧Composite layer

14‧‧‧ Container body

16‧‧‧ Cover

18‧‧‧ convex ribs

18a‧‧‧Face

20a‧‧‧Rhomb

20b‧‧‧ corner ribs

22‧‧‧ recess

24‧‧‧Retaining components

24a‧‧‧

24b‧‧‧ tip support

26‧‧‧Box body

26a, 26b‧‧‧ Straight rods

26c, 26d, 38‧‧‧L-shaped body

28‧‧‧Installation bolts

30‧‧‧ fastening bolts

32‧‧‧ long hole

34‧‧‧ screw holes

36, 38a‧‧ plane

37‧‧‧Handles

40‧‧‧ board

X‧‧‧ diagonal

FIG. 1 is a longitudinal cross-sectional view and a partially enlarged cross-sectional view showing an example of a pellicle container storage container according to the present invention.

Figure 2 is a plan view of the container body 14 shown in Figure 1 .

Figure 3 is a cross-sectional view taken along line A-A of the container body 14 shown in Figure 2 .

Fig. 4 is a plan view showing an example of use of a reinforcing member as the container body 14 shown in Fig. 1 .

Fig. 5 is a perspective view showing L-shaped bodies 26c and 26d which form corner portions of the reinforcing member shown in Fig. 4 .

6(a) and 6(b) are plan views and enlarged views showing another example of use as a reinforcing member of the container body 14.

Fig. 7 is a longitudinal cross-sectional view showing another example of the pellicle container storage container of the present invention.

Fig. 1 shows an example of a pellicle container storage container of the present invention. 1 is a longitudinal cross-sectional view of the pellicle assembly container 10, in which the rectangular resin container main body 14 carrying the pellicle assembly 12 and the resin cover 16 are fitted and locked to each other at the peripheral edge portion. The container body 14 and the lid body 16 are made of polymethyl methacrylate (PMMA resin), acrylonitrile-butadiene-styrene (ABS resin), and polycarbonate resin (PC). A thermoplastic resin such as a resin is produced by injection molding or vacuum molding. In particular, the container body 14 and the lid body 16 for the large pellicle film assembly 12 having a side length of more than 500 mm are preferably produced by a vacuum molding method. For the purpose of foreign matter inspection, the container body 14 is preferably black, and the cover 16 is preferably transparent or translucent in order to visually confirm the inside. The container body 14 and the lid body 16 are preferably subjected to an antistatic treatment for the purpose of preventing adhesion of foreign matter.

As shown in a partially enlarged view of the pellicle assembly container 10 of FIG. 1, the pellicle assembly 12 placed on the container body 14 and covered by the cover 16 is made of aluminum, stainless steel, polyethylene, or the like. A transparent pellicle film 12b such as nitrocellulose, cellulose acetate or fluororesin is attached or adhered to the upper end surface of the pellicle frame 12a. Further, on the lower end surface of the pellicle frame 12a, a composite layer 12c composed of an adhesive layer and a release layer (separation film) for protecting the adhesive layer is provided, and the adhesive layer is used for attaching the pellicle assembly to the photomask. It consists of a polybutene resin, a polyvinyl acetate resin, and an acrylic resin.

The pellicle assembly 12 is placed on the projecting surface 18a of the projecting rib 18 formed near the outer peripheral edge of the outer peripheral edge of the container body 14. As shown in FIG. 2, which is a plan view of the container body 14, the convex rib 18 and the protruding surface 18a are rectangular. The protruding surface 18a is formed such that the amplitude in the longitudinal direction is larger than the width in the short-side direction. As shown in FIG. 3, which is a cross-sectional view taken along the arrow A-A plane shown in FIG. 2, a plurality of holding members 24 are provided on the projecting surface 18a in the longitudinal direction. The holding member 24 is a member that detachably holds the pellicle assembly 12 placed on the projecting surface 18a, and is constituted by a tip 24a and a tip supporting body 24b, and the tip 24a is inserted and formed on the protruding surface 18a. Dust film set Inside the recess (not shown) on the side surface of the frame 12a, the tip 24a can be freely inserted and removed from the tip support 24b. By attaching the tip 24a of the holding member 24 to the concave portion on the side surface of the pellicle frame 12a by the tip supporting body 24b, the pellicle assembly 12 placed on the protruding surface 18a of the projecting rib 18 can be fixed at a predetermined position. On the other hand, the pellicle assembly 12 can be released by pulling the tip 24a out of the tip support body 24b.

As shown in FIG. 1, between the convex rib 18 of the container body 14 and the outer peripheral edge, a concave portion 22 is formed along the convex protruding rib 18, and the concave portion 22 is formed by folding back the outer peripheral portion of the container body 14. By folding back, the rigidity of the peripheral portion of the container body 14 can be increased, and in particular, the rigidity which is bent and deformed in the longitudinal direction and the short-side direction of the container body 14 can be improved. Further, when the outer peripheral edge of the lid body 16 is fitted and locked to the concave portion 22, the bonding strength with the lid body 16 and the overall strength of the pellicle assembly container 10 can be improved.

As shown in FIGS. 1 to 3, a rhombic rib 20a is formed at a central portion of a bottom surface region surrounded by the convex rib 18 of the container body 14, and two convex ribs 18 and a convex portion are perpendicular to each other. The corner portion of the protruding rib 18 is formed with a corner protruding rib 20b whose both ends are connected to the convex protruding rib 18 and the convex protruding rib 18. Since the rhombic rib 20a and the corner rib 20b traverse the diagonal line X of the container body 14, the torsional deformation of the container body 14 can be effectively prevented. Since the rhombic ribs 20a and the corner ribs 20b do not cross each other, the side faces of the rhombic ribs 20a and the corner ribs 20b are not cut, and do not become the starting point of the deformation of the joint portion, and a strong force can be obtained. Reinforcement effect.

As described above, the outer bottom surface of the container body 14 reinforced by the protruding ribs or the like, A rectangular frame body 26 as shown in Fig. 4 is mounted as a reinforcing member, and the container body 14 is reinforced together with the protruding ribs to improve rigidity. The frame body 26 is light in weight compared to the conventional "day" or "mesh" shaped reinforcing member. The straight rod-shaped body 26a forming the long side of the frame-shaped body 26 and the straight rod-shaped body 26b forming the short side are connected by a plate-shaped L-shaped body 26c and an L-shaped body 26d. The straight rod 26a and the straight rod 26b are made of a material resistant to corrosion, light weight, and high rigidity such as aluminum alloy, and have a solid rectangular cross section. The L-shaped body 26c and the L-shaped body 26d can be preferably made of steel or stainless steel, and if thick wall is used, a member made of an aluminum alloy can be used. The L-shaped body 26c is disposed outside the frame-shaped body 26, and the L-shaped body 26d is disposed inside the frame-shaped body 26. The straight bar 26a, the straight bar 26b, the L-shaped body 26c, and the L-shaped body 26d are fixed by a fastening bolt 30 and a fastening bolt 30. As shown in FIG. 5, the long hole 32 and the long hole 32 are formed in the L-shaped body 26c and the L-shaped body 26d, so that the L-shaped body 26c, the L-shaped body 26d, the straight rod-shaped body 26a, and the straight rod-shaped body 26b are formed. The mounting position can be adjusted.

As shown in FIGS. 1 and 2, the mounting of the frame-shaped body 26 to the container body 14 is performed by screwing a screw hole 34 and a screw hole 34 which are inserted from the inner side of the concave portion 22 into the straight rod-shaped body 26a and the straight rod-shaped body 26b. The straight rod 26a and the straight rod 26b abut against the outer bottom of the recess 22 of the container body 14 by the mounting bolts 28. From the viewpoint of strength, the mounting bolt 28 is preferably made of metal, and it is particularly preferable to provide a flange on the fastening surface. It is preferable to cover the exposed portion of the mounting bolt 28 to the inside of the container body 14 with a resin, and to dissolve the boundary portion between the mounting bolt 28 and the container body 14 with an organic solvent or the like to prevent dust or looseness from being generated from the gap.

The L-shaped body 26c and the L-shaped body 26d constituting the corner portion of the frame body 26 are not provided with a mounting mechanism for the container body 14, and can be adjusted by loosening the fastening bolt 30, the fastening bolt 30, and along the long hole 32 and the long hole 32. The position of the L-shaped body 26c and the L-shaped body 26d. Therefore, even if the size of the container body 14 changes due to variations in manufacturing or changes with time, the L-shaped body 26c and the L-shaped body 26d can be moved by loosening the fastening bolt 30 and the fastening bolt 30, thereby being able to adjust The frame-shaped body 26 is attached to the outer bottom surface of the concave portion 22 of the deformed container body 14 in a positional relationship with the straight rod-shaped body 26a and the straight rod-shaped body 26b. As shown in FIGS. 1 and 3, the frame-shaped body 26 attached to the bottom surface side of the concave portion 22 of the container body 14 has the bottom surface of the straight rod-shaped body 26a and the straight rod-shaped body 26b on the same plane as the outer bottom surface of the container body 14, During the conveyance of the pellicle container storage container, even if the frame body 26 comes into contact with other articles or the like, the other articles are not damaged, and the frame body 26 can be prevented from being scraped to generate dust.

On the straight rod-shaped body 26b and the straight rod-shaped body 26b which face each other on the short side of the frame-shaped body 26, as shown in FIG. 4, as a holding member is attached. The handle 37 of the glyph. The handle 37 is fastened to a straight rod 26b made of stainless steel and a straight rod 26b by bolts (not shown). By transporting the pellicle assembly storage container by the grip 37, it is possible to suppress the occurrence of deformation or the like caused by the gripping container main body 14 and/or the lid body 16, and it is possible to greatly reduce the adhesion to the stored pellicle assembly 12. The possibility of foreign bodies. The handle 37 may be a plate-like projection or may be attached to another position of the frame body 26.

The L-shaped body 26c and the L-shaped body 26d forming the corner portion of the frame-shaped body 26 are preferably chamfered by cutting the corner portion into a flat surface, or processed into a curved surface. For example, as shown in FIG. 5, by forming the corners of the L-shaped body 26c and the L-shaped body 26d into the flat surface 36 and the flat surface 36, when the container body 14 is deformed in the twisting direction, the flat surface 36 and the flat surface 36 become resistant surfaces, Preferably, the plane 36 is formed such that the height and length are as long as possible. Specifically, it is preferable to form a flat surface 36 having a height of 20 mm to 50 mm and a length of 40 mm to 100 mm.

The frame-shaped body 26 as the reinforcing member shown in FIG. 4 can be attached to the container body 14 even if the size or the like of the large-sized resin container body 14 of the large pellicle film assembly 12 having a side of 500 mm or more is changed with time. Above. This is because the positional relationship between the straight bar-shaped body 26a and the straight bar-shaped body 26b can be adjusted by moving the L-shaped body 26c and the L-shaped body 26d of the frame body 26, and the size of the frame-shaped body 26 can be adjusted. Further, since the frame-shaped body 26 as the reinforcing member is lighter in weight than the conventional "Japanese" or "mesh" shaped reinforcing member, the dust-proof membrane module storage container 10 of the container body 14 in which the frame-shaped body 26 is mounted is provided. Light weight and high rigidity.

Further, as another embodiment, as shown in FIG. 6(a) and FIG. 6(b) of the container body 14, a plate-shaped L-shaped body which is fixed to each corner portion of the container body 14 independently of each other can be used. 38 as a reinforcing member. The L-shaped body 38 is also fixed to the bottom surface side of the recess 22 from the inside of the recess 22 by a mounting bolt 28. The container body 14 reinforced with the respective corners by the L-shaped body 38 has sufficient resistance to deformation in the torsional direction. In particular, the L-shaped body 38 shown in Fig. 6(b) is preferably formed by forming the corner portion 38a as a flat surface 38a, and the flat surface 38a is a resisting surface with respect to the stress which deforms the container main body 14 in the twisting direction. Further, since the L-shaped body 38 and the other L-shaped body 38 are attached to the container body 14 independently of each other, even if the dimensional deviation of the container body 14 occurs due to a change with time or the like, it can be easily attached to the corner portion. In addition, each L-shaped body 38 is provided The handle 37 of the glyph does not cause a load imbalance on the container body 14 when the pellicle assembly container is handled.

In the outer bottom surface of the container main body 14 shown in FIGS. 1 to 6(a) and 6(b), the concave portion formed by the convex protruding rib 18, the rhombic protruding rib 20a, the corner protruding rib 20b, or the like is left open. Roller transport is not possible during transport of the pellicle container storage container 10. This is because the impact caused by the engagement between the recess and the roller causes the container body 14 to be deformed. As shown in Fig. 7, by attaching the plate body 40 to the frame body 26 or the L-shaped body 38 on the entire outer bottom surface of the container body 14, the outer bottom surface of the container body 14 is formed into a smooth surface, so that a pellicle can be used. The roller of the storage container 10 is transported. Moreover, when the outer bottom surface of the container main body 14 is a smooth surface, when the pellicle assembly storage container 10 is inclined, vacuum suction can be utilized. The plate body 40 may not be a reinforcing member of the container body 10, and a resin member having a thickness of 2 mm to 8 mm may be used. As the resin, polymethyl methacrylate (PMMA resin), acrylonitrile-butadiene-styrene (ABS resin), polycarbonate resin (PC resin), or polyvinyl chloride resin (PVC resin) can be used. When the plate body 40 is attached to the frame body 26 or the L-shaped body 38, a bolt, a double-sided tape, or an adhesive can be used. Further, when warping or bulging or the like is present in the central portion of the container body 14 and its vicinity, it is preferable to join the portion with the plate body 40 using a double-sided tape or an adhesive.

[Examples]

The embodiments of the present invention are described in detail below, but the scope of the present invention is not limited to the embodiments.

Using a sheet having a thickness of 5 mm made of acrylonitrile-butadiene-styrene (ABS resin) which was subjected to an antistatic treatment, a rectangular container body 14 as shown in the drawing and a peripheral edge thereof were produced by a vacuum forming method. The cover body 16 is fitted. As the sheet, the container body 14 is made of black, and the lid 16 is made of transparent. A rectangular convex rib 18 is formed in the vicinity of the outer periphery of the container body 14 and along the outer periphery, and the protruding surface 18a of the convex rib 18 is a loading surface of the pellicle assembly 12. The width of the protruding surface 18a in the longitudinal direction is formed to be wider than the width in the short-side direction, and the holding member 24 of the pellicle assembly 12 is provided. Further, between the convex protruding rib 18 and the outer peripheral edge, a concave portion 22 is formed along the convex protruding rib 18, and the concave portion 22 is formed by folding back the outer peripheral portion of the container body 14. In the bottom surface region surrounded by the convex rib 18, a rhombic rib 20a is formed at the center portion, and both ends of the two convex ribs 18 and the convex rib 18 which are orthogonal to each other are formed at both ends thereof. The projecting rib 18 and the projecting rib 18 are connected to the corner rib 20b. The rhombic rib 20a and the corner rib 20b traverse the diagonal X of the container body 14. The pellicle assembly container 10 in which the outer peripheral edge of the lid body 16 is fitted and fitted to the concave portion 22 of the container body 14 has an outer dimension of 1350 mm × 1550 mm and a height of 120 mm.

Then, a straight rod-like body 26a, a straight rod-shaped body 26b, an L-shaped body 26c, and an L-shaped body 26d which form the frame-shaped body 26 shown in Fig. 4 are produced, and the frame-shaped body 26 is the container body 14 produced as described above. Reinforcement member. The straight bar 26a and the straight bar 26b are made of a flat square bar (section 10 mm × 30 mm) made of an aluminum alloy (A6061), and a screw hole 34 is formed by machining, and an L-shaped body 26c and an L-shaped body 26d are mounted. Screw holes (straight rod 26a, side of straight rod 26b). In addition, stainless steel (SUS304) is attached to the outer side surface of the straight rod 26b on the short side. The handle 37 of the glyph. The L-shaped body 26c and the L-shaped body 26d are produced by bending a cold-rolled plate (thickness: 3 mm) of stainless steel (SUS304) so that the corner portion is formed into a flat surface 36 and the long hole 32 is formed as a screw hole. In addition, as a mounting bolt 28 for attaching the straight rod-shaped body 26a and the straight rod-shaped body 26b to the container main body 14, the hexagonal hole bolt made of stainless steel (SUS304) is insert-molded in ABS resin. Blue hexagon bolts.

When the straight rod 26a, the straight rod 26b, the L-shaped body 26c, and the L-shaped body 26d are attached to the container body, the straight rod 26a and the straight rod 26b are brought into contact with the concave portion of the container body 14. The outer bottom surface of the straight portion of the 22 is aligned with the screw hole at the bottom of the recess 22, and the mounting bolt 28 is inserted from the inside of the recess 22, whereby the straight rod 26a and the straight rod 26b are attached. After the installation, in order to eliminate the gap, the outer edge of the flange of the mounting bolt 28 that is in contact with the container body 14 is subjected to a dissolution treatment with a solvent (methyl ethyl ketone, MEK). Next, the L-shaped body 26c and the L-shaped body 26d shown in FIG. 5 are moved and adjusted so that the long holes 32 are aligned with the screw holes formed on the sides of the straight rod-shaped body 26a and the straight rod-shaped body 26b, and the fastening bolts 30 are used. The straight rod 26a and the straight rod 26b are connected to each other to form the frame body 26. The bottom surface of the frame-shaped body 26 attached to the container body 14 is flush with the outer bottom surface of the container body 14. In addition, the container body 14 produced has a long side compared to the design. A dimension deviation of +5 mm in the direction and +3 mm in the short-side direction, but by adjusting the size of the frame-shaped body 26, it is smoothly attached to the container body 14.

The container body 14 and the lid 16 reinforced by the frame body 26 are carried into a clean room of air cleanliness class 10 (Class 10), carefully washed with a surfactant and pure water, and then completely dried. Next, the pellicle film assembly 12 which has been subjected to the foreign matter inspection by the spotlight in the dark room is loaded on the protruding surface 18a of the convex protrusion rib 18 of the container body 14 and fixed by the holding member 24. The pellicle film assembly 12 has an outer dimension of 1392 mm × 1146 mm, an inner dimension of 1370 mm × 1124 mm, and a height of 5 mm, and is passed through a pellicle frame 12a (thickness 3.8 mm, surface black aluminum anodizing treatment) made of aluminum alloy (A5052). It is produced by sticking an antimony resin as a mask adhesive and a dust-proof film adhesive to a pellicle film 12b made of a fluororesin having a thickness of about 3 μm. The container main body 14 to which the pellicle film assembly 12 has been attached is attached as described above, and the upper lid body 16 is carefully fitted to obtain the pellicle film container 10 in which the pellicle film assembly 12 is housed.

Further, the peripheral portion of the pellicle membrane storage container 10 is adhered and fixed by a tape made of polyvinyl chloride (PVC) having a width of 40 mm, and the antistatic polyethylene (PE) bag which has been cleaned internally is packed in two layers and accommodated. Reinforced corrugated cardboard box with cushioning material inside. In the state of being bundled, a round-trip transportation test was conducted between Gunma and Fukuoka (a truck was used between Gunma and Tokyo, and an airplane was used between Tokyo and Fukuoka). After the transport test, the dust-proof membrane module storage container 10 which was opened and taken out of the package was carried into the clean room, and the inside thereof was confirmed. As a result, no foreign matter adhered to the pellicle was observed, and the extremely clean state was maintained.

[Industrial availability]

The pellicle container storage container of the present invention can be used as a storage container and a storage container for a pellicle for a semiconductor device, and can be used as a storage container and a storage container for a liquid crystal pellicle for a large-sized pellicle for a semiconductor device. container.

10‧‧‧Plastic membrane assembly storage container

12‧‧‧Dust film assembly

12a‧‧‧Plastic membrane assembly frame

12b‧‧‧Plastic film

12c‧‧‧Composite layer

14‧‧‧ Container body

16‧‧‧ Cover

18‧‧‧ convex ribs

18a‧‧‧Face

20a‧‧‧Rhomb

22‧‧‧ recess

26a‧‧‧ Straight rod

28‧‧‧Installation bolts

37‧‧‧Handles

Claims (8)

A dust-proof membrane module storage container comprising: a square resin container body on which a pellicle is placed; and a resin cover body that is fitted and locked by a peripheral portion thereof to cover the pellicle assembly a protruding surface of the convex protruding rib formed by the outer peripheral edge of the container body is formed as a mounting surface of the pellicle assembly, and the pellicle assembly container is characterized in that it is attached to an outer bottom surface of the container body and The reinforcing member between the outer periphery and the convex protruding rib is a frame-shaped body or an L-shaped body, and the frame-shaped body includes four straight rod-shaped bodies fixed along each side of the outer peripheral edge, and connects them An L-shaped body having a plurality of long holes and a plurality of bolts, the size of the frame-shaped body being adjustable by a change in a position of the plurality of long holes through the bolt, the L-shaped body being independent of each other at each corner The ground is fixed, and has a plate-shaped L-shaped body in a plane direction formed by the L-shape. The pellicle assembly container according to claim 1, wherein the frame body is composed of the straight rod and the L-shaped body disposed at a corner of the container body, The size of the frame body can be adjusted, and the mounting positions of the straight bar and the L-shaped body are variable. The pellicle assembly container according to the second aspect of the invention, wherein the L-shaped body is formed such that a corner portion thereof is a flat surface or a curved surface. The pellicle assembly container according to claim 1, wherein The length of the pellicle according to at least one side is 500 mm or more. The pellicle assembly container according to claim 1, wherein the bottom surface of the reinforcing member is on the same plane as the outer bottom surface of the container body. The pellicle assembly container according to the first aspect of the invention, wherein a corner rib is formed at each corner of a bottom surface region of the container body surrounded by the convex rib, the corner rib Both ends are connected to the two convex ribs forming the corners. The pellicle assembly container according to claim 1, wherein the reinforcing member attached to the opposite sides of the container body is provided with the pellicle assembly container. Holding mechanism. The pellicle container storage container according to the first aspect of the invention, which is provided with a plate body covering the entire outer bottom surface of the container body.