CN104816889B - Keep the method and packaging facilities of 100 grades of cleanliness factors of optical element - Google Patents

Abstract

The invention provides a method and packaging equipment for maintaining the cleanliness of the optical element 100. The method for maintaining the cleanliness of the optical element 100 includes the following steps. In an environment with a cleanliness level of 100, use high-grade ethanol to wipe off the water, and blow it with compressed air; finally, use a clean film to seal the packaging equipment. The equipment for realizing the method includes clean film and packaging equipment for maintaining the cleanliness of optical components at Class 100. The method and equipment of the present invention are suitable for optical elements that need to be stored in a changed clean environment, but need to maintain their original cleanliness level and surface level requirements. The operation is simple, no additional operating tools are required, and they are not limited by the shape and specification of the optical element , which saves the time loss and risk of re-cleaning optical components, prolongs the service life of optical components, and ensures the continuity and extension of research experiments.

Description

Method and packaging equipment for maintaining 100-class cleanliness of optical components

technical field

The invention belongs to the field of high-energy and high-power large-scale laser devices, and in particular relates to a method and packaging equipment for maintaining 100-level cleanliness of optical elements. It is suitable for storage methods and circulation methods that maintain a cleanliness level of 100 in an environment with a cleanliness level of less than 100.

Background technique

The cleanliness of the laboratory refers to the number of dust particles of a certain particle size contained in a unit volume in the air of the working environment.

Cleanliness class refers to the concentration of particles above a certain particle size. Each cleanliness class defines a maximum particle size over a 1ft2 [or ^0.1m2 ] surface area. Therefore, on the surface of the 100-class particle distribution, there is only one 100µm particle per square inch, and there are a certain number of small particles required, as small as 1µm in diameter.

MIL-STD-1246C (Product Cleanliness Levels and Contamination Control Program) is an American product cleanliness and pollution control standard, which mainly defines the level of particles and coatings on clean surfaces. Taking the cleanliness level of particles as an example, from 1 to 1000, each level Both take into account the distribution of the number of particles and their diameters.

In high-energy/high-power solid-state laser devices, the 100-class cleanliness of optical components is internationally recognized, and it is the benchmark requirement for achieving its theoretical goals. Basic cleanliness requirements for components. In addition, in other various auxiliary experiments (including key process nodes such as chemical film plating and modular assembly and adjustment), the 100% cleanliness of optical components is also one of the primary preparation conditions for participating in various process experiments.

When the following situations occur, the 100-level cleanliness optical components need to be temporarily separated from the 100-level clean environment and stored in a non-100-level clean environment for later use;

a. In the laser device, the replacement of optical components caused by various experiments such as crossover or circulation;

b. Part of the calibration module maintenance and update module storage in the laser device;

c. In the film coating process of batch optical components, the optical components that have completed the post-pretreatment (the last process) in advance;

d. Preparations before batch assembly of modular optical components;

e. Off-line inspection of optical components.

Contents of the invention

In order to overcome the deficiency that the cleanliness level of the optical element will change with the change of the cleanliness level of the environment where the optical element is located, the purpose of the present invention is to provide a method for maintaining the cleanliness level of the optical element 100, another aspect of the present invention The purpose is to provide optical component packaging equipment for a method of maintaining optical component 100 cleanliness. The invention can still maintain the original 100-level cleanliness of the optical element in an environment lower than 100-level cleanliness.

Technical scheme of the present invention is as follows:

The method for maintaining the cleanliness of the optical element 100 of the present invention comprises the following steps in turn:

a) Ultrasonic cleaning and drying of the packaging equipment used for packaging 100-class cleanliness optical components;

b) The packaging equipment used for packaging optical components with a cleanliness level of 100 shall be wiped with high-grade ethanol to remove water and blown with compressed air in a space environment with a cleanliness level of 100;

c) Place the class 100 cleanliness optical components to be packaged in the optical component packaging equipment;

d) Attach a class 100 cleanliness film to the periphery of the optical component packaging equipment with a built-in class 100 cleanliness optical element in a clockwise direction to form a sealed body.

Among them, a) The ultrasonic frequency in the step is 50Hz~75Hz, and the drying time under 100W light is 2h~4h; b) The high-grade ethanol CH ₃ CH ₂ OH in the step is ≥99.8%.

The packaging equipment for maintaining 100-class cleanliness of optical components according to the present invention is characterized in that the equipment includes handles, pads, top covers, side beams, bottom beams, tightening buckles, tightening bolts, connection switches, Seal plate. The handle is arranged above the top cover, and slots are respectively arranged on both sides of the top cover for fixing the sealing plate. The fastening buckles are embedded at both ends of the top cover, and are used for fixedly connecting the fastening screws. The tightening screw is embedded in the upper half of the side beam, and is used for connecting the side beam and the top cover. The connection switch is embedded in the two ends of the connection between the bottom beam and the side beams, and is used for connecting the bottom beam and the two side beams. The pads are respectively fixed at the center positions of the side beams, the bottom beam and the top cover. Both sides of the side beam and the bottom beam are provided with slots, which are used as an improvement of the method for maintaining the 100-level cleanliness of the optical element in the present invention, and the basic equipment can be used conveniently at any time to achieve a storage environment lower than the requirements of the optical element. In the case of high cleanliness, the original cleanliness requirements of optical components can still be maintained, and there is no need to worry that the sealing facilities will affect the cleanliness of the environment.

As an improvement of the method for maintaining the cleanliness of optical components at level 100 of the present invention, using the same set of packaging equipment, optical components of various types, processes and various cleanliness levels can be placed in a place lower than the cleanliness level of the optical components at the same time. In the storage environment required by the grade.

As another improvement of the method for maintaining the 100-class cleanliness of the optical element of the present invention, if the optical element is stored for a long time beyond 24 weeks, secondary sealing can be performed, and the sealing direction is in the same direction as the first packaging direction. the direction at right angles;

The beneficial effect of the present invention is to realize that the clean optical element maintains the original cleanliness requirement of the optical element in an environment lower than its own cleanliness, and keeps the requirement of the surface grade not lowered.

1. No need to use other tools, and conveniently maintain the requirements of 100-class cleanliness of optical components at any time;

2. Reduce the time and loss of the cleaning operation process of related optical components;

3. Reduce the risk in the process of re-cleaning the relevant optical components;

4. Maintained and continued the technological research process and calculation testing process of related optical components;

5. It can continuously prolong the service life of optical components.

The handle in the packaging device of the present invention is above the top cover, and the two ends of the top cover are spaces for the tightening switches to be used, and there are corresponding slots on both sides of the top cover.

In the packaging equipment of the present invention, the tightening buckles are embedded at both ends of the top cover, which are used to fix the screw bolts, and are convenient for matching to achieve the purpose of connecting the side beams and the top cover;

In the packaging equipment of the packaging equipment of the present invention, the tightening screw bolt is embedded in the upper half of the side beam for connecting the side beam and the top cover;

The connection switch in the packaging equipment of the packaging equipment of the present invention is embedded in the end of the connection between the bottom beam and the side beam in the form of a hinge, and is a special tool for connecting the bottom beam and the two side beams;

The pads in the packaging equipment of the packaging equipment of the present invention are evenly distributed and fixed on the middle parts of the side beams, bottom beams and top cover;

Both sides of the side beam, the bottom beam and the top cover in the packaging equipment of the packaging equipment of the present invention have through-length inserting transverse grooves for fixing the sealing plate;

The clean film in the present invention is wrapped on the periphery of the packaging equipment.

Description of drawings

Fig. 1 is a schematic structural view of the packaging equipment for maintaining the cleanliness of the optical element 100 of the present invention;

In the figure, 1. Handle 2. Spacer 3. Top cover 4. Side beam 5. Bottom beam 6. Tighten the buckle 7. Tighten the bolt 8. Connect the switch 9. Seal the plate.

detailed description

The optical components in the packaging equipment have various shapes such as cubes, cuboids, cylinders, cones, prisms, and polyhedrons (more than six sides). Among them, the optical components with a diameter of more than 300mm are the focus of the cleanliness requirements of the laser device. The present invention The specific embodiment of the present invention will be described by taking the most commonly used shape - cuboid as an example.

Example 1

Fig. 1 is a schematic structural diagram of the packaging equipment for maintaining the cleanliness of optical elements of class 100 of the present invention. In Fig. 1, the packaging equipment for optical elements of the present invention for maintaining the cleanliness of optical elements of class 100 includes a handle 1 and a cushion block 2 , top cover 3, side beam 4, bottom beam 5, tightening buckle 6, tightening bolt 7, connection switch 8, sealing plate 9; Slots are respectively provided for fixing the sealing plate 9; the screw-on buckles 6 are embedded at both ends of the top cover 3, and are used for fixedly connecting the screw-on screws 7; the screw-on screws 7 are embedded on the side The upper part of the beam 4 is used to connect the side beam 4) and the top cover 3; the connection switch 8 is embedded in the two ends of the bottom beam 5 and the side beam connection 4, and is used to connect the bottom beam 5 and the two side beams 4 The pads are respectively fixed at the center positions of the side beam 4, the bottom beam 5 and the top cover 3; slots are provided on both sides of the side beam 4 and the bottom beam 5 for fixing the sealing plate 9.

In this embodiment, two screw-on buckles are set in the optical component packaging equipment of the method of maintaining 100-level cleanliness of optical components, and the screw-on buckle 6 is one of them; One of them; two side beams, one of which is side beam 4; two connection switches, one of which is connection switch 8; four pads, one of which is pad 2; two sealing plates, one of which is sealing plate 9; Groove all around.

The method for maintaining the cleanliness of the optical element 100 in the present invention comprises the following steps:

a) Ultrasonic cleaning will be used for packaging 100-class cleanliness optical components packaging equipment, and the ultrasonic frequency is 50Hz;

b) The packaging equipment used for packaging 100-level cleanliness optical components should be dried with 100W power of light, and the drying time is 2 hours;

c). It will be used to pack 100-level cleanliness optical component packaging equipment. In a 100-level cleanliness space environment, use 100-level cleanliness clean silk cloth (mainly composed of 100% polyester fiber) to dip in superior grade ethanol (CH ₃ CH ₂ OH≥99.8%, mass fraction of carbonyl compound [calculated as CO]≤0.003%)) Always wipe clockwise;

d). In a space environment with a cleanliness level of 100, the packaging equipment used for packaging optical components with a cleanliness level of 100 is blown with compressed air at a pressure of 20 Pa;

e). Place the optical components to be installed vertically in the pads used to package the base of the packaging equipment for optical components with a cleanliness level of 100, and use two sets of connection switches to rotate the corresponding side beams upright until they are at 90 degrees to the bottom beam ⁰ angle, and at the same time, place the optical element in the pads of the two side beams to fix it to ensure that the optical element does not move;

f). Insert the two sealing plates from top to bottom into the slots on both sides of the two side beams and the bottom beam;

g). After inserting the slots of the top cover into the sealing plate, put the tightening rotation of the side beam upright in the tightening buckle in the top cover, and then tighten the tightening bolts;

h). Attach a 100-class cleanliness film (thickness 0.5mm~1mm) to the periphery of the optical component packaging equipment with built-in 100-class cleanliness optical components in a clockwise direction to form a relatively sealed body

Example 2

In this embodiment, the method of the present invention to maintain the 100-class cleanliness of the optical element is the same as that of Embodiment 1, the difference is that in step a) the ultrasonic frequency is 75 Hz; in step b) the light drying time of 100W power is 4 hours.

Claims (5)

1. A packaging device for maintaining the cleanliness of optical components at level 100, characterized in that the device includes a handle (1), pads, top cover (3), side beams (4), and bottom beams (5) , tighten the buckle (6), tighten the bolt (7), connect the switch (8), and seal the plate (9); the handle (1) is set above the top cover (3), and the top cover (3) Slots are provided on both sides for fixing the sealing plate (9); the tightening buckles (6) are embedded at both ends of the top cover (3) for fixing and connecting the tightening bolts (7); The tightening bolt (7) is embedded in the upper half of the side beam (4) for connecting the side beam (4) and the top cover (3); the connection switch (8) is embedded in the bottom beam (5) and the side The two ends of the beam (4) are used to connect the bottom beam (5) and the two side beams (4); the pads are respectively fixed on the side beam (4), the bottom beam (5), and the top cover (3) The center position of the center; the side beam (4) and the bottom beam (5) are provided with slots on both sides for fixing the sealing plate (9). 2. A method for maintaining 100-level cleanliness of optical components, characterized in that, the method comprises the following steps in sequence: a). Ultrasonic cleaning will be used to pack 100-class cleanliness optical components packaging equipment; b). The packaging equipment used for packaging 100-level cleanliness optical components will be dried by light with a power of 100W; c). The packaging equipment used for packaging optical components with a cleanliness level of 100, in a space environment with a cleanliness level of 100, wipe it clockwise with a clean silk cloth with a cleanliness level of 100 dipped in ethanol; d). In a space environment with a cleanliness level of 100, the packaging equipment used for packaging optical components with a cleanliness level of 100 is blown with compressed air at a pressure of 20 Pa; e). Place the optical components to be installed vertically in the cushion block (2) used to package the base of the 100-class cleanliness optical component packaging equipment, use two sets of connection switches to rotate the corresponding side beams (4) upright, Until it forms an angle of 90° with the bottom beam ( ⁵ ), at the same time, place the optical element in the pads (2) of the two side beams (4), and fix it to ensure that the optical element does not move; f). Insert the two sealing plates (9) into the slots on both sides of the two side beams (4) and the bottom beam (5) respectively from top to bottom; g). After inserting the slot of the top cover (3) into the sealing plate (9), put the fastening bolt (7) of the side beam (4) upright on the fastening buckle (6) in the top cover (3) , and then tighten the tightening bolt (7); h). Attach a film with a thickness of 0.5 mm to 1 mm on the periphery of the optical component packaging equipment with a built-in class 100 cleanliness optical component in a clockwise direction to form a relatively sealed body. 3. The method for maintaining class 100 cleanliness of optical components according to claim 2, characterized in that: the ultrasonic frequency in step a) is 50 Hz-75 Hz. 4. The method for maintaining the cleanliness of optical components at 100 grades according to claim 2, characterized in that: the 100W light drying time in the step b) is 2h~4h. 5 . The method for maintaining class 100 cleanliness of optical components according to claim 2 , wherein the ethanol CH ₃ CH ₂ OH in the step c) is ≥ 99.8%. 6 .