JP2011203309A - Pellicle storage container and truck for conveying pellicle storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pellicle storage container that can be safely transported by a pellicle storage container for storing a large pellicle.
A pellicle storage container 10 includes a pellicle storage container main body 11 on which a pellicle is placed, and a peripheral portion of the pellicle storage container 10 fitted into an opening of the pellicle storage container main body 11 so that the pellicle is attached to the pellicle storage container main body 11. A lid 12 that can be housed between the two and six leg portions 13 provided at the bottom of the pellicle storage container main body 11, and the leg portions 13 can rotate the transport means for transporting the pellicle storage container 10. It is comprised so that fitting to a mounting base is possible.
[Selection] Figure 1

Description

  The present invention relates to a lithographic pellicle storage container used as a dust-proof cover for a mask and a reticle and a pellicle storage container used for transporting the pellicle when manufacturing a semiconductor device such as an LSI or a VLSI, or a liquid crystal display panel. This relates to the transporting carriage.

  When manufacturing a semiconductor device such as LSI or VLSI or a liquid crystal display, an exposure master such as a photomask or a reticle (referred to collectively as “photomask” in this specification) is applied to a semiconductor wafer or a liquid crystal master. ) Is irradiated with light for exposure, the pattern of the photomask is transferred, and the pattern of the semiconductor device or the liquid crystal display is formed.

  Therefore, in this case, if foreign matter such as dust adheres to the photomask, the exposure light is reflected or absorbed by foreign matter such as dust attached to the surface of the photomask. Alternatively, the pattern transferred to the liquid crystal master plate may be deformed or the edge of the pattern may be unclear, and the substrate may be black and dirty, losing dimensions, quality, appearance, etc. As described above, there is a problem that the pattern of the photomask cannot be transferred, the performance of the semiconductor device or the liquid crystal display is lowered, and the yield is deteriorated.

  In order to prevent such a problem, the exposure of the semiconductor wafer or the liquid crystal master plate is performed in a clean room, but it is still difficult to completely prevent foreign matter from adhering to the surface of the photomask. Is configured such that a dust-proof cover called a pellicle having a high transmittance with respect to light for exposure is attached to the surface of a photomask to expose a semiconductor wafer or a liquid crystal master.

  In general, a pellicle is made of a pellicle film made of cellulose resin such as nitrocellulose or cellulose acetate or fluororesin having high transmittance for exposure light, and formed of aluminum, stainless steel, polyethylene, or the like. Apply a good solvent for the pellicle film material to one side of the frame, and air-dry the pellicle film for adhesion, or adhere using an adhesive such as acrylic resin, epoxy resin, or fluororesin. The adhesive layer is made of polybutene resin, polyvinyl acetate resin, acrylic resin, silicone resin, etc. on the surface, and an adhesive layer for adhering to the photomask is formed. Further, on the adhesive layer, a release layer for protecting the adhesive layer or It is manufactured by providing a separator (Patent Documents 1, 2, 3, and 4).

  When a pellicle configured in this way is attached to the surface of a photomask and a semiconductor wafer or liquid crystal master is exposed, foreign substances such as dust adhere to the surface of the pellicle and directly adhere to the surface of the photomask. Therefore, if the exposure light is irradiated so that the focal point is positioned on the pattern formed on the photomask, the influence of foreign matters such as dust can be removed.

  In recent years, with the increase in size of liquid crystal displays, the size of liquid crystal photomasks and pellicles has also increased, and extremely large pellicles having a side length exceeding 1000 mm have been used.

JP 58-219033 US Pat. No. 4,861,402 Japanese Patent Publication No. 63-27707 JP-A-7-168345

  As the size of the pellicle increases, the storage container for storing the pellicle inevitably increases in size, and the weight of the storage container for the pellicle increases significantly in order to increase the rigidity of the storage container. The weight of the pellicle storage container is, for example, only 6 kg for a container for storing a 520 mm × 800 mm photomask pellicle, but about 40 kg for a container for storing a 1220 × 1400 mm photomask pellicle, In the case of a container for storing a photomask pellicle of 1620 × 1780 mm, it reaches about 80 kg.

  Therefore, when transporting a container for storing a large pellicle in this way, especially when transporting a container for storing a particularly large pellicle having a side length exceeding 1000 mm, it is necessary to manually handle the container. It becomes difficult to transport. For example, when transporting a container storing a photomask pellicle of 1220 × 1400 mm, at least two people are required. When transporting a container storing a photomask pellicle of 1620 × 1780 mm, At least four people, preferably six, are needed.

  As described above, the work for transporting the storage container for storing these large pellicles is not only extremely labor-intensive, but also when the pellicle storage container falls from the transport device during the transport, There is a risk of serious damage to a person, and the carrying operation of a large pellicle storage container is accompanied by a great danger.

  Furthermore, when transporting and storing such a large pellicle storage container in a horizontal state, there is a problem that a large space is required such as a wide passage, a large door, and a wide storage place. Such a problem can be solved by vertically transporting and storing the pellicle storage container, but in reality, the pellicle storage container whose weight reaches 80 kg is vertically transported and stored. There is a great danger, it requires a lot of manpower and is not realistic.

  In order to solve such a problem, it is possible to use a suspension machine such as a chain block or a crane. However, in order to transport a pellicle container using such a suspension machine, it is necessary to place it in various places in the transportation route. In addition to the need to install these machines, there is an inconvenience that work can be performed only at the place where the hanging machine is installed.

  Furthermore, when carrying and storing the pellicle storage container in a vertical position, the pellicle storage container has fewer grippable parts and requires more manpower than when transported and stored in a horizontal state. However, it is difficult for many people to participate in the transportation work, and the weight that one person shares increases, and the danger that the pellicle storage container may fall over or fall from the transport equipment during transportation There was a problem that increased.

  As described above, since it is difficult to transport a large pellicle storage container in a vertical state, the large pellicle storage container is usually transported in a horizontal state.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a pellicle storage container that can safely transport a pellicle storage container that stores a large pellicle having a side length exceeding 1000 mm. is there.

  Another object of the present invention is to transport a pellicle storage container that can safely and transport a pellicle storage container that stores a large pellicle having at least one side length exceeding 1000 mm. To provide a dolly.

  An object of the present invention is to provide a pellicle storage container body on which at least one pellicle having a side length of 1000 mm or more is mounted, and a peripheral edge of the pellicle storage box body fitted into an opening of the pellicle storage container body. A pellicle storage container comprising a lid that can be stored between the pellicle storage container body and at least four legs that are spaced apart from each other provided at the bottom of the pellicle storage container body, wherein the legs are This is achieved by a pellicle storage container characterized in that the pellicle storage container is configured to be fitted to a rotatable mounting table of a transfer means for transferring the pellicle storage container.

  According to the present invention, the leg portion of the pellicle storage container main body is configured to be fitted to the rotatable mounting table of the transport means for transporting the pellicle storage container. It becomes possible to set the assembled pellicle storage container on the conveying means of the pellicle storage container.

  The object of the present invention is also to provide a pellicle storage container main body on which at least one pellicle having a side length of 1000 mm or more is mounted, and a peripheral edge of the pellicle storage container main body to be fitted into an opening of the pellicle storage container main body. Transport of a pellicle storage container that transports a pellicle storage container that includes a lid that can be stored between the pellicle storage container body and at least four legs that are provided at the bottom of the pellicle storage container body. A carriage, supported by a pivotable pivot shaft, on which a mounting table on which the pellicle storage container can be mounted, and a mounting table fixing means capable of fixing the mounting table at an arbitrary angle are provided. The pellicle storage container is a carriage for transporting a pellicle, wherein the mounting table is provided with a connecting portion to which the leg of the pellicle storage container can be fitted. It is accomplished by the transfer carriage vessels.

  According to the present invention, the mounting base of the pellicle storage container transfer carriage is provided with the connecting portion to which the leg portion provided at the bottom of the pellicle storage container main body can be fitted. The container can be connected to the mounting table, and the carriage for transporting the pellicle storage container has mounting table fixing means that can fix the mounting table at an arbitrary angle. Since the angle of the mounting table to which the pellicle storage containers are connected can be set according to the storage space, the pellicle storage container for storing a large pellicle with at least one side length exceeding 1000 mm can be safely used. In addition, it can be transported by a small number of people.

  In a preferred embodiment of the present invention, the pivot shaft is positioned so as to pass through the center of gravity when the pellicle storage container is mounted on the mounting table.

  According to a preferred embodiment of the present invention, since the pivot axis is positioned on the mounting table so as to pass through the center of gravity when the pellicle storage container is mounted, the pivot axis can be used even when there is only one worker. By rotating the mounting table around the pellicle storage container, the pellicle storage container can be easily fixed at an arbitrary angle and transported.

  In a further preferred embodiment of the present invention, a wheel having an impact buffering mechanism is attached to the bottom of the transport carriage.

  According to the present invention, it is possible to provide a pellicle storage container that can be safely transported with a pellicle storage container that stores a large pellicle having at least one side length exceeding 1000 mm.

  In addition, according to the present invention, a pellicle storage container transport cart that can safely and transport a pellicle storage container storing a large pellicle having a side length exceeding 1000 mm. It becomes possible to provide.

FIG. 1 is a schematic plan view of a pellicle storage container according to a preferred embodiment of the present invention. FIG. 2 is a schematic front view of the container for the pellicle shown in FIG. FIG. 3 is a schematic right side view of the container for the pellicle shown in FIG. FIG. 4 is a schematic front view of a transport carriage on which a pellicle storage container is mounted. FIG. 5 is a schematic front view of the pellicle storage container and the transport carriage showing a state in which the pellicle storage container is inclined at an angle of 75 degrees with respect to the horizontal plane. FIG. 6 is a schematic right side view of the pellicle storage container and the transport carriage showing a state in which the pellicle storage container is inclined at an angle of 75 degrees with respect to the horizontal plane.

  1 is a schematic plan view of a pellicle storage container according to a preferred embodiment of the present invention, FIG. 2 is a front view thereof, and FIG. 3 is a right side view thereof.

  As shown in FIGS. 1 to 3, a pellicle storage container 10 according to this embodiment includes a pellicle storage container main body 11 and a lid body 12 that store the pellicle.

  The pellicle is placed on the pellicle storage container body 11 and is configured to be stored in the pellicle storage container 10 by fitting the peripheral edge of the lid 12 to the inner periphery of the pellicle storage container body 11. ing.

  Six legs 13 are attached to the bottom of the pellicle storage container main body 11 with bolts (not shown).

  The pellicle storage container body 11 can be manufactured by vacuum molding a resin such as PMMA, ABS, PC, etc., but more preferably, an aluminum alloy, a magnesium alloy, etc. are processed by press molding, casting, etc. Manufactured with surface treatment.

  The lid 12 is preferably manufactured by vacuum molding a resin such as PMMA, ABS, PC, etc., but can also be manufactured by press molding an aluminum alloy, a magnesium alloy, or the like.

  Eight graspable handles 14 are attached to the pellicle storage container body 11, and four graspable handles 15 are also attached to the lid 12. The handles 14 and 15 are made of synthetic resin or metal.

  As a material for forming the leg portion 13, an engineering resin such as POM and PA can be used in addition to a metal such as an aluminum alloy, steel, and stainless steel, but preferably has an antistatic function. . As a processing method of the metal leg portion 13, in addition to cutting from a lump, casting, sheet metal processing, sheet metal / welding, or the like can be used. On the other hand, as a method of processing the resin leg 13, injection molding, vacuum molding, adhesive bonding of plate materials, cutting from a lump, or the like can be used. A material having a desired strength and dimensional accuracy may be appropriately selected as the material and processing method of the leg portion 13, but it is preferable that the cleaning water does not accumulate inside during cleaning. .

  FIG. 4 is a schematic front view of the transport carriage on which the pellicle storage container 10 is mounted.

  As shown in FIG. 4, the transport carriage 20 includes a gantry portion 21 to which a directionally changeable wheel 25 is attached at a lower portion, and support columns 22 are provided at both ends of the gantry portion 21.

  Here, the wheel 25 has an impact buffering mechanism (not shown) in order to prevent an impact from being applied to the pellicle storage container while the pellicle storage container 10 is being transported and foreign matter adhering thereto.

  The pellicle storage container 10 is mounted on a leg receiving seat 23 attached on the mounting table 24, and the mounting table 24 is supported by a pivot shaft 26 that is pivotably attached to the tip end portion of the column 22. In the present embodiment, a ball bearing, a cross roller bearing, or the like is used as a support means for the turning shaft 26 so that it can move smoothly.

  The pellicle storage container 10 is mounted on the transport carriage 20 by fitting the leg portion 13 of the pellicle storage container 10 to the leg receiving seat 23 attached on the mounting base 24 of the transport carriage 20. It is configured. Therefore, the leg portion 13 of the pellicle storage container 10 and the leg portion receiving seat 23 of the transport carriage 20 are accurately positioned so that the leg portion 13 of the pellicle storage container 10 fits the leg portion receiving seat 23. . Although the shape of the fitting can be designed in various ways, it is easy to insert the leg portion 13 of the pellicle storage container 10 into the leg receiving seat 23 from above, and the leg receiving seat 23 can be inserted even when tilted. It is preferable to design in consideration of the ability to reliably hold the leg 13 and the ease of cleaning.

  Thus, the pellicle storage container 10 is mounted on the transport carriage 20 by fitting the leg 13 of the pellicle storage container 10 to the leg receiving seat 23 mounted on the mounting base 24 of the transport carriage 20. Thus, the degree of freedom in designing the pellicle storage container body 11 and the lid portion 12 is increased, and the handles 14 and 15 can be provided at desired positions. It is easy to provide a functional component such as a buckle for stopping 12.

  The pivot shaft 26 that supports the mounting table 24 is provided at the center of gravity when the pellicle storage container 10 is mounted on the mounting table 24 of the transporting carriage 20, and therefore, the mounting base of the transporting carriage 20. The pellicle storage container 10 mounted on 24 can be inclined between the horizontal state and the vertical state.

  As shown in FIG. 4, in order to prevent the pellicle storage container 10 from falling or falling when it is in an inclined state, the transporting carriage 20 has a falling lever-type structure that is prevented from falling off. Means 27 are provided.

  FIG. 5 is a schematic front view of the pellicle storage container 10 and the transport carriage 20 in a state where the pellicle storage container 10 is inclined at an angle θ of 75 degrees with respect to the horizontal plane, and FIG. 6 is a right side view thereof. It is.

  As described above, the pivot shaft 26 that supports the mounting table 24 is provided at the center of gravity when the pellicle storage container 10 is mounted on the mounting table 24 of the transport carriage 20. The pellicle storage container 10 can be easily tilted by only a person. In the present embodiment, an angle fixing means 28 is further provided so that the mounting table 24 can be fixed at an arbitrary inclination angle. In this embodiment, the angle fixing means 28 includes a long hole 28a and a bolt 28b, and the bolt 28b is screwed into the long hole 28a so that the angle of the mounting table 24 with respect to the horizontal plane can be set to a desired angle. It is configured. .

  When the pellicle storage container 10 is mounted on the transport carriage 20 and the pellicle storage container 10 is transported, the pellicle storage container 10 is placed so that the angle θ with respect to the horizontal plane is 60 degrees to 80 degrees. It is preferable to transport and store the pellicle storage container 10 with the mounting table 24 inclined.

That is, from the viewpoint of saving space, the pellicle storage container 10 is transported with the mounting table 24 in a vertical state so that the angle θ with respect to the horizontal plane of the mounting table 24 on which the pellicle storage container 10 is mounted is 90 degrees. However, in this case, there is a risk of falling and there is a safety problem. In addition, as the angle θ of the mounting table 24 with respect to the horizontal plane is increased, in other words, the mounting table 24 is The closer to the vertical state, the smaller the width in the horizontal direction, in other words, the width when the mounting table 24 on which the pellicle storage container 10 is mounted is projected onto the horizontal plane, and the space in the horizontal direction can be reduced. However, on the other hand, there is a problem that the length in the vertical direction becomes long and it is difficult to pass through a portion where the upper space is restricted, such as a door or an air shower. Furthermore, when the horizontal width of the mounting table 24 on which the pellicle storage container 10 is mounted is reduced to reduce the horizontal space, the gantry 21 that supports the mounting table 24 via the support column 22. Similarly, the width of the carriage 21 needs to be reduced. However, the narrower the width of the gantry 21 is, the more unstable the carriage 20 becomes. From this point, the mounting table 24 is brought close to a vertical state. There are limitations. Therefore, when the pellicle storage container 10 is mounted on the transport carriage 20 and the pellicle storage container 10 is transported, the pellicle storage container 10 is placed so that the angle θ with respect to the horizontal plane is 60 degrees to 80 degrees. It is preferable that the mounting table 24 is inclined and the pellicle storage container 10 is transported and stored.

  According to this embodiment, the pellicle storage container 10 is used for transfer by fitting the leg portion 13 of the pellicle storage container 10 to the leg receiving seat 23 attached on the mounting table 24 of the transfer carriage 20. Since it is mounted on the carriage 20, a gripping part that can be gripped by the operator, such as the handle 13, can be provided at a desired position on the outer periphery of the pellicle storage container 10, so that a 1620 × 1780 mm photomask pellicle can be stored. Even if the pellicle storage container 10 has a weight of as much as 80 kg, like the pellicle storage container 10, a plurality of workers can easily be mounted on the mounting table 24 of the transport carriage 20. it can.

  Further, according to this embodiment, the pivot shaft 26 that supports the mounting table 24 is provided at the center of gravity when the pellicle storage container 10 is mounted on the mounting table 24 of the transport carriage 20. The pellicle storage container 10 mounted on the mounting table 24 of the transport carriage 20 can be easily tilted by one operator alone, and the direction is changed to the lower part of the gantry 21 of the transport carriage 20. Since a free wheel 25 is attached, even a pellicle storage container 10 having a weight of 80 kg, such as a pellicle storage container 10 for storing a photomask pellicle of 1620 × 1780 mm, can be used by one operator. The pellicle storage container 10 can be transported safely and easily.

  Furthermore, according to this embodiment, the mounting table 24 on which the pellicle storage container 10 is mounted is tilted so that the angle θ with respect to the horizontal plane is 60 degrees to 80 degrees, and the pellicle storage container 10 is safely transported. Therefore, the passage width necessary for transporting the pellicle storage container 10 is 50% or less of that when the pellicle storage container 10 is transported horizontally, and also when the pellicle storage container 10 is stored. The space required for storage is 50% or less of that when the pellicle storage container 10 is stored in a horizontal position, so that space saving can be realized, and the space below the pedestal 21 of the transport carriage 20 can be realized. Since the wheel 25 that can freely change the direction is attached, when it is necessary to move the pellicle storage container 10 when the pellicle storage container 10 is stored, The easy, it is possible to move the pellicle container 10.

  Hereinafter, in order to clarify the effects of the present invention, examples and comparative examples will be given.

EXAMPLE A pellicle storage container 10 having the shape shown in FIGS. 1 to 3 was manufactured as follows.

  After the pellicle storage container body 11 is sand-cast aluminum alloy AC4C, the surface is finished with a polishing cloth, the outer periphery and the surface on which the pellicle is mounted are cut by a milling machine, and the outer periphery of the pellicle storage container 10 is A screw hole for attaching the leg portion 13 was machined with reference.

  After the above machining was completed, casting defects such as nests on the surface were finished with putty, a conductive paint was applied, and baking and drying were performed in an oven.

  The leg portion 13 was manufactured by bending a SUS304 cold-rolled plate having a thickness of 4 mm. The size of the leg portion 13 was set to 70 × 80 × 100 mm, and the leg portion 13 was attached to six locations on the lower surface of the pellicle storage container body 11 with M8 hexagon socket head cap bolts.

  Next, after applying antistatic coating to a PMMA plate having a thickness of 3 mm, vacuum forming was performed to produce a lid 12. The outer periphery of the lid 12 was cut by an NC router so that the dimensions thereof were the same as the outer periphery of the pellicle storage container body 11.

  The lid body 12 manufactured in this way was attached to the pellicle storage container main body 11 having six legs 13 attached to the lower surface, and the pellicle storage container 10 was completed. The weight of the pellicle storage container 10 thus manufactured was about 80 kg.

  Further, a transport carriage 20 for mounting and transporting the pellicle storage container 10 shown in FIGS. 4 to 6 was manufactured as follows.

  The gantry 21 and the column 22 were assembled by bolting an aluminum alloy hollow extruded material, and a wheel 25 was attached to the lower portion of the gantry 21 with bolts. A swivel shaft 26 supported by cross roller bearings arranged in two rows is provided on each of the two columns 22. Here, the position of each member was set so that the position of the central axis of the turning shaft 26 coincided with the center of gravity of the pellicle storage container 10 turning around it, the mounting table 24 described later, and the leg receiving seat 23.

  The mounting table 24 supported by the turning shaft 26 was assembled by fastening a hollow extruded material of aluminum alloy with a bolt. Furthermore, a leg receiving seat 23 to which the leg 13 of the pellicle storage container 10 is fitted is attached to a predetermined position of the mounting table 24. Here, the leg receiving seat 23 was manufactured by cutting conductive MC nylon. In addition, a thin antistatic PVC plate was attached to the surface of the mounting table 24 in contact with the pellicle storage container 10 to prevent scratches and dust generation.

  Furthermore, lever-type dropout prevention means 27 were attached to two places around the mounting table 22. It has a structure capable of turning in the range of 0 to 90 degrees in the horizontal direction around the base turning axis.

  In addition, an angle fixing means 28 including an M12 bolt 28b provided with a knob is provided on the support column 22 in the vicinity of the turning shaft 26. The angle fixing means 28 is configured such that the angle of the mounting table 24 can be fixed to a desired angle by tightening a bolt 28 b in a long hole 28 a provided in the column 22.

  The legs 13 of the pellicle storage container 10 are fitted into the leg receiving seats 23 attached on the mounting table 24 of the transfer carriage 20 configured as described above, and the mounting table 24 of the transfer carriage 20 is fitted. After mounting the pellicle storage container 10, one worker mounted the pellicle storage container 10 so that the angle θ of the mounting table 24 with respect to the horizontal plane was 75 degrees as shown in FIG. 6. Although the mounting table 24 is tilted, the mounting table 24 on which the pellicle storage container 10 is mounted can be easily tilted. Further, one operator can carry the transporting carriage on which the pellicle storage container 10 is mounted. I moved 20 but I didn't feel any danger.

  Further, the passage width necessary for moving the transport carriage 20 on which the pellicle storage container 10 is mounted is about 1500 mm even when a slight margin is observed.

Comparative Example The pellicle storage container 10 manufactured in the same manner as in the example was transported by eight workers while keeping the horizontal state. Each worker grips the handle 14 of the pellicle storage container body 11 and transports the pellicle storage container 10.

  The weight assigned to each worker was about 10 kg, which was a little heavy, but there was no hindrance to the transfer work.

  However, when the passage width necessary for transporting the pellicle storage container 10 was measured, a passage width of 2500 mm or more was necessary, and a passage width of about 3000 mm was necessary in consideration of a safety work. .

  The present invention is not limited to the above embodiments and examples, and various modifications can be made within the scope of the invention described in the claims, and these are also included in the scope of the present invention. It goes without saying that it is a thing.

  For example, in the above-described embodiments and examples, six wheels 25 are attached to the bottom of the pellicle storage container body 11, but the number of wheels 25 can be determined according to the rigidity of the pellicle storage container 10. Preferably, it is not always necessary that the six wheels 25 are attached to the bottom of the pellicle storage container main body 11, and it is sufficient that at least four wheels 25 are attached.

  Further, in the above embodiment, the drop-off prevention means 27 has a lever-type structure that turns, but it is not always necessary that the drop-off prevention means 27 has a lever-type structure. It is also possible to select a means for preventing the structure from falling off.

  In the above-described embodiment, the angle fixing means 28 is configured to fix the angle of the mounting table 24 to a desired angle by tightening the bolt 28 b in the long hole 28 a formed in the support column 22. The angle fixing means 28 is not necessarily configured to fix the angle of the mounting table 24 to a desired angle by tightening the bolt 28b in the long hole 28a formed in the support column 22. Various configurations such as fixing the mounting table 24 to a desired angle by forming a female hole in the column 22 and inserting a pin into the female hole so that the mounting table 24 can be fixed at a desired angle. An angle fixing means can be used.

  Furthermore, in the above-described embodiment, the wheel 25 has an impact buffer mechanism (not shown) in order to prevent the pellicle storage container from being subjected to an impact and foreign matter adhering during the transport of the pellicle storage container 10. However, it is not always necessary for the wheel 25 to have an impact buffering mechanism, and a normal wheel can be attached to the bottom of the gantry 21 of the transport carriage 20.

DESCRIPTION OF SYMBOLS 10 Pellicle storage container 11 Pellicle storage container main body 12 Pellicle storage container lid body 13 Pellicle storage container leg 14 Handle 15 Handle 20 Transporting carriage 21 Mounting base 22 Strut 23 Leg receiving seat 24 Mounting base 25 Wheel 26 Rotating shaft 27 Fall-off prevention means 28 Angle fixing means 28a Long hole 28b Bolt

Claims (4)

A pellicle storage container main body on which at least one pellicle having a side length of 1000 mm or more is placed, and a peripheral edge of the pellicle storage container main body is fitted into an opening of the pellicle storage container main body, whereby the pellicle is placed between the pellicle storage container main body and the pellicle storage container main body. A pellicle storage container comprising: a lid that can be stored in the pellicle; and at least four legs that are spaced apart from each other provided at a bottom of the pellicle storage container body, wherein the legs transport the pellicle storage container. A pellicle storage container characterized in that the pellicle storage container is configured to be fitted to a turntable mounting table. A pellicle storage container main body on which at least one pellicle having a side length of 1000 mm or more is placed, and a peripheral edge of the pellicle storage container main body is fitted into an opening of the pellicle storage container main body, whereby the pellicle is placed between the pellicle storage container main body and the pellicle storage container main body. A pellicle storage container transport cart for transporting a pellicle storage container having a lid that can be stored in the body and at least four legs spaced apart from each other provided at the bottom of the pellicle storage container main body. A carriage for transporting a pellicle storage container, which is supported by a pivot shaft and on which a mounting table on which the pellicle storage container can be mounted, and a mounting table fixing means capable of fixing the mounting table at an arbitrary angle. A carriage for transporting a pellicle storage container, wherein the mounting table includes a connecting portion into which the legs of the pellicle storage container can be fitted. The cart for transporting a pellicle storage container according to claim 2, wherein the pivot shaft is positioned on the mounting table so as to pass through the center of gravity when the pellicle storage container is mounted. The carriage for transporting a pellicle storage container according to claim 2 or 3, wherein a wheel having an impact buffering mechanism is attached to the bottom.

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