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TW200708901A - Pellicle frame assembly - Google Patents

Pellicle frame assembly

Info

Publication number
TW200708901A
TW200708901A TW094129188A TW94129188A TW200708901A TW 200708901 A TW200708901 A TW 200708901A TW 094129188 A TW094129188 A TW 094129188A TW 94129188 A TW94129188 A TW 94129188A TW 200708901 A TW200708901 A TW 200708901A
Authority
TW
Taiwan
Prior art keywords
pellicle frame
restoring
pellicle
frame assembly
force
Prior art date
Application number
TW094129188A
Other languages
Chinese (zh)
Inventor
Han-Yong Cho
Original Assignee
Han-Yong Cho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Han-Yong Cho filed Critical Han-Yong Cho
Priority to TW094129188A priority Critical patent/TW200708901A/en
Publication of TW200708901A publication Critical patent/TW200708901A/en

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

A pellicle frame assembly of the present invention comprises a pellicle frame with a plurality of sides for supporting a pellicle film, which has an edge attached to an upper surface of the pellicle frame, in a substantially flat state; and at least one restoring-force applying member that is installed at the pellicle frame to apply a restoring force for restoring deformation of the pellicle frame due to tension on the pellicle film attached to the upper surface to at least one of the sides of the pellicle frame. The pellicle frame assembly preferably further comprises a restoring-force controlling means connected to the at least one restoring-force applying member to control the restoring force applied to the at least one side of the pellicle frame. A wire or resilient member can be used as the restoring-force applying member.
TW094129188A 2005-08-26 2005-08-26 Pellicle frame assembly TW200708901A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094129188A TW200708901A (en) 2005-08-26 2005-08-26 Pellicle frame assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094129188A TW200708901A (en) 2005-08-26 2005-08-26 Pellicle frame assembly

Publications (1)

Publication Number Publication Date
TW200708901A true TW200708901A (en) 2007-03-01

Family

ID=57910989

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094129188A TW200708901A (en) 2005-08-26 2005-08-26 Pellicle frame assembly

Country Status (1)

Country Link
TW (1) TW200708901A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472871B (en) * 2012-03-29 2015-02-11 Shinetsu Chemical Co Dust-proof film assembly storage container
TWI512392B (en) * 2012-09-07 2015-12-11 Kun Shan Power Stencil Co Ltd Mask frame and mask component thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472871B (en) * 2012-03-29 2015-02-11 Shinetsu Chemical Co Dust-proof film assembly storage container
TWI512392B (en) * 2012-09-07 2015-12-11 Kun Shan Power Stencil Co Ltd Mask frame and mask component thereof

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