JP2008083618A - Reinforcing material for pellicle storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reinforcing material for a storage container for a large pellicle, wherein weight increase due to the reinforcing material is suppressed, handleability in conveyance or the like is improved and problems caused by deformation of a case or the like are solved. <P>SOLUTION: The reinforcing material 7 is used for a pellicle storage container for mounting and storing a pellicle, wherein the reinforcing material is constituted so that side members 10 that become at least two sets of sides are assembled. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a photomask used in a lithography process for manufacturing LSIs and liquid crystal panels, and a pellicle storage container used to prevent foreign matter from adhering to a reticle, and particularly to storing a large pellicle for liquid crystal. The present invention relates to a container, and particularly to a reinforcing material for a pellicle storage container for a large pellicle having an area of 1000 cm ² or more.

  The present invention relates to a reinforcing material for a container for storing a pellicle. First, a pellicle to be stored will be described.

  2. Description of the Related Art Conventionally, in the manufacture of semiconductor circuit patterns and the like, it has been practiced to prevent foreign matter from adhering to a photomask or a reticle using a dustproof means generally called a pellicle. The pellicle is a transparent polymer film (hereinafter referred to as a pellicle film) such as nitrocellulose or a cellulose derivative having a thickness of 10 μm or less on the upper edge surface of a frame having a thickness of about several millimeters having a shape matching that of a photomask or reticle The adhesive is applied to the lower edge surface of the frame body, and a protective film is adhered to the adhesive material with a predetermined adhesive force.

  The pressure-sensitive adhesive is for fixing the pellicle to a photomask or reticle, and the protective film is used to maintain the adhesive strength of the pressure-sensitive adhesive until the pressure-sensitive adhesive is used for that purpose. It protects the adhesive surface.

  In transporting such a pellicle from the manufacturer to the user, in order to prevent foreign matter from adhering to the pellicle membrane or the like, or to prevent the pellicle from being damaged, the pellicle is placed in a storage container composed of a tray and a lid. In general, it is housed and further housed in a dust-proof bag or the like (for example, see Patent Documents 1 and 2).

  Conventionally, storage in a storage container having the above-described structure has been performed as shown in FIG. That is, in the figure, the pellicle film 52 is bonded to one upper edge surface of the frame body 51 in a stretched (pinched) state, and the other surface (lower edge surface) of the frame body 51 has an appropriate thickness. The adhesive material 53 is provided, and a protective film is attached to the lower surface of the adhesive material 53 to constitute a pellicle. The pellicle is placed so that the protective film is in contact with the installation surface 55a which is a flat surface of the tray 55.

  The pellicle placed on the installation surface 55 a of the tray 55 is restrained from moving left and right by a protruding post 55 b provided on the tray 55, and covers the lid 56 from above. It was stored by fixing four corners with 55. As a result, the pellicle was in a state of being restrained and enclosed by the inclined surface 56a of the lid 56, the post 55b, and the installation surface 55a. Further, instead of the clip 57, the entire circumference is sealed with an adhesive tape.

Such a storage container is generally manufactured by injection molding or vacuum molding using a resin material. However, 5 inch and 6 inch semiconductor pellicle storage containers are often formed by injection molding, but large pellicle storage containers having an area of 1000 cm ² or more are often vacuum formed. This is because the vacuum forming is thinner and a large integrated product can be easily formed.

  The storage container as described above is required to have a sealing property for preventing dust from adhering to the pellicle and a holding property capable of reliably holding the pellicle film in a non-contact state, as a matter of course. It is assumed that the shape does not change.

However, deformation is hardly a problem with a small storage container, but in the case of a storage container for a large pellicle having an area of 1000 cm ² or more as the object of the present invention, both ends are held. Deformation such as bending or twisting during transportation, deformation due to its own weight when stored vertically or stacked, and warping due to temperature may occur.

  Therefore, deformation due to warping or twisting of the tray or lid is transferred to the adhesive material as it is, or a part of the adhesive material is locally weighted due to warping of the tray, and the adhesive material is deformed. Will occur.

  Further, when the lid is warped or twisted, depending on the storage method, the pellicle is pressed against the tray, and further, the warp of the tray is transferred to the adhesive material.

That is, a large pellicle storage container having an area of 1000 cm ² or more has a larger area than a 5-inch or 6-inch semiconductor pellicle storage container, so that the storage container itself is enlarged, and warping and twisting are increased. This means that the deformation of the storage container is easily transferred to the adhesive material, and the frequency of defective sticking is increased. Specifically, the adhesive material is used by being attached to the lower surface of the mask or reticle. When a large pellicle is so heavy that even a small sticking failure that does not pose a problem with a small pellicle, the sticking failure part spreads over time, creating a gap that connects the inside and outside of the pellicle, called an air path, from which foreign matter enters the pellicle. Means that there will be a problem where the pellicle does not function.

  Further, when the tray or lid comes into contact with the pellicle due to warpage or deflection, wear powder such as the lid may adhere to the pellicle film, and the pellicle function may not be performed. Further, warping of the case impairs the fitting property between the lid and the tray, and foreign matter may enter from the gap between the lid and the tray and adhere to the pellicle.

  On the other hand, it consists of a tray for storing the pellicle and a lid that covers the tray, and a reinforcing plate is attached to at least one of the tray or the lid to prevent deformation of the case. There is also an invention which tried to achieve the improvement of the cleaning effect by eliminating the unevenness due to the prevention of the deformation and the absence of the rib (for example, Patent Document 3).

JP-A-8-62828 JP 2000-173887 A JP-A-2005-49765

  However, as the size of the storage container increases, the need for reinforcement to prevent deformation of the case accompanying an increase in weight increases. However, simply increasing the number, thickness, or area of the reinforcing plate will increase the reinforcing plate itself. This may lead to an increase in the weight of the machine, and there is a high possibility that a problem arises in hand link properties such as conveyance.

  Therefore, the present invention provides a reinforcing material for a storage container for a large pellicle that suppresses an increase in weight due to the reinforcing material, improves handling properties in transportation and the like, and solves problems due to deformation of the case at the same time. It is.

  As a result of intensive studies in order to solve the above problems, the present inventor has solved the above problems by specifying the structure of the members constituting the reinforcing material and the combination thereof. That is, the present invention has the following configuration.

  The first configuration is a reinforcing material for a pellicle storage container for mounting and storing a pellicle, wherein the reinforcing material is a combination of at least two side members serving as side parts. Reinforcing material for containers.

  In the second configuration, the side member is a combination member of at least a flat plate arranged parallel to the film surface of the pellicle film to be placed and a flat plate arranged in a direction perpendicular to the film surface. A reinforcing material for a pellicle storage container according to the first configuration.

  According to a third configuration, in the pellicle storage container according to the first or second configuration, the two sets of side members are combined through a connection member that connects the side members. It is a reinforcing material.

  According to a fourth configuration, the length of the connection member in the direction perpendicular to the film surface of the pellicle film is longer than the length of the side member in the direction perpendicular to the film surface of the pellicle film. It is a reinforcing material of the pellicle storage container described in the configuration.

  According to a fifth configuration, the connection member is a member having a closed surface disposed at least in a direction perpendicular to the film surface of the pellicle film. The reinforcing material of the pellicle storage container according to the above.

  According to a sixth configuration, the cross-sectional shape perpendicular to the longitudinal direction of the side member is any one of an L shape, a T shape, a U shape, and a B shape. The pellicle storage container reinforcing material according to any one of the first to fifth configurations.

  When the reinforcing material for the pellicle storage container according to the present invention is used, even in the case of a large pellicle storage container, while suppressing the increase in weight due to reinforcement by the reinforcing plate of the pellicle storage container as in the past, the same level or more as before Therefore, it is possible to simultaneously achieve handling and prevention of deformation of the storage container.

  In addition, since the reinforcing material of the present invention has a structure composed of a combination of a side member and a connecting member that connects the side members, even if the side member or a part of the connecting member is scratched easily They can be exchanged and are effective from the point of reuse.

  Embodiments of the present invention will be specifically described below.

  First, the pellicle storage container 1 to which the reinforcing material 7 of the present application is applied will be described. As shown in FIG. 1, the pellicle storage container 1 includes a pellicle mounting table 3 on which the pellicle 2 is mounted and a lid 4 that covers an upper portion of the pellicle mounting table 3. The reinforcing material 7 of the present application is disposed on the surface of the pellicle mounting table 3 opposite to the mounting surface 3 a of the pellicle 2 and reinforces the pellicle mounting table 3.

  The material that can be used for the reinforcing material of the pellicle storage container will be described. The material that can be used for the reinforcing material is not particularly limited as long as it has rigidity for suppressing deformation of the storage container, and examples thereof include metals, engineering plastics, reinforced plastics, and ceramics.

  Among them, metals, particularly aluminum and aluminum alloys, are preferable because they are lightweight and rigid as thin flat plates, and do not cause rusting problems that cause dust generation compared to other metals. Therefore, it is preferable.

  Next, the structure of the reinforcing material 7 will be described. The reinforcing member 7 has a structure in which at least two sets of side members 10 as shown in FIG. 2 are combined. The reinforcing member 7 includes two sets of side members 10 and a connection member 20 that connects the side members 10 to each other. The side member 10 is a member obtained by integrally combining at least a flat plate 11 arranged in parallel with the pellicle film surface direction of the pellicle placed on the storage container and a flat plate 12 arranged perpendicular to the pellicle film surface direction. It is. Further, the connecting member 20 is a member composed of at least a closed surface arranged in a direction perpendicular to the film surface direction of the pellicle film.

  The reinforcing member 7 that combines the side member 10 and the connecting member 20 has a variety of structures depending on the shape of the tray and the area of the pellicle to be stored, in addition to a rectangular structure using two sets of side members. obtain. For example, the reinforcing member 7 has a quadrangular shape as shown in FIG. 2 when there are two sets of parallel side members 10, but if there are three sets of parallel side members 10, the hexagonal and side members 10 are If it is 4 sets, it becomes an octagon. Moreover, in addition to the quadrangular structure using the members which become two sets of parallel sides, the structure of the reinforcing member 7 is various as shown in FIG. For example, a square reinforcing material in FIG. 3 (a), a reinforcing material in which one side member 10 is added diagonally as shown in FIG. 3 (b), and two diagonal materials as shown in FIG. 3 (c). Reinforcing material with side member 10 added, reinforcing material added one in parallel with side member 10 as shown in FIG. 3 (d), two in parallel with side member 10 as shown in FIG. 3 (e) As shown in FIG. 3 (f), two reinforcing materials may be added in parallel to the side member 10 so as to cross each other.

  The side member 10 will be described in detail.

  As shown in FIG. 4A, the side member 10 includes at least a flat plate 11 arranged parallel to the pellicle film surface direction of the pellicle 2 placed on the storage container 1 and a flat plate arranged perpendicular to the film surface direction. It is necessary to be a member combined with 12.

  It is difficult to combine the connecting members 20 only with the flat plate 11 arranged in parallel to the pellicle film surface direction of the pellicle. The strength can be improved by combining the flat plate 11 arranged parallel to the film surface direction and the flat plate 12 arranged perpendicular to the film surface direction, and the side member 10 can be connected to the connecting member. Easy to combine with 20.

  As described above, the side member 10 is not limited to the U-shaped cross section as shown in FIG. As shown in FIGS. 4B to 4D, it may be L-shaped, B-shaped, or T-shaped. However, the U-shape or the L-shape is preferable from the viewpoint of ease of coupling with the connection member and improvement of the reinforcing effect.

  In the case of the U-shape as shown in FIG. 4 (a), it is possible to improve the reinforcing effect by arranging two flat plate portions arranged in a direction perpendicular to the film surface direction of the pellicle film. From the aspect, it is preferable. When a U-shaped structure is adopted, alignment is easier by defining the width of the connecting member in the direction parallel to the pellicle film surface.

  In the case of the L-shape as shown in FIG. 4B, it is preferable from the viewpoint of assembling because it can be easily aligned by abutting against the connecting portion 23 of the connecting member 20 shown in FIG. Note that the angle of the L-shaped L-shaped portion does not need to be a right angle.

  Further, in order to further obtain the effect as a reinforcing material, as shown in FIG. 4C, the side member 10 itself can be formed in a square shape (so-called hollow type). In the case of this structure, since the connection member is structured to be fitted into the hollow portion of the side member 10, the distortion is suppressed, so that a reinforcing effect is further exhibited.

  In addition, in any of the U-shaped, L-shaped, and B-shaped types, after combining the side member and the connecting member as necessary, a cover is applied to the exposed connecting member. It is possible to ensure flatness of the surface parallel to the pellicle film surface direction.

  By the way, the thickness of the flat plate constituting the side member 10 is not limited as long as the reinforcing effect is obtained. However, as the thickness increases, the weight increases and the bulk increases, and the handling and storage container. The effect on storage by stacking will increase. For this reason, taking alumina or aluminum alloy as an example, it is usually from 1 mm to 5 mm, preferably from 3 mm to 5 mm.

  The connecting member 20 will be described in detail.

  As shown in FIG. 5, for example, the connecting member 20 is characterized by comprising at least a closed surface 21 (see FIG. 5B) disposed in a direction perpendicular to the film surface direction of the pellicle film. Specifically, it has a cylindrical structure having various shapes that can join the side members 10 to each other. For example, as shown in FIG. 6, the connecting member 20 can take various shapes such as a combination of flat surfaces, a curved surface, a combination of a flat surface and a curved surface. Also in the configuration of FIG. 6, if the rib 22 as shown in FIG. 5 is formed, the reinforcing effect can be enhanced.

  Further, the upper and lower sides of the connecting member 20 do not necessarily need to be hollow, and may be so-called block bodies. When using a block body, from the viewpoint of weight reduction, the material is preferably engineering plastic or reinforced plastic resin rather than metal. For example, ultra high molecular polyethylene is mentioned.

  Heretofore, each of the side member 10 and the connection member 20 has been described.

  As shown in FIG. 7A, when the reinforcing member 7 is formed by connecting the U-shaped side members 10 with the connecting member 20, the side member 10 may depend on the shape of the side member 10 and the connecting member 20. As a result, a step d is formed on the surface of the connecting member in the direction parallel to the pellicle film surface direction, and the surface does not become flat. The surface in the direction parallel to the pellicle film surface can be reinforced by arranging the reinforcing material 7 so that the entire surface of the reinforcing material 7 is in contact with the tray having a flat surface as much as possible. For this reason, in the case of the structure as shown in FIG. 7A, the exposed upper surface of the connection member 20 which is a low step portion is shown in FIG. 7B so that the surface is flat. As shown, it is preferable to cover with a cover member 24 composed of a flat plate.

  When using the U-shaped side member 10 as described above, the height of the connecting member 20 (the length in the opening direction) can be freely adjusted. If the height is high, the area where the reinforcing material itself contacts the floor surface can be reduced when a storage container having a tray in which the reinforcing material 7 is disposed on the floor surface. For this reason, dust generation due to rubbing can be prevented, the reinforcing material itself is less likely to be damaged, has excellent reusability, and has an effect of suppressing charging. Further, when stacking storage containers (a combination of the tray and the lid), the contact area between the storage containers is reduced, and the distortion-resistant reinforcing material part is involved in the contact part, so that deformation is prevented, and dust caused by rubbing is prevented. Since it will also lead to suppression, it is preferable.

  Specifically, as shown in FIG. 7C, the above effect is further improved by attaching a cap 25 made of resin or the like to the opening which is the lower part of the connecting member 20 that contacts the floor surface. Further, by attaching the cap 25, it is possible to prevent the floor surface from being damaged even when the reinforcing material 7 is placed after assembly.

  The structure of the reinforcing material 7 has been described above.

  In this embodiment, because of the characteristics based on the structure of the reinforcing material, in order to achieve the problem, in addition to optimizing the balance between the weight and the reinforcing strength by the material used for the side member 10 and the connecting member 20 and the thickness thereof. However, the problem can be achieved by optimizing the overall balance including the width and the material of the member.

  For example, when reinforcement is to be achieved by the side member 10, not only the thickness of the flat plate arranged in the direction parallel to the pellicle film surface is increased, but the width thereof may be increased. Alternatively, the thickness of the flat plate arranged in the direction perpendicular to the direction parallel to the pellicle film surface may be increased or the width may be increased. The above-mentioned measures can be said to be the same in terms of achieving reinforcement of the connecting member 20 that connects the side members 10, although it depends on the shape of the connecting member 20.

  Next, a method for manufacturing the side member 10 and the connecting member 20 constituting the reinforcing material that can be used in the present embodiment and a connecting method thereof will be described.

  The side member that can be used in the present embodiment basically has a structure in which flat plates are combined regardless of whether it is L-shaped or U-shaped. For this reason, it is possible to carve out from a metal lump, but it is preferable to manufacture it as a single piece by joining ordinary flat plates by welding or by pressing a single flat plate. Moreover, in the case of a structure like a square shape, it is also possible to manufacture by combining press molding and welding.

  Also, it can be manufactured by ordinary extrusion molding. According to extrusion molding, height adjustment by joining with a connecting member, such as swelling of a welded part, does not cause an unsuitable part for alignment. It is preferable because it can be manufactured, and the continuous productivity is high and the length can be adjusted, so that the degree of freedom of the structure can be increased. The ability to adjust the length of the side member of the reinforcing material makes it easy to match the reinforcing material to the size of various brands of the pellicle, and improves the production efficiency of the reinforcing material.

  The conditions for extrusion molding may be those normally used. For example, a metal ingot (billet) such as aluminum or an aluminum alloy is pressed from a die hole having various shapes with a pressure of 400 to 500 ° C. under pressure. It can be easily manufactured.

  For the connection member that can be used in the present embodiment, a manufacturing method similar to the manufacturing method for the side member can be applied.

  In particular, when the connecting member is manufactured by an extrusion molding method, it is preferable in that the height of the reinforcing material can be freely changed. Furthermore, since the connection member can connect the side members with a high degree of freedom in shape, those having various shapes are required. Therefore, the extrusion molding method is preferable in that connection members having various shapes can be manufactured depending on the die shape.

  The side member and the connecting member constituting the reinforcing member manufactured as described above are assembled by fixing the connecting member to an appropriate part of the side member, but the fixing method includes welding, Usual fixing means such as adhesive, screwing, screwing, etc. can be used. Among these, screwing is preferable because the process is simple and height adjustment and alignment can be easily achieved.

  In addition, in the case of a reinforcing material structure in which the side member is hollow like a square shape and the connecting member is fitted into the hollow part and assembled, how to obtain dimensional accuracy, the connecting direction of the connecting member By fitting the section so that the cross section perpendicular to the thickness increases from the insertion end portion to the center portion, the fitting property is improved, and it is also possible to avoid using other fixing means only by fitting.

  As described above, the combination of the side member and the connection member as described above may not have a flat surface parallel to the pellicle film surface direction as described above depending on the shape of each member. There may be a step between the two. In such a case, as shown in FIG. 7B, the connecting member 20 can be provided with a cover member 24 to achieve flatness.

  Any material may be used for the cover member as long as the flatness can be achieved. However, from the viewpoint of durability and productivity, it is preferable to use the same material as the side member.

  The cover member has the same shape as the corresponding side member, and a cover that covers the shape of the portion where the connection member is exposed (for example, the upper surface portion of the connection member 20 in FIG. 7A). Is preferred. However, if it is difficult to manufacture a cover that matches the shape of the complicated connection part from the viewpoint of productivity, at least to eliminate the step in the plane direction parallel to the pellicle film surface and achieve flatness You can also cover it. In order to avoid the step of covering with the cover, as shown in the side view of the connecting portion in FIG. 8, the connecting member 20 is connected to the side member 10 at the portion where the connecting member 20 is connected by the thickness D of the side member. It is also possible to make a cut 20c in the vertical direction. In FIG. 8, D≈d.

  The structure of the reinforcing material and the manufacturing method thereof have been described above.

  As shown in FIG. 1, the above reinforcing material is arranged and used so as to be in contact with the surface opposite to the surface on which the pellicle 2 of the pellicle mounting table 3 constituting the storage container 1 is mounted. Since the material 7 has achieved weight reduction, it can also be used for the lid 4 constituting the storage container.

  Hereinafter, the present embodiment will be described more specifically using examples.

[Example 1]
As shown in FIG. 1, the reinforcing material 7 was fixed to the back surface side of the pellicle mounting surface 3 a of the pellicle storage container using a screw 8 as a fixture. The screw 8 is screwed downward from the placement surface 3a, and is fixed through the side member 10 of the reinforcing member 7 in contact with the back surface of the placement surface 3a.

  The pellicle 2 has an outer diameter of 474 mm × 782 mm and a height of 5.9 mm. The pellicle storage container 1 is a vacuum molded product of 3 mm thick ABS resin plate and has an outer diameter of 910 mm × 600 mm. The size of 3a is an outer diameter of 530 mm × 840 mm, an inner diameter of 350 mm × 670 mm (the upper surface dimension of one side of the annular ridge 6 is 90 mm × 85 mm), and the height of the pellicle mounting surface 3a is the peripheral surface 3d of the pellicle mounting table 3 The height was 20 mm from the level.

  The reinforcing member 7 has a shape as shown in FIG. 9 and has an outer diameter of 520 mm × 830 mm, an inner diameter of 370 mm × 680 mm (upper surface dimension of one side of the annular structure 7 of 75 mm × 75 mm), and a height of 25 mm. The screw hole positions of the screws serving as fixtures are 10 mm inside from the outer diameter dimension of the pellicle mounting surface 3 a and 5 mm inside from the outer diameter dimension of the reinforcing material 7, and four corners and two sides of the pellicle mounting table 3 ( Equal distance) was a total of 12 locations.

  As the side member 10 of the reinforcing member 7, a U-shaped member shown in FIG. 4A is used, and as shown in FIG. The end portions of the side member 10 were welded to each other.

  The cross-sectional dimension perpendicular to the longitudinal direction of the U-shaped side member 10 is 3 mm as shown in FIG. 9B, and the pellicle mounting surface ( The width l1 of the surface parallel to the film surface of the pellicle is 75 mm, and the width h1 of the surface perpendicular to the mounting surface of the pellicle (film surface of the pellicle) is 25 mm. The U-shaped side member 10 is an extruded aluminum material.

[Example 2]
Instead of welding the ends of the side members 10 of the reinforcing member 7, a connecting member 20 as shown in FIG. 10 was used, and a block body 20 B of ultrahigh molecular weight polyethylene was used as the connecting member 20. The side member 10 was configured in the same manner as in Example 1 except that the side member 10 was screwed and joined to the ultrahigh molecular weight polyethylene block body 20B.

Example 3
The width of the surface perpendicular to the mounting surface of the pellicle (the surface of the pellicle film) is changed from 25 mm to 20 mm with the cross-sectional shape dimension perpendicular to the longitudinal direction of the U-shaped side member 10 of the reinforcing material 7 Otherwise, the configuration was the same as in Example 2.

Example 4
Instead of using a block body of ultra high molecular polyethylene as the connecting member 20, an aluminum L-shaped connecting member 20 as shown in FIG. 11 is used, and the side member 10 is formed on the thick portion of the L-shaped frame. The structure was the same as in Example 3 except that the screws were joined.

[Comparative Example 1]
Instead of the reinforcing member 7, an aluminum plate having a thickness of 5 mm having an outer diameter of 520 mm × 830 mm and an inner diameter of 370 mm × 680 mm (the upper surface dimension of one side of the annular structure 7 is 75 mm × 75 mm) is used. The configuration was the same.

[Comparative Example 2]
The structure was the same as that of Comparative Example 1 except that the thickness of the aluminum plate was changed from 5 mm to 10 mm.

  Table 1 below shows the evaluation results for Examples 1 to 4 and Comparative Examples 1 and 2. In the twist evaluation of the pellicle storage container 1 shown in Table 1 below, the case where the pellicle storage container 1 is not twisted when carrying the both ends of the pellicle storage container 1 is “◯”, and the pellicle storage container 1 is slightly twisted. The case where the pellicle film 2c does not come into contact with the pellicle storage container 1 is indicated by “Δ”. Moreover, the weight of the pellicle storage container to which the reinforcing material is attached is shown.

  As an application example of the present invention, it is possible to prevent foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing a semiconductor device such as an LSI (Large Scale Integrated Circuit) or a TFT type LCD (Thin Film Transistor Liquid Crystal Display). It can be applied to a pellicle storage container for storing, transporting, and transporting a pellicle used for this purpose, and is particularly suitable for a storage container for a large pellicle for liquid crystal.

The perspective view of the pellicle storage container 1. FIG. The perspective view of the reinforcing material. The top view which shows the example of the reinforcing material 7. FIG. FIG. 3 is an explanatory diagram of the side member 10. FIG. 3 is a diagram illustrating an example of a connection member 20. FIG. 6 is a plan view showing another example of the connection member 20. The perspective view which shows the state which connected the side member 10 and the connection member 20. FIG. The figure which shows the state which formed the notch 20c in the connection member 20. FIG. Explanatory drawing of the reinforcing material 7 which concerns on Example 1. FIG. The perspective view of the block body 20B which concerns on Example 2. FIG. Explanatory drawing of the connection member 20 which concerns on Example 4. FIG. Explanatory drawing of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Pellicle storage container, 2 ... Pellicle, 3 ... Pellicle mounting base, 3a ... Mounting surface, 4 ... Cover, 7 ... Reinforcement material, 8 ... Screw, 10 ... Side member, 11 ... Flat plate, 12 ... Flat plate, 20 ... Connecting member, 20B ... Block body, 20c ... Incision, 22 ... Rib, 23 ... Connecting portion, 24 ... Cover member, 25 ... Cap

Claims (6)

  A reinforcing material for a pellicle storage container for mounting and storing a pellicle, wherein the reinforcing material is a combination of at least two sets of side members.   The side member is a combination member of at least a flat plate arranged parallel to the film surface of the pellicle film to be placed and a flat plate arranged in a direction perpendicular to the film surface. The reinforcing material of the pellicle storage container as described.   The reinforcing material for a pellicle storage container according to claim 1 or 2, wherein the two sets of side members are combined through a connecting member that connects the side members.   The reinforcement of the pellicle storage container according to claim 3, wherein a length of the connection member in a direction perpendicular to the film surface of the pellicle film is longer than a length of the side member in a direction perpendicular to the film surface of the pellicle film. Wood.   The reinforcing member for a pellicle storage container according to claim 3 or 4, wherein the connection member is a member having a closed surface disposed at least in a direction perpendicular to the film surface of the pellicle membrane.   The cross-sectional shape perpendicular to the longitudinal direction of the side member is any one of an L shape, a T shape, a U shape, and a B shape. Reinforcing material for the pellicle storage container according to 1.