HK1185325B - A storage container for dustproof thin-film components - Google Patents

Description

Dustproof thin film assembly storage container

Technical Field

The present invention relates to a dustproof thin film assembly container.

Background

In the process of manufacturing semiconductors such as large scale integrated circuits and very large scale integrated circuits, and in the process of manufacturing liquid crystal displays and the like, it is necessary to perform a photolithography operation for irradiating light onto a semiconductor wafer or a liquid crystal master to form a pattern. At this time, if dust adheres to the photomask or the precision mask, dust may be generated

Deformation of the transferred pattern, or unclear edges and smudging of the substrate. This is because the dust absorbs or refracts light. Such work is usually performed in a clean room, but it is difficult to keep the photomask always clean, and therefore, a pellicle assembly in which a transparent pellicle is attached to a pellicle assembly frame is generally used. For example, in photolithography, the pellicle is placed on a photomask, and foreign matter is prevented from adhering to the photomask, and the photomask is exposed with the pattern on the photomask in focus, so that transfer can be performed without being affected by dust adhering to the pellicle.

On the other hand, if foreign matter adheres to the pellicle itself, the foreign matter adheres to the photomask, and therefore, high cleanability is required. The dustproof thin film assembly containing container is used for storing and transporting the dustproof thin film assembly. A resin dustproof pellicle assembly container obtained by injection molding or vacuum molding is generally used. This is because the surface of the dust-proof film package storage container made of resin is smooth and the risk of dust generation is small.

In order to keep the interior in which the pellicle is stored in a clean state, the pellicle storage container is required to have a certain rigidity so that it is not easily deformed even when an external force is applied thereto during transportation or the like. However, since the rigidity of the dust-proof film module storage container made of resin has a certain limit, as described in patent documents 1 and 2 below, a measure is generally taken in which a reinforcing member such as an aluminum alloy rod or a square tube is attached to the outer surface of the container body in a "japanese" shape or a "eye" shape to secure the rigidity.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2005-170507

Patent document 2: japanese patent No. 4391435

Disclosure of Invention

As described in patent documents 1 and 2, if a large number of reinforcing members are attached to the outer surface of the container body in order to provide sufficient rigidity to the dust-proof pellicle assembly container made of resin, the weight and cost of the dust-proof pellicle assembly container increase. For this reason, it is required that the reinforcing member attached to the dustproof thin film assembly storage container obtains a sufficient reinforcing effect with a minimum requirement.

As described above, since the dust-proof pellicle assembly container made of resin is molded by injection molding or vacuum molding, the molding stress after molding is gradually released, and the shape and size thereof change with the passage of time. The larger the dustproof thin film assembly storage container is, the larger the change with time is. When the reinforcing member is attached to the container body of the dustproof thin film assembly storage container after the change over time, even the reinforcing member cannot be attached due to the positional deviation of the attachment hole formed in advance in the container body.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a dustproof thin film assembly storage container which can easily attach a minimum reinforcement member to a container body made of resin after a change over time, and which is lightweight and has high rigidity.

In order to achieve the purpose, the following technical scheme is proposed:

1. a dustproof thin film assembly containing container is provided with: a square resin container body on which the dust-proof film unit is mounted; and a resin cover body which covers the dustproof thin film assembly by fitting and locking the periphery of the cover body,

a projecting surface of a convex rib formed along an outer peripheral edge of the container body is formed as a mounting surface of the pellicle,

it is characterized in that

A reinforcing member mounted on the outer bottom surface of the container body between the outer peripheral edge thereof and the convex rib, the reinforcing member being a frame-shaped body adjustable in size including a straight rod-shaped body fixed along each side of the outer peripheral edge; or L-shaped bodies which are fixed to the respective corners of the container body independently of each other.

2. The pellicle storage container according to claim 1, wherein the frame-shaped body is composed of the straight rod-shaped body and L-shaped bodies disposed at each corner of the container body, and the positions of attachment of the straight rod-shaped body and the L-shaped bodies are variable so that the size of the frame-shaped body can be adjusted.

3. The pellicle storage container according to claim 1 or 2, wherein the L-shaped body is formed so that a corner portion thereof is a flat surface or a curved surface.

4. The pellicle storage container of any of claims 1 to 3, wherein at least one side of the pellicle is 500mm or more in length.

5. The pellicle storage container of any of claims 1 to 4, wherein the bottom surface of the reinforcement member is flush with the outer bottom surface of the container body.

6. The dustproof thin film assembly housing container according to any one of the above 1 to 5, wherein a corner rib is formed at each corner of the bottom surface region of the container body surrounded by the convex ribs, and both ends of the corner rib are connected to two convex ribs forming the corner.

7. The pellicle storage container according to any one of claims 1 to 6, wherein the reinforcing member attached to the opposite sides of the container body is provided with a gripping mechanism for carrying the pellicle storage container.

8. The pellicle storage container as described in any one of claims 1 to 7, wherein a plate body covering the entire outer bottom surface of the container body is provided.

Effects of the invention

According to the present invention, it is possible to provide a lightweight and highly rigid dust-proof pellicle assembly housing container in which a minimum reinforcement member is easily attached to a resin-made dust-proof pellicle assembly housing container whose dimensions and the like change with time.

Drawings

FIG. 1 is a longitudinal sectional view and a partial sectional view showing an example of a dustproof thin film assembly housing container according to the present invention;

FIG. 2 is a plan view of the container body (14) shown in FIG. 1;

FIG. 3 is a cross-sectional view taken along the plane of arrow A-A in the container body (14) shown in FIG. 2;

FIG. 4 is a plan view showing an example of a reinforcing member used as the container main body (14) shown in FIG. 1;

FIG. 5 is a perspective view showing L-shaped bodies 26c, 26d forming the corners of the reinforcing member shown in FIG. 4;

fig. 6(a) is a plan view showing another example of the reinforcing member used for the container main body (14). FIG. 6(b) is an enlarged view thereof;

fig. 7 is a longitudinal sectional view showing another example of the dustproof thin film assembly storage container of the present invention.

Detailed Description

Fig. 1 shows an example of the dustproof thin film assembly storage container of the present invention. Fig. 1 is a longitudinal sectional view of a pellicle film unit housing container 10, in which a rectangular resin container main body 14 carrying a pellicle film unit 12 and a resin lid 16 are fitted and locked to each other at peripheral edges thereof. The container body 14 and the lid 16 are manufactured by injection molding or vacuum molding using a thermoplastic resin such as polymethyl methacrylate (PMMA resin), acrylonitrile butadiene styrene (ABS resin), or polycarbonate resin (PC resin). In particular, the container body 14 and the lid 16 for the large pellicle assembly 12 having a side length of more than 500mm are preferably manufactured by vacuum forming. For the purpose of foreign matter inspection, the container body 14 is preferably black, and the lid 16 is preferably transparent or translucent so that the inside can be visually confirmed. In order to prevent the adhesion of foreign matter, it is preferable that the container body 14 and the lid 16 are subjected to antistatic treatment.

As shown in the partially enlarged view of the dustproof thin film module storage container 10 in fig. 1, the dustproof thin film module 12 placed on the container body 14 and covered with the cover 16 has a transparent dustproof thin film 12b made of nitrocellulose, cellulose acetate, fluororesin, or the like adhered or bonded to the upper end surface of a dustproof thin film module frame 12a made of aluminum, stainless steel, polyethylene, or the like. A composite layer 12c including an adhesive layer for mounting the pellicle on the photomask and including a polybutene resin, a polyvinyl acetate resin, and a polymethyl methacrylate and a release layer (separation film) for protecting the adhesive layer is provided on the lower end surface of the pellicle frame 12 a.

The pellicle film assembly 12 is placed on the projection surface 18a of the convex rib 18 formed along the outer peripheral edge of the container body 14 in the vicinity of the outer peripheral edge. As shown in fig. 2, which is a plan view of the container body 14, the convex rib 18 and the projecting surface 18a are rectangular. The projection surface 18a is formed to have a width in the longitudinal direction larger than that in the lateral direction. As shown in fig. 3, which is a cross-sectional view taken along the plane of arrow a-a shown in fig. 2, the protruding surface 18a in the longitudinal direction is provided with a plurality of holding members 24. The holding member 24 is a member for detachably holding the pellicle assembly 12 placed on the projection surface 18a, and is constituted by a pin 24a and a pin support 24b, the pin 24a being inserted into a recess (not shown) formed in a side surface of the pellicle assembly frame 12a placed on the projection surface 18a, and the pin 24a being freely insertable into and removable from the pin support 24 b. The pin 24a of the holding member 24 is inserted into the recessed portion of the side surface of the pellicle assembly frame 12a via the pin support 24b, whereby the pellicle assembly 12 placed on the protruding surface 18a can be fixed at a predetermined position, and the pin 24a is removed from the pin support 24b, whereby the pellicle assembly 12 can be released.

As shown in fig. 1, a concave portion 22 is provided along the convex rib 18 between the convex rib 18 and the outer peripheral edge of the container body 14, and the concave portion 22 is formed by folding back the outer peripheral portion of the container body 14. By folding back, the rigidity of the peripheral edge portion of the container body 14, particularly the rigidity against bending in the longitudinal direction and the short side direction of the container body 14, can be improved. Further, when the outer peripheral edge of the lid 16 is fitted and locked in the recess 22, the bonding strength with the lid 16 and the overall strength of the dustproof thin film assembly housing container 10 can be improved.

As shown in fig. 1 to 3, a diamond rib 20a is formed at the center of the bottom surface region surrounded by the convex ribs 18 of the container body 14, and corner ribs 20b each having both ends connected to the convex ribs 18, 18 are formed at the corners of the two vertical convex ribs 18, 18. Since the diamond ribs 20a and the corner ribs 20b cross the diagonal line X of the container body 14, the torsional deformation of the container body 14 can be effectively prevented. Since the diamond ribs 20a and the corner ribs 20b do not intersect with each other, the side surfaces of the diamond ribs 20a and the corner ribs 20b are not cut and do not become the starting points of deformation, and a strong reinforcing effect can be obtained.

As described above, the outer bottom surface of the container main body 14 reinforced with the ribs or the like is provided with the rectangular frame-shaped body 26 as shown in fig. 4 as a reinforcing member, and the reinforcing member and the ribs reinforce the container main body 14 to enhance the rigidity. Frame body 26 is lightweight as compared to conventional "herringbone" or "mu" shaped reinforcing members. Straight rod-shaped bodies 26a forming the long sides of frame-shaped body 26 and straight rod-shaped bodies 26b forming the short sides are connected by plate-shaped L-shaped bodies 26c, 26 d. The straight rod-shaped bodies 26a, 26b are made of a material such as an aluminum alloy which is corrosion-resistant, lightweight, and highly rigid, and have a solid rectangular cross-sectional shape. The L-shaped bodies 26c and 26d are preferably made of steel or stainless steel, and if a thick wall is used, an aluminum alloy member is used. The L-shaped body 26c is disposed outside the frame body 26, and the L-shaped body 26d is disposed inside the frame body 26. The straight rod-shaped bodies 26a, 26b and the L-shaped bodies 26c, 26d are fixed to each other by fastening bolts 30, 30. As shown in fig. 5, the L-shaped bodies 26c and 26d are formed with elongated holes 32 and 32, so that the mounting positions of the L-shaped bodies 26c and 26d and the straight rod-shaped bodies 26a and 26b can be adjusted.

As shown in fig. 1 and 2, the frame-shaped body 26 is attached to the container main body 14 by tightening the attachment bolts 28 inserted into the screw holes of the straight rod-shaped bodies 26a and 26b from the inside of the recess 22, and the straight rod-shaped bodies 26a and 26b are brought into contact with the outer bottom of the recess 22 of the container main body 14. From the viewpoint of strength, the mounting bolt 28 is preferably made of metal, and particularly preferably has a flange on the fastening surface. It is preferable to coat the exposed portion of mounting bolt 28 to the inside of container body 14 with resin and to dissolve the boundary portion of mounting bolt 28 and container body 14 with an organic solvent or the like to prevent dust and looseness from being generated from the gap.

The L-shaped bodies 26c and 26d constituting the corners of the frame body 26 are not provided with attachment means to the container body 14, and the positions of the L-shaped bodies 26c and 26d can be adjusted along the elongated holes by loosening the fastening bolts 30 and 30. Therefore, even if the size of the container main body 14 changes due to variations in manufacturing or changes over time, the fastening bolts 30 and 30 are loosened to move the L-shaped bodies 26c and 26d, so that the positions of the straight rod-shaped bodies 26a and 26b can be adjusted, and the frame-shaped body 26 can be attached to the outer bottom surface of the recess 22 of the container main body 14 after the deformation. As shown in fig. 1 and 3, the frame-shaped bodies 26 attached to the outer bottom surfaces of the recesses 22 of the container body 14 in this manner have the bottom surfaces of the straight rod-shaped bodies 26a and 26b flush with the bottom surface of the container body 14, so that the frame-shaped bodies 26 do not damage other articles or the like during the transportation of the dustproof thin film module storage container, and the frame-shaped bodies 26 can be prevented from being scratched to generate dust.

As shown in fig. 4, handles 37 and 37 shaped like "コ" as gripping members are attached to straight rod-shaped bodies 26b and 26b facing each other and forming the short sides of frame-shaped body 26. The handles 37 and 37 are fastened to the straight rod-shaped bodies 26b and 26b made of stainless steel by bolts (not shown). By gripping the handles 37 and 37 to transport the dustproof thin film component storage container, the occurrence of deformation or the like due to gripping the container body 14 and/or the lid 16 can be suppressed, and the possibility of adhesion of foreign matter to the stored dustproof thin film component can be greatly reduced. The handles 37 and 37 may be plate-shaped projections, and may be attached to other positions of the frame body 26.

The L-shaped bodies 26c and 26d forming the corners of the frame body 26 are preferably chamfered or curved by cutting the corners to be flat. For example, as shown in fig. 5, since the corners of the L-shaped bodies 26c and 26d are formed as the flat surfaces 36 and 36, the flat surfaces 36 and 36 serve as resistance surfaces when the container body 14 is deformed in the twisting direction, it is preferable that the surface 36 is formed to have a height and a length as long as possible. Specifically, the surface 36 is preferably formed to have a height of 20mm to 50mm and a length of 40mm to 100 mm.

The frame-shaped body 26 as a reinforcing member shown in fig. 4 can be attached to the container body 14 even if the size of the large resin container body 14 on which the large dustproof thin film module 12 having a side of 500mm or more is placed changes with time. This is because the size of the frame body 26 can be adjusted by adjusting the positions of the straight rod-like bodies 26a and 26b by moving the L-shaped bodies 26c and 26d of the frame body 26. Further, since the frame-shaped body 26 as the reinforcing member is lighter in weight than the conventional reinforcing member in the shape of "japanese" or "mesh", the dustproof thin film assembly storage container 10 including the container body 14 in which the frame-shaped body 26 is mounted is lighter in weight and has higher rigidity.

As another embodiment, as shown in fig. 6, which is a rear view of the container main body 14, plate-like L-shaped bodies 38 fixed to the respective corner portions of the container main body 14 independently of each other may be used as the reinforcing member. The L-shaped body 38 is also fixed to the bottom surface side of the recess 22 from the inside of the recess 22 by a mounting bolt. The use of the L-shaped body 38 reinforces the container body 14 at each corner with sufficient resistance to deformation in the twisting direction. In particular, as shown in fig. 6(b), the L-shaped body 38 is preferably formed such that the corner portion is a flat surface 38a, which serves as a resistance surface against a stress flat surface 38a that deforms the container main body 14 in the twisting direction. Further, since the L-shaped body 38 and the other L-shaped body 38 are attached to the container body 14 independently of each other, even if dimensional variations occur in the container body 14 due to changes over time, the attachment to the corner portion can be easily performed. Further, since the L-shaped bodies 38 are provided with the コ -shaped handles 37, the container body 14 is not unbalanced in load when the dustproof thin film assembly storage container is transported.

In the outer bottom surface of the container body 14 shown in fig. 1 to 6, the concave portion formed by the convex rib 18, the rhombic rib 20a, and the corner rib 20b is opened, and the dust-proof pellicle assembly storing container 10 cannot be conveyed by rollers during conveyance. This is because the container body 14 is deformed by the impact caused by the engagement between the recess and the roller. As shown in fig. 7, the outer bottom surface of the container body 14 is formed to be a smooth surface by attaching the plate body 40 to the frame body 26 or the L-shaped body 38 over the entire outer bottom surface of the container body 14, and thereby the dustproof thin film assembly housing container 10 can be transported by using the roller. Further, by making the outer bottom surface of the container main body 14 a smooth surface, vacuum suction can be used when the dustproof thin film module storage container 10 is tilted. The plate body 40 may be a resin member having a thickness of 2mm to 8mm, instead of the reinforcing member of the container body 10. As the resin, polymethyl methacrylate (PMMA resin), acrylonitrile-butadiene-styrene (ABS resin), polycarbonate resin (PC resin), polyvinyl chloride resin (PVC resin) can be used. When the plate 40 is attached to the frame 26 or the L-shaped body 38, bolts, double-sided tape, or adhesive can be used. When the central portion of the container body 14 and the vicinity thereof are warped or raised, it is preferable to join the portion and the plate body 40 with a double-sided tape or an adhesive.

The following examples of the present invention will be described in detail, but the scope of the present invention is not limited to these examples.

A rectangular container body 14 and a lid 16 fitted and locked to the outer peripheral edge thereof were produced by vacuum forming using a 5mm thick sheet of acrylonitrile-butadiene-styrene (ABS resin) subjected to antistatic treatment. As the sheet, the container body 14 is black, and the lid 16 is transparent. A convex rib 18 is formed near and along the outer peripheral edge of the container body 14, and a protruding surface 18a of the convex rib 18 is a mounting surface of the dustproof thin film assembly 12. The projecting surface 18a is formed to have a width in the longitudinal direction larger than that in the transverse direction, and a holding member 24 of the dustproof thin film assembly 12 is provided. Further, between the convex rib 18 and the outer peripheral edge, a concave portion 22 is provided along the convex rib 18, and the concave portion 22 is formed by folding back the outer peripheral portion of the container body 14. In the bottom surface region surrounded by the convex ribs 18, a diamond rib 20a is formed at the center portion, and corner ribs 20b having both ends connected to the convex ribs 18, 18 are formed at the corners of the two convex ribs 18, 18 that are orthogonal to each other. The diamond ribs 20a and corner ribs 20b traverse a diagonal X of the container body 14. The dustproof thin film module storage container 10 in which the outer peripheral edge of the lid 16 is fitted and locked in the recess 22 of the container body 14 has an outer dimension of 1350mm × 1550mm and a height of 120 mm.

Then, straight rod-shaped bodies 26a, 26b and L-shaped bodies 26c, 26d forming the frame-shaped body 26 shown in fig. 4 are produced, the frame-shaped body 26 being a reinforcing member of the container main body 14 produced above. The straight rod-shaped members 26a and 26b are formed by machining screw holes 34 and screw holes (side surfaces of the straight rod-shaped members 26a and 26 b) for attaching the L-shaped members 26c and 26d, using flat square rods (10 mm × 30mm in cross section) made of aluminum alloy (a 6061). Further, an コ -shaped stainless steel (SUS304) handle 37 is attached to the outer side surface of the short-side straight rod-shaped body 26 b. The L-shaped bodies 26c and 26d are formed by bending a cold-rolled stainless steel (SUS304) plate, forming corners into flat surfaces, and forming screw holes of long holes. As the mounting bolts 28 for mounting the straight rod-shaped bodies 26a and 26b to the container body 14, flange hexagon bolts produced by insert molding stainless steel (SUS304) hexagon socket bolts into ABS resin are used.

When the manufactured straight rod-like bodies 26a and 26b and L-shaped bodies 26c and 26d are attached to the container body, the straight rod-like bodies 26a and 26b are brought into contact with the outer bottom surface of the straight portion of the recess 22 of the container body 14, the screw holes 34 are aligned with the screw holes in the bottom of the recess 22, and the attachment bolts 28 are inserted from the inside of the recess 22, whereby the straight rod-like bodies 26a and 26b are attached. After the mounting, the flange outer edge portions of the mounting bolts 28, which are in contact with the container main body 14, are subjected to a dissolving treatment with a solvent (MEK) in order to eliminate the gap. Next, the L-shaped bodies 26c and 26d shown in fig. 5 are moved and adjusted so that the elongated holes 32 are aligned with the screw holes formed in the side surfaces of the straight rod-shaped bodies 26a and 26b, and the straight rod-shaped bodies 26a and 26b are connected by the fastening bolts 30 to produce the frame-shaped body 26. The bottom surface of the frame body 26 attached to the container body 14 is flush with the outer bottom surface of the container body 14. Although the manufactured container main body 14 has dimensional variations of +5mm in the longitudinal direction and +3mm in the short side direction compared to the design, the size of the frame-shaped body 26 is adjusted to smoothly attach the container main body 14.

The container body 14 and the lid 16 reinforced by the frame body 26 were carried into a clean room of Class10 (Class10), carefully washed with a surfactant and water, and completely dried. Next, the dustproof film assembly 12, which has been inspected for foreign matter by a spotlight in advance in a dark room, is mounted on the protruding surface 18a of the convex rib 18 of the container body 14 and fixed by a holding member. The pellicle membrane assembly 12 is: a pellicle frame 12a (3.8 mm thick and anodized) made of an aluminum alloy (A5052) was attached with a pellicle film made of a fluororesin having an outer dimension of 1392mm × 1146mm, an inner dimension of 1370mm × 1124mm and a height of 5mm by using a photomask adhesive and a silicone resin as a pellicle film adhesive, and having a thickness of 3 mm. The container body 14 with the pellicle assembly 12 mounted and fixed thereon as described above is carefully fitted and sealed with the upper lid 16, whereby the pellicle assembly storage container 10 in which the pellicle assembly 12 is stored is obtained.

The periphery of the dustproof thin film assembly storage container 10 was adhesively fixed with a tape made of polyvinyl chloride (PVC) having a width of 40mm, and two layers were packed with an antistatic Polyethylene (PE) bag having a clean interior, and stored in a reinforced carton having a cushion material inside. In the packed state, a round trip transport test was performed from suma to foggar (a truck was used between suma and tokyo, and an airplane was used between tokyo and foggar). After the transport test, the dustproof thin film module storage container 10 taken out of the package was carried into a clean room and the inside thereof was confirmed, and as a result, no foreign matter was observed from the dustproof thin film module, and an extremely clean state was maintained.

The dustproof thin film assembly containing container of the invention can be used as a containing container and a storage container of a dustproof thin film assembly for a semiconductor device, and can also be used as a containing container and a storage container of a dustproof thin film assembly which is larger than the dustproof thin film assembly for the semiconductor device.

Description of the reference symbols

10: dustproof thin film assembly storage container

12: dustproof film assembly

12 a: dustproof pellicle assembly frame

12 b: dustproof film

12 c: composite layer

14: container body

16: cover body

18: convex arch rib

18 a: projecting surface

20 a: diamond arch rib

20 b: corner arch rib

22: concave part

24: holding member

24 a: pin bolt

24 b: pin support

26: frame body

26a, 26 b: straight rod-shaped body

26c, 26d, 38: l-shaped body

28: mounting bolt

30: fastening bolt

32: long hole

33: screw hole

36, 38 a: plane surface

37: handle bar

40: plate body

X: diagonal line

Claims (5)

1. A dustproof thin film assembly containing container is provided with: a square resin container body on which the dust-proof film unit is mounted; and a resin cover body which covers the dustproof thin film assembly by fitting and locking the periphery of the cover body,

a projecting surface of a convex rib formed along an outer peripheral edge of the container body is formed as a mounting surface of the pellicle,

the method is characterized in that:

the reinforcing member mounted on the outer bottom surface of the container body and between the outer peripheral edge and the convex rib is a frame body having 4 straight bar-shaped bodies fixed along each side of the outer peripheral edge, an L-shaped body having a plurality of elongated holes connected thereto, and a plurality of bolts, the size of which can be adjusted by changing the positions of the plurality of bolts penetrating through the elongated holes, or L-shaped bodies fixed independently at each corner of the container, and the bottom surface of the reinforcing member and the outer bottom surface of the container body are on the same plane, and a plate body covering the entire outer bottom surface of the container body is attached.

2. The dustproof pellicle container of claim 1, where the L-shaped body is formed so that its corners are flat or curved.

3. The dustproof pellicle storage container according to claim 1 or 2, characterized in that the length of at least one side of the dustproof pellicle is 500mm or more.

4. The dustproof film module receiving container according to claim 1, wherein a corner rib is formed at each corner of the bottom surface region of the container body surrounded by the convex ribs, and both ends of the corner rib are connected to two convex ribs forming the corner.

5. The dustproof pellicle container of claim 1, wherein gripping means for carrying the dustproof pellicle container is provided on the reinforcing member attached to the opposite side of the container body.