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JP1731878S - Reaction tube - Google Patents

Reaction tube

Info

Publication number
JP1731878S
JP1731878S JP2022004140F JP2022004140F JP1731878S JP 1731878 S JP1731878 S JP 1731878S JP 2022004140 F JP2022004140 F JP 2022004140F JP 2022004140 F JP2022004140 F JP 2022004140F JP 1731878 S JP1731878 S JP 1731878S
Authority
JP
Japan
Prior art keywords
reaction tube
accommodates
article
processes
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022004140F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2022004140F priority Critical patent/JP1731878S/en
Priority to TW111302869F priority patent/TWD230586S/en
Priority to US29/843,538 priority patent/USD1022905S1/en
Application granted granted Critical
Publication of JP1731878S publication Critical patent/JP1731878S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本願物品は、基板処理装置において、複数多段に並べた基板を内部に収容して、所定のガス雰囲気下で処理する反応管である。The article of the present application is a reaction tube in a substrate processing apparatus that accommodates a plurality of substrates arranged in multiple stages and processes them under a predetermined gas atmosphere.

JP2022004140F 2022-03-01 2022-03-01 Reaction tube Active JP1731878S (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022004140F JP1731878S (en) 2022-03-01 2022-03-01 Reaction tube
TW111302869F TWD230586S (en) 2022-03-01 2022-06-15 reaction tube
US29/843,538 USD1022905S1 (en) 2022-03-01 2022-06-22 Tubular reactor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022004140F JP1731878S (en) 2022-03-01 2022-03-01 Reaction tube

Publications (1)

Publication Number Publication Date
JP1731878S true JP1731878S (en) 2025-12-15

Family

ID=84322363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022004140F Active JP1731878S (en) 2022-03-01 2022-03-01 Reaction tube

Country Status (3)

Country Link
US (1) USD1022905S1 (en)
JP (1) JP1731878S (en)
TW (1) TWD230586S (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1713189S (en) * 2021-09-15 2022-04-21

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD405429S (en) * 1997-01-31 1999-02-09 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
USD424024S (en) * 1997-01-31 2000-05-02 Tokyo Electron Limited Quartz process tube
USD405431S (en) * 1997-08-20 1999-02-09 Tokyo Electron Ltd. Tube for use in a semiconductor wafer heat processing apparatus
JP3985899B2 (en) * 2002-03-28 2007-10-03 株式会社日立国際電気 Substrate processing equipment
TWD118408S1 (en) * 2006-02-20 2007-08-01 東京威力科創股份有限公司 Processing tubes for semiconductor manufacturing
USD600659S1 (en) * 2006-09-12 2009-09-22 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
TWD127410S1 (en) * 2007-04-20 2009-02-11 東京威力科創股份有限公司 Process tubes for semiconductor manufacturing
TWD125601S (en) * 2007-05-08 2008-10-21 東京威力科創股份有限公司 Processing tubes for semiconductor manufacturing
TWD133943S1 (en) 2008-05-09 2010-03-21 日立國際電氣股份有限公司 Reaction tube
TWD166710S (en) 2013-07-08 2015-03-21 日立國際電氣股份有限公司 reaction tube
USD742339S1 (en) 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
JP1534828S (en) * 2015-02-23 2015-10-13
JP1535455S (en) * 2015-02-25 2015-10-19
JP1546345S (en) * 2015-09-04 2016-03-22
JP1546512S (en) * 2015-09-04 2016-03-22

Also Published As

Publication number Publication date
USD1022905S1 (en) 2024-04-16
TWD230586S (en) 2024-04-01

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