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本物品は、半導体基板等の基板を処理するための基板処理チャンバのチャンバ内部を封じ込めるための封じ込めプレートに関するThe present article relates to a containment plate for containing the chamber interior of a substrate processing chamber for processing substrates such as semiconductor substrates.
JP2023000308F2022-04-182022-04-18
Containment plate for substrate processing chamber
ActiveJP1768699S
(en)