JP1791688S - 基板校正治具 - Google Patents
基板校正治具Info
- Publication number
- JP1791688S JP1791688S JP2024016001F JP2024016001F JP1791688S JP 1791688 S JP1791688 S JP 1791688S JP 2024016001 F JP2024016001 F JP 2024016001F JP 2024016001 F JP2024016001 F JP 2024016001F JP 1791688 S JP1791688 S JP 1791688S
- Authority
- JP
- Japan
- Prior art keywords
- calibration fixture
- pcb calibration
- pcb
- fixture
- calibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Abstract
本物品は、半導体製造装置内のロボットの位置を校正するための治具である。本物品は、校正作業の際に実際の基板の代わりとしての機能を果たす。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/927,453 USD1100698S1 (en) | 2024-02-05 | 2024-02-05 | Substrate calibration fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1791688S true JP1791688S (ja) | 2025-02-20 |
Family
ID=94631199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024016001F Active JP1791688S (ja) | 2024-02-05 | 2024-08-01 | 基板校正治具 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD1100698S1 (ja) |
| JP (1) | JP1791688S (ja) |
| TW (1) | TWD237360S (ja) |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD320361S (en) * | 1989-06-02 | 1991-10-01 | Tokyo Electron Limited | Wafer probe plate holder |
| US5820329A (en) * | 1997-04-10 | 1998-10-13 | Tokyo Electron Limited | Vacuum processing apparatus with low particle generating wafer clamp |
| US6932558B2 (en) * | 2002-07-03 | 2005-08-23 | Kung Chris Wu | Wafer aligner |
| US7256132B2 (en) * | 2002-07-31 | 2007-08-14 | Applied Materials, Inc. | Substrate centering apparatus and method |
| USD674759S1 (en) * | 2010-08-19 | 2013-01-22 | Epistar Corporation | Wafer carrier |
| US10186448B2 (en) * | 2015-12-11 | 2019-01-22 | Lam Research Corporation | Wafer support pedestal with wafer anti-slip and anti-rotation features |
| JP2018139284A (ja) * | 2016-12-08 | 2018-09-06 | ウルトラテック インク | 収縮可能なシールデバイスを備える、反りのあるウェハーを固定するためのウェハーチャック装置 |
| USD858469S1 (en) * | 2018-03-26 | 2019-09-03 | Veeco Instruments Inc. | Chemical vapor deposition wafer carrier with thermal cover |
| US10796940B2 (en) * | 2018-11-05 | 2020-10-06 | Lam Research Corporation | Enhanced automatic wafer centering system and techniques for same |
| CN120663299A (zh) * | 2019-07-26 | 2025-09-19 | 朗姆研究公司 | 用于自动化晶片搬运机械手教导与健康检查的整合适应性定位系统及例程 |
| CN115485826A (zh) * | 2020-03-06 | 2022-12-16 | 朗姆研究公司 | 具有柔性居中指部的环结构 |
| JP2024054628A (ja) * | 2022-10-05 | 2024-04-17 | 日本発條株式会社 | 積層構造体および積層構造体の製造方法 |
| EP4489064A1 (en) * | 2023-07-03 | 2025-01-08 | Unity Semiconductor | Substrate dimension adapter |
| CN117855110B (zh) * | 2024-03-08 | 2024-05-24 | 苏州智程半导体科技股份有限公司 | 一种半导体处理设备 |
-
2024
- 2024-02-05 US US29/927,453 patent/USD1100698S1/en active Active
- 2024-07-31 TW TW113303901F patent/TWD237360S/zh unknown
- 2024-08-01 JP JP2024016001F patent/JP1791688S/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD1100698S1 (en) | 2025-11-04 |
| TWD237360S (zh) | 2025-04-01 |
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