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USD1100698S1 - Substrate calibration fixture - Google Patents

Substrate calibration fixture

Info

Publication number
USD1100698S1
USD1100698S1 US29/927,453 US202429927453F USD1100698S US D1100698 S1 USD1100698 S1 US D1100698S1 US 202429927453 F US202429927453 F US 202429927453F US D1100698 S USD1100698 S US D1100698S
Authority
US
United States
Prior art keywords
calibration fixture
substrate calibration
substrate
view
fixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/927,453
Other languages
English (en)
Inventor
Bryan Griffith
Joseph Guardiola
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM IP Holding BV
Original Assignee
ASM IP Holding BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM IP Holding BV filed Critical ASM IP Holding BV
Priority to US29/927,453 priority Critical patent/USD1100698S1/en
Priority to TW113303901F priority patent/TWD237360S/zh
Priority to JP2024016001F priority patent/JP1791688S/ja
Application granted granted Critical
Publication of USD1100698S1 publication Critical patent/USD1100698S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

US29/927,453 2024-02-05 2024-02-05 Substrate calibration fixture Active USD1100698S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/927,453 USD1100698S1 (en) 2024-02-05 2024-02-05 Substrate calibration fixture
TW113303901F TWD237360S (zh) 2024-02-05 2024-07-31 基板校準夾具
JP2024016001F JP1791688S (ja) 2024-02-05 2024-08-01 基板校正治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/927,453 USD1100698S1 (en) 2024-02-05 2024-02-05 Substrate calibration fixture

Publications (1)

Publication Number Publication Date
USD1100698S1 true USD1100698S1 (en) 2025-11-04

Family

ID=94631199

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/927,453 Active USD1100698S1 (en) 2024-02-05 2024-02-05 Substrate calibration fixture

Country Status (3)

Country Link
US (1) USD1100698S1 (ja)
JP (1) JP1791688S (ja)
TW (1) TWD237360S (ja)

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD320361S (en) * 1989-06-02 1991-10-01 Tokyo Electron Limited Wafer probe plate holder
US5820329A (en) * 1997-04-10 1998-10-13 Tokyo Electron Limited Vacuum processing apparatus with low particle generating wafer clamp
US20040005212A1 (en) * 2002-07-03 2004-01-08 Wu Kung Chris Wafer aligner
US20040047720A1 (en) * 2002-07-31 2004-03-11 Alexander Lerner Substrate centering apparatus and method
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
US20170170051A1 (en) * 2015-12-11 2017-06-15 Lam Research Corporation Wafer support pedestal with wafer anti-slip and anti-rotation features
US20180166314A1 (en) * 2016-12-08 2018-06-14 Ultratech, Inc. Wafer Chuck Apparatus With Contractible Sealing Devices For Securing Warped Wafers
USD858469S1 (en) * 2018-03-26 2019-09-03 Veeco Instruments Inc. Chemical vapor deposition wafer carrier with thermal cover
US20200144097A1 (en) * 2018-11-05 2020-05-07 Lam Research Corporation Enhanced automatic wafer centering system and techniques for same
US20220254666A1 (en) * 2019-07-26 2022-08-11 Lam Research Corporation Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
US20230126459A1 (en) * 2020-03-06 2023-04-27 Lam Research Corporation Ring structure with compliant centering fingers
US12074400B1 (en) * 2023-07-03 2024-08-27 Unity Semiconductor Substrate dimension adapter
US20250201623A1 (en) * 2022-10-05 2025-06-19 Nhk Spring Co., Ltd. Multilayer structure and method for manufacturing multilayer structure
US12374579B1 (en) * 2024-03-08 2025-07-29 Suzhou Zhicheng Semiconductor Technology Co., Ltd. Semiconductor processing equipment

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD320361S (en) * 1989-06-02 1991-10-01 Tokyo Electron Limited Wafer probe plate holder
US5820329A (en) * 1997-04-10 1998-10-13 Tokyo Electron Limited Vacuum processing apparatus with low particle generating wafer clamp
US20040005212A1 (en) * 2002-07-03 2004-01-08 Wu Kung Chris Wafer aligner
US20040047720A1 (en) * 2002-07-31 2004-03-11 Alexander Lerner Substrate centering apparatus and method
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
USD704155S1 (en) * 2010-08-19 2014-05-06 Epistar Corporation Wafer carrier
US20170170051A1 (en) * 2015-12-11 2017-06-15 Lam Research Corporation Wafer support pedestal with wafer anti-slip and anti-rotation features
US20180166314A1 (en) * 2016-12-08 2018-06-14 Ultratech, Inc. Wafer Chuck Apparatus With Contractible Sealing Devices For Securing Warped Wafers
USD858469S1 (en) * 2018-03-26 2019-09-03 Veeco Instruments Inc. Chemical vapor deposition wafer carrier with thermal cover
US20200144097A1 (en) * 2018-11-05 2020-05-07 Lam Research Corporation Enhanced automatic wafer centering system and techniques for same
US20220254666A1 (en) * 2019-07-26 2022-08-11 Lam Research Corporation Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check
US20230126459A1 (en) * 2020-03-06 2023-04-27 Lam Research Corporation Ring structure with compliant centering fingers
US20250201623A1 (en) * 2022-10-05 2025-06-19 Nhk Spring Co., Ltd. Multilayer structure and method for manufacturing multilayer structure
US12074400B1 (en) * 2023-07-03 2024-08-27 Unity Semiconductor Substrate dimension adapter
US12374579B1 (en) * 2024-03-08 2025-07-29 Suzhou Zhicheng Semiconductor Technology Co., Ltd. Semiconductor processing equipment

Also Published As

Publication number Publication date
JP1791688S (ja) 2025-02-20
TWD237360S (zh) 2025-04-01

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