JP1711119S - サセプタリング - Google Patents
サセプタリングInfo
- Publication number
- JP1711119S JP1711119S JP2021022981F JP2021022981F JP1711119S JP 1711119 S JP1711119 S JP 1711119S JP 2021022981 F JP2021022981 F JP 2021022981F JP 2021022981 F JP2021022981 F JP 2021022981F JP 1711119 S JP1711119 S JP 1711119S
- Authority
- JP
- Japan
- Prior art keywords
- susceptoring
- wafer
- article
- hold
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタリングである。
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021022981F JP1711119S (ja) | 2021-10-22 | 2021-10-22 | サセプタリング |
| US29/834,637 USD1037186S1 (en) | 2021-10-22 | 2022-04-13 | Susceptor ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021022981F JP1711119S (ja) | 2021-10-22 | 2021-10-22 | サセプタリング |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1711119S true JP1711119S (ja) | 2022-03-29 |
Family
ID=80912671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021022981F Active JP1711119S (ja) | 2021-10-22 | 2021-10-22 | サセプタリング |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD1037186S1 (ja) |
| JP (1) | JP1711119S (ja) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD1094321S1 (en) | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor cover |
| USD1094320S1 (en) | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor |
| USD1094322S1 (en) | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor |
| USD1095473S1 (en) | 2022-10-20 | 2025-09-30 | Nuflare Technology, Inc. | Susceptor |
| USD1095471S1 (en) | 2022-10-20 | 2025-09-30 | Nuflare Technology, Inc. | Susceptor |
| USD1095472S1 (en) | 2022-10-20 | 2025-09-30 | Nuflare Technology, Inc. | Susceptor cover |
| USD1096676S1 (en) | 2022-10-20 | 2025-10-07 | Nuflare Technology, Inc. | Cover base for susceptors |
| USD1098057S1 (en) | 2022-10-20 | 2025-10-14 | Nuflare Technology, Inc. | Susceptor cover |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1741173S (ja) * | 2022-10-20 | 2023-04-06 | 半導体ウェハ及びサセプタ加熱用ヒータ | |
| JP1746407S (ja) * | 2023-01-11 | 2023-06-15 | サセプタ | |
| JP1746403S (ja) * | 2023-01-11 | 2023-06-15 | サセプタ | |
| JP1746408S (ja) * | 2023-01-11 | 2023-06-15 | サセプタ | |
| JP1746406S (ja) * | 2023-01-11 | 2023-06-15 | サセプタユニット | |
| JP1746405S (ja) * | 2023-01-11 | 2023-06-15 | サセプタカバー | |
| JP1746404S (ja) * | 2023-01-11 | 2023-06-15 | サセプタカバーベース |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4099041A (en) * | 1977-04-11 | 1978-07-04 | Rca Corporation | Susceptor for heating semiconductor substrates |
| JPH0834187B2 (ja) * | 1989-01-13 | 1996-03-29 | 東芝セラミックス株式会社 | サセプタ |
| US5844205A (en) * | 1996-04-19 | 1998-12-01 | Applied Komatsu Technology, Inc. | Heated substrate support structure |
| JPH11343571A (ja) * | 1998-05-29 | 1999-12-14 | Ngk Insulators Ltd | サセプター |
| US20030017268A1 (en) * | 2001-07-18 | 2003-01-23 | Applied Materials, Inc. | .method of cvd titanium nitride film deposition for increased titanium nitride film uniformity |
| JP4034145B2 (ja) * | 2002-08-09 | 2008-01-16 | 住友大阪セメント株式会社 | サセプタ装置 |
| DE102005045081B4 (de) * | 2004-09-29 | 2011-07-07 | Covalent Materials Corp. | Suszeptor |
| KR20070093493A (ko) * | 2006-03-14 | 2007-09-19 | 엘지이노텍 주식회사 | 서셉터 및 반도체 제조장치 |
| USD600223S1 (en) * | 2008-08-07 | 2009-09-15 | Ravinder Aggarwal | Susceptor ring |
| USD743357S1 (en) * | 2013-03-01 | 2015-11-17 | Asm Ip Holding B.V. | Susceptor |
| USD784276S1 (en) * | 2013-08-06 | 2017-04-18 | Applied Materials, Inc. | Susceptor assembly |
| USD830981S1 (en) * | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
| JP1648519S (ja) * | 2018-10-04 | 2019-12-23 | ||
| USD864134S1 (en) * | 2018-10-24 | 2019-10-22 | Asm Ip Holding B.V. | Susceptor |
| USD948463S1 (en) * | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
| US11764101B2 (en) * | 2019-10-24 | 2023-09-19 | ASM IP Holding, B.V. | Susceptor for semiconductor substrate processing |
-
2021
- 2021-10-22 JP JP2021022981F patent/JP1711119S/ja active Active
-
2022
- 2022-04-13 US US29/834,637 patent/USD1037186S1/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD1094321S1 (en) | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor cover |
| USD1094320S1 (en) | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor |
| USD1094322S1 (en) | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor |
| USD1095473S1 (en) | 2022-10-20 | 2025-09-30 | Nuflare Technology, Inc. | Susceptor |
| USD1095471S1 (en) | 2022-10-20 | 2025-09-30 | Nuflare Technology, Inc. | Susceptor |
| USD1095472S1 (en) | 2022-10-20 | 2025-09-30 | Nuflare Technology, Inc. | Susceptor cover |
| USD1096676S1 (en) | 2022-10-20 | 2025-10-07 | Nuflare Technology, Inc. | Cover base for susceptors |
| USD1098057S1 (en) | 2022-10-20 | 2025-10-14 | Nuflare Technology, Inc. | Susceptor cover |
Also Published As
| Publication number | Publication date |
|---|---|
| USD1037186S1 (en) | 2024-07-30 |
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