JP1743081S - 研磨パッド - Google Patents
研磨パッドInfo
- Publication number
- JP1743081S JP1743081S JP2022014222F JP2022014222F JP1743081S JP 1743081 S JP1743081 S JP 1743081S JP 2022014222 F JP2022014222 F JP 2022014222F JP 2022014222 F JP2022014222 F JP 2022014222F JP 1743081 S JP1743081 S JP 1743081S
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- article
- silicon wafers
- polishing silicon
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005498 polishing Methods 0.000 title abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Abstract
本物品は、シリコンウエハ等の研磨に使用するものである。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022014222F JP1743081S (ja) | 2022-07-01 | 2022-07-01 | 研磨パッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022014222F JP1743081S (ja) | 2022-07-01 | 2022-07-01 | 研磨パッド |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1743081S true JP1743081S (ja) | 2023-04-27 |
Family
ID=86055123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022014222F Active JP1743081S (ja) | 2022-07-01 | 2022-07-01 | 研磨パッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1743081S (ja) |
-
2022
- 2022-07-01 JP JP2022014222F patent/JP1743081S/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP1711119S (ja) | サセプタリング | |
| JP1711120S (ja) | サセプタカバー | |
| JP1741175S (ja) | サセプタ | |
| JP1639752S (ja) | 基板保持リング | |
| JP1645741S (ja) | 基板保持リング | |
| JP1743011S (ja) | 研磨パッド | |
| JP1743081S (ja) | 研磨パッド | |
| JP1743080S (ja) | 研磨パッド | |
| JP1743012S (ja) | 研磨パッド | |
| JP1643942S (ja) | 基板保持リング | |
| JP1639765S (ja) | 基板保持リング | |
| JP1746404S (ja) | サセプタカバーベース | |
| JP1730994S (ja) | 研磨パッド用ドレッサ | |
| JP1730995S (ja) | 研磨パッド用ドレッサ | |
| JP1730993S (ja) | 研磨パッド用ドレッサ | |
| JP1730992S (ja) | 研磨パッド用ドレッサ | |
| JP1639764S (ja) | 基板保持リング | |
| JP1643626S (ja) | 基板保持リング | |
| JP1716269S (ja) | 研磨パッド | |
| JP1716270S (ja) | 研磨パッド | |
| JP1716206S (ja) | 研磨パッド | |
| JP1716273S (ja) | 研磨パッド | |
| JP1716271S (ja) | 研磨パッド | |
| JP1716274S (ja) | 研磨パッド | |
| JP1716272S (ja) | 研磨パッド |