[go: up one dir, main page]

HK1218184B - 曝光方法和装置、以及器件制造方法 - Google Patents

曝光方法和装置、以及器件制造方法 Download PDF

Info

Publication number
HK1218184B
HK1218184B HK16106083.7A HK16106083A HK1218184B HK 1218184 B HK1218184 B HK 1218184B HK 16106083 A HK16106083 A HK 16106083A HK 1218184 B HK1218184 B HK 1218184B
Authority
HK
Hong Kong
Prior art keywords
heads
head
measurement
stage
encoder
Prior art date
Application number
HK16106083.7A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1218184A1 (zh
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1218184A1 publication Critical patent/HK1218184A1/zh
Publication of HK1218184B publication Critical patent/HK1218184B/zh

Links

HK16106083.7A 2006-08-31 2016-05-30 曝光方法和装置、以及器件制造方法 HK1218184B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2006237045 2006-08-31
JP2006237045 2006-08-31
JP2006237491 2006-09-01
JP2006237491 2006-09-01
JP2006237606 2006-09-01
JP2006237606 2006-09-01

Publications (2)

Publication Number Publication Date
HK1218184A1 HK1218184A1 (zh) 2017-02-03
HK1218184B true HK1218184B (zh) 2018-03-29

Family

ID=

Similar Documents

Publication Publication Date Title
US10353301B2 (en) Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
EP2071613B1 (en) Exposure method and apparatus
EP2071614B1 (en) Exposure method and apparatus
HK1248325A1 (zh) 曝光设备、曝光方法以及装置制造方法
HK1224022B (zh) 曝光装置、曝光方法和设备制造方法
HK1218184B (zh) 曝光方法和装置、以及器件制造方法
HK1224021B (zh) 曝光装置，曝光方法和器件制造方法
HK1218187B (zh) 曝光方法和设备以及设备制造方法
HK1193879B (zh) 曝光设备和曝光方法
HK1130944B (zh) 曝光装置、曝光方法、以及设备制造方法
HK1218168B (zh) 移动体驱动方法及移动体驱动系统、图案形成方法及装置、曝光方法及装置、以及组件制造方法
HK1218167B (zh) 曝光方法、设备以及装置制造方法
HK1131466B (zh) 曝光方法及装置
HK1131467B (zh) 曝光方法及装置