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HK1218168B - 移动体驱动方法及移动体驱动系统、图案形成方法及装置、曝光方法及装置、以及组件制造方法 - Google Patents

移动体驱动方法及移动体驱动系统、图案形成方法及装置、曝光方法及装置、以及组件制造方法 Download PDF

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Publication number
HK1218168B
HK1218168B HK16106140.8A HK16106140A HK1218168B HK 1218168 B HK1218168 B HK 1218168B HK 16106140 A HK16106140 A HK 16106140A HK 1218168 B HK1218168 B HK 1218168B
Authority
HK
Hong Kong
Prior art keywords
measurement
heads
head
movable body
encoder
Prior art date
Application number
HK16106140.8A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1218168A1 (zh
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1218168A1 publication Critical patent/HK1218168A1/zh
Publication of HK1218168B publication Critical patent/HK1218168B/zh

Links

HK16106140.8A 2006-09-01 2016-05-31 移动体驱动方法及移动体驱动系统、图案形成方法及装置、曝光方法及装置、以及组件制造方法 HK1218168B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006237465 2006-09-01
JP2006237465 2006-09-01

Publications (2)

Publication Number Publication Date
HK1218168A1 HK1218168A1 (zh) 2017-02-03
HK1218168B true HK1218168B (zh) 2018-05-11

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