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HK1224021B - 曝光装置，曝光方法和器件制造方法 - Google Patents

曝光装置，曝光方法和器件制造方法 Download PDF

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Publication number
HK1224021B
HK1224021B HK16112134.4A HK16112134A HK1224021B HK 1224021 B HK1224021 B HK 1224021B HK 16112134 A HK16112134 A HK 16112134A HK 1224021 B HK1224021 B HK 1224021B
Authority
HK
Hong Kong
Prior art keywords
heads
measurement
head
stage
switching
Prior art date
Application number
HK16112134.4A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1224021A1 (zh
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1224021A1 publication Critical patent/HK1224021A1/zh
Publication of HK1224021B publication Critical patent/HK1224021B/zh

Links

HK16112134.4A 2006-08-31 2016-10-20 曝光装置，曝光方法和器件制造方法 HK1224021B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2006237045 2006-08-31
JP2006237045 2006-08-31
JP2006237606 2006-09-01
JP2006237491 2006-09-01
JP2006237491 2006-09-01
JP2006237606 2006-09-01

Publications (2)

Publication Number Publication Date
HK1224021A1 HK1224021A1 (zh) 2017-08-11
HK1224021B true HK1224021B (zh) 2018-07-20

Family

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