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HK1218167B - 曝光方法、设备以及装置制造方法 - Google Patents

曝光方法、设备以及装置制造方法 Download PDF

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Publication number
HK1218167B
HK1218167B HK16106139.1A HK16106139A HK1218167B HK 1218167 B HK1218167 B HK 1218167B HK 16106139 A HK16106139 A HK 16106139A HK 1218167 B HK1218167 B HK 1218167B
Authority
HK
Hong Kong
Prior art keywords
measurement
heads
head
encoder
movable body
Prior art date
Application number
HK16106139.1A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1218167A1 (zh
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1218167A1 publication Critical patent/HK1218167A1/zh
Publication of HK1218167B publication Critical patent/HK1218167B/zh

Links

HK16106139.1A 2006-09-01 2016-05-31 曝光方法、设备以及装置制造方法 HK1218167B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006237692 2006-09-01
JP2006237692 2006-09-01

Publications (2)

Publication Number Publication Date
HK1218167A1 HK1218167A1 (zh) 2017-02-03
HK1218167B true HK1218167B (zh) 2018-07-20

Family

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