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WO2008081695A1 - 弾性表面波装置 - Google Patents

弾性表面波装置 Download PDF

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Publication number
WO2008081695A1
WO2008081695A1 PCT/JP2007/074018 JP2007074018W WO2008081695A1 WO 2008081695 A1 WO2008081695 A1 WO 2008081695A1 JP 2007074018 W JP2007074018 W JP 2007074018W WO 2008081695 A1 WO2008081695 A1 WO 2008081695A1
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic wave
surface acoustic
idt electrode
normalized
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/074018
Other languages
English (en)
French (fr)
Inventor
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2008552078A priority Critical patent/JP4992911B2/ja
Priority to EP07850538.5A priority patent/EP2099129A4/en
Priority to CN2007800479298A priority patent/CN101584115B/zh
Publication of WO2008081695A1 publication Critical patent/WO2008081695A1/ja
Priority to US12/477,282 priority patent/US7626314B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　温度変化による特性の変動が生じ難く、ＩＤＴの電極指１本当たりの反射係数が高く、狭帯域化が容易な弾性表面波装置を得る。 　オイラー角（０°±５°，０°～１４０°，０°±４０°）である水晶からなる圧電基板２上に、ＩＤＴ電極３が形成されており、ＩＤＴ電極３を覆うようにｃ軸配向のＺｎＯからなる圧電膜４が形成されており、圧電膜４の表面にＩＤＴ電極３の厚みに対応した凸部が形成されており、弾性表面波としてレイリー波が利用されており、前記ＩＤＴ電極が、Ａｌ、Ａｕ、Ｔａ、Ｗ、Ｐｔ、Ｃｕ、ＮｉまたはＭｏを主体とする金属材料からなり、弾性表面波の波長λとした場合、ＩＤＴ電極において主体となる金属と、ＩＤＴ電極の弾性表面波の波長で規格化した規格化膜厚と、圧電膜の弾性表面波の波長で規格化した規格化膜厚とは、下記の表１で示す各組み合わせの範囲内とされている弾性表面波装置１。 【表１】
PCT/JP2007/074018 2006-12-27 2007-12-13 弾性表面波装置 Ceased WO2008081695A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008552078A JP4992911B2 (ja) 2006-12-27 2007-12-13 弾性表面波装置
EP07850538.5A EP2099129A4 (en) 2006-12-27 2007-12-13 Surface acoustic wave device
CN2007800479298A CN101584115B (zh) 2006-12-27 2007-12-13 声表面波装置
US12/477,282 US7626314B2 (en) 2006-12-27 2009-06-03 Surface acoustic wave device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006352091 2006-12-27
JP2006-352091 2006-12-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/477,282 Continuation US7626314B2 (en) 2006-12-27 2009-06-03 Surface acoustic wave device

Publications (1)

Publication Number Publication Date
WO2008081695A1 true WO2008081695A1 (ja) 2008-07-10

Family

ID=39588379

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074018 Ceased WO2008081695A1 (ja) 2006-12-27 2007-12-13 弾性表面波装置

Country Status (5)

Country Link
US (1) US7626314B2 (ja)
EP (1) EP2099129A4 (ja)
JP (1) JP4992911B2 (ja)
CN (1) CN101584115B (ja)
WO (1) WO2008081695A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017068877A1 (ja) * 2015-10-23 2017-04-27 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
KR102060984B1 (ko) * 2017-09-27 2019-12-31 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106209007B (zh) * 2010-12-24 2019-07-05 株式会社村田制作所 弹性波装置
WO2016111262A1 (ja) * 2015-01-07 2016-07-14 株式会社村田製作所 複合フィルタ装置
CN108141198B (zh) * 2015-10-23 2022-04-29 株式会社村田制作所 弹性波装置
WO2018092511A1 (ja) * 2016-11-18 2018-05-24 株式会社村田製作所 弾性表面波フィルタおよびマルチプレクサ
KR101953219B1 (ko) * 2016-11-24 2019-02-28 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
SG10202010325SA (en) * 2016-11-25 2020-11-27 Univ Tohoku Acoustic wave devices
CN107041751A (zh) * 2017-04-01 2017-08-15 浙江大学 一种呼吸状态检测系统及无线无源的声表面波传感器
JP6963423B2 (ja) * 2017-06-14 2021-11-10 株式会社日本製鋼所 接合基板、弾性表面波素子および接合基板の製造方法
FR3079667B1 (fr) * 2018-03-28 2020-03-27 Frec'n'sys Dispositif d'onde acoustique de surface sur substrat composite
TWI689856B (zh) * 2019-01-04 2020-04-01 友達光電股份有限公司 壓電感測器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999005788A1 (en) * 1997-07-28 1999-02-04 Kabushiki Kaisha Toshiba Surface acoustic wave device and method of producing the same
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

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JPS61136312A (ja) * 1984-12-06 1986-06-24 Alps Electric Co Ltd 弾性表面波素子
JPH01292908A (ja) 1988-05-20 1989-11-27 Hitachi Ltd 弾性表面波フィルタ
JPH0818388A (ja) * 1993-09-16 1996-01-19 Matsushita Electric Ind Co Ltd 表面波フィルタ素子とその製造方法
JP3205978B2 (ja) * 1995-08-08 2001-09-04 住友電気工業株式会社 表面弾性波素子
JP3196678B2 (ja) * 1997-02-07 2001-08-06 株式会社村田製作所 表面波装置
JPH11136083A (ja) * 1997-08-27 1999-05-21 Murata Mfg Co Ltd 表面波装置
JP3301399B2 (ja) * 1998-02-16 2002-07-15 株式会社村田製作所 弾性表面波装置
JP3568025B2 (ja) * 1999-05-14 2004-09-22 株式会社村田製作所 表面波装置及び通信機装置
JP3341759B2 (ja) * 1999-10-15 2002-11-05 住友電気工業株式会社 表面弾性波素子
US6717327B2 (en) * 2001-04-23 2004-04-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP3841053B2 (ja) * 2002-07-24 2006-11-01 株式会社村田製作所 弾性表面波装置及びその製造方法
JP4145678B2 (ja) * 2003-02-13 2008-09-03 セイコーエプソン株式会社 縦２重モード型ｓａｗフィルタ
JP4244656B2 (ja) * 2003-02-26 2009-03-25 株式会社村田製作所 弾性表面波装置
JP4158650B2 (ja) * 2003-08-20 2008-10-01 セイコーエプソン株式会社 弾性表面波デバイス及びその製造方法
CN100495910C (zh) * 2003-10-29 2009-06-03 株式会社村田制作所 弹性表面波装置
JP2005142629A (ja) 2003-11-04 2005-06-02 Seiko Epson Corp 弾性表面波素子およびその製造方法
JP4497159B2 (ja) * 2004-04-08 2010-07-07 株式会社村田製作所 弾性境界波フィルタ
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JP4548088B2 (ja) 2004-10-20 2010-09-22 セイコーエプソン株式会社 弾性表面波装置
EP1675260A3 (en) * 2004-12-03 2007-08-15 Epson Toyocom Corporation Surface acoustic wave device
JPWO2006137464A1 (ja) * 2005-06-21 2009-01-22 エプソントヨコム株式会社 弾性表面波デバイス、モジュール、及び発振器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999005788A1 (en) * 1997-07-28 1999-02-04 Kabushiki Kaisha Toshiba Surface acoustic wave device and method of producing the same
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Small and low-loss filter using ZnO film/Quartz structure", 31TH EM SYMPOSIUM, May 2002 (2002-05-01), pages 87 - 94
See also references of EP2099129A4

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017068877A1 (ja) * 2015-10-23 2017-04-27 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
US10425116B2 (en) 2015-10-23 2019-09-24 Murata Manufacturing Co., Ltd. Elastic wave device, high frequency front-end circuit, and communication apparatus
KR102060984B1 (ko) * 2017-09-27 2019-12-31 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
US11228300B2 (en) 2017-09-27 2022-01-18 Murata Manufacturing Co., Ltd. Elastic wave device, high-frequency front-end circuit, and communication apparatus

Also Published As

Publication number Publication date
JP4992911B2 (ja) 2012-08-08
US20090237181A1 (en) 2009-09-24
JPWO2008081695A1 (ja) 2010-04-30
EP2099129A1 (en) 2009-09-09
US7626314B2 (en) 2009-12-01
CN101584115B (zh) 2012-09-05
EP2099129A4 (en) 2014-03-26
CN101584115A (zh) 2009-11-18

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