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WO2008123132A1 - 弾性表面波装置 - Google Patents

弾性表面波装置 Download PDF

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Publication number
WO2008123132A1
WO2008123132A1 PCT/JP2008/055247 JP2008055247W WO2008123132A1 WO 2008123132 A1 WO2008123132 A1 WO 2008123132A1 JP 2008055247 W JP2008055247 W JP 2008055247W WO 2008123132 A1 WO2008123132 A1 WO 2008123132A1
Authority
WO
WIPO (PCT)
Prior art keywords
idt electrode
standardized
surface wave
elastic surface
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/055247
Other languages
English (en)
French (fr)
Inventor
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2009509069A priority Critical patent/JP4811518B2/ja
Publication of WO2008123132A1 publication Critical patent/WO2008123132A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　温度変化による特性の変動が生じ難く、ＩＤＴの電極指１本あたりの反射係数が高く、狭帯域化が容易な弾性表面波装置を得る。 　オイラー角（０°±５°，０°～１４０°，０°±４０°）である水晶からなる圧電基板２上に、ＩＤＴ電極３及びＩＤＴ電極３の電極指と同じ厚みのＳｉＯ２膜７が形成されており、ＩＤＴ電極３及びＳｉＯ２膜７を覆うようにｃ軸配向のＺｎＯ膜４からなる圧電膜が形成されており、弾性表面波としてレイリー波が利用されており、前記ＩＤＴ電極３が、Ａｕ、Ｔａ、Ｗ、Ｐｔ、Ｃｕ、ＮｉまたはＭｏを主体とする金属材料からなり、弾性表面波の波長をλとした場合、ＩＤＴ電極３において主体となる金属と、ＩＤＴ電極３のλで規格化してなる規格化膜厚と、ＺｎＯ膜４のλで規格化してなる規格化膜厚とが、下記の表１で示す各組み合わせの範囲内とされている弾性表面波装置１。
PCT/JP2008/055247 2007-03-30 2008-03-21 弾性表面波装置 Ceased WO2008123132A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009509069A JP4811518B2 (ja) 2007-03-30 2008-03-21 弾性表面波装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007092127 2007-03-30
JP2007-092127 2007-03-30

Publications (1)

Publication Number Publication Date
WO2008123132A1 true WO2008123132A1 (ja) 2008-10-16

Family

ID=39830629

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055247 Ceased WO2008123132A1 (ja) 2007-03-30 2008-03-21 弾性表面波装置

Country Status (2)

Country Link
JP (1) JP4811518B2 (ja)
WO (1) WO2008123132A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54148478U (ja) * 1978-04-06 1979-10-16
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100713966B1 (ko) * 1997-07-28 2007-05-02 가부시끼가이샤 도시바 탄성표면파 장치 및 그의 제조방법
JP2002280856A (ja) * 2001-03-21 2002-09-27 Seiko Epson Corp 弾性表面波素子の製造方法
JP4244656B2 (ja) * 2003-02-26 2009-03-25 株式会社村田製作所 弾性表面波装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54148478U (ja) * 1978-04-06 1979-10-16
JP2003037467A (ja) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd 弾性表面波装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KADOTA M. ET AL.: "ZnO Maku Hyomen Kenma ni yoru SAW Filter no Shuhasu Tokusei Baratsuki no Teigen", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, vol. J76-A, no. 10, 25 October 1993 (1993-10-25), pages 1399 - 1406 *

Also Published As

Publication number Publication date
JP4811518B2 (ja) 2011-11-09
JPWO2008123132A1 (ja) 2010-07-15

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