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WO2008102577A1 - 弾性表面波センサー装置 - Google Patents

弾性表面波センサー装置 Download PDF

Info

Publication number
WO2008102577A1
WO2008102577A1 PCT/JP2008/050363 JP2008050363W WO2008102577A1 WO 2008102577 A1 WO2008102577 A1 WO 2008102577A1 JP 2008050363 W JP2008050363 W JP 2008050363W WO 2008102577 A1 WO2008102577 A1 WO 2008102577A1
Authority
WO
WIPO (PCT)
Prior art keywords
surface acoustic
acoustic wave
detected
sensor
wave sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/050363
Other languages
English (en)
French (fr)
Inventor
Kenjiro Okaguchi
Michio Kadota
Koji Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2009500103A priority Critical patent/JPWO2008102577A1/ja
Publication of WO2008102577A1 publication Critical patent/WO2008102577A1/ja
Priority to US12/505,571 priority patent/US8156814B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　検出対象物質に由来する質量負荷の変動が小さい場合であっても、検出対象物質を高精度に検出することを可能とする弾性表面波センサー装置を提供する。 　共振子型の弾性表面波フィルタへの質量負荷を周波数変化により検出する弾性表面波センサー装置であって、圧電基板２上に表面波励振用のＩＤＴ電極３が形成されており、ＩＤＴ電極３を覆うように絶縁膜６が形成されており、絶縁膜６上に、検出対象物質または検出対象物質と結合する結合物質が反応される反応膜８が形成されており、該反応膜８が金属または金属酸化物からなる弾性表面波センサー装置１。
PCT/JP2008/050363 2007-02-19 2008-01-15 弾性表面波センサー装置 Ceased WO2008102577A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009500103A JPWO2008102577A1 (ja) 2007-02-19 2008-01-15 弾性表面波センサー装置
US12/505,571 US8156814B2 (en) 2007-02-19 2009-07-20 Surface acoustic wave sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-038064 2007-02-19
JP2007038064 2007-02-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/505,571 Continuation US8156814B2 (en) 2007-02-19 2009-07-20 Surface acoustic wave sensor

Publications (1)

Publication Number Publication Date
WO2008102577A1 true WO2008102577A1 (ja) 2008-08-28

Family

ID=39709857

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050363 Ceased WO2008102577A1 (ja) 2007-02-19 2008-01-15 弾性表面波センサー装置

Country Status (3)

Country Link
US (1) US8156814B2 (ja)
JP (1) JPWO2008102577A1 (ja)
WO (1) WO2008102577A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010041390A1 (ja) * 2008-10-07 2010-04-15 株式会社 村田製作所 弾性波センサ及び弾性波センサを用いた検出方法
WO2010046212A1 (de) * 2008-10-21 2010-04-29 Siemens Aktiengesellschaft Vorrichtung und verfahren zur detektion einer substanz mit hilfe eines dünnfilmresonators (fbar) mit isolationsschicht
WO2010146923A1 (ja) * 2009-06-18 2010-12-23 株式会社 村田製作所 弾性表面波センサー
WO2011030519A1 (ja) 2009-09-11 2011-03-17 パナソニック株式会社 弾性波素子と弾性波素子センサ
US8317392B2 (en) 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
WO2017068835A1 (ja) * 2015-10-23 2017-04-27 株式会社村田製作所 弾性波装置
JP2019035613A (ja) * 2017-08-10 2019-03-07 国立研究開発法人物質・材料研究機構 膜型表面応力センサーを用いた水素センサー及び水素検出方法
CN109613647A (zh) * 2019-01-10 2019-04-12 济南晶正电子科技有限公司 一种铌酸锂/氮化硅光波导集成结构及其制备方法

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WO2009078089A1 (ja) * 2007-12-17 2009-06-25 Fujitsu Limited 弾性波素子、通信モジュール、および通信装置
US20130201316A1 (en) 2012-01-09 2013-08-08 May Patents Ltd. System and method for server based control
JPWO2013108608A1 (ja) * 2012-01-20 2015-05-11 パナソニックＩｐマネジメント株式会社 弾性波センサ
CN103529120B (zh) * 2013-10-25 2016-06-01 中国电子科技集团公司第三十八研究所 声表面波传感器复合敏感膜的制备工艺
CN103868818A (zh) * 2014-03-28 2014-06-18 中国电子科技集团公司第二十六研究所 一种三维纳米结构声表面波气敏传感器
US20160109322A1 (en) * 2014-10-20 2016-04-21 HGST Netherlands B.V. Leak detection using acoustic wave transducer
US10261078B2 (en) * 2015-08-17 2019-04-16 National Technology & Engineering Solutions Of Sandia, Llc Shear horizontal surface acoustic wave (SH-SAW) resonators and arrays thereof
US20180348166A1 (en) * 2016-02-29 2018-12-06 Kyocera Corporation Sensor element and sensor device
WO2018057201A1 (en) * 2016-09-20 2018-03-29 Sensor Kinesis Corp. Surface acoustic wave biosensor employing an analog front end and dna encoded libraries to improved limit of detection (lod) with exemplary apparatus of the same
WO2019043446A1 (en) 2017-09-04 2019-03-07 Nng Software Developing And Commercial Llc METHOD AND APPARATUS FOR COLLECTING AND USING SENSOR DATA FROM A VEHICLE
IT201900000418A1 (it) * 2019-01-10 2020-07-10 Consiglio Nazionale Ricerche Dispositivo sensorizzato per l'analisi di un fluido mediante onde acustiche

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JPH055689A (ja) * 1991-06-28 1993-01-14 Meitec Corp 酸素ガスセンサ
JP2003258602A (ja) * 2001-12-28 2003-09-12 Murata Mfg Co Ltd 弾性表面波装置
JP2004340766A (ja) * 2003-05-16 2004-12-02 Hitachi Ltd 化学物質検出装置
JP2005189213A (ja) * 2003-12-26 2005-07-14 Alps Electric Co Ltd 水素センサ
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JP3167053B2 (ja) 1992-12-25 2001-05-14 マルヤス工業株式会社 液体の性質を測定するための弾性表面波装置
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JP2003258602A (ja) * 2001-12-28 2003-09-12 Murata Mfg Co Ltd 弾性表面波装置
JP2004340766A (ja) * 2003-05-16 2004-12-02 Hitachi Ltd 化学物質検出装置
JP2005189213A (ja) * 2003-12-26 2005-07-14 Alps Electric Co Ltd 水素センサ
JP2006220508A (ja) * 2005-02-09 2006-08-24 Shimadzu Corp ガスセンサ

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010041390A1 (ja) * 2008-10-07 2010-04-15 株式会社 村田製作所 弾性波センサ及び弾性波センサを用いた検出方法
JP5423681B2 (ja) * 2008-10-07 2014-02-19 株式会社村田製作所 弾性波センサ及び弾性波センサを用いた検出方法
CN104764802A (zh) * 2008-10-21 2015-07-08 西门子公司 利用具有绝缘层的薄膜谐振器探测物质的装置和方法
WO2010046212A1 (de) * 2008-10-21 2010-04-29 Siemens Aktiengesellschaft Vorrichtung und verfahren zur detektion einer substanz mit hilfe eines dünnfilmresonators (fbar) mit isolationsschicht
US9046464B2 (en) 2008-10-21 2015-06-02 Siemens Aktiengesellschaft Device and method for detecting a substance using a thin film resonator (FBAR) having an insulating layer
US8317392B2 (en) 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
WO2010146923A1 (ja) * 2009-06-18 2010-12-23 株式会社 村田製作所 弾性表面波センサー
WO2011030519A1 (ja) 2009-09-11 2011-03-17 パナソニック株式会社 弾性波素子と弾性波素子センサ
US9160299B2 (en) 2009-09-11 2015-10-13 Panasonic Intellectual Property Management Co., Ltd. Acoustic wave element and acoustic wave element sensor
WO2017068835A1 (ja) * 2015-10-23 2017-04-27 株式会社村田製作所 弾性波装置
US11424731B2 (en) 2015-10-23 2022-08-23 Murata Manufacturing Co., Ltd. Elastic wave device
JP2019035613A (ja) * 2017-08-10 2019-03-07 国立研究開発法人物質・材料研究機構 膜型表面応力センサーを用いた水素センサー及び水素検出方法
CN109613647A (zh) * 2019-01-10 2019-04-12 济南晶正电子科技有限公司 一种铌酸锂/氮化硅光波导集成结构及其制备方法

Also Published As

Publication number Publication date
US20090272193A1 (en) 2009-11-05
JPWO2008102577A1 (ja) 2010-05-27
US8156814B2 (en) 2012-04-17

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