TWI862191B - Test socket - Google Patents

Abstract

The present invention is a test socket, which includes a base with a first surface, and a second surface opposite to the first surface and through holes, a conductive elastic sheet located on the first surface, and the plural elastic metal parts with a first contact terminal toward the conductive elastic sheet. A bump of the elastic metal parts is suitable for inserting into the conductive elastic sheet. By the base is covered by the conductive elastic sheet, it can avoid each elastic metal parts from being susceptible to dirty. In particular, when the elastic metal parts are squeezed and the bump is inserted into the conductive elastic sheet, it is not only a low resistance value, but even better than the resistance value of the elastic metal parts without squeezing. In addition, when the bump is inserted into the conductive elastic sheet, the surface of the first contact terminal can be cleaned and these elastic metal parts contact with the conductive elastic sheet can be more stable.

Description

Test socket

The present invention relates to semiconductor testing technology, particularly a test socket.

In semiconductor package testing, a test socket with multiple probes is usually used to place the object to be tested, such as a semiconductor package or chip. After each probe is electrically connected to the semiconductor package or chip, the test signal is transmitted to the semiconductor package or chip through each probe to achieve the purpose of testing.

As test conditions become increasingly stringent, the signal quality requirements during the test process are becoming increasingly higher. Therefore, the transmission path between the probe and the DUT plays a very important role in the test interface. Therefore, how to shorten the transmission path or improve the contact between the contact interfaces has become one of the issues to be solved in the industry.

As shown in FIG. 1 , it is a schematic diagram of a conventional test socket testing a DUT. As shown in the figure, a test socket 100 includes a base 101 having a plurality of conductive holes 102 and probes 103 disposed in each of the conductive holes 102. The test socket 100 is disposed on a test device 104 to receive a test signal from the test device 104. The test device 104 may be, for example, a printed circuit board (PCB). During the test, the object to be tested 9 having a plurality of conductive blocks 91 (such as solder balls) is placed on the base 101, and force is applied downward to the object to be tested 9, so that the conductive blocks 91 of the object to be tested 9 are in direct electrical contact with the probe head of the probe 103, and the test signal can be transmitted to the object to be tested 9 through each of the probes 103 and each of the conductive blocks 91 to test the object to be tested 9.

However, during the test process, the probe head of the probe 103 is usually a spherical or needle-shaped structure, and the probe 103 of the test socket 100 and the conductive block 91 of the object to be tested 9 are both solid hard metals, so the probe head and the conductive block 91 are connected in a point contact manner. Therefore, there is a problem of poor contact and poor stability between the two, which will lead to the interface (i.e., the probe head) being The contact resistance between the probe tip and the conductive block 91 is higher. As the contact resistance increases, a severe electrothermal effect will occur when the current of the test signal passes through the contact between the probe tip and the conductive block 91. The high temperature generated by the electrothermal effect will affect the elasticity of the probe 103, causing the elasticity of the probe 103 to decrease. After that, the contact between the probe 103 and the object to be tested 9 becomes unstable. deterioration, which eventually leads to a series of vicious cycles. In addition, when the conventional probe 103 is tested, the probe head is driven by the elastic force of the internal spring to push the conductive block 91 of the object to be tested 9, which will cause the probe head to be worn, and metal debris will be generated, resulting in the contamination of the probe head and the increase of the aforementioned contact resistance. It may even cause a short circuit between the conductive block 91 or the probe head, thereby damaging the object to be tested. The object to be tested is 9, so the probe tip must be cleaned with special cleaning items to avoid the aforementioned adverse reactions; and when the probe tip is worn and the probe 103 is damaged, the unusable probe 103 must be replaced, but many probes 103 are arranged in the test socket 100, and it is very difficult and time-consuming to find the damaged one among the many probes 103, which is very inconvenient.

In view of the above problems, how to provide a test socket, especially one that can provide good contact stability between the probe and the object to be tested, and at the same time effectively reduce the contact resistance and avoid the resulting electrothermal effect, will become a goal that people in this technical field are eager to pursue.

In order to solve the above-mentioned problems of the prior art, the present invention discloses a test seat, which includes: a base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; a conductive elastic sheet located above the first surface of the base; and a plurality of elastic metal parts respectively disposed in each of the plurality of through holes, wherein each of the elastic metal parts has a first contact end facing the conductive elastic sheet, and the first contact end includes a bump suitable for being immersed in the conductive elastic sheet.

In one embodiment, the protrusion of each elastic metal piece is suitable for piercing the surface of the conductive elastic sheet to penetrate into the interior of the conductive elastic sheet.

In a specific embodiment, the protrusions of each elastic metal part are plural and pointed.

In another embodiment, the protrusion of each elastic metal part is pressed against the conductive elastic sheet and sunk into the conductive elastic sheet, so that the conductive elastic sheet covers the protrusion.

In another embodiment, each of the elastic metal parts is a spring probe, a vertical probe or a micro-electromechanical probe.

In another embodiment, the conductive elastic sheet is disposed on a frame of the base so as to have a spacing distance between the protrusions of each of the elastic metal parts.

In another embodiment, the length of the bump is greater than or equal to 0.01 millimeters (mm) and less than the thickness of the conductive elastic sheet.

In another embodiment, each of the elastic metal parts further includes an elastic body disposed in each of the through holes, a metal block rotatably disposed on the elastic body and connected to the first contact end, and a second contact end connected to the metal block and extending toward the second surface.

In another embodiment, the base is a metal base, and the conductive elastic sheet includes a plurality of conductive elastic regions corresponding to each of the elastic metal parts and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the width of each of the conductive elastic regions is greater than the aperture of each of the through holes, so that each of the conductive elastic regions contacts the base.

In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 2 mm.

In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.

In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

In another embodiment, the particle size of each conductive particle is greater than or equal to 0.005 mm and less than or equal to 0.1 mm.

In another embodiment, the proportion of the plurality of conductive particles in the conductive elastic sheet is greater than or equal to 30% and less than or equal to 90%.

In another embodiment, another conductive elastic sheet is further included below the second surface of the base.

In another embodiment, the conductive elastic sheet has a first contact surface and a second contact surface opposite to each other, and the conductive elastic sheet is disposed on the base with the first contact surface facing the first surface, and the second contact surface has a plurality of protruding pads protruding from the second contact surface at locations corresponding to each of the elastic metal parts.

In another embodiment, the conductive elastic sheet covers the first surface of the base to seal each of the through holes.

In another embodiment, the base further includes a frame disposed around the conductive elastic sheet and having a fluid inlet and a fluid outlet. The conductive elastic sheet is disposed on the first surface of the base, and the frame and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

In another embodiment, the conductive elastic sheet includes a substrate having a plurality of conductive elastic regions and a plurality of conductive particles distributed in each of the conductive elastic regions, and at least one of the conductive elastic regions corresponds to at least two of the elastic metal parts.

In another embodiment, the present invention further comprises a conductive member, and the conductive elastic sheet comprises a substrate having a plurality of conductive elastic regions respectively corresponding to each of the elastic metal members and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the conductive member electrically connects at least two of the conductive elastic regions.

In another embodiment, the elastic metal part is a ground probe or a power probe.

In another embodiment, a supporting body is provided around the conductive elastic sheet, and the conductive elastic sheet is provided on the base through the supporting body, so that there is a gap between the conductive elastic sheet and the first surface or the second surface, so that the two ends of each of the elastic metal parts can protrude from the first surface and the second surface of the base respectively and contact the conductive elastic sheet.

In another embodiment, when the bump of each elastic metal part pierces the lower surface of the conductive elastic sheet and sinks into the conductive elastic sheet, the distance between the top of the bump and the upper surface of the conductive elastic sheet is less than 0.35 mm, or the distance between the top of the bump and the upper surface of the conductive elastic sheet accounts for less than 85% of the thickness of the conductive elastic sheet.

The present invention further discloses a test stand, comprising: a base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; a plurality of elastic metal parts, respectively disposed in each of the plurality of through holes; and a conductive elastic sheet, located above the base and the plurality of elastic metal parts, and having a thickness of less than or equal to 2 mm.

In one embodiment, the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.

In another embodiment, each of the elastic metal parts has a first contact end facing the conductive elastic sheet, and the first contact end includes a protrusion suitable for piercing the surface of the conductive elastic sheet so that the protrusion can be immersed in the interior of the conductive elastic sheet.

In another embodiment, the bumps are plural and pointed.

In another embodiment, the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.

In another embodiment, the base is a metal base, and the conductive elastic sheet includes a plurality of conductive elastic regions corresponding to each of the elastic metal parts and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the width of each of the conductive elastic regions is greater than the aperture of each of the through holes, so that each of the conductive elastic regions contacts the base.

In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.

In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

In another embodiment, the base further includes a frame disposed around the conductive elastic sheet and having a fluid inlet and a fluid outlet. The conductive elastic sheet is disposed on the first surface of the base to seal each of the through holes, and the frame and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

In another embodiment, a conductive element is further included, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic regions corresponding to each of the elastic metal elements and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the conductive element electrically connects at least two of the conductive elastic regions.

The present invention further discloses a test seat, which includes: a base; a conductive elastic sheet located on the base; and a plurality of elastic metal parts arranged in the base, wherein when the elastic metal parts are immersed in the conductive elastic sheet, the contact resistance between the elastic metal parts and the conductive elastic sheet is less than the contact resistance of the elastic metal parts contacting the conductive block of the device to be tested.

In one embodiment, the base includes a first surface and a second surface opposite to each other and a plurality of through holes connecting the first surface and the second surface, and the first surface is used for the conductive elastic sheet to be set, and each of the through holes is used for the elastic metal parts to be set.

In another embodiment, each of the elastic metal parts has a first contact end facing the conductive elastic sheet, and the first contact end includes a protrusion suitable for being immersed in the conductive elastic sheet.

In another embodiment, the protrusion of each elastic metal piece is suitable for piercing the surface of the conductive elastic sheet to be immersed in the interior of the conductive elastic sheet.

In another embodiment, the protrusions of each elastic metal part are plural and pointed.

In another embodiment, the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.

In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

In another embodiment, the base further includes a frame disposed around the conductive elastic sheet and having a fluid inlet and a fluid outlet, the conductive elastic sheet is disposed on the first surface of the base to seal each of the through holes, and the frame and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

In another embodiment, the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.

As can be seen from the above, the test socket of the present invention achieves the purpose of reducing the contact resistance by making the bump of the first contact end of each elastic metal part sink into the conductive elastic sheet to increase the contact area between the first contact end and the conductive elastic sheet. In addition, when the bump is covered by the conductive elastic sheet, the elastic metal parts are not easy to shake, thus having a stable In addition, when the bump penetrates into the conductive elastic sheet, it can directly contact each conductive particle, so the purpose of quickly reducing the resistance and cleaning the surface of the first contact end can be achieved; in addition, by sealing each through hole with the conductive elastic sheet, it can prevent foreign matter from entering the through hole and causing the problem of contamination of each elastic metal part.

1,1’: Test socket

11,11’: base

111: First surface

112: Second surface

113:Through hole

1311: Bump

114: Frame seat

115,115’: Fluid inlet

116,116’: Fluid outlet

117:Frame

118: Fluid Space

119: Sealing cover

12,12’,12”: Conductive elastic sheet

121: First contact surface

122: Second contact surface

123,123’: Substrate

124: Conductive particles

125: Support body

126: Pad

13,13’: Elastic metal parts

131,131’: First contact end

132,132’: Second contact end

133: Subject

135,135’: Elastic parts

136: Elastic body

137:Metal block

14: Conductive parts

2,2’: Object to be tested

21: Conductive block

22: Conductive pad

4: Test equipment

5: Test wafer

9: Object to be tested

91: Conductive block

100: Test socket

101: Base

102: Conductive hole

103:Probe

104:Testing equipment

A-A: Section line

D: Width

d: aperture

F: Force

G: Gap

H: Spacing distance

L: Length

R: Conductive elastic region

S: Area

T:Thickness

t: distance

Figure 1 is a diagram showing the structure of a test socket for testing an object under test.

Figure 2 is a three-dimensional exploded view of the test stand of the present invention.

Figure 3 is a three-dimensional structural diagram of the test stand of the present invention.

Figure 4 is a cross-sectional view taken along the A-A section line of Figure 3.

Figure 5 is a test diagram of the test seat of the present invention placing the object to be tested.

Figure 6 is a partial enlarged view of area S in Figure 5.

Figure 7 is a schematic diagram of the structure of the conductive elastic sheet with a protruding pad in the test seat of the present invention.

Figure 8 is a schematic diagram of the conductive elastic sheet with a protruding pad in the test socket of the present invention in use.

Figure 9 is a schematic diagram of the structure of the test stand of the present invention having a frame seat.

Figures 10A-10B are schematic diagrams of the structure of the test stand of the present invention having a frame.

Figure 11 is a structural diagram of the test socket of the present invention applied to a wafer.

Figure 12 is a schematic diagram of the test socket of the present invention used for four-end point measurement (Kelvin contact).

Figures 13A-13B are structural diagrams of the test stand of the present invention with conductive components arranged on a conductive elastic sheet.

Figures 14A-14C are structural diagrams of elastic metal parts of different designs of the test stand of the present invention.

Figures 15A-15B are diagrams showing the relationship between the probe of the test socket, the resistance of the conductive block of the object to be tested, and the elastic force of the elastic metal part.

Figures 16A-16B are diagrams showing the relationship between the elastic metal part of the test socket of the present invention, the resistance of the conductive block of the object to be tested, and the elastic force of the elastic metal part.

Figures 17A-17B are respectively the relationship diagrams between the resistance value of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention when the surface is not treated and the elastic force of the elastic metal part.

Figure 18 is a graph showing the resistance changes of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention after multiple tests.

Figures 19A-19B are graphs showing the relationship between the resistance of the probe of the test socket when it is used for the first time and after 300 tests and the elastic force of the elastic metal part.

Figures 20A-20B are respectively the relationship diagrams between the resistance and elasticity of the elastic metal parts of the test socket of the present invention when it is used for the first time and after 300 tests.

Figures 21A-21B are respectively the elastic force and temperature change trend diagrams of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention when a current of 6A is passed through them.

Figures 22A-22C are the elastic force and temperature change trend diagrams of the old and new probes of the conventional test socket and the used elastic metal parts of the test socket of the present invention when a 3A current is passed through them.

The following describes the technical content of the present invention through a specific concrete implementation form. People familiar with this technology can easily understand the advantages and effects of the present invention from the content disclosed in this manual. However, the present invention can also be implemented or applied through other different specific implementation forms.

FIG2 is a three-dimensional exploded view of the test seat of the present invention, FIG3 is a three-dimensional structural view of the test seat of the present invention, and FIG4 is a cross-sectional view of the A-A section line of FIG3. As shown in the figure, the test seat 1 of the present invention includes a base 11, a conductive elastic sheet 12 located above the base 11, and a plurality of elastic metal parts 13 extending toward the conductive elastic sheet 12 and arranged in the base 11. In a specific embodiment, the test seat 1 of the present invention can be a probe seat or a probe card, and can be arranged on a test device 4 so that each of the elastic metal parts 13 receives a test signal from the test device 4, wherein the elastic metal part 13 can be a probe. A detailed description of the test seat 1 of the present invention is as follows.

The base 11 is a base for placing the object to be tested 2 (such as shown in FIG. 5 ). Specifically, the base 11 includes a first surface 111, a second surface 112 opposite to the first surface 111, and a plurality of through holes 113 connecting the first surface 111 and the second surface 112. The base 11 is arranged on a test device 4 that provides a test signal through the second surface 112. Furthermore, the first surface 111 of the base 11 can be used to place the object to be tested 2 such as a semiconductor package, a chip or a wafer. In one embodiment, the base 11 extends from the periphery of the first surface 111 toward the direction of the second surface 112 (such as the bottom shown in FIG. 2 ) to form a side wall. In addition, the base 11 can be a base made of metal material. In a specific embodiment, the base 11 can be a coaxial test base that can be used for high-frequency testing.

The conductive elastic sheet 12 may be a sheet with excellent mechanical properties (such as ductility and toughness), which is located on the first surface 111 of the base 11. Specifically, the conductive elastic sheet 12 includes a first contact surface 121 and a second contact surface 122 opposite to each other, and the conductive elastic sheet 12 may be a soft sheet structure made of a conductive medium. When the conductive medium is squeezed, a conductive path can be formed along the squeezing direction, so that the circuit is conductive up and down, so as to achieve the measurement. In addition, the conductive elastic sheet 12 can be attached to the first surface 111, that is, the conductive elastic sheet 12 can cover the first surface 111 of the base 11 and seal each through hole 113, thereby preventing metal debris, dust or liquid from falling into each through hole 113, not only keeping each through hole 113 and the elastic metal parts 13 therein clean, but also reducing the contact between the elastic metal parts 13 and oxygen, reducing the problem of metal oxidation of the elastic metal parts 13.

In a specific embodiment, as shown in FIGS. 2-4 , the conductive elastic sheet 12 may include a substrate 123 having a plurality of conductive elastic regions R defined corresponding to the plurality of elastic metal parts 13, and a plurality of conductive particles 124 distributed in each of the conductive elastic regions R. Accordingly, the conductive elastic sheet 12 has the conductive particles 124 distributed only in each of the conductive elastic regions R, and the non-conductive elastic regions R in the substrate 123 do not have the conductive particles 124. That is, the conductive elastic sheet 12 has a plurality of conductive elastic bumps formed by the conductive elastic regions R in which the conductive particles are distributed. Therefore, the conductive path is formed only in each conductive elastic region R (or each conductive elastic pad) between the first contact surface 121 and the second contact surface 122 of the conductive elastic sheet 12, which can avoid the short circuit between the conductive paths formed in the adjacent conductive elastic pads, or the problem of the current of a conductive path overflowing to another conductive path.

Each of the elastic metal parts 13 has a first contact end 131 and a second contact end 132 and is disposed in each of the through holes 113. Each of the elastic metal parts 13 can displace its first contact end 131 toward the first surface 111 of the base 11 based on internal elastic force, or move toward the direction inside the through hole 113 under extrusion force. In a specific embodiment, the elastic metal part 13 of the present invention can be, for example, a spring probe, a vertical probe, a micro-electromechanical probe, or other components with elastic extension that can provide a stroke for packaging testing of the object to be tested 2, but is not limited thereto.

In particular, the first contact end 131 of each elastic metal part 13 faces the conductive elastic sheet 12 and includes a bump 1311 suitable for being immersed in the conductive elastic sheet 12. The present invention achieves a lower contact resistance by increasing the contact area between the bump 1311 and the conductive elastic sheet 12. Compared with the first contact end 131 being directly electrically connected to the object to be tested 2, it can provide a better contact resistance. That is, when the bump 1311 of the elastic metal part 13 is immersed in the conductive elastic sheet 12, the contact resistance between the bump 1311 and the conductive elastic sheet 12 can be less than the contact resistance when the first contact end 131 directly contacts the object to be tested 2.

According to experimental verification, when the elastic metal part 13 directly contacts the object to be tested 2, its actual resistance is about 37.7 milliohms (mΩ). In addition, when the conductive elastic sheet 12 of the test seat 1 of the present invention has a thickness of 0.2 mm, after the bump 1311 of the elastic metal part 13 is immersed in the conductive elastic sheet 12, its contact resistance can be 30.4 milliohms (mΩ). It is obvious that the design of the present invention can provide a better test environment.

In addition, there are two types of the protrusion 1311 of the first contact end 131 being suitable for being immersed in the conductive elastic sheet 12. The first type is that after the first contact end 131 squeezes the conductive elastic sheet 12 with the protrusion 1311, the conductive elastic sheet 12 is deformed so that the protrusion 1311 is completely or partially covered by the conductive elastic sheet 12. The second type is that the protrusion 1311 directly pierces the conductive elastic sheet 12 and is embedded in the conductive elastic sheet 12. More specifically, in the first non-embedded type, the bump 1311 of the first contact end 131 does not pierce the surface of the conductive elastic sheet 12, but sinks into the surface of the conductive elastic sheet 12 to achieve the result of being immersed in the conductive elastic sheet 12, that is, the conductive elastic sheet 12 covers all or part of the bump 1311, thereby increasing the elastic metal part 1 3 and the contact area between the conductive elastic sheet 12; in addition, for the second embedded type, the first contact end 131 pierces the surface of the conductive elastic sheet 12 (such as the first contact surface 121 in Figure 4) with the protrusion 1311 and enters the inside of the conductive elastic sheet 12, which can also increase the contact area between the elastic metal part 13 and the conductive elastic sheet 12.

FIG. 5 is a test schematic diagram of the test base of the present invention for placing the object to be tested, and FIG. 6 is a partial enlarged diagram of the area S in FIG. 5 , please refer to FIG. 4 together. As shown in FIG4 , when the first contact surface 121 and the second contact surface 122 of the conductive elastic sheet 12 in the conductive elastic region are not squeezed, the conductive particles 124 may not be electrically connected to each other; as shown in FIGS. 5-6 , when the object 2 to be tested is squeezed by the applied force F, because the conductive elastic sheet 12 is elastic, not only the conductive block 21 of the object 2 to be tested can be sunk into the conductive elastic sheet 12, but also the bump 1311 of the elastic metal part 13 will be sunk into the conductive elastic sheet 12. The conductive block 21 and the bump 1311 are squeezed up and down, and the distance between the conductive particles 124 in the squeezing direction gradually decreases, thereby contacting each other. Contact, that is, a conductive path electrically connected between the first contact surface 121 and the second contact surface 122 is provided in each conductive elastic region R along the squeezed direction. Accordingly, during the test process of the object under test 2, when the current formed by the test signal passes through the conductive path formed in each conductive elastic region R, it will not overflow to the conductive path in other conductive elastic regions R. Even if the conductive blocks 21 of the object under test 2 are dense, or the object under test 2 is miniaturized more and more with the evolution of semiconductor manufacturing process, the purpose of ensuring that the test signal is transmitted in its conductive path can still be achieved, and the conductive paths do not interfere with each other.

In practical application, as shown in FIGS. 4-6 , in the initial state of the test socket 1 of the present invention (as shown in FIG. 4 ), the protrusion 1311 of each elastic metal part 13 is not immersed in the conductive elastic sheet 12 , that is, each elastic metal part 13 and the conductive elastic sheet 12 are in a state of being separated or only in contact with each other. During the test, the base 11 can receive the test signal from the test device 4. Specifically, after the object to be tested 2 having a plurality of conductive blocks 21 (such as solder balls) is placed on the base 11 and the conductive elastic sheet 12, each conductive block 21 is arranged opposite to the corresponding elastic metal piece 13. When the object to be tested 2 is pressed downward against the conductive elastic sheet 12 by the applied force F, the object to be tested 2 and each elastic metal piece 13 press the conductive elastic pad (i.e., the conductive elastic region R where the conductive particles are distributed) of the conductive elastic sheet 12 up and down. At this time, each elastic metal piece 13 is immersed in the conductive elastic sheet 12 with the protrusion 1311, so that the corresponding conductive pad in the conductive elastic sheet 12 is pressed downward. A conductive path is formed between the block 21 and the elastic metal part 13 (as shown in FIG6 ), and accordingly, the corresponding conductive block 21 and the elastic metal part 13 are electrically connected through the conductive path, and the test signal is transmitted to the object under test 2 through the elastic metal part 13, the conductive elastic sheet 12 and the conductive block 21 to test the object under test 2. Since the elastic metal part 13 is immersed in the conductive elastic sheet 12 with the protrusion 1311, a larger contact area can be obtained, which can reduce the contact resistance. Moreover, since the conductive elastic sheet 12 is designed through the conductive elastic pad, the problem of mutual interference between the conductive paths formed in the adjacent conductive elastic pads can be avoided.

Furthermore, after the test is completed and the object to be tested 2 is removed, the conductive elastic sheet 12 is not squeezed by the force F. Since the conductive elastic sheet 12 is elastic, the bump 1311 of the first contact end 131 will be pushed out. During the test, the bump 1311 may cause surface oxidation and increase the contact resistance. Therefore, during the immersion and push-out process, the surface of the bump 1311 and the conductive elastic sheet 12 rub against each other, and the oxidized surface can be removed. This not only ensures the stability of the contact resistance, but also has the effect of cleaning the bump 1311. Therefore, even if the bump 1311 is not electroplated or otherwise treated on the surface, the stability of the contact resistance can still be maintained. In addition, by providing the conductive elastic sheet 12 on the elastic metal part 13, it is possible to prevent the bump 1311 of the elastic metal part 13 from directly pressing against the conductive block 21 of the object to be tested 2 and causing wear. That is, the conductive elastic sheet 12 can provide the bump 1311 with a buffering and protective function, thereby reducing the possibility of damage to the elastic metal part 13. Preferably, when the conductive elastic sheet 12 is damaged, only the conductive elastic sheet 12 needs to be replaced to restore the test performance of the test seat of the present invention. In this way, the procedure of finding the damaged probe from many probes when the probe of the conventional test seat is damaged can be reduced, thereby achieving the purpose of saving time and cost. In addition, even if the conductive elastic sheet 12 is squeezed or pierced by the bump 1311 of the elastic metal part 13 during the test, the conductive elastic sheet 12 has elasticity, so after the bump 1311 is pushed out, it can return to a state where it is not squeezed, or the pierced position can be slightly restored. Therefore, even if the conductive elastic sheet 12 is pierced by the bump 1311, it can still have a good service life.

In particular, the second embedding type (the bump 1311 of the elastic metal part 13 pierces the surface of the conductive elastic sheet 12 and enters the conductive elastic sheet 12) has the following characteristics. First, the first contact end 131 directly contacts the conductive particles 124 in the conductive elastic sheet 12 with the bump 1311, which can achieve the effect of rapid electrical conduction. Moreover, since the bump 1311 is embedded (inserted) into the conductive elastic sheet 12 and contacts more conductive particles 124, the contact resistance can be effectively reduced. Second, each elastic metal part 13 directly contacts the conductive particles 124 with the bump 1311. When the conductive elastic sheet 12 is pierced through, the protrusions 1311 of each elastic metal part 13 are completely covered by the conductive elastic sheet 12 and are not easy to shake. During the test process, the elastic metal part 13 is stable and in contact with the conductive block 21 of the object 2 to be tested. That is, each elastic metal part 13 is not easy to be displaced relative to the conductive block 21 of the object 2 to be tested (i.e., accurately aligned), which can avoid the habit of In the test environment, the contact area between the probe and the object to be tested is small, which may cause displacement and damage to the probe. Third, the bump 1311 of the elastic metal part 13 will be inserted into the conductive elastic sheet 12 during the test, and will be pushed out by the elastic force of the conductive elastic sheet 12 at the end of the test. Therefore, the elastic metal part 13 increases the friction with the conductive elastic sheet 12 during the insertion and removal process. The degree of cleaning will provide a cleaning effect. In particular, the surface of the bump 1311, which is dirty due to oxidation or other aging, will be improved through the friction between the two. Due to the aforementioned cleaning effect, the surface of the bump 1311 is always kept as new. Therefore, the bump 1311 of the elastic metal part 13 does not need additional surface processing maintenance, which can reduce costs.

In one embodiment, the thickness T of the conductive elastic sheet 12 (i.e., the substrate 123) is greater than or equal to 0.15 mm and less than or equal to 2 mm. In short, if the thickness of the conductive elastic sheet 12 is insufficient, it is easy to be pierced. If the thickness of the conductive elastic sheet 12 is too thick, the overall resistance value will increase due to the excessive length of the conduction path. In another embodiment, preferably, 0.150 mm ≤ thickness T ≤ 1.5 mm, and according to experimental results, when the thickness T of the conductive elastic sheet 12 ≤ 0.4 mm, a good conductive effect can be obtained without a significant increase in contact resistance. In addition, the conductive elastic sheet 12 can adjust the contact resistance by adjusting the thickness T and the immersion depth of the elastic metal part 13. For example, when the thickness T of the conductive elastic sheet 12 is increased, the depth of the elastic metal part 13 entering the conductive elastic sheet 12 can be increased to maintain the contact resistance within the required range.

As shown in FIG. 6 , when the bumps 1311 of each elastic metal part 13 penetrate the lower surface of the conductive elastic sheet 12 and sink into the conductive elastic sheet 12, the distance t between the top of the bump 1311 and the upper surface of the conductive elastic sheet 12 can be less than 0.35 mm, or the distance t between the top of the bump 1311 and the upper surface of the conductive elastic sheet 12 is less than 85% of the thickness T of the conductive elastic sheet 12. Thus, even if the thickness of the conductive elastic sheet 12 changes, a good contact resistance can be maintained by adjusting the degree to which the bumps 1311 are embedded in the conductive elastic sheet 12.

In another specific embodiment, the particle size of each conductive particle 124 can be greater than or equal to 0.005 mm and less than or equal to 0.1 mm. That is, if the particle size is too small, there will be too many gaps between the particles and the resistance will be too high. If the particle size is too large, the elastic metal part 13 will be easily worn and the contact area will be reduced. In addition, the percentage of the plurality of conductive particles 124 in the conductive elastic sheet 12 is preferably greater than or equal to 30% and less than or equal to 90%. In other words, if the particle density is too low, the resistance will be higher. If the particle density is too high, it means that the colloid component in the conductive elastic sheet 12 is small and the durability of the conductive elastic sheet 12 will also decrease.

FIG. 7 is a schematic diagram showing the structure of the conductive elastic sheet with a protruding pad in the test socket of the present invention, and FIG. 8 is a schematic diagram showing the use state of the conductive elastic sheet with a protruding pad in the test socket of the present invention. As shown in FIG. 7 , the conductive elastic sheet 12 ″ is disposed on the base 11 with the first contact surface 121 facing the first surface 111, and the second contact surface 122 has a plurality of convex pads 126 protruding from the second contact surface 122 at locations corresponding to each elastic metal part 13. Accordingly, as shown in FIG. 8 , the object to be tested 2 ′ having a plurality of conductive pads 22 can be placed on the conductive elastic sheet 12 ″ through each conductive pad 22 corresponding to each convex pad 126. In addition, in another embodiment, when the conductive pad 22 of the object to be tested is a concave structure (not shown), each convex pad 126 enters the corresponding concave conductive pad 22, thereby forming a conductive path during the testing process of the object to be tested 2 ′.

FIG9 is a schematic diagram of the structure of the test seat of the present invention having a frame. As shown in the figure, in one embodiment, the conductive elastic sheet 12 is arranged on a frame 114 of the base 11, with a spacing H between the protrusions 1311 of each elastic metal part 13, and a gap is maintained with the first surface 111, wherein the conductive elastic sheet 12 can float and move in the vertical direction. Compared with the state in FIG4 where the protrusions 1311 of some elastic metal parts 13 just touch the surface of the conductive elastic sheet 12 or have penetrated into the conductive elastic sheet 12, the protrusions 1311 of the present embodiment are During the test, the conductive elastic sheet 12 will be in contact with the protrusion 1311, and each time the pressure test is performed, the protrusion 1311 will pierce the conductive elastic sheet 12, that is, the protrusion 1311 will not always exist in the conductive elastic sheet 12 when the test is not performed. Moreover, the position where the protrusion 1311 pierces the conductive elastic sheet 12 each time may also be different, and the same area will not be pierced repeatedly. Therefore, this embodiment can also provide the conductive elastic sheet 12 with recovery time, which helps to extend the service life of the conductive elastic sheet 12.

FIG10A and FIG10B are schematic diagrams of the test seat of the present invention having a frame. As shown in FIG10A , the base 11 of the test seat 1 further includes a frame 117 disposed around the substrate 123 of the conductive elastic sheet 12. Specifically, the frame 117 is disposed (for example, glued) on the first surface 111 of the base 11, and the conductive elastic sheet 12 can be surrounded by the frame 117. Specifically, the conductive elastic sheet 12 is disposed on the first surface 111 of the base 11 and seals each through hole 113. A space for fluid to enter is formed between the frame 117 and the upper surface of the substrate 123 of the conductive elastic sheet 12 (i.e., the second contact surface 122 of the conductive elastic sheet 12). That is, when the object to be tested 2 is placed on the conductive elastic sheet 12, a fluid space is formed between the bottom surface of the object to be tested 2 and the second contact surface 122 of the conductive elastic sheet 12. The fluid space 118 is used to introduce non-conductive fluid such as liquid or gas into the fluid space 118 during the test process of the object 2 to dissipate heat of the object 2 to achieve the purpose of cooling the object 2. That is, the frame 117 is provided with a fluid inlet 115 and a fluid outlet 116 connected to the fluid space 118, so that the fluid can enter the fluid space 118.

In addition, as shown in FIG. 10B , a sealing cover 119 having a fluid inlet 115′ and a fluid outlet 116′ may be provided above the frame 117 so that the fluid flows from the fluid inlet 115′ into the fluid space 118 (as indicated by the arrow in the figure) and is discharged from the fluid outlet 116′ to achieve the aforementioned heat dissipation and temperature reduction purposes. In practical applications, the sealing cover 119 may be a part of a heat transfer device of, for example, a semiconductor sorting machine. When the fluid flows into the fluid space 118, the conductive elastic sheet 12 seals each through hole 113, which can prevent the fluid from flowing into each through hole 113. After the test is completed, the fluid can be removed by pumping out the liquid, injecting air flow or other electronic control methods. This can not only clean the fluid space 118, but also prevent metal debris or dust from falling into each through hole 113 during the test and affecting the resistance of each elastic metal part 13. In addition, the conductive elastic sheet 12 can prevent the fluid (such as cooling liquid) from entering the through hole 113 during the test and affecting the high-frequency electrical properties of each elastic metal part 13.

FIG. 11 is a schematic diagram showing the structure of the test base of the present invention applied to a wafer. As shown in the figure, a conductive elastic sheet 12 and a conductive elastic sheet 12' are respectively provided on the first surface 111 and the second surface 112 of the base 11', wherein a supporting body 125 is provided around the substrate 123' of the conductive elastic sheet 12'. The conductive elastic sheet 12' is provided on the base 11' by the supporting body 125, so that the conductive elastic sheet 12' forms a tent-like structure, and there is a gap G between the substrate 123' and the second surface 112, so that the second contact end 132' of each elastic metal part 13' protrudes from the second surface 112 of the base 11' and contacts the conductive elastic sheet 12'. In this embodiment, the elastic metal part 13' can be a vertical probe (Cobra probe). It should be noted that the above description states that the conductive elastic sheet 12' can be disposed on the second surface 112 of the base 11', but this is not limited to the above description. That is, the conductive elastic sheet 12' can be disposed on the first surface 111 of the base 11'. The structural design is similar and will not be described in detail here.

For example, when the test base 1' of the present invention is applied to wafer testing, the test base 1' can be a probe card and is used to test the wafer 5, wherein the test base 1' includes a base 11' having a plurality of through holes, each elastic metal member 13' is disposed in each through hole of the base 11' and includes a first contact end 131' and a second contact end 132' protruding from the upper opening and the lower opening of each through hole, and an elastic member 135' disposed in each through hole and respectively pushing against the first contact end 131' and the second contact end 132', thereby , the test seat 1' can be provided with a conductive elastic sheet 12 on the first surface 111 of the base 11' for the object to be tested 2 to be provided thereon. In addition, the conductive elastic sheet 12' having a support 125 can be provided on the second surface 112 of the base 11' so that the second contact surface of the conductive elastic sheet 12' (facing upward in the figure) will not contact the second surface 112 of the base 11'. During the test, the first contact surface of the conductive elastic sheet 12' (facing downward in the figure) will contact the surface of the test wafer 5 for testing.

FIG12 is a schematic diagram of the test socket of the present invention applied to four-point measurement (Kelvin contact). As shown in FIG12, a conductive elastic region R can be made to correspond to a plurality of elastic metal parts 13' according to the needs. For example, when applied to four-point measurement (Kelvin contact) technology, a conductive elastic region R is made to correspond to two elastic metal parts 13', that is, two elastic metal parts 13' share a conductive elastic region R, so that a conductive block 21 of the object to be tested 2 and a plurality of elastic metal parts 13' are connected through the conductive elastic region R to perform the test procedure.

Figures 13A-13B are structural diagrams of the test socket of the present invention with a conductive component disposed on a conductive elastic sheet. As shown in Figure 13A, the test socket 1 of the present invention further includes a conductive component 14 (the first contact surface 121 is used as an example in the figure) corresponding to at least two elastic metal parts 13 and disposed on the first contact surface 121 or the second contact surface 122 of the conductive elastic sheet 12. The conductive component 14 can be used to electrically connect to each adjacent elastic metal part. Specifically, when the elastic metal part 13 is a ground probe, it can be electrically connected to the adjacent ground probe through the conductive component 14, or when the elastic metal part 13 is a power probe, it can be electrically connected to the adjacent power probe through the conductive component 14. In one embodiment, as shown in the figure, the conductive component 14 is disposed on the first contact surface 121 of the conductive elastic sheet 12; in another embodiment, the conductive component 14 can be further disposed on the second contact surface 122 of the conductive elastic sheet 12, that is, between the elastic metal component 13 and the conductive elastic sheet 12. In this embodiment, since the conductive component 14 is located between the elastic metal component 13 and the conductive elastic sheet 12, a hollow portion (not shown) is provided at a position corresponding to the elastic metal component 13 so that the elastic metal component 13 can contact the conductive elastic sheet 12 through the hollow portion. In addition, as shown in FIG. 13B , the test seat 1 of the present invention further includes another conductive elastic sheet 12 located under the second surface 112 of the base 11 and a conductive member 14 corresponding to at least two elastic metal parts 13 and located on the lower surface of the other conductive elastic sheet 12, wherein the conductive member 14 can be used as a conductive line or grounding. In summary, by providing the conductive member 14 on the conductive elastic sheet 12, a plurality of conductive blocks 21 of the object to be tested 2 are connected or grounded through a conductive line. Furthermore, when providing a high current power signal, it can also be used as a shunt function. In addition, the conductive elastic sheet 12 can strengthen the contact with the first surface 111 or the second surface 112 of the base 11 by increasing the area or position of the conductive elastic region, and can also provide a grounding function.

Furthermore, as shown in FIG. 13B , the base 11 is a metal base, and the width of each conductive elastic region of the conductive elastic sheet 12 is greater than the aperture of each through hole 113, so that each conductive elastic region can contact the base 11, that is, the aperture d of the through hole 113 (as shown by the aperture of the second surface 112) is smaller than the width D of each conductive elastic region R of the conductive elastic sheet 12. In other words, d is smaller than D. Accordingly, each elastic metal part 13 can be electrically connected to the metal base 11 through each conductive elastic pad, thereby improving the grounding probability of each elastic metal part 13. Therefore, the conductive part 14 can also be omitted.

Figures 14A-14C are structural diagrams of elastic metal parts of different designs of the test seat of the present invention. As shown in Figure 14A, the protrusion 1311 of each elastic metal part 13 can be a pointed structure. In one embodiment, the length L of the protrusion 1311 is greater than or equal to 0.01 mm and less than the thickness T of the conductive elastic sheet (as shown in Figure 4). In other words, the protrusion 1311 of the first contact end 131 only needs to be able to pierce the conductive elastic sheet and enter the interior thereof without penetrating the conductive elastic sheet, and its length L is not limited thereto. In other words, the moving stroke of the first contact end 131 of the elastic metal part 13 (or the elastic force that pushes the first contact end 131 to move) can be controlled to allow the protrusion 1311 to penetrate the conductive elastic sheet by at least 0.01 mm during the test, thereby achieving the reduction of the contact resistance between the elastic metal part 13 and the conductive elastic sheet.

As shown in FIG. 14B , in one embodiment, the elastic metal member 13 includes a main body 133 having a tube hole, a first contact end 131 and a second contact end 132 respectively disposed at two ends of the tube hole, and an elastic member 135 (e.g., a spring) disposed in the tube hole and respectively pushing against the first contact end 131 and the second contact end 132. In one embodiment, the first contact end 131 of the elastic metal member 13 of the present invention has a rough or concave-convex surface, which can provide a larger contact area to achieve the purpose of reducing the contact resistance. Specifically, the first contact end 131 has a plurality of bumps 1311. In a specific embodiment, each bump 1311 is a pointed structure. The first contact end 131 as a whole can be a crown structure, so that the elastic metal part 13 can penetrate into the conductive elastic sheet through each pointed structure. Accordingly, after each bump 1311 penetrates into the conductive elastic sheet through the crown-shaped first contact end 131, the conductive particles are gathered (see FIG. 6 ). That is, the conductive electrons can be confined within the range surrounded by the crown structure, so that when the conductive path is formed, the conductive path has a better conductive effect.

As shown in FIG. 14C , in another embodiment, each of the elastic metal parts 13 ′ further includes an elastic body 136 for being disposed in the through hole 113 and a metal block 137 rotatably disposed on the elastic body 136 , the metal block 137 extending toward the first surface 111 of the base 11 to connect to the first contact end 131 ′, and extending toward the second surface 112 of the base 11 to connect to the second contact end 132 ′. In another embodiment, the elastic metal part 13 ′ can be a structure applied to a probe card as shown in FIG. 8 , and its structural description has been described above and will not be repeated.

The following is an experiment to illustrate the effectiveness of the test socket of the present invention. In order to show the difference between the above-mentioned effectiveness of the test socket of the present invention (such as shown in Figures 2-4) and the conventional test socket (such as shown in Figure 1), during the test process, the present invention and the conventional test socket use the same elastic metal parts (such as probes) and are tested in the same experimental environment and conditions. The relevant description is as follows.

15A-15B are relationship diagrams of the probe of the conventional test socket and the resistance of the conductive block of the object to be tested and the elastic force of the elastic metal part, and FIGS. 16A-16B are relationship diagrams of the elastic metal part of the test socket of the present invention and the resistance of the conductive block of the object to be tested and the elastic force of the elastic metal part. As shown in FIG. 15A , the spring force of the probe of the conventional test base is 20.7 gf and the resistance is 43.2 mΩ in the initial use. Then, as shown in FIG. 15B , after a period of use, the spring force of the probe of the conventional test base decreases to 20.4 gf and the resistance increases to 155.6 mΩ. On the contrary, as shown in FIG. 16A , the spring force of the probe (i.e., the elastic metal part) of the test base of the present invention is 21.4 gf and the resistance is 35.1 mΩ in the initial use. Then, as shown in FIG. 16B , after a period of use, the spring force of the probe of the conventional test base decreases to 20.4 gf and the resistance increases to 155.6 mΩ. After the test, the spring force of the probe of the present invention can still be maintained at 21.5gf, and its resistance is further reduced to 33.6 milliohms (mΩ). It is obvious that the same probe can be used in the structure of the present invention to maintain the spring force of the probe. In terms of resistance performance, it can not only ensure that the resistance will not double as in the known test results, but also achieve the effect of reducing the resistance. In addition, from the resistance performance of Figure 16B, it can be seen that in the resistance range of 0.4mm-0.6mm, the line of this embodiment is stable without the unstable phenomenon of jitter change, which can confirm that the present invention can provide good contact stability even at a low stroke.

Furthermore, as shown in FIG15A, the resistance of the conventional test socket can slowly decrease to 50 milliohms (mΩ) as the travel of the probe tip changes, and as shown in FIG15B, after a period of use, it can no longer be reduced to 50 milliohms (mΩ); on the contrary, as shown in FIG16A and FIG16B, the test socket of the present invention and the conductive block of the object to be tested can immediately reduce the resistance to below 50 milliohms (mΩ) after being pressurized, and can still maintain the aforementioned characteristics even after a period of use.

17A-17B are diagrams showing the relationship between the resistance of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention when the surface is not treated and the elastic force of the elastic metal part. The diagram illustrates the performance of the probe tip without surface treatment such as electroplating. It is worth noting that, as shown in FIG17A, the resistance of the probe of the conventional test socket is as high as 2081.5 milliohms (mΩ), while as shown in FIG17B, the probe of the test socket of the present invention (i.e., the elastic metal part) can still be maintained at about 50 milliohms (mΩ), i.e., 48.4 milliohms (mΩ). It can be seen that the probe tip (bump at the first contact end) of the probe (elastic metal part) of the present invention is better than the conventional design without surface treatment, so it helps to reduce manufacturing costs.

FIG18 is a graph showing the resistance variation of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention after multiple tests. FIG19A-19B are graphs showing the relationship between the resistance of the probe of the conventional test socket when it is used for the first time and after 300 tests and the elasticity of the elastic metal part. FIG20A-20B are graphs showing the relationship between the resistance of the elastic metal part of the test socket of the present invention when it is used for the first time and after 300 tests and the elasticity. As shown in Figure 18, the change trend of the resistance of the probe after multiple uses is illustrated. It is known that the resistance of the probe in the test socket increases significantly after several uses, and as can be seen from the figure, its resistance is more unstable. On the contrary, the probe of the test socket of the present invention can maintain the resistance at the best performance level even after multiple tests. That is, even if it is used multiple times, the probe of the present invention can still maintain the resistance performance of a new probe.

Furthermore, as shown in FIG. 19A , the resistance and elasticity of the known probe are normal when used for the first time. As shown in FIG. 19B , after being used 300 times, the resistance of the known probe exceeds 800 milliohms (mΩ) and is no longer usable. On the contrary, as shown in FIG. 20A and FIG. 20B , the probe of the present invention remains close to the initial state even after being used 300 times, and has a good resistance.

21A-21B are respectively diagrams showing the elastic force and temperature change trends of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention when a current of 6A is passed through the elastic metal part. The diagram illustrates the change in probe elasticity and temperature when a continuous current of 6A is passed through the probe. As shown in FIG21A, after a current of 6A is passed through the probe of the conventional test socket, its temperature rises to 101.6℃, which is already over 100℃, and its elasticity drops to nearly 0g. In contrast, as shown in FIG21B, the elasticity of the probe of the test socket of the present invention can be maintained at an elasticity of about 25g, and the temperature is only 61.7℃, which is about 40℃ lower than the temperature of the conventional probe. It can be seen that the test socket of the present invention still has good performance even when used in a large current test environment.

Figures 22A-22C are the elastic force and temperature change trend diagrams of the old and new probes of the conventional test socket and the used elastic metal parts of the test socket of the present invention when a current of 3A is passed through them. Specifically, the resistance value of the conventional probe before use is 37.5 milliohms (mΩ). After a considerable number of test uses, the resistance value of the conventional probe will rise to 171.2 milliohms (mΩ). The present invention uses a probe (i.e., an elastic metal part) that has been used many times, and its resistance value is 37.7 milliohms (mΩ). Based on the above conditions, a current of 3A is passed through it to conduct experiments. As shown in FIG22A, a new probe tip is used for the learning test socket. Even if the learning probe tip is not used, when a current of 3A is applied, the elastic force can be maintained but the temperature reaches 24.6°C. In addition, as shown in FIG22B, a used probe tip is used for the learning test socket. As the number of times or time of use increases, the resistance of the learning probe tip increases to 171.2 milliohms (mΩ). When a current of 3A is applied, not only the elastic force is affected, but more importantly, the temperature increases by more than 80°C, reaching 89. 680℃; on the contrary, as shown in FIG22C, the probe of the test socket of the present invention maintains a resistance of 37.7 milliohms (mΩ) even after being used many times. When a current of 3A is applied, it can still maintain good elastic performance, and the temperature only rises to 25.8℃. Therefore, the probe of the present invention (i.e., the elastic metal part) can still maintain the performance of a new probe under the prior art even after being used many times, which proves that the test socket of the present invention can indeed achieve good performance.

The above embodiments are only illustrative and not intended to limit the present invention. Anyone familiar with this technology may modify and change the above embodiments without violating the spirit and scope of the present invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application attached to the present invention. As long as it does not affect the effect and implementation purpose of the present invention, it should be covered by this public technical content.

1: Test socket

11: Base

111: First surface

112: Second surface

113:Through hole

12: Conductive elastic sheet

13: Elastic metal parts

131: First contact end

1311: Bump

132: Second contact end

4: Test equipment

R: Conductive elastic region

Claims (17)

A test stand includes: a metal base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; a plurality of elastic metal parts, respectively disposed in each of the plurality of through holes and forming a coaxial structure with the metal base; and a conductive elastic sheet, located above the first surface of the metal base and disposed on a frame of the metal base, with a spacing distance between each of the elastic metal parts, and the conductive elastic sheet is suitable for contacting each of the elastic metal parts. The test socket as described in claim 1, wherein the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate. As described in claim 1, the test socket, wherein each of the elastic metal parts has a protrusion, and the protrusion of each of the elastic metal parts is suitable for piercing the surface of the conductive elastic sheet to be immersed in the interior of the conductive elastic sheet. The test socket as described in claim 3, wherein the conductive elastic sheet and the bumps of each elastic metal part have the spacing distance. A test socket as described in claim 1, wherein the elastic metal part is a ground probe and is electrically connected to the metal base. The test socket as described in claim 1 further includes a conductive member, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic regions corresponding to each of the elastic metal members and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the conductive member electrically connects at least two of the conductive elastic regions. The test socket as described in claim 6, wherein the width of each conductive elastic region is greater than the aperture of each through hole, so that each conductive elastic region contacts the metal base. The test seat as described in claim 1, wherein the metal base further includes a frame arranged around the conductive elastic sheet and having a fluid inlet and a fluid outlet, and the frame and the upper side of the conductive elastic sheet define a fluid space connected to the fluid inlet and the fluid outlet and suitable for fluid flow. The test base as described in claim 1 further includes another conductive elastic sheet located below the second surface of the base. A test base includes: a metal base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; a plurality of elastic metal parts, respectively disposed in each of the plurality of through holes, wherein part of the elastic metal parts are signal elastic metal parts and have a distance with the inner side wall of the through hole, and part of the elastic metal parts are grounding elastic metal parts and are electrically connected to the metal base; and a conductive elastic sheet, located above the first surface of the metal base and disposed on a frame of the metal base, with a spacing distance between each of the elastic metal parts, and the conductive elastic sheet is suitable for contacting each of the elastic metal parts. The test socket as described in claim 10, wherein the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate. As described in claim 10, the test socket, wherein each of the elastic metal parts has a protrusion, and the protrusion of each of the elastic metal parts is suitable for piercing the surface of the conductive elastic sheet to be immersed in the interior of the conductive elastic sheet. The test socket as described in claim 12, wherein the conductive elastic sheet and the bumps of each elastic metal part have the spacing distance. The test socket as described in claim 10 further includes a conductive member, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic regions corresponding to each of the elastic metal members and a plurality of conductive particles distributed in each of the conductive elastic regions, wherein the conductive member electrically connects at least two of the conductive elastic regions. As described in claim 14, the width of each conductive elastic region is greater than the diameter of each through hole, so that each conductive elastic region contacts the metal base. The test seat as described in claim 10, wherein the metal base further includes a frame arranged around the conductive elastic sheet and having a fluid inlet and a fluid outlet, and the frame and the upper side of the conductive elastic sheet define a fluid space connected to the fluid inlet and the fluid outlet and suitable for fluid flow. The test base as described in claim 10 further includes another conductive elastic sheet located below the second surface of the base.

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