TWM650398U - Test socket - Google Patents

Abstract

The present creation is a test socket, which includes a base with a first surface, and a second surface opposite to the first surface and through holes, a conductive elastic sheet located on the first surface, and the plural elastic metal parts with a first contact terminal toward the conductive elastic sheet. A bump of the elastic metal parts is suitable for inserting into the conductive elastic sheet. By the base is covered by the conductive elastic sheet, it can avoid each elastic metal parts from being susceptible to dirty. In particular, when the elastic metal parts are squeezed and the bump is inserted into the conductive elastic sheet, it is not only a low resistance value, but even better than the resistance value of the elastic metal parts without squeezing. In addition, when the bump is inserted into the conductive elastic sheet, the surface of the first contact terminal can be cleaned and these elastic metal parts contact with the conductive elastic sheet can be more stable.

Description

Test socket

This work is about semiconductor testing technology, especially a test socket.

In semiconductor packaging testing, a test socket (Socket) with a plurality of probes is usually used for placing an object under test such as a semiconductor package or chip, and then each probe is electrically connected to the semiconductor package or chip to conduct the test. The signal is transmitted to the semiconductor package or chip through each probe for testing purposes.

As the test conditions become increasingly stringent, the requirements for signal quality during the test process are getting higher and higher. Therefore, the transmission path between the probe and the object under test plays a very important role in the test interface. Therefore, how to shorten the The delivery path or improving the contact between contact interfaces has become one of the issues to be solved in the industry.

As shown in Figure 1, it is a schematic diagram of a conventional test socket for testing an object under test. As shown in the figure, the test socket 100 includes a base 101 with a plurality of via holes 102 and probes 103 respectively located in each of the via holes 102. , wherein the test socket 100 is disposed on a test device 104 to receive test signals from the test device 104, where the test device 104 can be, for example, a printed circuit board (PCB). During the test, the object 9 having a plurality of conductive blocks 91 (such as solder balls) is placed on the base 101, and force is applied downwards on the object 9 to make the conductive blocks 91 of the object 9 With direct electrical contact with the probe head of the probe 103, the test signal can be transmitted to the object under test 9 through each probe 103 and each conductive block 91, so that the object under test 9 can be tested.

However, during the test process, the probe head of the probe 103 is often a spherical or needle-shaped structure, and the probe 103 of the test socket 100 and the conductive block 91 of the object under test 9 are both solid hard metal, so this The probe head and the conductive block 91 are connected in a point contact manner. Therefore, there are problems of poor contact and poor stability between the two, which will lead to problems at the interface (i.e., the probe head and the conductive block 91 ). The contact of the conductive block 91) produces a higher contact resistance. As the contact resistance increases, it will cause a serious electrothermal effect when the current of the test signal passes through the contact between the probe head and the conductive block 91, and the electric current The high temperature generated by the thermal effect will affect the elasticity of the probe 103, causing the elasticity of the probe 103 to decrease. After that, the contact between the probe 103 and the object to be measured 9 will become unstable and deteriorate, eventually triggering a series of vicious cycles; In addition, when the conventional probe 103 is tested, the probe head is driven by the elastic force of the internal spring to push against the conductive block 91 of the object under test 9, which will cause the probe head to wear and generate metal debris. This may cause the probe head to become dirty and the aforementioned contact resistance to increase. It may even cause a short circuit between the conductive blocks 91 or the probe heads and damage the object under test 9. Therefore, special cleaning items must be used frequently to clean the probe heads. Clean to avoid the various adverse reactions mentioned above; also, when the probe 103 is damaged due to the wear of the probe head, the unusable probe 103 must be replaced. However, there are many probes 103 in the test socket 100. It is quite difficult and time-consuming to find the damaged one among the many probes 103, which is very inconvenient.

In view of the above problems, how to provide a test socket that can provide good contact stability between the probe and the object under test, and at the same time effectively reduce the contact resistance and avoid the resulting electrothermal effect, will become a current issue. A goal that people in this technical field are eager to pursue.

In order to solve the above-mentioned problems in the prior art, the present invention discloses a test base, which includes: a base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface. ; The conductive elastic piece is located above the first surface of the base; and a plurality of elastic metal parts are respectively provided in each of the plurality of through holes, wherein each elastic metal piece has a first contact end facing the conductive elastic piece , and the first contact end includes a bump suitable for being embedded in the conductive elastic piece.

In one embodiment, the protrusions of each elastic metal component are adapted to pierce the surface of the conductive elastic piece so as to be submerged into the interior of the conductive elastic piece.

In a specific embodiment, each of the elastic metal parts has a plurality of bumps and is pointed.

In another embodiment, the bumps of each elastic metal piece press against the conductive elastic piece and sink into the conductive elastic piece, so that the conductive elastic piece covers the bump.

In another embodiment, each of the elastic metal parts is a spring probe, a vertical probe or a micro-electromechanical probe.

In another embodiment, the conductive elastic piece is disposed on a frame of the base to have a distance from the bumps of each elastic metal part.

In another embodiment, the length of the bump is greater than or equal to 0.01 millimeter (mm) and less than the thickness of the conductive elastic sheet.

In another embodiment, each elastic metal component further includes an elastic body disposed in each through hole, a metal block rotatably disposed on the elastic body and connected to the first contact end, and a metal block connected to the metal. The block is connected to a second contact end extending toward the second surface.

In another embodiment, the base is a metal base body, and the conductive elastic sheet includes a plurality of conductive elastic areas corresponding to each of the elastic metal parts and a plurality of conductive particles distributed in each of the conductive elastic areas, wherein each of The width of the conductive elastic region is larger than the diameter of each through hole, so that each conductive elastic region contacts the base.

In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 2 mm.

In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.

In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

In another embodiment, the particle size of each conductive particle is greater than or equal to 0.005 mm and less than or equal to 0.1 mm.

In another embodiment, the proportion of the plurality of conductive particles in the conductive elastic sheet is greater than or equal to 30% and less than or equal to 90%.

In another embodiment, another conductive elastic piece is included below the second surface of the base.

In another embodiment, the conductive elastic piece has a first contact surface and a second contact surface opposite each other, and the conductive elastic piece is disposed on the base with the first contact surface facing the first surface, and the third contact surface is disposed on the base. The two contact surfaces have a plurality of convex pads protruding from the second contact surface corresponding to each elastic metal component.

In another embodiment, the conductive elastic sheet covers the first surface of the base to seal each through hole.

In another embodiment, the base further includes a frame disposed around the conductive elastic sheet and having a fluid inlet and a fluid outlet, the conductive elastic sheet being disposed on the first surface of the base, and The frame body and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

In another embodiment, the conductive elastic sheet includes a substrate with a plurality of conductive elastic areas and a plurality of conductive particles distributed in each conductive elastic area, and at least one of the conductive elastic areas corresponds to at least two of the elastic metal parts.

In another embodiment, the present invention includes a conductive component, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic areas corresponding to each of the elastic metal components and a plurality of conductive particles distributed in each of the conductive elastic areas. , wherein the conductive member is electrically connected to at least two of the conductive elastic regions.

In another embodiment, the elastic metal component is a ground probe or a power probe.

In another embodiment, a support body is provided on the peripheral side of the conductive elastic piece, and the conductive elastic piece is disposed on the base through the support body, so that the conductive elastic piece is in contact with the first surface or the second surface. There is a gap therebetween so that the two ends of each elastic metal piece can respectively protrude from the first surface and the second surface of the base and contact the conductive elastic piece.

In yet another embodiment, when the bump of each elastic metal piece penetrates the lower surface of the conductive elastic piece and is submerged into the conductive elastic piece, the distance between the top of the bump and the upper surface of the conductive elastic piece is less than 0.35 mm, or the distance between the top of the bump and the upper surface of the conductive elastic sheet accounts for less than 85% of the thickness of the conductive elastic sheet.

The present invention further discloses a test base, which includes: a base having a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; Elastic metal parts are respectively provided in each of the plurality of through holes; and a conductive elastic piece is located above the base and the plurality of elastic metal parts, and has a thickness of less than or equal to 2 mm.

In one embodiment, the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.

In another embodiment, each elastic metal member has a first contact end facing the conductive elastic piece, and the first contact end includes a protrusion adapted to pierce the surface of the conductive elastic piece, so that the protrusion can disappear. into the conductive elastic sheet.

In another embodiment, there are a plurality of bumps and they are pointed.

In another embodiment, the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.

In another embodiment, the base is a metal base body, and the conductive elastic sheet includes a plurality of conductive elastic areas corresponding to each of the elastic metal parts and a plurality of conductive particles distributed in each of the conductive elastic areas, wherein each of The width of the conductive elastic region is larger than the diameter of each through hole, so that each conductive elastic region contacts the base.

In another embodiment, the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm.

In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

In another embodiment, the base further includes a frame disposed around the conductive elastic sheet and having a fluid inlet and a fluid outlet, and the conductive elastic sheet is disposed on the first surface of the base to Each through hole is sealed, and the frame body and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

In another embodiment, it further includes a conductive member, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic areas corresponding to each of the elastic metal members and a plurality of conductive particles distributed in each of the conductive elastic areas, wherein, The conductive component is electrically connected to at least two conductive elastic areas.

This invention further discloses a test base, which includes: a base; a conductive elastic piece located on the base; and a plurality of elastic metal parts located in the base, wherein the elastic metal parts are submerged in the conductive elastic piece. When the elastic metal piece contacts the conductive elastic piece, the contact resistance between the elastic metal piece and the conductive elastic piece is smaller than the contact resistance between the elastic metal piece and the conductive block of the component under test.

In one embodiment, the base includes an opposing first surface and a second surface and a plurality of through holes connecting the first surface and the second surface, and the first surface is used for disposing the conductive elastic sheet, and Each through hole is provided for each elastic metal component.

In another embodiment, each elastic metal member has a first contact end facing the conductive elastic piece, and the first contact end includes a protrusion adapted to be submerged in the conductive elastic piece.

In another embodiment, the bumps of each elastic metal part are adapted to pierce the surface of the conductive elastic piece so as to be submerged into the interior of the conductive elastic piece.

In another embodiment, the bumps of each elastic metal part are plural and are pointed.

In another embodiment, the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic sheet.

In another embodiment, the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate.

In another embodiment, the base further includes a frame disposed around the conductive elastic sheet and having a fluid inlet and a fluid outlet, and the conductive elastic sheet is disposed on the first surface of the base, Each through hole is sealed, and the upper side of the frame body and the conductive elastic sheet forms a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter.

In another embodiment, the thickness of the conductive elastic sheet is less than or equal to 0.4 mm.

It can be seen from the above that the test socket of this invention increases the contact area between the first contact end and the conductive elastic piece by making the bumps of the first contact end of each elastic metal piece sink into the conductive elastic piece, so as to achieve the reduction of For the purpose of contact resistance, and when the bump is covered with the conductive elastic piece, the elastic metal parts can be prevented from shaking easily, thus having the effect of stable contact; in addition, when the bump penetrates into the conductive elastic piece can directly contact the conductive particles, so the resistance value can be quickly reduced and the surface of the first contact end can be cleaned; in addition, the conductive elastic sheet seals the through holes to prevent debris from entering the through holes. hole, causing the elastic metal parts to become dirty.

1,1’: test seat

11,11’: base

111: First surface

112: Second surface

113:Through hole

1311:Bump

114:Frame base

115,115’: Fluid inlet

116,116’: Fluid outlet

117: Frame

118:Fluid space

119:Sealing cover

12, 12’, 12”: conductive elastic sheet

121: First contact surface

122: Second contact surface

123,123’:Substrate

124:Conductive particles

125:Support

126:convex pad

13,13’: Elastic metal parts

131,131’: first contact end

132,132’: Second contact end

133:Subject

135,135’: Elastic part

136:Elastomer

137:Metal block

14: Conductive parts

2,2’: object to be tested

21:Conductive block

22:Conductive pad

4:Test device

5: Test wafer

9:Object to be tested

91:Conductive block

100:Test socket

101:Base

102: Via hole

103:Probe

104:Test equipment

A-A: hatch line

D:Width

d:Aperture

F: Apply force

G: Gap

H: separation distance

L: length

R: Conductive elastic zone

S: area

T:Thickness

t: distance

Figure 1 is a structural diagram of a conventional test stand for testing the object under test.

Figure 2 is a three-dimensional exploded view of the test seat of this creation.

Figure 3 is a three-dimensional structural diagram of the test seat of this creation.

Figure 4 is a cross-sectional view along the line A-A in Figure 3.

Figure 5 is a schematic diagram of the test of placing the object under test on the test socket of this invention.

Figure 6 is a partial enlarged view of area S in Figure 5.

Figure 7 is a schematic structural diagram of the conductive elastic sheet with convex pads in the test socket of this invention.

Figure 8 is a schematic diagram of the use state of the conductive elastic sheet with convex pads in the test socket of this invention.

Figure 9 is a schematic structural diagram of the test base of this invention with a frame base.

Figures 10A-10B are schematic structural diagrams of the test socket of this invention with a frame.

Figure 11 is a structural diagram of the test socket of this invention applied to the wafer.

Figure 12 is a structural diagram of the test socket of this creation used in four-point measurement (Kelvin contact).

Figures 13A-13B are structural diagrams of the test socket of this invention with conductive elements on the conductive elastic sheet.

Figures 14A-14C are structural diagrams of elastic metal parts of different designs of the test seat of this invention.

15A-15B are diagrams showing the relationship between the resistance of the probe of the conventional test socket and the conductive block of the object under test, and the elastic force of the elastic metal part.

Figures 16A-16B are diagrams showing the relationship between the resistance of the elastic metal part of the test seat of the present invention, the conductive block of the object under test, and the elastic force of the elastic metal part.

Figures 17A-17B are respectively diagrams showing the relationship between the resistance value and the elastic force of the elastic metal part of the probe of the conventional test seat and the elastic metal part of the test seat of this invention without surface treatment.

Figure 18 is a diagram of the resistance changes of the probe of the conventional test socket and the elastic metal part of the test socket of this invention after multiple tests.

Figures 19A-19B are respectively diagrams showing the relationship between the resistance value and the elastic force of the elastic metal part of the probe of the conventional test socket after the first use and after 300 tests.

Figures 20A-20B are respectively diagrams showing the relationship between the resistance and elasticity of the elastic metal part of the test seat of this invention after the first use and after 300 tests.

Figures 21A-21B are respectively graphs of the elastic force and temperature change trends of the probe of the conventional test socket and the elastic metal part of the test socket of this invention when a current of 6A is passed therethrough.

Figures 22A-22C are graphs of elasticity and temperature change trends of the old and new probes of the conventional test socket and the used elastic metal parts of the test socket of this invention when a current of 3A is passed through.

The following describes the technical content of this invention through specific implementation forms. Those familiar with this technology can easily understand the advantages and effects of this invention from the content disclosed in this specification. However, this invention can also be implemented or applied through other different specific implementation forms.

Figure 2 is a three-dimensional exploded view of the test seat of this invention. Figure 3 is a three-dimensional structural view of the test seat of this invention. Figure 4 is a cross-sectional view along the A-A section line in Figure 3. As shown in the figure, the test base 1 of this invention includes a base 11, a conductive elastic piece 12 located above the base 11, and a plurality of elastic metal parts 13 extending toward the conductive elastic piece 12 and provided in the base 11. In a specific embodiment, the test seat 1 of the present invention can be a probe seat or a probe card, and can be disposed on the test device 4 so that each elastic metal component 13 receives a test signal from the test device 4, wherein, The elastic metal part 13 can be a probe. Detailed description of the test socket 1 of this creation is as follows.

The base 11 is a base for placing the object 2 (for example, as shown in FIG. 5 ). Specifically, the base 11 includes a first surface 111 , a second surface 112 relative to the first surface 111 and A plurality of through holes 113 connecting the first surface 111 and the second surface 112 are provided on the test device 4 that provides test signals through the second surface 112 . Furthermore, the test object 2 such as a semiconductor package, a chip or a wafer can be placed above the first surface 111 of the base 11. In one embodiment, the base 11 faces from the peripheral side of the first surface 111. The second surface 112 extends in a direction (downward as shown in FIG. 2 ) to form a side wall. In addition, the base 11 can be a base made of metal material. In a specific embodiment, the base 11 can be a coaxial test base, which can be used for high-frequency testing.

The conductive elastic sheet 12 can be a thin sheet with excellent mechanical properties (such as ductility and toughness), which is located on the first surface 111 of the base 11 . Specifically, the conductive elastic sheet 12 includes an opposite first contact surface 121 and the second contact surface 122, and the conductive elastic sheet 12 can be a soft sheet structure made of conductive medium. When the conductive medium is extruded, it can form a conductive path along the extrusion direction, so that the circuit Up and down conductivity is achieved for testing purposes; in addition, the conductive elastic sheet 12 can be attached to the first surface 111, that is, the conductive elastic sheet 12 can cover the first surface 111 of the base 11 to seal each through hole. 113. According to this, metal debris, dust or liquid can be prevented from falling into each through hole 113, which not only keeps each through hole 113 and the elastic metal part 13 in it clean, but also reduces the contact between the elastic metal part 13 and oxygen. Reduce the problem of metal oxidation of the elastic metal part 13.

In a specific embodiment, as shown in Figures 2-4, the conductive elastic sheet 12 may include a substrate 123 defined with a plurality of conductive elastic regions R corresponding to a plurality of elastic metal parts 13, and distributed in each of the conductive elastic regions R. A plurality of conductive particles 124, accordingly, the conductive elastic sheet 12 only has conductive particles 124 distributed in each conductive elastic region R, and the area of the non-conductive elastic region R in the substrate 123 does not have conductive particles 124, that is, the conductive elasticity The sheet 12 has a plurality of conductive elastic pads (Bump Pads) formed by conductive elastic regions R distributed with conductive particles. Therefore, there is only a distance between the first contact surface 121 and the second contact surface 122 of the conductive elastic sheet 12. Forming a conductive path in each conductive elastic area R (or each conductive elastic pad) can avoid the phenomenon of short circuit between the conductive paths formed in adjacent conductive elastic pads, or the current of the conductive path from overflowing to another conductive path. Path problem.

Each of the elastic metal parts 13 has a first contact end 131 and a second contact end 132 and is disposed in each of the through holes 113. Each elastic metal part 13 can make its first contact end 131 toward the base 11 based on internal elastic force. The first surface 111 is displaced in the direction, or is moved toward the direction in the through hole 113 by the extrusion force. In a specific embodiment, the elastic metal component 13 of the present invention can be, for example, a spring probe, Probes such as vertical probes or micro-electromechanical probes or other components that have elastic extension and can provide travel for packaging and testing the object under test 2, but are not limited to this.

In particular, the first contact end 131 of each elastic metal piece 13 faces the conductive elastic piece 12 and includes a bump 1311 suitable for being embedded in the conductive elastic piece 12. This invention increases the distance between the bump 1311 and the conductive elastic piece 12. The contact area can achieve a lower contact resistance. Compared with the first contact end 131 being directly electrically connected to the object under test 2, it can provide a better contact resistance, that is, the bump on the elastic metal member 13 When 1311 is inserted into the conductive elastic piece 12, the contact resistance between the bump 1311 and the conductive elastic piece 12 can be smaller than the contact resistance when the first contact end 131 directly contacts the object 2 to be measured.

It has been experimentally verified that if the elastic metal piece 13 is directly in contact with the object 2 under test, its actual resistance value is about 37.7 milliohms (mΩ). In addition, if the conductive elastic piece 12 of the test seat 1 of this invention is made with a thickness of 0.2 mm At this time, after the bump 1311 of the elastic metal part 13 is submerged into the conductive elastic piece 12, its contact resistance can be 30.4 milliohms (mΩ). It is obvious that the design of this invention can provide a better testing environment.

In addition, the bump 1311 of the first contact end 131 is suitable for being embedded in the conductive elastic piece 12, including two types. The first type is that after the first contact end 131 squeezes the conductive elastic piece 12 with the bump 1311, because the conductive elastic piece 12 is deformed so that all or part of the bumps 1311 are covered by the conductive elastic sheet 12 . The second method is that the bumps 1311 directly penetrate the conductive elastic sheet 12 and are embedded in the conductive elastic sheet 12 . More specifically, for the first non-embedded type, the bump 1311 of the first contact end 131 is embedded in the conductive elastic sheet 12 by sinking into the surface of the conductive elastic sheet 12 without penetrating the surface of the conductive elastic sheet 12 . The internal result is that the conductive elastic sheet 12 covers all or part of the bump 1311, thereby increasing the contact area between the elastic metal piece 13 and the conductive elastic sheet 12; in addition, for the second embedded type state, so that the first contact end 131 pierces the surface of the conductive elastic sheet 12 with the bump 1311 (as shown in Figure 4 The first contact surface 121) enters the inside of the conductive elastic piece 12, which can also increase the contact area between the elastic metal piece 13 and the conductive elastic piece 12.

Figure 5 is a schematic diagram of the testing of the object under test on the test socket of this invention, and Figure 6 is a partial enlarged view of the area S in Figure 5. Please refer to Figure 4 as well. As shown in Figure 4, when the first contact surface 121 and the second contact surface 122 of the conductive elastic sheet 12 in the conductive elastic region are not squeezed, the conductive particles 124 do not need to be electrically connected to each other; Figure 5-6 As shown, when the object 2 is squeezed by the force F, because the conductive elastic piece 12 is elastic, not only the conductive block 21 of the object 2 can sink into the conductive elastic piece 12, but also the bumps 1311 of the elastic metal member 13 can also sink into the conductive elastic piece 12. will be submerged into the conductive elastic piece 12, and the conductive block 21 and the bump 1311 are squeezed up and down. The distance between the conductive particles 124 in the extrusion direction gradually becomes smaller, and then contacts each other, that is, the middle edge of each conductive elastic region R is squeezed. The pressing direction provides a conductive path for electrical connection between the first contact surface 121 and the second contact surface 122. Accordingly, during the testing process of the object under test 2, the current formed by the test signal passes through each conductive elastic region R. When the conductive path is formed, it will not overflow to the conductive paths in other conductive elastic regions R. Even if the conductive blocks 21 of the object under test 2 are densely packed, or the object under test 2 becomes more miniaturized as the semiconductor process evolves, this can still be ensured. The purpose of transmitting the test signal in its conductive path is to ensure that the conductive paths do not interfere with each other.

In practical applications, as shown in Figures 4-6, in the initial state of the test seat 1 of the present invention (as shown in Figure 4), the bumps 1311 of each elastic metal part 13 are not submerged in the conductive elastic piece 12. , that is, each elastic metal piece 13 and the conductive elastic piece 12 are in a state of being separated or only in contact with each other. During testing, the base 11 can receive test signals from the test device 4. Specifically, after the object 2 having a plurality of conductive blocks 21 (such as solder balls) is placed on the base 11 and the conductive elastic sheet 12, each The conductive block 21 is arranged opposite to the corresponding elastic metal piece 13. When the object 2 is pressed downward against the conductive elastic piece 12 by the force F, the object 2 and each elastic metal piece 13 press the conductive elastic piece 12 up and down. Conductive elasticity pad (i.e., the conductive elastic area R in which conductive particles are distributed). At this time, each elastic metal piece 13 is embedded into the conductive elastic piece 12 with a bump 1311, so that the corresponding conductive block 21 in the conductive elastic piece 12 is in contact with the elastic metal piece. A conductive path is formed between 13 (as shown in Figure 6). Accordingly, the corresponding conductive block 21 and the elastic metal piece 13 are electrically connected through the conductive path. The test signal passes through the elastic metal piece 13, the conductive elastic piece 12 and the conductive elastic piece 12. The block 21 is transferred to the object under test 2 for testing the object under test 2. Since the elastic metal member 13 is embedded into the conductive elastic piece 12 with the bumps 1311, a larger contact area can be obtained and the contact resistance can be reduced, and Due to the design of the conductive elastic sheet 12 passing through the conductive elastic pad, the problem of mutual interference of the conductive paths formed in the adjacent conductive elastic pads can be avoided.

In addition, after the test is completed, after the object 2 is removed, the conductive elastic piece 12 is not squeezed by the force F. Since the conductive elastic piece 12 has elasticity, it will push out the bump 1311 of the first contact end 131, where, During the testing process, the bump 1311 may cause surface oxidation and increase the contact resistance. Therefore, during the insertion and push-out process, the surface of the bump 1311 and the conductive elastic sheet 12 rub against each other, which can remove the oxidized surface. It not only ensures the stability of the contact resistance, but also has the effect of cleaning the bumps 1311. Therefore, even if the bumps 1311 are not electroplated or otherwise surface treated, the stability of the contact resistance can still be maintained. In addition, arranging the conductive elastic piece 12 on the elastic metal piece 13 can prevent the bumps 1311 of the elastic metal piece 13 from directly pressing against the conductive block 21 of the object to be tested 2 and causing wear. That is, the conductive elastic piece 12 will not be worn again. The bumps 1311 can provide buffering and protection functions to reduce the possibility of damage to the elastic metal piece 13. Better yet, when the conductive elastic piece 12 is damaged, only the conductive elastic piece 12 needs to be replaced to resume testing of the test socket of the invention. In this way, the conventional test socket can reduce the need to search for the damaged probe from many probes when the probe is damaged, thereby saving time and cost. In addition, even if the conductive elastic piece 12 is squeezed or penetrated by the bumps 1311 of the elastic metal member 13 during the test, because the conductive elastic piece 12 has elasticity, it can return to the non-squeezed position after the bumps 1311 are pushed out. Pressed Therefore, even if the conductive elastic piece 12 is penetrated by the bump 1311, it can still have a good service life.

In particular, the second embedding type mentioned above (the bumps 1311 of the elastic metal member 13 penetrate the surface of the conductive elastic sheet 12 and enter the inside of the conductive elastic sheet 12) will have the following characteristics. First, the first contact end 131 uses the bumps 1311 to make direct electrical contact with the conductive particles 124 in the conductive elastic sheet 12, which can achieve the effect of rapid electrical conduction, and because the bumps 1311 are embedded (inserted) into the conductive elastic sheet 12 Contact with more conductive particles 124 can effectively reduce the contact resistance; secondly, when each elastic metal piece 13 pierces the surface of the conductive elastic piece 12 with the bump 1311, it is inserted into the conductive elastic piece 12, so that each elastic metal piece 13 is inserted into the conductive elastic piece 12. The bumps 1311 of the elastic metal parts 13 are completely covered by the conductive elastic sheet 12 and are not easy to shake. During the test process, they will have the effect of maintaining stability and stable contact. That is, each elastic metal part 13 is not easy to move relative to the conductive block 21 of the object under test 2. Producing displacement (that is, accurate alignment) can avoid the situation that the contact area between the probe and the object under test is small due to the displacement and damage to the probe in the conventional testing environment; thirdly, the bump 1311 of the elastic metal part 13 During the test, it will be inserted into the conductive elastic piece 12 and pushed out by the elastic force of the conductive elastic piece 12 at the end of the test. Therefore, the elastic metal piece 13 increases the degree of friction with the conductive elastic piece 12 during the insertion and removal process, and will be able to Provides a cleaning effect. In particular, the uncleanness of the surface of the bump 1311 caused by oxidation or other aging will be improved through the friction between the two, and due to the aforementioned cleaning effect, the surface of the bump 1311 can be maintained as it is at all times. It is new, so the bumps 1311 of the elastic metal part 13 do not need additional surface processing and maintenance, and the cost can be reduced.

In one embodiment, the thickness T of the conductive elastic sheet 12 (ie, the substrate 123) is greater than or equal to 0.15 millimeters (mm) and less than or equal to 2 mm. In short, if the thickness of the conductive elastic sheet 12 is insufficient, it may be easily punctured. , if the thickness of the conductive elastic sheet 12 is too thick, the conductive path will be too long, causing the overall resistance to increase. In another embodiment, preferably, 0.150 mm≦thickness T≦1.5 mm, and According to the experimental results, when the thickness T of the conductive elastic sheet 12 is ≦0.4 mm, good conductive effect can be obtained without a significant increase in the contact resistance. In addition, the contact resistance of the conductive elastic sheet 12 can be adjusted by adjusting the thickness T and the penetration depth of the elastic metal member 13. For example, when the thickness T of the conductive elastic sheet 12 is increased, the penetration depth of the elastic metal member 13 can be increased. The depth of the conductive elastic sheet 12 maintains the contact resistance within a required range.

As shown in FIG. 6 , when the bumps 1311 of each elastic metal member 13 penetrate the lower surface of the conductive elastic piece 12 and sink into the conductive elastic piece 12 , the distance between the top of the bump 1311 and the upper surface of the conductive elastic piece is The distance t can be less than 0.35 mm, or the distance t between the top of the bump 1311 and the upper surface of the conductive elastic sheet 12 accounts for less than 85% of the thickness T of the conductive elastic sheet 12. Accordingly, even if it is conductive Even if the thickness of the elastic piece 12 changes, good contact resistance can still be maintained by adjusting the degree of the bumps 1311 embedded in the conductive elastic piece 12 .

In another specific embodiment, the particle size of each conductive particle 124 can be greater than or equal to 0.005 mm and less than or equal to 0.1 mm. That is, if the particle size is too small, there will be too many gaps between the particles, and the resistance will decrease. If the particle size is too high, the elastic metal piece 13 will be easily worn and the contact area will be reduced; in addition, the percentage of the plurality of conductive particles 124 in the conductive elastic piece 12 is preferably greater than or equal to 30 % and less than or equal to 90%. In other words, if the particle density is too low, the resistance value will be high. If the particle density is too high, it means there is less colloid content in the conductive elastic sheet 12 and the durability of the conductive elastic sheet 12 will also decrease.

Figure 7 is a schematic diagram of the structure of the conductive elastic piece with protruding pads in the test socket of this invention. Figure 8 is a schematic diagram of the use state of the conductive elastic piece in the test socket of this invention with protruding pads. As shown in FIG. 7 , the conductive elastic sheet 12 ″ is disposed on the base 11 with the first contact surface 121 facing the first surface 111 , and the second contact surface 122 has a protruding second contact surface corresponding to each elastic metal member 13 . Plural of contact surface 122 The convex pads 126, as shown in Figure 8, allow the object 2' having a plurality of conductive pads 22 to be placed on the conductive elastic sheet 12" through each conductive pad 22 corresponding to each convex pad 126. In addition, In another embodiment, when the conductive pad 22 of the object under test has a recessed structure (not shown in the figure), each convex pad 126 enters the corresponding recessed conductive pad 22, and the object under test 2' Conductive paths are formed during testing.

Figure 9 is a schematic structural diagram of the test seat of this invention with a frame base. As shown in the figure, in one embodiment, the conductive elastic piece 12 is disposed on a frame 114 of the base 11 to have a distance H between it and the bumps 1311 of each elastic metal part 13, and also between it and the first The surface 111 maintains a gap, in which the conductive elastic piece 12 can float and move in the vertical direction. Compared with the bumps 1311 of some elastic metal parts 13 in Figure 4, they just contact the surface of the conductive elastic piece 12 or have penetrated into the surface. In the state inside the conductive elastic piece 12, each bump 1311 in this embodiment will only come into contact with the conductive elastic piece 12 during testing, and only when a pressure test is performed, the bumps 1311 will penetrate into the conductive elastic piece 12. , that is, the bump 1311 will not always exist in the conductive elastic sheet 12 without testing. Furthermore, the position of the bump 1311 piercing the conductive elastic sheet 12 may also be different each time and will not be repeated. The same area is punctured, so this embodiment can also provide the recovery time of the conductive elastic sheet 12, which helps to extend the service life of the conductive elastic sheet 12.

Figures 10A and 10B are structural schematic diagrams of the test seat with a frame of this invention. As shown in Figure 10A, the base 11 of the test seat 1 further includes a frame 117 located on the peripheral side of the substrate 123 of the conductive elastic sheet 12. Specifically, the frame 117 is located on (for example, fixed with glue) the base. On the first surface 111 of 11 , the conductive elastic piece 12 can be surrounded by the frame 117 . Specifically, the conductive elastic sheet 12 is disposed on the first surface 111 of the base 11 and seals each through hole 113. The frame 117 and the upper surface of the substrate 123 of the conductive elastic sheet 12 (ie, the third surface of the conductive elastic sheet 12 A space for fluid to enter is formed between the two contact surfaces 122), that is, when the object 2 is placed above the conductive elastic sheet 12, the bottom surface of the object 2 is in contact with the second contact surface of the conductive elastic sheet 12. A fluid space 118 is formed between the contact surfaces 122 so that non-conductive fluids such as liquid or gas can be introduced into the fluid space 118 during the testing of the object under test 2, and the fluid flows in the fluid space 118 (as shown by the arrows in the figure) , and dissipate heat of the object 2 to achieve the purpose of cooling the object 2, that is, by opening the fluid inlet 115 and the fluid outlet 116 in the frame 117 that are connected to the fluid space 118, so that the fluid can enter Fluid space118.

In addition, as shown in FIG. 10B , a sealing cover 119 having a fluid inlet 115 ′ and a fluid outlet 116 ′ can also be provided above the frame 117 so that the fluid flows from the fluid inlet 115 ′ into the fluid space 118 (such as (indicated by arrows in the figure), and is led out from the fluid outlet 116' to achieve the aforementioned heat dissipation and cooling purposes. In practical applications, the sealing cover 119 can be a part of the heat conduction device of a semiconductor sorter, for example. When the fluid flows into the fluid space 118, since the conductive elastic sheet 12 seals each through hole 113, the fluid can be prevented from flowing into each through hole 113. After the test is completed, it only needs to be pumped out of the liquid, injected with air flow or other electronic control methods. Removing the fluid can not only clean the fluid space 118, but also prevent metal debris or dust from falling into each through hole 113 during the test and affecting the resistance of each elastic metal component 13. In addition, the conductive elastic piece 12 can This prevents fluid (such as cooling liquid) from entering the through holes 113 during testing and affecting the high-frequency electrical properties of each elastic metal component 13 .

Figure 11 is a structural diagram of the test socket of this invention applied to the wafer. As shown in the figure, a conductive elastic piece 12 and a conductive elastic piece 12' are respectively provided on the first surface 111 and the second surface 112 of the base 11', wherein the conductive elastic piece 12' is provided with a conductive elastic piece 12' on the peripheral side of the substrate 123'. Support body 125, the conductive elastic sheet 12' is disposed on the base 11' by the support body 125, so that the conductive elastic sheet 12' forms a tent-like structure, and there is a gap between the base plate 123' and the second surface 112 G, for the second contact end 132' of each elastic metal component 13' to protrude from the second surface 112 of the base 11' and contact the conductive elastic piece 12'. In this embodiment, the elastic metal component 13 'Can be a vertical probe (Cobra probe). Need further explanation Furthermore, the above description shows that the conductive elastic sheet 12' can be disposed on the second surface 112 of the base 11', but is not limited thereto. That is, the conductive elastic sheet 12' can be disposed on the second surface 112 of the base 11'. The structural design at the end of surface 111 is similar and will not be described again here.

For example, when the test socket 1' of the present invention is used for wafer testing, the test socket 1' can be a probe card and used to test the wafer 5, where the test socket 1' includes a base 11 with a plurality of through holes. ', each elastic metal piece 13' is provided in each through hole of the base 11' and includes a first contact end 131' and a second contact end 132' protruding from the upper opening and the lower opening of each through hole, and a The elastic member 135' is in each of the through holes and pushes against the first contact end 131' and the second contact end 132' respectively, whereby the test socket 1' can dispose the conductive elastic piece 12 on the base 11' on the first surface 111 of the base 11' for the object to be tested 2 to be placed thereon. In addition, the conductive elastic sheet 12' having the support 125 can be disposed on the second surface 112 of the base 11' so that the conductive elastic sheet The second contact surface of 12' (the one facing upward in the figure) will not contact the second surface 112 of the base 11'. During the test, the first contact surface of the conductive elastic piece 12' (the one facing downward in the figure) will The surface of the test wafer 5 is contacted for testing.

Figure 12 is a structural diagram of the test socket of this creation applied to four-end point measurement (Kelvin contact). As shown in Figure 12, a conductive elastic region R can be made to correspond to a plurality of elastic metal parts 13' according to requirements. For example, when applying the four-point measurement (Kelvin contact) technology, a conductive elastic region R can be made to correspond to two elastic metal parts. Component 13', that is, two elastic metal components 13' share a conductive elastic area R, which is used for connecting one of the conductive blocks 21 of the object under test 2 and the plurality of elastic metal components 13' through the conductive elastic area R to perform the test procedure. .

Figures 13A-13B are structural diagrams of the test socket of this invention with conductive elements on the conductive elastic sheet. As shown in FIG. 13A , the test seat 1 of the present invention further includes a conductive member 14 corresponding to at least two elastic metal members 13 and located on the first contact surface 121 or the second contact surface 122 of the conductive elastic piece 12 (in the figure, The first contact surface 121 (for example), the conductive member 14 can be used to electrically connect the adjacent elastic metal parts. Specifically, when the elastic metal member 13 is a ground probe, the conductive member 14 can be used to electrically connect the adjacent elastic metal parts. The ground probe, or when the elastic metal member 13 is a power probe, can be electrically connected to the adjacent power probe through the conductive member 14. In one embodiment, as shown in the figure, the conductive member 14 is configured on the first contact surface 121 of the conductive elastic piece 12; in another embodiment, the conductive element 14 can be disposed on the second contact surface 122 of the conductive elastic piece 12, that is, on the elastic metal piece 13 and the conductive elastic piece 12 and in this embodiment, because the conductive member 14 is located between the elastic metal member 13 and the conductive elastic piece 12, there is a hollow portion (not shown) at the corresponding position of the elastic metal member 13 for the elastic metal member 13 to It is in contact with the conductive elastic sheet 12 through the hollow part. In addition, as shown in FIG. 13B , the test seat 1 of the present invention further includes another conductive elastic piece 12 located under the second surface 112 of the base 11 and corresponding to at least two elastic metal parts 13 and located between the other conductive elastic piece 12 The conductive member 14 is on the lower surface, and the conductive member 14 can be used as a conductive line or ground. In summary, by arranging the conductive member 14 on the conductive elastic sheet 12, the plurality of conductive blocks 21 of the object under test 2 are connected through conductive lines or grounded together. Furthermore, when providing a high-current power signal, Accordingly, it functions as a shunt. In addition, the conductive elastic piece 12 can strengthen the contact with the first surface 111 or the second surface 112 of the base 11 by increasing the area or position of the conductive elastic zone, and can also provide a grounding function. .

Furthermore, as shown in FIG. 13B , the base 11 is a metal base, and the width of each conductive elastic area of the conductive elastic sheet 12 is larger than the diameter of each through hole 113 , so that each conductive elastic area can contact the base 11 , that is, the aperture d of the through hole 113 (as shown by the aperture of the second surface 112) is smaller than the width D of each conductive elastic region R of the conductive elastic sheet 12. In other words, d is smaller than D. Accordingly, each elastic force The metal parts 13 can be electrically connected to the metal base 11 through the conductive elastic pads, thereby improving the grounding probability of each elastic metal part 13. Therefore, the conductive parts 14 can also be omitted.

Figures 14A-14C are structural diagrams of elastic metal parts of different designs of the test seat of this invention. As shown in FIG. 14A , the bumps 1311 of each elastic metal member 13 may have a pointed structure. In one embodiment, the length L of the bumps 1311 is greater than or equal to 0.01 mm and less than the thickness T of the conductive elastic sheet (such as As shown in Figure 4). In other words, the bump 1311 of the first contact end 131 only needs to be able to penetrate the conductive elastic piece and enter its interior without penetrating the conductive elastic piece. Its length L is not limited to this, that is, it can be By controlling the moving stroke of the first contact end 131 of the elastic metal piece 13 (or the elastic force that pushes the first contact end 131 to move), the bump 1311 penetrates the conductive elastic piece by at least 0.01 mm during the test, thereby reducing the The contact resistance between the elastic metal piece 13 and the conductive elastic piece.

As shown in FIG. 14B , in one embodiment, the elastic metal member 13 includes a main body 133 with a tube hole, a first contact end 131 and a second contact end 132 respectively provided at two ends of the tube hole, and a second contact end located at the two ends of the tube hole. The elastic member 135 (such as a spring) is inside and pushes against the first contact end 131 and the second contact end 132 respectively. In one embodiment, the first contact end 131 of the elastic metal member 13 of the present invention has a rough or concave-convex surface, which can provide a larger contact area to achieve the purpose of reducing the contact resistance. Specifically, the first contact end 131 has a plurality of bumps 1311. In a specific embodiment, each bump 1311 has a pointed structure, and the first contact end 131 as a whole can have a crown structure, so that the elastic metal member 13 can be Each pointed structure is pierced into the conductive elastic sheet. Accordingly, after the first contact end 131 with a crown is penetrated into the conductive elastic sheet with each bump 1311, it has the effect of gathering conductive particles (please refer to Figure 6). That is, the conductive electrons can be limited to the range surrounded by the crown structure, so that when forming the conductive path, the conductive path can have a better conductive effect.

As shown in Figure 14C, in another embodiment, each elastic metal component 13' further includes an elastic body 136 disposed in the through hole 113 and a metal block 137 rotatably disposed on the elastic body 136. The metal block 137 extends toward the first surface 111 of the base 11 to connect the first contact end 131', And extends toward the second surface 112 of the base 11 to connect the second contact end 132'. In another embodiment, the elastic metal member 13' can be a structure applied to a probe card as shown in Figure 8. The structure description has been as described above and will not be described again.

Subsequent experiments will be used to illustrate the efficacy of the test socket of this creation. In order to show the difference in the aforementioned efficacy of the test socket of this creation (for example, as shown in Figure 2-4) compared with the conventional test socket (as shown in Figure 1), during the test process , this creation uses the same type of elastic metal parts (such as probes) as the conventional test seat, and is tested in the same experimental environment and conditions. The relevant instructions are as follows.

Figures 15A-15B are diagrams showing the relationship between the resistance of the probe of the conventional test seat and the conductive block of the object under test and the elastic force of the elastic metal component. Figures 16A-16B are the relationship between the elastic metal component and the object under test of the test seat of this invention. The relationship between the resistance of the conductive block and the elastic force of the elastic metal part. As shown in Figure 15A, the probe of the conventional test socket has an elastic force of 20.7 grams of force (gf) and a resistance of 43.2 milliohms (mΩ) in the initial stage of use. Then, as shown in Figure 15B, after a period of time, After use, the elastic force of the probe of the conventional test socket dropped to 20.4gf, and the resistance increased to 155.6 milliohms (mΩ); conversely, as shown in Figure 16A, the probe of the test socket of the present invention (i.e. elastic metal (piece) at the initial stage of use, its elastic force is 21.4gf and its resistance is 35.1 milliohms (mΩ). Then, as shown in Figure 16B, after a period of use, the elastic force of the probe of this invention can still be maintained at 21.5gf. , and its resistance value is further reduced to 33.6 milliohms (mΩ). It is obvious that the same probe is used in the structure of this invention, which can maintain the elasticity of the probe. In terms of resistance performance, in addition to ensuring that the resistance value is not as usual It is known that the test results will not only be doubled, but also the resistance value can be reduced. In addition, from the resistance value performance in Figure 16B, it can be seen that at the resistance value of the stroke 0.4mm-0.6mm, the line of this embodiment is stable without jitter changes. Unstable phenomenon also confirms that this creation can provide good contact stability even at low strokes.

Furthermore, it can be seen from Figure 15A that the resistance of the conventional test socket slowly decreases to 50 milliohms (mΩ) as the stroke of the probe head changes. As shown in Figure 15B, after a period of use, After that, it can no longer even be reduced to 50 milliohms (mΩ); on the contrary, as shown in Figure 16A and Figure 16B, the test socket and the conductive block of the object under test can immediately reduce the resistance to 50 milliohms (mΩ) after being compressed. Below 50 milliohms (mΩ), the aforementioned characteristics can still be maintained even after a period of use.

Figures 17A-17B are respectively diagrams showing the relationship between the resistance value and the elastic force of the elastic metal part of the probe of the conventional test seat and the elastic metal part of the test seat of this invention without surface treatment. The diagram illustrates the performance of the probe tip without surface treatment such as electroplating. It is worth noting that, as shown in Figure 17A, the resistance of the probe of the conventional test socket is as high as 2081.5 milliohms (mΩ). As shown in Figure 17B, the probe (i.e., the elastic metal piece) of the test seat of the present invention can still be maintained at about 50 milliohms (mΩ), that is, 48.4 milliohms (mΩ). From this, it can be seen that the probe of the present invention The probe head (bump of the first contact end) of the (elastic metal part) can still be better than the conventional design without surface treatment, so it helps to reduce the manufacturing cost.

Figure 18 is a diagram showing the resistance changes of the probe of the conventional test socket and the elastic metal part of the test socket of the present invention after multiple tests. Figures 19A-19B are respectively the first use of the probe of the conventional test socket and after 300 cycles. The relationship between the resistance value and the elastic force of the elastic metal parts after the first test. Figures 20A and 20B are respectively the relationship between the resistance value and the elastic force of the elastic metal parts of the test seat after the first use and 300 tests. As shown in Figure 18, it illustrates the changing trend of the resistance of the probe after multiple uses. It is known that the resistance of the probe in the conventional test socket increases significantly after several uses. As can be seen from the figure, Its resistance value is more unstable. On the other hand, the probe of this creative test socket can still maintain the resistance value stably at the best performance level even after multiple tests. In other words, even if it is used many times, the probe of this creation can still maintain its resistance value at the best performance level. Maintain the resistance performance of new probes.

Further, as shown in Figure 19A, the resistance and elasticity of the conventional probe have normal performance when used for the first time. As shown in Figure 19B, after being used 300 times, the resistance of the conventional probe It has exceeded 800 milliohms (mΩ) and is unusable; on the contrary, as shown in Figure 20A and Figure 20B, the probe of this invention still maintains close to the initial state and has a good resistance value even after 300 times of use.

Figures 21A-21B are respectively graphs of the elastic force and temperature change trends of the probe of the conventional test socket and the elastic metal part of the test socket of this invention when a current of 6A is passed therethrough. The diagram illustrates the changes in elasticity and temperature of the probe when a continuous current of 6A is applied to the probe. As shown in Figure 21A, the temperature of the probe of a conventional test socket rises to 101.6°C after a current of 6A is applied. It has exceeded 100°C, and its elasticity has dropped to close to 0g. In contrast, as shown in Figure 21B, the elasticity of the probe in the test seat of this invention can be maintained at about 25g. In addition, the temperature is only 61.7°C. The temperature is about 40°C lower than that of conventional probes. It can be seen that the test socket of the present invention still has good performance even if it is used in a high-current testing environment.

Figures 22A-22C are graphs showing elasticity and temperature change trends of the old and new probes of the conventional test socket and the used elastic metal parts of the test socket of this invention when a current of 3A is passed through. Specifically, the conventional probe measured a resistance of 37.5 milliohms (mΩ) when not in use. After a considerable number of test uses, the resistance of the conventional probe will rise to 171.2 milliohms (mΩ). This creation uses a probe (i.e., an elastic metal piece) that has been used many times, with a resistance value of 37.7 milliohms (mΩ). Based on the above conditions, a 3A current is passed to conduct the experiment. As shown in Figure 22A, it is a conventional test socket with a new probe. Even if the conventional probe is not used, when a current of 3A is passed, the elastic force can be maintained but the temperature reaches 24.6°C; in addition, as shown in Figure 22B It shows that it is a conventional test socket with an old probe. As the number of times or time of use increases, the resistance of the conventional probe increases to 171.2 milliohms (mΩ). When a current of 3A is passed, not only the elasticity is affected, but also the key point is is that its temperature rises more than 80°C, reaching as high as 89.680°C; on the contrary, as shown in Figure 22C, the test of this creation Even though the probe in the holder has been used many times, its resistance still remains at 37.7 milliohms (mΩ). It can still maintain good elasticity under the current of 3A, and the temperature only rises to 25.8℃, so , the probe of this invention (i.e. the elastic metal piece) can still maintain the same performance as the new probe under the conventional technology even after being used many times, which proves that the test socket of this invention can indeed achieve good performance.

The above embodiments are only illustrative descriptions and are not used to limit the invention. Anyone skilled in this art can modify and change the above embodiments without violating the spirit and scope of the invention. Therefore, the scope of rights protection for this creation is defined by the scope of the patent application attached to this creation. As long as the effect and implementation purpose of this creation are not affected, this disclosed technical content should be covered.

1:Test seat

11: base

111: First surface

112: Second surface

113:Through hole

12:Conductive elastic sheet

13: Elastic metal parts

131: First contact end

1311:Bump

132: Second contact end

4:Test device

R: conductive elastic zone

Claims (42)

A test socket includes: The base has a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; A conductive elastic piece is located above the first surface of the base; and A plurality of elastic metal parts are respectively provided in each of the plurality of through holes, wherein each elastic metal part has a first contact end facing the conductive elastic piece, and the first contact end includes a hole suitable for being submerged in the conductive elastic piece. Bump. The test seat as claimed in claim 1, wherein the bumps of each elastic metal part are adapted to pierce the surface of the conductive elastic piece so as to be submerged into the interior of the conductive elastic piece. The test seat as claimed in claim 1, wherein each of the elastic metal parts has a plurality of bumps and is pointed. The test seat as claimed in claim 1, wherein the bumps of each elastic metal piece press against the conductive elastic piece and sink into the conductive elastic piece, so that the conductive elastic piece covers the bump. The test seat as claimed in claim 1, wherein each of the elastic metal parts is a spring probe, a vertical probe or a micro-electromechanical probe. The test base as claimed in claim 1, wherein the conductive elastic piece is disposed on a frame of the base so as to have a distance from the bumps of the elastic metal parts. The test socket of claim 1, wherein the length of the bump is greater than or equal to 0.01 millimeter (mm) and less than the thickness of the conductive elastic piece. The test socket as claimed in claim 1, wherein each of the elastic metal parts further includes an elastic body disposed in each of the through holes, a metal rotatably disposed on the elastic body and connected to the first contact end. A block and a second contact end connected to the metal block and extending toward the second surface. The test base of claim 1, wherein the base is a metal base body, and the conductive elastic piece includes a plurality of conductive elastic areas corresponding to each of the elastic metal parts and a plurality of conductive particles distributed in each of the conductive elastic areas. , wherein the width of each conductive elastic region is greater than the diameter of each through hole, so that each conductive elastic region contacts the base. The test socket according to claim 1, wherein the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 2 mm. The test socket according to claim 10, wherein the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm. The test socket of claim 1, wherein the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate. The test base according to claim 12, wherein the particle diameter of each conductive particle is greater than or equal to 0.005 mm and less than or equal to 0.1 mm. The test socket as described in claim 12, wherein the proportion of the plurality of conductive particles in the conductive elastic sheet is greater than or equal to 30% and less than or equal to 90%. The test base according to claim 1 further includes another conductive elastic piece located below the second surface of the base. The test socket of claim 1, wherein the conductive elastic piece has a first contact surface and a second contact surface opposite each other, and the conductive elastic piece faces the first surface with the first contact surface. The second contact surface is provided on the base and has a plurality of convex pads protruding from the second contact surface corresponding to each elastic metal component. The test base as claimed in claim 1, wherein the conductive elastic sheet covers the first surface of the base to seal each of the through holes. The test base as claimed in claim 1, wherein the base further includes a frame provided on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet, and the conductive elastic sheet is disposed on the third side of the base. On one surface, the frame body and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter. The test socket of claim 1, wherein the conductive elastic sheet includes a substrate with a plurality of conductive elastic areas and a plurality of conductive particles distributed in each conductive elastic area, and at least one of the conductive elastic areas corresponds to at least two of the elastic forces. metal parts. The test base as described in claim 1 further includes a conductive member, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic areas corresponding to each of the elastic metal members and a plurality of conductive particles distributed in each of the conductive elastic areas. , wherein the conductive element is electrically connected to at least two of the conductive elastic regions. The test socket of claim 20, wherein the elastic metal part is a ground probe or a power probe. The test base according to claim 1, wherein the conductive elastic piece is provided with a support body on its peripheral side, and the conductive elastic piece is disposed on the base through the support body, so that the conductive elastic piece is in contact with the first surface. Or there is a gap between the second surfaces so that the two ends of each elastic metal piece can respectively protrude from the first surface and the second surface of the base and contact the conductive elastic piece. The test seat as described in claim 1, wherein when the bump of each elastic metal piece penetrates the lower surface of the conductive elastic piece and is submerged into the conductive elastic piece, the top of the bump is in contact with the conductive elastic piece. The distance between the upper surfaces is less than 0.35 mm, or the distance between the top of the bump and the upper surface of the conductive elastic sheet accounts for less than 85% of the thickness of the conductive elastic sheet. A test socket includes: The base has a first surface, a second surface opposite to the first surface, and a plurality of through holes connecting the first surface and the second surface; A plurality of elastic metal parts are respectively provided in each of the plurality of through holes; and The conductive elastic piece is located above the base and the plurality of elastic metal parts, and has a thickness of less than or equal to 2 mm. The test socket according to claim 24, wherein the thickness of the conductive elastic piece is less than or equal to 0.4 mm. The test socket of claim 24, wherein each of the elastic metal parts has a first contact end facing the conductive elastic piece, and the first contact end includes a bump suitable for piercing the surface of the conductive elastic piece, so that The bump can be embedded inside the conductive elastic piece. The test socket as described in claim 26, wherein the bumps are plural and pointed. The test socket of claim 26, wherein the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic piece. The test base as described in claim 24, wherein the base is a metal base body, and the conductive elastic piece includes a plurality of conductive elastic areas respectively corresponding to each of the elastic metal parts and distributed on each of the elastic metal parts. A plurality of conductive particles in the conductive elastic region, wherein the width of each conductive elastic region is greater than the diameter of each through hole, so that each conductive elastic region contacts the base. The test socket of claim 24, wherein the thickness of the conductive elastic sheet is greater than or equal to 0.15 mm and less than or equal to 0.4 mm. The test socket of claim 24, wherein the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate. The test base according to claim 24, wherein the base further includes a frame body provided on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet, and the conductive elastic sheet is disposed on the third side of the base. On one surface, each of the through holes is sealed, and the frame body and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter. The test base of claim 24 further includes a conductive member, and the conductive elastic sheet includes a substrate having a plurality of conductive elastic areas corresponding to each of the elastic metal members and a plurality of conductive particles distributed in each of the conductive elastic areas. , wherein the conductive member is electrically connected to at least two of the conductive elastic regions. A test socket includes: base; A conductive elastic piece is located on the base; and A plurality of elastic metal parts are installed in the base, Wherein, when the elastic metal piece is submerged into the conductive elastic piece, the contact resistance between the elastic metal piece and the conductive elastic piece is smaller than the contact resistance between the elastic metal piece and the conductive block of the component under test. The test base as claimed in claim 34, wherein the base includes an opposing first surface and a second surface and a plurality of through holes connecting the first surface and the second surface, and the first surface is used for the The conductive elastic piece is provided, and each through hole is used for each elastic metal piece to be provided. The test socket of claim 34, wherein each of the elastic metal parts has a first contact end facing the conductive elastic piece, and the first contact end includes a bump suitable for being submerged in the conductive elastic piece. The test seat as described in claim 36, wherein the bumps of each elastic metal part are adapted to pierce the surface of the conductive elastic piece so as to be submerged into the interior of the conductive elastic piece. The test seat as described in claim 36, wherein the bumps of each elastic metal part are plural and are pointed. The test socket of claim 36, wherein the length of the bump is greater than or equal to 0.01 mm and less than the thickness of the conductive elastic piece. The test socket of claim 34, wherein the conductive elastic sheet includes a substrate and a plurality of conductive particles distributed in the substrate. The test base according to claim 35, wherein the base further includes a frame body provided on the peripheral side of the conductive elastic sheet and having a fluid inlet and a fluid outlet, and the conductive elastic sheet is disposed on the third side of the base. On one surface, each of the through holes is sealed, and the frame body and the upper side of the conductive elastic sheet form a fluid space connected to the fluid inlet and the fluid outlet for fluid to enter. The test socket according to claim 34, wherein the thickness of the conductive elastic piece is less than or equal to 0.4 mm.

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