TWI474431B - The anomaly detection module for semiconductor device and transport equipment for semiconductor device - Google Patents

Description

Abnormality detection module for semiconductor components and transportation of semiconductor components device

The present invention relates to an abnormality detecting module for a semiconductor device and a semiconductor device transporting device, and more particularly to an abnormality detecting module for a semiconductor component of an IC test sorting machine and a semiconductor component transporting device.

In today's era of information explosion, integrated circuits have been inextricably linked to daily life, and products such as integrated circuit components are often used in food and clothing. With the continuous evolution of electronic technology, more humanized and more complex electronic products are constantly being introduced. However, various products are designed to be light, thin, short and small, in order to provide more convenient and comfortable use.

In the manufacturing process of an integrated circuit or a semiconductor element, electrical testing of an integrated circuit or a semiconductor element is necessary regardless of the stage of the process. Each integrated circuit, whether in the form of a wafer or the type of construction, must be tested to determine if it is a good product and to determine its electrical properties. As the output of integrated circuits continues to increase, the functions of integrated circuits are becoming more and more powerful, and their structures are becoming more and more complex, which is even more urgent with high-speed and accurate testing requirements.

Taking the IC test sorting machine as an example, it is provided with a loading device for transporting the semiconductor component to be tested to the test area for testing. After the test, the carrier device transports the tested semiconductor components to the receiving area. Most of the existing carrier devices are rail-type transport devices. Therefore, during the rail transportation process, the IC-equipped carrier is likely to cause the IC to jump out or not completely placed in the carrier during the track transportation. When the IC-equipped carrier is in transit, the IC may not be transported at a fixed location due to the influence of the carrier. Accordingly, when the carrier is transported to the receiving area for stack storage, the IC that is jumped out or not completely placed in the carrier will be damaged. In addition, even if it is detected by the detecting component, the IC is skipped out of the carrier when it is transported, so that the operator can pre-empt the ICs that jump out of the carrier. However, during the transport of the IC-equipped carrier, the detection component will change the height of the carrier with the IC, and it will not be able to correctly detect the jump of the IC when it is transported.

The present invention provides a semiconductor device transport apparatus to reduce the misjudgment of the alignment of the semiconductor elements caused by the detecting elements when the height of the carrier is changed.

The invention provides an abnormality detecting module for a semiconductor component, which is suitable for a semiconductor component transporting device. A semiconductor component transport apparatus is used to transport a plurality of semiconductor components and includes a machine table and a carrier. The carrier is movably connected between the two frames of the machine and moves in a first direction. The carrier has a plurality of receiving slots. These semiconductor components are suitable for storage in these accommodating grooves. The abnormality detecting module of the semiconductor component comprises a fixing base and a detecting component. The mount is adapted to be vertically movable and disposed in two racks. The detecting component is disposed on the fixed seat. The detecting component is adapted to detect the alignment between the semiconductor components and the receiving slots. When the carrier moves in a second direction, the mount is adapted to carry the carrier Moving, the second direction is perpendicular to the first direction.

The present invention proposes a transport device for a semiconductor element for transporting a plurality of semiconductor elements. The semiconductor component transport device includes a machine table, a carrier board, and an abnormality detecting module of the two semiconductor components. The machine has two racks. The carrier is movably coupled between the two frames and moves in a first direction. The carrier has a plurality of receiving slots. These semiconductor components are suitable for storage in these accommodating grooves. The abnormality detecting modules of the two semiconductor components are vertically movably disposed in the two frames. The abnormality detecting module of each semiconductor component includes a fixing base and a detecting component. The detecting component is disposed on the fixing base, and the detecting component is configured to detect the alignment between the semiconductor component and the receiving slots. When the carrier moves in a second direction, the mount moves with the carrier, and the second direction is perpendicular to the first direction.

In an embodiment of the abnormality detecting module of the semiconductor device of the present invention, the abnormality detecting module of the semiconductor component further includes a slide rail. The mount is movably coupled to the slide rail. When the carrier moves in the second direction, the fixed seat moves along the carrier in the second direction by the slide rail.

In an embodiment of the abnormality detecting module of the semiconductor device of the present invention, the abnormality detecting module of the semiconductor component further includes a roller. The roller is disposed on the fixed seat. When the carrier moves in the second direction and contacts the roller, the roller is configured to drive the fixed seat to move in the second direction.

In an embodiment of the abnormality detecting module of the semiconductor device of the present invention, the detecting component is adapted to detect an orthographic projection of the semiconductor component on the carrier and an orthographic projection of the semiconductor substrate around the receiving slots overlapping.

An embodiment of the abnormality detecting module of the semiconductor device of the present invention The detecting component is adapted to detect that the orthographic projection of the semiconductor component on the carrier and the orthographic projection of the carrier around the receiving slots do not overlap each other.

In an embodiment of the semiconductor device transport apparatus of the present invention, the abnormality detecting module of each of the semiconductor elements further includes a slide rail. The mount is movably coupled to the slide rail. When the carrier moves in the second direction, the fixed seat moves along the carrier in the second direction by the slide rail.

In an embodiment of the semiconductor device transport apparatus of the present invention, the abnormality detecting module of each of the semiconductor elements further includes a roller. The roller is arranged on the fixed seat. When the carrier moves in the second direction and contacts the roller, the roller is used to drive the fixed seat to move in the second direction.

In an embodiment of the semiconductor device carrying device of the present invention, the detecting component is configured to detect that the orthographic projection of the semiconductor component on the carrier and the orthographic projection of the carrier around the receiving slots overlap each other.

In an embodiment of the semiconductor device carrying device of the present invention, the detecting component is configured to detect that the orthographic projection of the semiconductor component on the carrier and the orthographic projection of the carrier around the receiving slots do not overlap each other.

In an embodiment of the transport apparatus for a semiconductor component of the present invention, the above-described machine further has two tracks. The two rails are connected to two racks. The carrier is movably coupled to the two tracks to move the carrier in a first direction.

In the above, in the abnormality detecting module of the semiconductor device of the present invention and the carrying device of the semiconductor element, when the semiconductor element jumps out of the accommodating groove and the semiconductor element is not aligned with the corresponding accommodating groove, the semiconductor element The detecting component of the abnormality detecting module detects that the semiconductor component is not located in the corresponding receiving slot. According to this, the operator can pre-select this The semiconductor component or the semiconductor component is placed in a corresponding accommodating groove to avoid damage to the semiconductor component during subsequent transportation. In addition, the operator can further determine whether the semiconductor component is placed in the corresponding accommodating slot by detecting the component to reduce the error of manually determining the alignment.

Further, since the mount moves with the carrier, the detecting element also moves with the mount. Accordingly, when the height of the carrier (this refers to the second direction) changes, the detecting element of the abnormality detecting module of the semiconductor component moves with the movement of the fixing seat. This not only does not require the operator to manually adjust the height of the detecting component, but also reduces the misjudgment of the alignment between the semiconductor component and the receiving slots caused by the height of the detecting component.

The above described features and advantages of the present invention will be more apparent from the following description.

FIG. 1 is a schematic diagram of an abnormality detecting module for a semiconductor device used in a semiconductor device transport apparatus according to an embodiment of the present invention. 2 is a schematic diagram of an abnormality detecting module of the semiconductor device of FIG. 1 for a semiconductor device. For convenience of explanation, FIGS. 1 and 2 are represented by different viewing angles. Referring to FIGS. 1 and 2, the semiconductor device transport apparatus 100 of the present embodiment is transported, which is applied to an IC test sorter and used to transport a plurality of semiconductor elements 50. The semiconductor element of this embodiment is, for example, an integrated circuit (IC). The semiconductor device transport device 100 includes a machine 110, a carrier 120, and two semiconductor component anomaly detection modules 130.

In detail, the machine table 110 has two racks 112 on both sides. The carrier 120 is movably coupled between the two frames 112 and movable in a first direction D1. The carrier 120 has a plurality of receiving slots 122. These semiconductor elements 50 are adapted to be stored in these accommodating grooves 122. It should be noted that the shape and size of the accommodating groove 122 are not limited in this embodiment, as long as the semiconductor component 50 can be stored. In other words, the shape and size of the accommodating groove may depend on the semiconductor component of the actual product. The invention is not limited thereto.

The abnormality detecting module 130 of the two semiconductor elements is vertically disposed to be disposed in the two frames 112. The abnormality detecting module 130 of each semiconductor component includes a fixing base 132 and a detecting component 134. The detecting component 134 is disposed on the fixing base 132, and the detecting component 134 is configured to detect the alignment between the semiconductor component 50 and the receiving slots 122. As a result, when the carrier 120 with the semiconductor component 50 is moved in the first direction D1, there will be a semiconductor component that jumps out of the accommodating groove 122 as shown in FIG. 1 and does not align with the corresponding accommodating groove 122. 60. At the same time, the detecting component 134 detects that the semiconductor component 60 is not located in the corresponding receiving slot 122. Accordingly, the operator can thereby pick out the semiconductor component 60 or place the semiconductor component 60 in the corresponding accommodating groove 122 to avoid damage to the semiconductor component 60 during subsequent transportation. In addition, the operator can determine whether the semiconductor component 60 is placed in the corresponding accommodating slot 122 by the detecting component 134 to reduce the error of manually determining the alignment.

When the carrier 120 moves in a second direction D2 as shown in FIG. 2, the holder 132 moves with the carrier 120. It should be noted that the first direction D1 of the embodiment is, for example, a horizontal direction along the chassis 112, and the second direction D2. For example, in the vertical direction of the frame 112, the second direction D2 is perpendicular to the first direction D1. Since the mount 132 moves with the carrier 120, the detecting element 134 also moves with the mount 132. Accordingly, when the height of the carrier 120 (this refers to the second direction D2, that is, the direction perpendicular to the chassis 112), the detecting component 134 of the abnormality detecting module 130 of the semiconductor component follows the fixing block 132. Move while moving. This not only eliminates the need for the operator to manually adjust the height of the detecting element 134, but also reduces the misjudgment of the alignment between the semiconductor element 50 and the receiving groove 122 caused by the height of the detecting plate 134 being changed.

In the present embodiment, the machine table 110 further has two tracks 114. Two rails 114 are coupled to the two frames 112. The carrier 120 is movably coupled to the two rails 114 to move the carrier 120 in the first direction D1. Further, the transport device 100 of the semiconductor element further includes a pneumatic cylinder 140. The pneumatic cylinder 140 is coupled to the motor and drives the carrier 120 to move the carrier 120 in the second direction D2. In other embodiments, the carrier can be moved in the first direction and the second direction by other suitable mechanisms, which are not limited by the present invention.

3 is a schematic diagram of an abnormality detecting module of the semiconductor device of FIG. 1. Please refer to Figure 1 to Figure 3. In this embodiment, the abnormality detecting module 130 of each semiconductor component further includes a sliding rail 136 and a roller 138. The mount 132 is movably coupled to the slide rail 136 and is movable back and forth along the second direction D2. The roller 138 is disposed on the fixing base 132. When the carrier 120 moves in the second direction D2 and contacts the roller 138, the roller 138 is used to drive the fixed seat 132 to move in the second direction D2. The fixed seat 132 is moved along the second direction by the sliding rail 136. mobile. According to this, the difference of semiconductor components The detecting component 134 of the normal detecting module 130 moves along with the movement of the fixing base 132 to ensure that the detecting component 134 is in an appropriate position to correctly detect the pair between the semiconductor component 50 and the receiving slot 122. Bit.

Specifically, the detecting component 134 is configured to detect that the orthographic projection of the semiconductor component 50 on the carrier 120 and the orthographic projection of the carrier 120 around the receiving trenches 122 overlap each other to ensure that the semiconductor components 50 are stored. In these receiving slots 122. In other words, the detecting component 134 is configured to detect that the orthographic projection of the semiconductor component 60 on the carrier 120 and the orthographic projection of the carrier 120 around the receiving trenches 122 do not overlap each other to determine that the semiconductor components 60 are not stored. In these receiving slots 122. Of course, the manner in which the detecting component 134 detects the alignment between the semiconductor component 50 and the accommodating groove 122 is not limited thereto. In other embodiments, the detecting component can detect the alignment between the semiconductor component and the receiving slot via other suitable means.

It should be noted that the abnormality detecting module 130 of the above-mentioned semiconductor component can be applied to devices of various different semiconductor component transportation devices or other components, that is, as long as the alignment between the semiconductor component 50 and the accommodating groove 122 is performed. For the mechanism, the abnormality detecting module 130 of the semiconductor device of the embodiment can be used.

In the above, in the abnormality detecting module of the semiconductor device and the semiconductor device carrying device, when the semiconductor device jumps out of the accommodating groove and the semiconductor device does not align with the corresponding accommodating groove, the semiconductor The detecting component of the component abnormality detecting module detects that the semiconductor component is not located in the corresponding receiving slot. According to this, the operator can thereby pick out the semiconductor components in advance or place the semiconductor components in the corresponding accommodating slots to avoid Semiconductor components are damaged during subsequent shipping. In addition, the operator can further determine whether the semiconductor component is placed in the corresponding accommodating slot by detecting the component to reduce the error of manually determining the alignment.

Further, since the mount moves with the carrier, the detecting element also moves with the mount. Accordingly, when the height of the carrier (this refers to the second direction) changes, the detecting element of the abnormality detecting module of the semiconductor component moves with the movement of the fixing seat. This not only does not require the operator to manually adjust the height of the detecting component, but also reduces the misjudgment of the alignment between the semiconductor component and the receiving slots caused by the height of the detecting component.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

50‧‧‧Semiconductor components

60‧‧‧Semiconductor components

100‧‧‧Transport equipment for semiconductor components

110‧‧‧ machine

112‧‧‧Rack

114‧‧‧ Track

120‧‧‧ Carrier Board

122‧‧‧ accommodating slots

130‧‧‧Actual component detection module for semiconductor components

132‧‧‧ fixed seat

134‧‧‧Detection components

136‧‧‧rails

138‧‧‧Roller

140‧‧‧ pneumatic cylinder

D1‧‧‧ first direction

D2‧‧‧ second direction

FIG. 1 is a schematic diagram of an abnormality detecting module for a semiconductor device used in a semiconductor device transport apparatus according to an embodiment of the present invention.

2 is a schematic diagram of an abnormality detecting module of the semiconductor device of FIG. 1 for a semiconductor device.

3 is a schematic diagram of an abnormality detecting module of the semiconductor device of FIG. 1.

120‧‧‧ Carrier Board

130‧‧‧Actual component detection module for semiconductor components

132‧‧‧ fixed seat

134‧‧‧Detection components

136‧‧‧rails

138‧‧‧Roller

D1‧‧‧ first direction

D2‧‧‧ second direction

Claims (11)

An abnormality detecting module for a semiconductor component, which is suitable for a semiconductor component carrying device for transporting a plurality of semiconductor components and comprising a machine table and a carrier board, the carrier board being movably connected to the semiconductor component Between the two frames of the machine and moving in a first direction, the carrier has a plurality of receiving slots, and the semiconductor components are adapted to be stored in the receiving slots, and the abnormality detecting module of the semiconductor component The device includes: a fixing base configured to be vertically movable in the two frames; and a detecting component disposed on the fixing base, the detecting component is adapted to detect between the semiconductor components and the receiving slots The alignment is adapted to move with the carrier when the carrier is moved in a second direction, the second direction being perpendicular to the first direction. The abnormality detecting module of the semiconductor device of claim 1, wherein the abnormality detecting module of the semiconductor component further comprises a sliding rail, the fixing seat is movably connected to the sliding rail, when the loading When the plate moves in the second direction, the fixing seat moves along the second direction with the carrier by the sliding rail. The abnormality detecting module of the semiconductor device of claim 1, wherein the abnormality detecting module of the semiconductor component further comprises a roller disposed on the fixing seat, and the carrier moves in the second direction And contacting the roller, the roller is used to drive the fixing seat to move in the second direction. The abnormality detecting module of the semiconductor device of claim 1, wherein the abnormality detecting component of the semiconductor component is adapted to detect an orthographic projection of the semiconductor component on the carrier and the receiving slots Around here The orthographic projections of the carrier plates overlap each other. The abnormality detecting module of the semiconductor device of claim 1, wherein the abnormality detecting component of the semiconductor component is adapted to detect an orthographic projection of the semiconductor component on the carrier and the receiving slots The orthographic projections around the carrier do not overlap each other. A semiconductor component transporting apparatus for transporting a plurality of semiconductor components, the transporting device of the semiconductor component comprising: a machine having two frames; a carrier plate movably connected between the two frames and along a first Moving in one direction, the carrier has a plurality of accommodating slots, and the semiconductor components are adapted to be stored in the accommodating slots; and the abnormality detecting modules of the two semiconductor components are vertically movably disposed in the two racks. The abnormality detecting module of the semiconductor device includes a fixing base and a detecting component, wherein the detecting component is disposed on the fixing base, and the detecting component is configured to detect the semiconductor component and the receiving slots Between the alignments, when the carrier moves in a second direction, the mount moves with the carrier, the second direction being perpendicular to the first direction. The device for transporting semiconductor components according to claim 6, wherein the abnormality detecting module of each of the semiconductor components further comprises a sliding rail, the fixing bracket is movably connected to the sliding rail, when the carrier edge When the second direction is moved, the fixing seat moves along the second direction with the carrier by the sliding rail. The device for transporting semiconductor components according to claim 6, wherein the abnormality detecting module of each of the semiconductor components further comprises a roll The wheel is disposed on the fixing seat. When the carrier board moves in the second direction and contacts the roller, the roller is used to drive the fixing seat to move in the second direction. The device for transporting a semiconductor device according to claim 6, wherein the detecting component is configured to detect the orthographic projection of the semiconductor component on the carrier and the positive of the carrier in the periphery of the carrier The projections overlap each other. The device for transporting a semiconductor device according to claim 6, wherein the detecting component is configured to detect the orthographic projection of the semiconductor component on the carrier and the positive of the carrier in the periphery of the carrier The projections do not overlap each other. The transport device for a semiconductor component according to claim 6, wherein the machine further has two rails, and the two rails are connected to the two racks, and the carrier is movably connected to the two rails to enable the carrier Move in the first direction.