200839914 九、發明說明: 【發明所屬之技術領域】 #本發明尤指其提供—種不僅可先行對半導體元件進行短 U本,性測試,且可在不影響系統層級測試產能下,以最佳化 ^路㈣配置,達到確保測試產能之具開、短路測試及系统層 、,及測試之半導體元件自動測試分類機。 μ、、曰 【先前技術】 、 士^ ’目雨半導體元件於完成封裝後之測試作業,係先於-A ί 上進行基本電性測試,完成基本電性測試後若為ί 太+½、目卜Γ)、了體電〜測試(GR0SS IDD test)等等一般的基 ’而祕層級測試機則請參閱第 2刚申請之第9121_虎「IC檢測機之運送裝置^;$申= 體=插置於實際配合使用之實體板中^實體 各別闕級測試機為 結合;^—測^ 有5者將基本電性測試及公板測試 號「半導許構梦开生’广閱第2圖,其係為申請第93109078 1 ΙΊ卜且件自動化測試裝置」專利案,豆工作平二 1 0上具有弟一測試區1 1 ,、 十口 件進行基本電性測試之第\2,厂可對半導體元 1 3 1,並設置於工;以具有-測試谭 基本電性測試之半^!元:、#^弟二収區1 1,另可對通過 係具有數個測試公板j"4l二5式=第二測試單元14,200839914 IX. Description of the invention: [Technical field to which the invention pertains] # The invention, in particular, provides a short-term, neutral test of the semiconductor component, and can be optimally performed without affecting the system level test throughput. The circuit (4) configuration, to achieve the test capacity of the open, short-circuit test and system layer, and test the semiconductor component automatic test sorter. 、, 曰 [Prior Art], 士 ^ 'The rain semiconductor components in the test after the completion of the package, the basic electrical test is performed on -A ί, after the basic electrical test is ί too +1⁄2目 Γ 、 、 、 体 体 体 测试 测试 测试 测试 测试 GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR GR Body = inserted in the actual use of the physical board ^ entity separate level test machine for the combination; ^ - test ^ There are 5 will be the basic electrical test and the public board test number "semi-guided Xu Jian Meng Kaisheng" wide Read Figure 2, which is the patent application for the application of the 93109078 1 且 且 and the automatic test device, the bean work level 2 1 has a test area 1 1 of the brother, and 10 pieces of the basic electrical test. 2, the factory can be on the semiconductor element 1 3 1, and set in the work; to have - test Tan basic electrical test half ^! yuan:, #^弟二收区1 1, another can have several tests on the pass system Public board j" 4l 2 5 = second test unit 14,
工作平台1 ο,其並具有可堆遇=口10之眺,而緊鄰 1 5 1 ’以提供待測|】二谷置上導體承载盤之供料H 千導體讀,—輸送單元16係架設於工 5 200839914 β ί具有—可於工作平台1 Q上進行三度空間移動 二出二t1 ir置於工作平台運:s Γί=ίΠ]Γ元13之測試埠131及第 丄内,於進仃半導體元件的測試時,係先以赖M、车辟^ , 將待測之半導體元件自供舳i 5 i内取ί先=械it61 m^tl r^tTM 181 ^ ^ ,緩衝承座18 1再、J持,191吸附取出待測之半導體元件 麵入測===王:將待測之半導體元件 、、Ριίθ#,。内進仃基本電性測試,完成基本電性 1 ί P ff V 9 1 ^ 導體元件置89 ;:方緩p將完料 ϋ己電+ 61依據測試結果’將不良品分類置人 ίίίΐ5 分類E171内’若測試結果為良品,則機 ϊΐί iH+3元件運送移載至測試公板1 4 1對應之緩 ί掊件ί㊂ί ΐ ’、讀承座181再移入壓持件191下方,由 取出待測之半導體元件’緩衝承座181再退 izi ri件ϋ1即將待測之半導體元件顯置入測試公板 1進行公板測試,完成公板測試後,壓持 附取出完測之半導體元件,緩衝承座18!則再移mi 1 9 1下方’由壓持件1 9 1將完測之半導體树置人緩衝承座 6 200839914 181内,緩衝承座18丨再退出測試公板^ 6 1依據職結果,將完測之半導體元件置人分 分類匣171内;上述之設備雖可於機台上生ς 試及,測試,叫娜键及降低穌 配置架構上仍具有如下之缺失: 純I、在栻台之 1 . 公板測試之測試區内增設進行基本電性測試之測 ^ 試::;=,試之 本電性測試之時間極短,而公]板==2S =因基 =;;_後,_&==== :令!生測5式的產能’將導致完成基本電性測試的半導體 行公板測試,而必須停留於測試埠 2 卜由^電性測試之測試 ====== 芊構測與公板測試的測試璋平行排列,如此的 15 1 ^ ^The working platform 1 ο, which has the stack of the mouth 10, and immediately adjacent to the 1 5 1 'to provide the test to be tested | the second valley is placed on the conductor carrier disk H H-conductor read, the transport unit 16 is erected于工5 200839914 β 具有 has - can move three degrees on the working platform 1 Q two out two t1 ir placed on the working platform: s Γ = = = Γ Γ 13 13 13 及 及 及 及 及 及 及 及 及 及 及 及When testing semiconductor components, the first semiconductor component to be tested is taken from the supply 舳i 5 i. 先 first = mechanical it61 m^tl r^tTM 181 ^ ^ , buffer socket 18 1 Then, J holds, 191 adsorbs and takes out the surface of the semiconductor component to be tested. === Wang: The semiconductor component to be tested, Ριίθ#. Into the basic electrical test, complete the basic electrical 1 ί P ff V 9 1 ^ Conductor component set 89;: Fang will slow down p will complete the charge + 61 according to the test results 'discard the bad goods classification ί ί ΐ 5 classification E171 If the test result is good, then the machine ϊΐί iH+3 component is transported and transferred to the test board 1 4 1 corresponding to the 掊 ί ί ί ί ί , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The semiconductor component of the test is buffered 181, and the semiconductor component to be tested is placed in the test board 1 for public board test. After the completion of the public board test, the semiconductor component is taken out and tested. The seat 18! then moves mi 1 9 1 below 'by the holding part 1 9 1 the semiconductor tree is completed and placed in the buffer socket 6 200839914 181, the buffer seat 18丨 and then exit the test board ^ 6 1 basis As a result, the semiconductor components that have been tested are classified into 171. The above-mentioned equipment can still be tested and tested on the machine, and there are still the following defects in the structure of the key and the structure of the reduction: pure I In the test area of the platform test, the basic electrical test is added. The test sample measurement :: ^; =, the test electrode of this short time of testing, while the public] == 2S = plate by the group = _ ;;, _ & ====: Order! The production capacity of the type 5 will lead to the completion of the basic electrical test of the semiconductor board test, but must stay in the test 埠 2 卜 ^ ^ electrical test test ====== 芊 construction and public board test Tests are arranged in parallel, so 15 1 ^ ^
内、隹—運达至遂知之第一測試單元測試埠1 3 1 =7=性,’若測試結果為不良品,則機A LU::T7=測;:。内移送取出至遠端之不 過長,軍、fi導致機械手臂161運送路徑 時1 ’尤其單一組機械手臂161還需負 時導件的運送項,機械手臂1 6 1運送路徑! =過長,將嚴重影響工作時序上匹配之問題。 及 經驗,ΪΪΪ前事相關行業的研發與製作 5作,終究;:=¾導; 置,層,測試產能下’以最佳化移載路徑的: 此即分類機,以大幅改善習式之缺弊, 200839914 【發明内容】 >、^發明之主要目的係提供一種農門^ 、、 试之半導體元件自動測試分類 、丑路測試及系統層級測 料E、空£、數個收料厘及開_:、系於私σ之%端分別設有供 開、短路測試裝置,不僅可先行對半^此:利帛於機纟前端設, 且可在不輯錢層_職置—轉進彳了基本電性測試 半導體元件可正常依時序接續進行2 使兀成基本電性測試的 產能之目的。 、仃糸統層級測試,達到確保測試 別排列設有數個系統層級測試裝試裝置,機台之後端則分 開、短路測試奘罢,丁#一,h ’籍此’利用於機台前滅設罟 本發明之另一目的係提供一 試之半導體元件自動測試分類機,2系統層級测 料E、雜、數個收料E及開、短路之^分別設有供 別排列設有數個系統層級卿^ 之後端則分 件自供繼移载至開、短路測試裝置,tiff將半導體元 =完成基本電性職後,將不良品 以=測試,並 成系統層級測試後,再將半導體元 :於完 可先行對半導體元件進行基本_^\=^=不僅 =佳化移載路徑的配置,達目Γ 【貫施方式】 實施明作更進-步之瞭解’兹舉-較佳 則分別排顺有數個系統層級職裝置2 6,另裝設於機台^ ^ 200839914 上之輸送褒置係包括有移動於機台前端區域之前 移動於機台前、後端區域之轉運台2 8及 ===、 後機械手臂2 9,而可接續運送半導體元件進行 性測试及系統層級測試。本發明由於係於機 ς二 、不良品收舰2 4相鄰處設置開、短路 在不縮減系統層級測試裝置2 6之數量下( 、2 3 ’而 對半導體元件進彳獨、短路基本= 達到確保測試產能之效益。 系、、、充層、·及測试, 請參閱第4、5圖’本發明於進行測試作举 戒,7將供籠2 u之制半導體元 2 3係於機架2 3】上設有測試】2 3]㈡由== 動及動力源2 3 5驅動升降之下壓頭 行開、i路之向後移入並下降下愿半導體元件以進 臂2 7即可於測試座2 刖 續進行實體板測試。台2 8上,以接 、不良品收· 2 4及轉端,^ 2 3,而可於p弓、立-狄甘丄相㈤處叹置開、短路測試裝置 較短之運送路“品或良品時,以 *果2圖,當轉運台2 8將開、短路基本電性測,式 並刀置於系統層級測試裝置2 6内。請 9 200839914Internal, 隹---------------------------------------------------- The internal transfer is not too long to be taken out to the far end. When the military and fi cause the mechanical arm 161 to carry the path, 1 'especially the single group robot 161 also needs the transport item of the negative guide, the robot arm 116 transport path! = too long, Will seriously affect the matching problem at the working time. And experience, research and development and production of related industries in the past, after all;:=3⁄4 guide; set, layer, test capacity under 'to optimize the transfer path: This is the sorter to greatly improve the practice Disadvantages, 200839914 [Invention] The main purpose of the invention is to provide a kind of automatic testing and classification of semiconductor components, ugly road test and system level measurement E, empty £, and several receiving materials. And open _:, at the % end of the private σ, respectively, for the open, short-circuit test device, not only can be half-first ^ this: Lee 帛 纟 纟 纟 纟 纟 纟 , , , , , , 纟 纟 纟 纟 纟Into the basic electrical test semiconductor components can be carried out in sequence according to the sequence of 2 to make the capacity of the basic electrical test.仃糸, 仃糸 level test, to ensure that the test is arranged in a number of system level test and test equipment, after the machine is separated, short-circuit test 奘 ,, Ding #一,h '[This] used in front of the machine Another object of the present invention is to provide a test semiconductor component automatic test sorting machine, wherein the two system level materials E, the miscellaneous, the plurality of materials E, and the open and short circuits are separately provided with a plurality of system levels. After the end of the Qing ^ part of the self-supplied transfer to the open, short-circuit test device, tiff will be the semiconductor element = after the completion of the basic electrical job, the defective product to = test, and after the system level test, then the semiconductor element: After the completion of the semiconductor components, the basic _^\=^= not configuration of the transfer path, to achieve the goal of the implementation of the implementation of the implementation of the implementation of the new step-by-step understanding There are several system level level devices 2, and the transport unit installed on the machine table ^ ^ 200839914 includes a transfer table 28 8 and == before moving to the front and rear areas of the machine before moving to the front end area of the machine. =, rear robot arm 2 9, and can be transported continuously Conductor elements of system-level testing and testing. The invention is based on the machine 2, the defective product receiving ship 2 4 adjacent to the opening and short circuit without reducing the number of the system level test device 26 (, 2 3 'and the semiconductor component into the single, short circuit basic = To achieve the benefits of ensuring the test capacity. Department,, filling, and testing, please refer to Figure 4, 5 'The invention is used for testing, 7 is to supply the semiconductor element 2 3 for the cage Rack 2 3] is equipped with test] 2 3] (2) by == movement and power source 2 3 5 drive the lower pressure head to open, the i road to move backward and lower the semiconductor component to the arm 2 7 The physical board test can be carried out in the test stand 2. On the table 2, the connection, the defective product, the 2 4 and the transfer end, ^ 2 3, can be sighed at the p-bow, the vertical-digan phase (five) When the short-circuit test device is short or short, the product will be placed in the system level test device 26 when the transfer table 28 is opened and short-circuited. 9 200839914
參閱第7、8圖’各系統層級測試I 體板26 1,當後機械手臂2二^6係於測試區内裝設實 2 6 1之測試座後,一下壓頭2 R 9牛導體元件移載至實體板 使其與實體板2 61之測試座讀實^會=壓抵半導體元件, ,於完測後下壓頭2 6 2再上升觸^以進行糸統層級的測試 2 6 1之測試座内取出半導體元件’。後機械手臂2 9再於實體板 請參閱第9圖,當後機械手臂 半導體it件後’即將半導體元件 巧之職座内取出 台2 8上另承載有已完成開、短路ί本;二於;運 體元件,因此後機械手臂29會於轉=且為良⑽之半導 的交換取置,而將完㈣統層_ ^上=半導體元件 2 8上,並吸取欲接續進行系統層級 至系,級賴裝置2 6。請參閱第丄〇圖8 糸統層級測试之半導體元件移出至機台2 〇之 機二 系ί層級測試之結果,將完測之料體元件t ㈣it ΪΓ月不僅可先行對半導體元件進行開、短路基本電 二二1縣響系統層級測試之產能下,以最佳化移载路 位的配置,達到確保_產能之效益,實為—深具實用性及進+ 性之设計,然未見有相同之產品及刊物公開,從而允符發$ 申請要件,爰依法提出申請。 【圖式簡單說明】 第1圖·係為申請第91210786號「1C檢測機之運送裝置」專利案 之架構示意圖。 一 第2圖:係為申請第93109078號「半導體構裝元件之自動化測試 I置」專利案之架構示意圖。 第3圖:本發明之架構示意圖。 第4圖:本發明之動作示意圖(一)。 10 200839914 第5圖:本發明開、短路測試裝置之示意圖 第6圖:本發明之動作示意圖(二)。 第7圖:本發明之動作示意圖(三)。 第8圖:本發明系統層級測試裝置之示意圖 第9圖:本發明之動作示意圖(四)。 第1 0圖:本發明之動作示意圖(五)。 【主要元件符號說明】 習用部分: 0 第一測試區 工作平台 第一測試單元 第二測試單元 供料單元 輸送單元 出料單元 緩衝單元 壓持單元 本發明部分: 2 0 :機台 2 3 :開、短路測試裝置 2 31 :機架 2 3 2 :測試座2 3 4 :動力源 2 3 5 :動力源 2 4 :不良品收料匣 2 5 :分類收料匣 2 6 :系統層級測試裝置 2 61 :實體板 2 6 2 :下壓頭 2 7 :前機械手臂 2 8 :轉運台 2 9 :後機械手臂 12:第二測試區 1415 1 61718 1 9 13 1 14 1 15 1 16 1 17 118 1 19 1 測試埠 測試公板 供料匣 機械手臂 分類匣 緩衝承座 壓持件 21:供料匣 2 2 :空匣 2 3 3 :下壓頭Refer to Figures 7 and 8 for each system level test I body plate 26 1. After the mechanical arm 2 2 6 is installed in the test area with the test piece of the actual 2 6 1 , the lower head 2 R 9 cattle conductor element Transfer to the solid board to make it read with the test board of the solid board 2 61 = press against the semiconductor component, after the test, the lower head 2 6 2 rises again to perform the test of the 层 level 2 6 1 The semiconductor component is taken out in the test socket. After the mechanical arm 2 9 and then the solid board, please refer to Figure 9. After the mechanical arm semiconductor piece, the semiconductor component is taken out of the station, and the other is loaded with the open and short circuit. The body element, so the rear robot arm 29 will take the exchange of the semi-conductor of the good (10), and will complete the (four) layer _ ^ up = the semiconductor component 28, and draw the system level to Department, level device 2 6 . Please refer to Figure 8 for the semiconductor component removed from the 层 level test to the machine 2 〇 二 ί ί layer level test results, the finished material element t (four) it 不仅 month can not only open the semiconductor components first Under the capacity of the short-circuit basic electricity 2nd 2 county system level test, to optimize the configuration of the transfer road position, to ensure the efficiency of _ capacity, the actual - practical and progressive design, No identical products and publications were disclosed, so that the application requirements were issued and the application was made according to law. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram showing the structure of the patent application No. 91210786 "Conveying device for 1C detector". Figure 2: Schematic diagram of the application for the patent application No. 93109078, "Automated Test of Semiconductor Components". Figure 3: Schematic diagram of the architecture of the present invention. Figure 4: Schematic diagram of the action of the present invention (1). 10 200839914 Fig. 5: Schematic diagram of the open and short test device of the present invention Fig. 6: Schematic diagram of the action of the present invention (2). Figure 7: Schematic diagram of the action of the present invention (3). Fig. 8 is a schematic view showing the system level test apparatus of the present invention. Fig. 9 is a schematic view showing the operation of the present invention (4). Figure 10: Schematic diagram of the operation of the present invention (5). [Main component symbol description] Conventional part: 0 First test area work platform First test unit Second test unit Feed unit Transfer unit Discharge unit Buffer unit Press unit Unit of the invention: 2 0 : Machine 2 3 : Open Short-circuit test device 2 31 : Rack 2 3 2 : Test stand 2 3 4 : Power source 2 3 5 : Power source 2 4 : Defective goods receipt 匣 2 5 : Classification receipt 匣 2 6 : System level test device 2 61: solid plate 2 6 2 : lower pressing head 2 7 : front mechanical arm 2 8 : transfer table 2 9 : rear robot arm 12: second test zone 1415 1 61718 1 9 13 1 14 1 15 1 16 1 17 118 1 19 1 Test 埠 Test slab supply 匣 Robot arm classification 匣 Buffer bearing holder 21: Feed 匣 2 2 : Open 3 2 3 3 : Lower head