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TWD230208S - Part of the inner tube of a reaction tube for semiconductor manufacturing equipment - Google Patents

Part of the inner tube of a reaction tube for semiconductor manufacturing equipment Download PDF

Info

Publication number
TWD230208S
TWD230208S TW111305741F TW111305741F TWD230208S TW D230208 S TWD230208 S TW D230208S TW 111305741 F TW111305741 F TW 111305741F TW 111305741 F TW111305741 F TW 111305741F TW D230208 S TWD230208 S TW D230208S
Authority
TW
Taiwan
Prior art keywords
semiconductor manufacturing
reaction tube
tube
inner tube
manufacturing equipment
Prior art date
Application number
TW111305741F
Other languages
Chinese (zh)
Inventor
平野敦士
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD230208S publication Critical patent/TWD230208S/en

Links

Abstract

【物品用途】;本設計的物品是半導體製造裝置用反應管的內管，係安裝於反應管之內側而被使用的內管，而該反應管係被使用於半導體製造裝置。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。;圖式所揭露之一點鏈線僅是表示作為部分設計而欲主張設計專利之部分與其他部分間的邊界，該一點鏈線本身為本案不主張設計之部分。[Use of Article]; The article of this design is an inner tube of a reaction tube for a semiconductor manufacturing device, which is an inner tube installed on the inner side of the reaction tube and used, and the reaction tube is used in a semiconductor manufacturing device. ;[Design Description]; The dotted line portion disclosed in the figure is a portion that is not claimed in this case. ; The dotted chain line disclosed in the figure only indicates the boundary between the portion that is intended to be claimed as a partial design and the other portions, and the dotted chain line itself is a portion that is not claimed in this case.

Description

半導體製造裝置用反應管的內管之部分Part of the inner tube of a reaction tube for semiconductor manufacturing equipment

本設計的物品是半導體製造裝置用反應管的內管，係安裝於反應管之內側而被使用的內管，而該反應管係被使用於半導體製造裝置。The object of this design is an inner tube of a reaction tube for a semiconductor manufacturing device. It is an inner tube that is installed inside the reaction tube and used in the semiconductor manufacturing device.

圖式所揭露之虛線部分，為本案不主張設計之部分。The dotted line parts revealed in the diagram are the parts that are not designed in this case.

圖式所揭露之一點鏈線僅是表示作為部分設計而欲主張設計專利之部分與其他部分間的邊界，該一點鏈線本身為本案不主張設計之部分。The dotted chain line disclosed in the drawing only represents the boundary between the part for which a design patent is intended to be claimed as part of the design and other parts. The dotted chain line itself is a part of the design that is not claimed in this case.

TW111305741F 2022-05-30 2022-11-18 Part of the inner tube of a reaction tube for semiconductor manufacturing equipment TWD230208S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022011411F JP1731675S (en) 2022-05-30 2022-05-30 Inner tubes for reaction tubes in semiconductor manufacturing equipment
JP2022-011411 2022-05-30

Publications (1)

Publication Number Publication Date
TWD230208S true TWD230208S (en) 2024-03-01

Family

ID=84322292

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111305741F TWD230208S (en) 2022-05-30 2022-11-18 Part of the inner tube of a reaction tube for semiconductor manufacturing equipment

Country Status (3)

Country Link
US (1) USD1019583S1 (en)
JP (1) JP1731675S (en)
TW (1) TWD230208S (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD213081S (en) 2020-06-15 2021-08-01 日商東京威力科創股份有限公司 Reaction tube for semiconductor manufacturing equipment (1)

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Patent Citations (1)

* Cited by examiner, † Cited by third party
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TWD213081S (en) 2020-06-15 2021-08-01 日商東京威力科創股份有限公司 Reaction tube for semiconductor manufacturing equipment (1)

Also Published As

Publication number Publication date
JP1731675S (en) 2025-12-15
USD1019583S1 (en) 2024-03-26

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