USD405430S - Inner tube for use in a semiconductor wafer heat processing apparatus - Google Patents
Inner tube for use in a semiconductor wafer heat processing apparatus Download PDFInfo
- Publication number
- USD405430S USD405430S US29/074,301 US7430197F USD405430S US D405430 S USD405430 S US D405430S US 7430197 F US7430197 F US 7430197F US D405430 S USD405430 S US D405430S
- Authority
- US
- United States
- Prior art keywords
- processing apparatus
- semiconductor wafer
- inner tube
- heat processing
- wafer heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1: a perspective view of a inner tube for use in a semiconductor wafer heat processing apparatus;
FIG. 2: a front elevational view thereof, the rear elevational view, the right side view and the left side view are identical with the front view;
FIG. 3: a top plan view thereof;
FIG. 4: a bottom plan view thereof; and,
FIG. 5: a cross sectional view thereof taken along line V-V in FIG. 3.
Claims (1)
- I claim the ornamental design for inner tube for use in a semiconductor wafer heat processing apparatus, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP265397 | 1997-01-31 | ||
| JP9-2653 | 1997-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD405430S true USD405430S (en) | 1999-02-09 |
Family
ID=71726461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/074,301 Expired - Lifetime USD405430S (en) | 1997-01-31 | 1997-07-24 | Inner tube for use in a semiconductor wafer heat processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD405430S (en) |
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD611013S1 (en) * | 2008-03-28 | 2010-03-02 | Tokyo Electron Limited | Process tube for manufacturing semiconductor wafers |
| USD694366S1 (en) * | 2011-01-14 | 2013-11-26 | Kohler Co. | Faucet |
| USD711332S1 (en) * | 2012-03-20 | 2014-08-19 | Veeco Instruments Inc. | Multi-keyed spindle |
| USD711843S1 (en) * | 2013-06-28 | 2014-08-26 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD719114S1 (en) * | 2013-06-28 | 2014-12-09 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD720707S1 (en) * | 2013-06-28 | 2015-01-06 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD725055S1 (en) * | 2013-06-28 | 2015-03-24 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD726133S1 (en) * | 2012-03-20 | 2015-04-07 | Veeco Instruments Inc. | Keyed spindle |
| USD739832S1 (en) * | 2013-06-28 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD744967S1 (en) | 2012-03-20 | 2015-12-08 | Veeco Instruments Inc. | Spindle key |
| USD749287S1 (en) * | 2014-11-10 | 2016-02-09 | Dennis T. Thompson, Sr. | Hydraulic jack extension |
| USD770993S1 (en) * | 2015-09-04 | 2016-11-08 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD797011S1 (en) * | 2016-09-28 | 2017-09-12 | Kent R. Madison | Trailer tongue extender |
| USD798423S1 (en) * | 2015-12-21 | 2017-09-26 | Ipex Technologies Inc. | Pipe with extended bell portion |
| US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
| USD812595S1 (en) * | 2015-11-30 | 2018-03-13 | Kmw Inc. | Antenna |
| USD813210S1 (en) * | 2016-06-23 | 2018-03-20 | Voxx International Corporation | Antenna housing |
| USD971192S1 (en) | 2019-06-03 | 2022-11-29 | Space Exploration Technologies Corp. | Antenna apparatus |
| USD971900S1 (en) * | 2019-06-03 | 2022-12-06 | Space Exploration Technologies Corp. | Antenna apparatus |
| USD976242S1 (en) * | 2019-06-03 | 2023-01-24 | Space Exploration Technologies Corp. | Antenna apparatus |
| USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4857689A (en) | 1988-03-23 | 1989-08-15 | High Temperature Engineering Corporation | Rapid thermal furnace for semiconductor processing |
| US5314574A (en) | 1992-06-26 | 1994-05-24 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
| US5320218A (en) | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
| US5752796A (en) | 1996-01-24 | 1998-05-19 | Muka; Richard S. | Vacuum integrated SMIF system |
-
1997
- 1997-07-24 US US29/074,301 patent/USD405430S/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4857689A (en) | 1988-03-23 | 1989-08-15 | High Temperature Engineering Corporation | Rapid thermal furnace for semiconductor processing |
| US5320218A (en) | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
| US5314574A (en) | 1992-06-26 | 1994-05-24 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
| US5752796A (en) | 1996-01-24 | 1998-05-19 | Muka; Richard S. | Vacuum integrated SMIF system |
Cited By (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD611013S1 (en) * | 2008-03-28 | 2010-03-02 | Tokyo Electron Limited | Process tube for manufacturing semiconductor wafers |
| USD694366S1 (en) * | 2011-01-14 | 2013-11-26 | Kohler Co. | Faucet |
| USD698420S1 (en) | 2011-01-14 | 2014-01-28 | Kohler Co. | Faucet |
| USD704805S1 (en) | 2011-01-14 | 2014-05-13 | Kohler Co. | Faucet handle |
| USD704802S1 (en) | 2011-01-14 | 2014-05-13 | Kohler Co. | Faucet |
| USD704807S1 (en) | 2011-01-14 | 2014-05-13 | Kohler Co. | Waterspout |
| USD704800S1 (en) | 2011-01-14 | 2014-05-13 | Kohler Co. | Showerhead |
| USD744967S1 (en) | 2012-03-20 | 2015-12-08 | Veeco Instruments Inc. | Spindle key |
| USD726133S1 (en) * | 2012-03-20 | 2015-04-07 | Veeco Instruments Inc. | Keyed spindle |
| US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
| USD748591S1 (en) * | 2012-03-20 | 2016-02-02 | Veeco Instruments Inc. | Keyed spindle |
| USD711332S1 (en) * | 2012-03-20 | 2014-08-19 | Veeco Instruments Inc. | Multi-keyed spindle |
| USD725055S1 (en) * | 2013-06-28 | 2015-03-24 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD739832S1 (en) * | 2013-06-28 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD720707S1 (en) * | 2013-06-28 | 2015-01-06 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD711843S1 (en) * | 2013-06-28 | 2014-08-26 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD719114S1 (en) * | 2013-06-28 | 2014-12-09 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD749287S1 (en) * | 2014-11-10 | 2016-02-09 | Dennis T. Thompson, Sr. | Hydraulic jack extension |
| USD770993S1 (en) * | 2015-09-04 | 2016-11-08 | Hitachi Kokusai Electric Inc. | Reaction tube |
| USD812595S1 (en) * | 2015-11-30 | 2018-03-13 | Kmw Inc. | Antenna |
| USD798423S1 (en) * | 2015-12-21 | 2017-09-26 | Ipex Technologies Inc. | Pipe with extended bell portion |
| USD845936S1 (en) | 2016-06-23 | 2019-04-16 | Voxx International Corporation | Antenna housing |
| USD813210S1 (en) * | 2016-06-23 | 2018-03-20 | Voxx International Corporation | Antenna housing |
| USD797011S1 (en) * | 2016-09-28 | 2017-09-12 | Kent R. Madison | Trailer tongue extender |
| USD971192S1 (en) | 2019-06-03 | 2022-11-29 | Space Exploration Technologies Corp. | Antenna apparatus |
| USD971900S1 (en) * | 2019-06-03 | 2022-12-06 | Space Exploration Technologies Corp. | Antenna apparatus |
| USD976242S1 (en) * | 2019-06-03 | 2023-01-24 | Space Exploration Technologies Corp. | Antenna apparatus |
| USD1012070S1 (en) | 2019-06-03 | 2024-01-23 | Space Exploration Technologies Corp. | Antenna apparatus |
| USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
| USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| USD405429S (en) | Processing tube for use in a semiconductor wafer heat processing apparatus | |
| USD405062S (en) | Processing tube for use in a semiconductor wafer heat processing apparatus | |
| USD405431S (en) | Tube for use in a semiconductor wafer heat processing apparatus | |
| USD405430S (en) | Inner tube for use in a semiconductor wafer heat processing apparatus | |
| USD404372S (en) | Ring for use in a semiconductor wafer heat processing apparatus | |
| USD406113S (en) | Processing tube for use in a semiconductor wafer heat processing apparatus | |
| USD411176S (en) | Wafer boat for use in a semiconductor wafer heat processing apparatus | |
| USD409158S (en) | Wafer boat for use in a semiconductor wafer heat processing apparatus | |
| USD404370S (en) | Cap for use in a semiconductor wafer heat processing apparatus | |
| USD404371S (en) | Wafer boat for use in a semiconductor wafer heat processing apparatus | |
| USD424024S (en) | Quartz process tube | |
| USD407696S (en) | Inner tube for use in a semiconductor wafer heat processing apparatus | |
| USD404368S (en) | Outer tube for use in a semiconductor wafer heat processing apparatus | |
| USD421969S (en) | Semiconductor device | |
| USD395828S (en) | Bottle | |
| USD423463S (en) | Quartz process tube | |
| USD379799S (en) | Heat sink | |
| USD404015S (en) | Wafer boat for use in a semiconductor wafer heat processing apparatus | |
| USD418485S (en) | Semiconductor device | |
| USD381011S (en) | Heat sink | |
| USD418997S (en) | Adjustable table | |
| USD385788S (en) | Article carrier | |
| USD404369S (en) | Manifold cover for use in a semiconductor wafer heat processing apparatus | |
| USD427912S (en) | Bottle | |
| USD367469S (en) | Heat sink |