201132566 六、發明說明： 【發明所屬之技術領域】 “士Ϊ發明係關於一種用以運$玻璃基板的容器以及台車，更詳 =，j ’係關於—種在用以運送大型玻璃基板特別有效的運送技 =大型玻璃基板係在製造液晶顯示11等時偶防塵裝置所使 用之嘁影用防塵薄膜組件之製造用基板。 【先前技術】 ^大型積體電路等之半導體裝置或是液晶顯示器等的製造 光照射將齡於光罩賴鍵印至晶贼是原板。若有 !!2^粒_在此_光微影步驟中所使用之光罩，因為此等 艰收曝光的光，或使光折射。其結果，引起轉印圖案變 j®U邊緣的清晰度降低等，而影響到圖案的尺寸、品質、外 觀等，此皆為其問題點。 、 —鑑於此類問題，與光微影相關的步驟通常是於無塵室内進 :塵tm'難以常保光罩之清潔。因此，於光罩表面貼附 ===崎嫌歡娜靖，並使用此狀 ’因為異物不會直接附著於光罩的表面上，而是附 者於防，，驗件上’故在微影時若紐焦點對準於鮮之圖案 上，防塵薄膜組件上的異物就不會影響到轉印。 /、 件係將以具有良好透紐的石肖化纖維素、 iiii if巧所構成的透’塵薄膜，貼附或黏著在 乙烯等所構成的防塵薄膜组件框架的上端 面^ ’在防塵溥膜崎框架下端，設有用以裝著在光之 以及目的為保遽黏者層之脫離層(分離部）。 薄目t組件在貼附於光罩後，對於異物從外部附著於 身’則該異物有附著在光罩上之疑慮。因此，； 201132566 ^須為潔淨者’且《製造防麟騎使料大型麵基板 尚潔淨性。 一 [習知技術文獻] [專利文獻] 專利文獻1 :日本特開2007 — 250688號公報 【發明内容】 [發明所欲解決的問題] ㈣吾要求用於保管或運送防塵薄膜製造等所 使用的大型玻璃基板之容器，具有維持收納 面之潔淨性且不損傷基板的構造。 j㈣減衣 广iLti—種容器：由抗靜電性能佳、即使於摩 所構成，具有盡量防止基板與構成零件 腳於的方法’係使用安袭於基板運i容器的 而垂直運达之方法，在運送姻玻璃基板時會與天花板發 大型i垂ί運送等’而雜收納於基板運送容器内^ 會對基板造細傷而進行保管以及運 士於Εί事只上難明已充分滿足之(例如參照專利文獻U。 運’其目的在於提供—種運送用容器以及 用保管或運微影用防塵薄膜組件的製造等所使 時，雜触域大财縣板喊淨性且不 [解決問題之技術手段] 邊邊玻璃基板運送用容器，係1 的運送用容H，其特徵為3為1G麵以上的大型矩形玻璃基扳 體，;基板，及矩形的上部本 5亥下部本體具有：下外框部，設置在周邊部；下歲合部，設 201132566 S 了 S!該置ϊ置在4邊的各個周邊部;基板固 與該4邊的各周邊部ΐ彼此對，其為 設置的夾且摩駐却^ j j z遠之周邊部分別互相面對面 直，，部之夹具安裝部的 合部逆工合部’藉由該上嵌 具安裝部的旋触錢可裝卸。 下之心.切於該夾 基板^ί^ϊϊϊί^ΐ用台車，係用以運送本發明之玻璃 具有： °σ玻肖基板運_台車，該麵基板運送用台車 容安裝部之旋触具的支持部；以及用以維持該 水平面所形成的傾斜角之傾斜肢定部。 定於tto^flT。輕絲運顧轉，細斜岭基準可 [發明之功效] 2邊板f送岭糾4邊的各周邊料對向的 容哭羋祕/ ’分別設有用以使在收納玻璃基板的狀態之 ：；：:s: 因此，如你二「之士具所支持’能在既定的角度範圍傾斜。 而運、# 以及莧度方向皆受限制的通道亦可使容器傾斜 對 S造 【實施方式】 璃基進Ξ本發明之玻璃基板運送用容器以及玻 圖1係顯示玻璃基板收納於本發明的玻璃基板運送用容 §§ 的 201132566 I部♦體的狀態之-態樣之俯她略圖。玻璃基板η係i邊邊長 ^OOOmm以上，厚度為10mm以上的大型矩形玻璃基板，此玻 =土坂11載置於基板載置部15之上，該基板載置部15設於玻璃 ，板運容器的矩形的下部本體12的4叙各蝴邊部(周緣 土’以旋紹6從上方將設於該各個基板載置部ls的基板固定部 基^反固定具)14鎖緊，藉此固定破璃基板η。在此圖中，顯示基 板载置部15設於4邊的各周邊部的3個地方的例子。 射^ 設於4邊的各周邊部中的相鄰2邊的周邊部端之基板 有央具(基板定位部)13，其用以進行收納於下部本 體12内的狀態的玻璃基板u的定位。此基板定位部13，係在使 未^示)將玻璃_ 11载置於基板載置部15上時，用以 修正位置，例如轉鮮件與金屬製的歡構件所構成。 J者，4邊的各周邊部之中對向的 別^旋轉想18a、b的安裝部17a、b，_轉 二使：納玻T基板11的狀態之容器能對水平面傾 士二？互相面對面的狀態固定於此等安裝部％、b。因:匕連 狀夾具版與18b的直線，成為 部17a、b之旋轉夾具18a、b，係可裝卸。 杈人八扃 因為基板固疋部14 ’會接觸到涵斑其把11 AA 士 膜組件成膜的面，所以將面亦即防塵薄 的部分(邊糊之位置。此量靠端部 配麵數，或是其形狀，係按照在载置或是= 所用之搬運臂(未圖示)的形狀等 ^^玻喊板u時 發明的圖示所例示之形態。㈣田以即可，亚不限定於本 圖2係沿著圖1中^虛線八之 在周邊部(周緣部），設置具有下嵌人；；下°卩本體12， 部20，與形成於上外框部26的上&部^ = 2合 内部，該上外框部26設於密封交哭 口藉此k封各器 的周邊部。為了防止異物從外形的上部本體21 卜義入，欲合部的間隙宜盡可能的 201132566 觸而產生灰塵，體21與下部本體！2的歲合部因接 再者，為了提高容器内：的緣部埋人密合墊(未圖示）。 圖示?5，蝴料搭扣的=翻^將上下本體轉著膠帶(未 容器的下部本體12 基板定位部13、基板载置二==置於下部本體12的 龍或聚縮醛等之工鞀朔來、丨士 、'广板口疋°卩14的材質’可從尼 所造成的異物附著，、適當選擇。另外，為了減少由靜電 顏色，宜為黑色以便於電材料。又’此等樹脂構件的 別設^用^ = 2本體21的上面以及下部本體12的背面，分 " 方止受形的補強材22、23。又，因為在使容哭傾 裝载於運送用刍鱼拄，认n 口々社便谷為傾斜而 荷，所以於 ^；於成為下方侧之下部本體12的側面承載負 件(未圖示;八丨f 2 _面設有補強材24。若以搭扣的底座零 補強计的、^ :補強材23、24，則能提升作為補強材的剛性。 基板運送用容料^ 擇鐵鋼合金寺，但從維持玻璃 強声大的肺3度且錢_總重量之無來看，宜使用比 又大的材抖。另外，圖中符號25表示容ϋ的腳部。 面槪=’分別為沿著圖1中的虛線Β以及虛線C之剖 邱太濟;9二圖3所不，於基板載置部15 ’設有用以將收納於下 4本體12⑽狀態之玻璃基板11 S位之基板定位部13。 圖j係顯示將本發明的玻璃基板運送用容器裝載於運送用台 車巧態之立體圖。關於將運送容器運送時的姿態，吾人可設^ ^容器，主面於水平狀態下運送或於垂直豎立的狀態下運送，^ W者f高度方向有限制的情形有利，另一方面，在寬度方向有限 情形則，不利；後者則與其相反。在設置有空氣浴塵室或是 ^造裝置之實際的無塵室内的運送通道中，高度以及寬度方向皆 限制的^況並不少見。因此’宜可使玻璃基板運送用容器1〇傾 斜而運送’俾於在即使高度以及寬度方向皆受限制之情況下，亦 能運送。 圖5所示之態樣的運送用台車30,於框體31的柱部的頂部的 201132566 斜角決定央部並可裝卸，於此支持部32，設有傾 構）機構(亦即，使容111Q傾斜時的固定機 ί的翰屬、線、螺紋旋紐、搭扣等扣具。另外，從安全 οΐΐϋ看’宜财即使在傾斜角蚊機構脫落的情形下料 =不會旋轉的止動部(未圖示）。再者，於框體31的；設^; 哭持部32設有樹脂製輥(未圖示），能容易地使容 i送通，1G的傾斜可能範酬斜絲圍），係按照 之任二*丨及見度做適當設計即可，並*受到此圖的形態 赫α二 纟’在—般的運送通道，此傾斜肖細水平面為 基準，宜可維持於〇〜90度的範圍。 [實施例] 以下說明本發明的實施例，但本發明不限於此。 使用聚丙烯睛系的非晶性熱可塑性樹脂板(商品名： un arex ’二協化成(股)製造），藉由黏接製成圖丄至圖4所示之容 器下部本體12以及上部本體21。上部本體12與下部本體21的 内寸為1940mmxl800mm，組合各個本體的容器1〇的外型尺寸為 2020mmxl880mm，厚度為195mm。另外，此外型尺寸，係包含 補強材’但不包含突起部之值。 i補材22、23、24係將銘合金製擠製材料組合使用，採用防 止變形之高剛性的構造。又，玻璃基板n的大小，為 1780mmxl620mm，厚度為 17mm。 基板載置部15、基板固定部14以及基板定位部13，係將耐 磨耗性、抗靜電性能優良的超高分子量聚乙烯(商品名：U—PE^O， Nippon Polypenco Limited製造)以機械加工方式製成，配置於圖i 所不之玻靖基板11的周圍各邊的3個地方。 又’製成如圖5所不之運送用台車3〇，其容器1〇與水平面的 201132566 最大傾斜角度為65度，始古许,1n^ 麵酿，框舰高度(c)=):力1920麵，前後距離_ 部13^^於下方。預先使基板定位 運臂寺將玻璃基板11置於基板載置部15卜 =基板植部13㈣紋部，以顧玻璃基板11 _面來修正 的邊ίί來i鱗13糧卿蝴基板η H 基板定位部13鎖緊，固定玻璃基板11。 月圍'林體21與下部本體12重疊，以黏著膠帶穷封 周圍，亚以搭扣將上部本體21與下部本體12鎖緊。 山封 ^下來’將旋轉夹具18a、18b安裝於容^的對向的 点！_ 將巧轉夾具载置於設於運送用台車30的頂部之旋鏟 ^羹即螺2 ’亚將容器1G傾斜至既定的角度’而以傾斜角決定 機構即螺效旋轉容器1〇鎖固於運送用台車30。 肖夬疋 [產業上利用性] 刑上述’根據本發明’可提供—種確保收納於容器内的* I玻璃基板之潔淨性且不會對基板造成損傷之保管以及運 【圖式簡單說明】 圖1係顯示玻璃基板收納於容器的下部本體的狀態之— 之俯視概略圖。 心k 圖2係沿著圖1中的虛線A之剖面概略圖。 圖3係沿著圖！中的虛線b之剖面概略圖。 圖4係沿著圖1中的虛線c之剖面概略圖。 圖5係顯示將本發明的玻璃基板運送用容器裝載於 車的狀態之立體圖。 、用〇 【主要元件符號說明】 :玻璃基板運送用容器 10 201132566 11 :玻璃基板 12 :下部本體 13 :基板定位部 14 :基板固定部(基板固定具) 15 :基板載置部 16 :旋鈕 17a、b :安裝部 18a、b :旋轉夾具 19 :下外框部 20 :下嵌合部 21 :上部本體 22、23、24 :補強材 25 :腳部 26 :上外框部 27 :上嵌合部 30 :運送用台車 31 :框體 32 :旋轉夾具支持部 33 :車輪 a :總焉度 b:前後距離 c:框體最低高度201132566 VI. Description of the invention: [Technical field to which the invention belongs] "The invention of the gentry" relates to a container for transporting a glass substrate and a trolley, more specifically, the type of j' is particularly effective for transporting large glass substrates. Transportation technology: A large-sized glass substrate is a substrate for manufacturing a dust-proof film module for use in a dust-proof device when the liquid crystal display 11 or the like is manufactured. [Prior Art] A semiconductor device such as a large integrated circuit or a liquid crystal display. The manufacturing of light irradiation will be the age of the mask to the crystal thief is the original board. If there is!! 2 ^ grain _ in this _ light lithography step used in the reticle, because of these hard exposure light, or light Refraction. As a result, the transfer pattern is reduced in the sharpness of the edge of the j®U, which affects the size, quality, appearance, etc. of the pattern, which is a problem. - In view of such problems, and lithography The relevant steps are usually in the clean room: the dust tm' is difficult to keep the mask clean. Therefore, attaching to the surface of the mask ===Saki Kasumi, and using this shape' because the foreign matter does not directly attach to Mask table On the top, but attached to the defense, on the inspection piece, so if the focus is on the fresh pattern when the lithography is on, the foreign matter on the pellicle will not affect the transfer. A fine dust-coated film made of stone-like cellulose, iiii if, which is well-transparent, attached or adhered to the upper end surface of the dust-proof membrane module frame made of ethylene, etc. There is a release layer (separation portion) for holding the light and for the purpose of protecting the adhesive layer. After the thin t-component is attached to the photomask, the foreign matter adheres to the body from the outside, and the foreign matter adheres to the photomask. Therefore, 201132566 ^It must be a cleanser' and the "manufacturing anti-Lin riding material large-area substrate is still clean." [Practical Technical Literature] [Patent Literature] Patent Document 1: Japan Special Open 2007 - 250688 [Claim of the Invention] [Problems to be Solved by the Invention] (4) A container for storing or transporting a large-sized glass substrate used for the production of a dust-proof film, etc., has a structure for maintaining the cleanliness of the storage surface without damaging the substrate. Reduce the clothes iLt I-type container: It has a good antistatic property, even if it is composed of a motorcycle, and has a method of preventing the substrate and the components from being formed as much as possible, and adopting a method of traversing the substrate and transporting it vertically, and transporting the glass In the case of the substrate, the ceiling and the ceiling are shipped in a large size, and the container is transported in the substrate transport container. The substrate is finely wounded and stored, and it is difficult to satisfy the problem. (For example, refer to the patent literature. U. The purpose of the operation is to provide a container for transportation and the manufacture of a dust-proof membrane module for storage or transport of lithography. The miscellaneous touch area of Dacai County is not clear [technical means to solve the problem] The container for transporting the glass substrate on the side, the transport capacity H of the system 1 is characterized by a large rectangular glass base plate having a size of 1 G or more, and a substrate and a rectangular upper portion having a lower outer frame portion. It is installed in the peripheral part; the lower part of the old part is set to 201132566 S S! This is placed on each side of the four sides; the base plate is fixed to the peripheral parts of the four sides, which are set and clamped Residing in the vicinity of jjz Face-to-face with each other, the joint of the clamp mounting portion of the section is detachable by the screw contact of the upper insert mounting portion. The heart of the board is used to transport the glass of the present invention. The glass for transporting the present invention has: a σ σ 玻 、 、 、 、 、 、 、 、 、 、 、 、 、 、 a support portion; and an inclined limb portion for maintaining a tilt angle formed by the horizontal plane. Set at tto^flT. Light wire transport, the fine slanting ridge can be [the effect of the invention] 2 side plate f send lings to correct the side of each side of the four sides of the opposite side of the crying secret / 'respectively set to accommodate the state of the glass substrate :;::s: Therefore, if you are able to tilt at a given angle range, the lanes that are restricted by the movement, #, and the direction of the twist can also make the container tilt to the S. 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The glass substrate η is a large rectangular glass substrate having a length of 2,000 mm or more and a thickness of 10 mm or more. The glass substrate 11 is placed on the substrate mounting portion 15 and the substrate mounting portion 15 is provided on the glass. The four sides of the rectangular lower body 12 of the container are locked by the peripheral edge portion (the peripheral edge of the substrate is fixed from the top to the substrate fixing portion of the substrate mounting portion ls) The glass substrate η is fixed. In this figure, the substrate mounting portion 15 is shown on each of the four sides. An example of the three places of the side portions. The substrate is provided with a centering device (substrate positioning portion) 13 on the peripheral end of the adjacent two sides of each of the four peripheral portions, and is housed in the lower body 12 The positioning of the glass substrate u in the state of the substrate. The substrate positioning portion 13 is used to correct the position when the glass 11 is placed on the substrate mounting portion 15, such as a fresh-made member and a metal. In the case of the peripheral members of the four sides, the mounting portions 17a and b of the 18a and the b are rotated, so that the container of the state of the nanoglass T substrate 11 can be The horizontal planes are fixed to the mounting portions % and b in a state in which they face each other. The straight-shaped jig plate and the straight line of 18b are the rotating jigs 18a and b of the portions 17a and b, and are detachable.扃Because the substrate solid portion 14' will come into contact with the surface where the 11 AA film module is formed into a film, the surface is also the dust-thin portion (the position of the side paste. This amount depends on the number of end faces, or It is a shape, and it is illustrated by the illustration which was invented when the shape of the transport arm (not shown) used for mounting or = is used. The form is (4) Tian Yi can be, the second is not limited to this figure 2 is along the dotted line of Figure 1 in the peripheral part (peripheral part), provided with a lower embedded;; lower ° 卩 body 12, part 20, The upper outer frame portion 26 is provided in the upper portion of the upper outer frame portion 26, and the upper outer frame portion 26 is provided at the peripheral portion of the sealing device to seal the upper and lower portions of the device. Bu Yi entered, the gap between the parts to be combined should be as much as possible 201132566 touches the dust, the body 21 and the lower body! 2 of the old part of the junction, in order to improve the inside of the container: the buried part of the mat (not Figure 5: Figure 5, the buckle of the butterfly buckle = turn the upper and lower body to the tape (the lower body of the container 12, the substrate positioning portion 13, the substrate is placed two == the dragon or the poly placed on the lower body 12 The work of acetal, etc., gentleman, and the material of 'Guangbankou 疋°卩14' can be attached to foreign matter caused by Nie, and is appropriately selected. In addition, in order to reduce the color of the static electricity, it is preferably black to facilitate the electrical material. Further, the resin members are provided with the upper surface of the body 21 and the back surface of the lower body 12, and the shaped reinforcing members 22 and 23 are separated. In addition, since the squid is placed on the transport squid, the squid is loaded with the squid, so the negative side is carried on the side of the lower body 12 below. ; gossip f 2 _ surface is provided with reinforcing material 24. If the base of the buckle is zero-reinforcement, ^: reinforcing material 23, 24, the rigidity of the reinforcing material can be improved. Alloy Temple, but from the perspective of maintaining the strong lungs of the glass 3 degrees and the weight of the total weight, it is better to use a larger material than the other. In addition, the symbol 25 in the figure indicates the foot of the tolerant. The substrate is placed along the dotted line Β and the broken line C in FIG. 1 , and the substrate mounting portion 15 ′ is provided with a substrate for arranging the S substrate of the glass substrate 11 in the state of the lower body 12 ( 10 ). Fig. j is a perspective view showing a state in which the container for transporting a glass substrate of the present invention is mounted on a transporting trolley. With regard to the posture when transporting the transport container, the container can be provided, and the main surface is transported in a horizontal state. Or in a state of being vertically erected, it is advantageous to have a limit in the height direction of the W On the other hand, it is disadvantageous in the case where the width direction is limited; the latter is the opposite. In the transport passage in the actual clean room where the air bath chamber or the device is installed, the height and width directions are not limited. Therefore, it is preferable that the container for transporting the glass substrate 1 is tilted and transported, so that it can be transported even if the height and the width direction are restricted. The transporting cart 30 of the aspect shown in FIG. The 201132566 oblique angle at the top of the column portion of the frame body 31 determines the central portion and is detachable, and the support portion 32 is provided with a tilting mechanism (that is, the fixed machine ί when the volume 111Q is tilted, the line, Threaded knobs, buckles, etc. In addition, from the perspective of safety 宜 ' 宜 宜 宜 宜 宜 宜 宜 宜 宜 宜 宜 = = = = = = = = = = = = = = = = = = = = = = = = = = = 31; The setting of the crying holding portion 32 is provided with a resin roller (not shown), which can easily feed the container, and the tilt of the 1G can be used for the slanting of the wire. Degree can be properly designed, and * subject to the shape of this figure Like conveyance path, this fine inclined Shaw the horizontal plane, should be maintained in the range 〇~90 degrees. [Examples] Hereinafter, examples of the invention will be described, but the invention is not limited thereto. A polypropylene thermoplastic resin sheet (trade name: un arex 'manufactured by Nippon Kasei Co., Ltd.) was used, and the lower body 12 and the upper body of the container shown in Fig. 4 were formed by bonding. twenty one. The inner dimensions of the upper body 12 and the lower body 21 are 1940 mm x 800 mm, and the outer dimensions of the container 1 组合 of the respective bodies are 2020 mm x l 880 mm and the thickness is 195 mm. Further, in addition, the size includes the reinforcing material 'but does not include the value of the protrusion. i Refills 22, 23, and 24 are used in combination with extruded alloy extruded materials, and have a highly rigid structure that prevents deformation. Further, the size of the glass substrate n was 1780 mm x 620 mm and the thickness was 17 mm. The substrate mounting portion 15, the substrate fixing portion 14, and the substrate positioning portion 13 are mechanically made of ultrahigh molecular weight polyethylene (trade name: U-PE^O, manufactured by Nippon Polypenco Limited) excellent in abrasion resistance and antistatic performance. The processing method is formed in three places on each side of the surrounding glass substrate 11 of Fig. i. In addition, it is made into a transport trolley 3如图 as shown in Fig. 5, and its container 1〇 and the horizontal plane 201132566 have a maximum inclination angle of 65 degrees, the beginning of the ancient Xu, 1n^ surface brewing, the frame ship height (c) =): force 1920 face, front and rear distance _ part 13 ^ ^ below. Positioning the substrate in advance, the arm substrate is placed on the substrate mounting portion 15 = the substrate portion 13 (four) grain portion, and the edge of the glass substrate 11 is corrected. The positioning portion 13 is locked to fix the glass substrate 11. The moon body 21 overlaps with the lower body 12, and the adhesive tape is used to seal the periphery, and the upper body 21 and the lower body 12 are locked by the buckle. The mountain seal ^down' mounts the rotating jigs 18a, 18b to the opposite point of the volume! _ Place the clever fixture on the top of the transport trolley 30. The shovel 2' will tilt the container 1G to a predetermined angle' and lock it with the tilt angle determining mechanism. For the transport trolley 30.夬疋 夬疋 [Industrial Applicability] The above-mentioned 'in accordance with the present invention' provides a kind of storage and transportation that ensure the cleanliness of the *I glass substrate stored in the container without causing damage to the substrate. Fig. 1 is a schematic plan view showing a state in which a glass substrate is housed in a lower body of a container. Heart k Fig. 2 is a schematic cross-sectional view taken along the broken line A in Fig. 1. Figure 3 is along the map! A schematic cross-sectional view of the broken line b in the middle. Fig. 4 is a schematic cross-sectional view taken along the broken line c in Fig. 1. Fig. 5 is a perspective view showing a state in which the container for transporting a glass substrate of the present invention is mounted on a vehicle. 〇 [Main component symbol description]: Glass substrate transport container 10 201132566 11 : Glass substrate 12 : Lower body 13 : Substrate positioning portion 14 : Substrate fixing portion (substrate fixing device) 15 : Substrate mounting portion 16 : Knob 17a b: mounting portions 18a, b: rotating jig 19: lower outer frame portion 20: lower fitting portion 21: upper main body 22, 23, 24: reinforcing material 25: leg portion 26: upper outer frame portion 27: upper fitting Part 30: transporting carriage 31: frame 32: rotating jig support part 33: wheel a: total twist b: front-rear distance c: minimum height of the frame