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TW200916201A - Apparatus and method for applying coating liquid - Google Patents

Apparatus and method for applying coating liquid Download PDF

Info

Publication number
TW200916201A
TW200916201A TW097105989A TW97105989A TW200916201A TW 200916201 A TW200916201 A TW 200916201A TW 097105989 A TW097105989 A TW 097105989A TW 97105989 A TW97105989 A TW 97105989A TW 200916201 A TW200916201 A TW 200916201A
Authority
TW
Taiwan
Prior art keywords
coating
substrate
detecting means
unit
air
Prior art date
Application number
TW097105989A
Other languages
English (en)
Chinese (zh)
Inventor
Toshihiro Mori
Genshin Nakazawa
Original Assignee
Toray Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Eng Co Ltd filed Critical Toray Eng Co Ltd
Publication of TW200916201A publication Critical patent/TW200916201A/zh

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • H10P72/0604

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW097105989A 2007-03-29 2008-02-21 Apparatus and method for applying coating liquid TW200916201A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007086832A JP2008238144A (ja) 2007-03-29 2007-03-29 塗布装置及び塗布方法

Publications (1)

Publication Number Publication Date
TW200916201A true TW200916201A (en) 2009-04-16

Family

ID=39910115

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097105989A TW200916201A (en) 2007-03-29 2008-02-21 Apparatus and method for applying coating liquid

Country Status (4)

Country Link
JP (1) JP2008238144A (ja)
KR (1) KR20080088388A (ja)
CN (1) CN101274313B (ja)
TW (1) TW200916201A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI456017B (zh) * 2010-03-29 2014-10-11 Origin Electric 接合構件的製造方法及接合構件製造裝置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5303231B2 (ja) * 2008-09-30 2013-10-02 東京応化工業株式会社 塗布装置
JP5550255B2 (ja) * 2009-04-28 2014-07-16 株式会社日立製作所 ペースト塗布装置及び塗布方法
CN103480537B (zh) * 2013-10-18 2015-10-28 宁波泰立电子科技有限公司 一种自动点胶机
CN104722444B (zh) * 2013-12-23 2017-03-29 昆山国显光电有限公司 一种涂布装置
CN103706531B (zh) * 2013-12-23 2016-03-30 京东方科技集团股份有限公司 一种涂布设备
WO2015125756A1 (ja) * 2014-02-18 2015-08-27 オイレス工業株式会社 エアベアリング装置及び測定装置
TWI511795B (zh) * 2014-03-26 2015-12-11 Premtek Int Inc 噴塗方法及裝置
CN104384077B (zh) * 2014-11-12 2017-02-15 浙江龙旺纺织涂层有限公司 一种涂层面料用的涂料添加装置
JP6817861B2 (ja) * 2017-03-23 2021-01-20 株式会社Screenホールディングス 塗布装置および塗布方法
CN110000046A (zh) * 2019-04-29 2019-07-12 华工制造装备数字化国家工程中心有限公司 一种用于硬质载体的液体涂布设备及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61182737A (ja) * 1985-02-06 1986-08-15 Omron Tateisi Electronics Co 静圧空気軸受
JPS61270519A (ja) * 1985-05-27 1986-11-29 Mitsubishi Metal Corp 気体軸受の保護装置
JPH04210122A (ja) * 1990-12-06 1992-07-31 Kobe Steel Ltd 気体軸受の異常検出方法
JP3988817B2 (ja) * 2001-09-25 2007-10-10 大日本スクリーン製造株式会社 塗布液塗布方法及びその装置並びにその装置の塗布条件調整方法
JP2005218971A (ja) * 2004-02-06 2005-08-18 Hitachi Industries Co Ltd ペースト塗布機と塗布方法
JP4318563B2 (ja) * 2004-02-19 2009-08-26 東京エレクトロン株式会社 塗布装置及び塗布方法
JP2006095665A (ja) * 2004-09-30 2006-04-13 Sumitomo Heavy Ind Ltd ステージ装置
JP4490780B2 (ja) * 2004-10-07 2010-06-30 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4657855B2 (ja) * 2005-08-23 2011-03-23 東京応化工業株式会社 塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI456017B (zh) * 2010-03-29 2014-10-11 Origin Electric 接合構件的製造方法及接合構件製造裝置

Also Published As

Publication number Publication date
CN101274313B (zh) 2012-12-19
CN101274313A (zh) 2008-10-01
JP2008238144A (ja) 2008-10-09
KR20080088388A (ko) 2008-10-02

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