TW200916201A - Apparatus and method for applying coating liquid - Google Patents
Apparatus and method for applying coating liquid Download PDFInfo
- Publication number
- TW200916201A TW200916201A TW097105989A TW97105989A TW200916201A TW 200916201 A TW200916201 A TW 200916201A TW 097105989 A TW097105989 A TW 097105989A TW 97105989 A TW97105989 A TW 97105989A TW 200916201 A TW200916201 A TW 200916201A
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- substrate
- detecting means
- unit
- air
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
-
- H10P72/0604—
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Coating Apparatus (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007086832A JP2008238144A (ja) | 2007-03-29 | 2007-03-29 | 塗布装置及び塗布方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200916201A true TW200916201A (en) | 2009-04-16 |
Family
ID=39910115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097105989A TW200916201A (en) | 2007-03-29 | 2008-02-21 | Apparatus and method for applying coating liquid |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008238144A (ja) |
| KR (1) | KR20080088388A (ja) |
| CN (1) | CN101274313B (ja) |
| TW (1) | TW200916201A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI456017B (zh) * | 2010-03-29 | 2014-10-11 | Origin Electric | 接合構件的製造方法及接合構件製造裝置 |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5303231B2 (ja) * | 2008-09-30 | 2013-10-02 | 東京応化工業株式会社 | 塗布装置 |
| JP5550255B2 (ja) * | 2009-04-28 | 2014-07-16 | 株式会社日立製作所 | ペースト塗布装置及び塗布方法 |
| CN103480537B (zh) * | 2013-10-18 | 2015-10-28 | 宁波泰立电子科技有限公司 | 一种自动点胶机 |
| CN104722444B (zh) * | 2013-12-23 | 2017-03-29 | 昆山国显光电有限公司 | 一种涂布装置 |
| CN103706531B (zh) * | 2013-12-23 | 2016-03-30 | 京东方科技集团股份有限公司 | 一种涂布设备 |
| WO2015125756A1 (ja) * | 2014-02-18 | 2015-08-27 | オイレス工業株式会社 | エアベアリング装置及び測定装置 |
| TWI511795B (zh) * | 2014-03-26 | 2015-12-11 | Premtek Int Inc | 噴塗方法及裝置 |
| CN104384077B (zh) * | 2014-11-12 | 2017-02-15 | 浙江龙旺纺织涂层有限公司 | 一种涂层面料用的涂料添加装置 |
| JP6817861B2 (ja) * | 2017-03-23 | 2021-01-20 | 株式会社Screenホールディングス | 塗布装置および塗布方法 |
| CN110000046A (zh) * | 2019-04-29 | 2019-07-12 | 华工制造装备数字化国家工程中心有限公司 | 一种用于硬质载体的液体涂布设备及方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61182737A (ja) * | 1985-02-06 | 1986-08-15 | Omron Tateisi Electronics Co | 静圧空気軸受 |
| JPS61270519A (ja) * | 1985-05-27 | 1986-11-29 | Mitsubishi Metal Corp | 気体軸受の保護装置 |
| JPH04210122A (ja) * | 1990-12-06 | 1992-07-31 | Kobe Steel Ltd | 気体軸受の異常検出方法 |
| JP3988817B2 (ja) * | 2001-09-25 | 2007-10-10 | 大日本スクリーン製造株式会社 | 塗布液塗布方法及びその装置並びにその装置の塗布条件調整方法 |
| JP2005218971A (ja) * | 2004-02-06 | 2005-08-18 | Hitachi Industries Co Ltd | ペースト塗布機と塗布方法 |
| JP4318563B2 (ja) * | 2004-02-19 | 2009-08-26 | 東京エレクトロン株式会社 | 塗布装置及び塗布方法 |
| JP2006095665A (ja) * | 2004-09-30 | 2006-04-13 | Sumitomo Heavy Ind Ltd | ステージ装置 |
| JP4490780B2 (ja) * | 2004-10-07 | 2010-06-30 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
| JP4657855B2 (ja) * | 2005-08-23 | 2011-03-23 | 東京応化工業株式会社 | 塗布装置 |
-
2007
- 2007-03-29 JP JP2007086832A patent/JP2008238144A/ja active Pending
-
2008
- 2008-02-21 TW TW097105989A patent/TW200916201A/zh unknown
- 2008-03-03 KR KR1020080019542A patent/KR20080088388A/ko not_active Ceased
- 2008-03-28 CN CN200810087497XA patent/CN101274313B/zh active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI456017B (zh) * | 2010-03-29 | 2014-10-11 | Origin Electric | 接合構件的製造方法及接合構件製造裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101274313B (zh) | 2012-12-19 |
| CN101274313A (zh) | 2008-10-01 |
| JP2008238144A (ja) | 2008-10-09 |
| KR20080088388A (ko) | 2008-10-02 |
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