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JP2008238144A - 塗布装置及び塗布方法 - Google Patents

塗布装置及び塗布方法 Download PDF

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Publication number
JP2008238144A
JP2008238144A JP2007086832A JP2007086832A JP2008238144A JP 2008238144 A JP2008238144 A JP 2008238144A JP 2007086832 A JP2007086832 A JP 2007086832A JP 2007086832 A JP2007086832 A JP 2007086832A JP 2008238144 A JP2008238144 A JP 2008238144A
Authority
JP
Japan
Prior art keywords
coating
substrate
unit
detection means
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007086832A
Other languages
English (en)
Japanese (ja)
Inventor
Toshihiro Mori
俊裕 森
Motonobu Nakazawa
源伸 中澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Engineering Co Ltd
Original Assignee
Toray Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co Ltd filed Critical Toray Engineering Co Ltd
Priority to JP2007086832A priority Critical patent/JP2008238144A/ja
Priority to TW097105989A priority patent/TW200916201A/zh
Priority to KR1020080019542A priority patent/KR20080088388A/ko
Priority to CN200810087497XA priority patent/CN101274313B/zh
Publication of JP2008238144A publication Critical patent/JP2008238144A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • H10P72/0604—

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2007086832A 2007-03-29 2007-03-29 塗布装置及び塗布方法 Pending JP2008238144A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007086832A JP2008238144A (ja) 2007-03-29 2007-03-29 塗布装置及び塗布方法
TW097105989A TW200916201A (en) 2007-03-29 2008-02-21 Apparatus and method for applying coating liquid
KR1020080019542A KR20080088388A (ko) 2007-03-29 2008-03-03 도포장치 및 도포방법
CN200810087497XA CN101274313B (zh) 2007-03-29 2008-03-28 涂布装置及涂布方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007086832A JP2008238144A (ja) 2007-03-29 2007-03-29 塗布装置及び塗布方法

Publications (1)

Publication Number Publication Date
JP2008238144A true JP2008238144A (ja) 2008-10-09

Family

ID=39910115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007086832A Pending JP2008238144A (ja) 2007-03-29 2007-03-29 塗布装置及び塗布方法

Country Status (4)

Country Link
JP (1) JP2008238144A (zh)
KR (1) KR20080088388A (zh)
CN (1) CN101274313B (zh)
TW (1) TW200916201A (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103480537A (zh) * 2013-10-18 2014-01-01 宁波泰立电子科技有限公司 一种自动点胶机
CN103706531A (zh) * 2013-12-23 2014-04-09 京东方科技集团股份有限公司 一种涂布设备
KR101472598B1 (ko) * 2008-09-30 2014-12-15 도오꾜오까고오교 가부시끼가이샤 도포 장치
WO2015125756A1 (ja) * 2014-02-18 2015-08-27 オイレス工業株式会社 エアベアリング装置及び測定装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550255B2 (ja) * 2009-04-28 2014-07-16 株式会社日立製作所 ペースト塗布装置及び塗布方法
JP5460418B2 (ja) * 2010-03-29 2014-04-02 オリジン電気株式会社 接合部材の製造方法及び接合部材製造装置
CN104722444B (zh) * 2013-12-23 2017-03-29 昆山国显光电有限公司 一种涂布装置
TWI511795B (zh) * 2014-03-26 2015-12-11 Premtek Int Inc 噴塗方法及裝置
CN104384077B (zh) * 2014-11-12 2017-02-15 浙江龙旺纺织涂层有限公司 一种涂层面料用的涂料添加装置
JP6817861B2 (ja) * 2017-03-23 2021-01-20 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
CN110000046A (zh) * 2019-04-29 2019-07-12 华工制造装备数字化国家工程中心有限公司 一种用于硬质载体的液体涂布设备及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61182737A (ja) * 1985-02-06 1986-08-15 Omron Tateisi Electronics Co 静圧空気軸受
JPS61270519A (ja) * 1985-05-27 1986-11-29 Mitsubishi Metal Corp 気体軸受の保護装置
JPH04210122A (ja) * 1990-12-06 1992-07-31 Kobe Steel Ltd 気体軸受の異常検出方法
JP2003093959A (ja) * 2001-09-25 2003-04-02 Dainippon Screen Mfg Co Ltd 塗布液塗布方法及びその装置並びにその装置の塗布条件調整方法
JP2005236009A (ja) * 2004-02-19 2005-09-02 Tokyo Electron Ltd 塗布装置及び塗布方法
JP2006095665A (ja) * 2004-09-30 2006-04-13 Sumitomo Heavy Ind Ltd ステージ装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005218971A (ja) * 2004-02-06 2005-08-18 Hitachi Industries Co Ltd ペースト塗布機と塗布方法
JP4490780B2 (ja) * 2004-10-07 2010-06-30 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4657855B2 (ja) * 2005-08-23 2011-03-23 東京応化工業株式会社 塗布装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61182737A (ja) * 1985-02-06 1986-08-15 Omron Tateisi Electronics Co 静圧空気軸受
JPS61270519A (ja) * 1985-05-27 1986-11-29 Mitsubishi Metal Corp 気体軸受の保護装置
JPH04210122A (ja) * 1990-12-06 1992-07-31 Kobe Steel Ltd 気体軸受の異常検出方法
JP2003093959A (ja) * 2001-09-25 2003-04-02 Dainippon Screen Mfg Co Ltd 塗布液塗布方法及びその装置並びにその装置の塗布条件調整方法
JP2005236009A (ja) * 2004-02-19 2005-09-02 Tokyo Electron Ltd 塗布装置及び塗布方法
JP2006095665A (ja) * 2004-09-30 2006-04-13 Sumitomo Heavy Ind Ltd ステージ装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101472598B1 (ko) * 2008-09-30 2014-12-15 도오꾜오까고오교 가부시끼가이샤 도포 장치
CN103480537A (zh) * 2013-10-18 2014-01-01 宁波泰立电子科技有限公司 一种自动点胶机
CN103480537B (zh) * 2013-10-18 2015-10-28 宁波泰立电子科技有限公司 一种自动点胶机
CN103706531A (zh) * 2013-12-23 2014-04-09 京东方科技集团股份有限公司 一种涂布设备
WO2015125756A1 (ja) * 2014-02-18 2015-08-27 オイレス工業株式会社 エアベアリング装置及び測定装置

Also Published As

Publication number Publication date
CN101274313B (zh) 2012-12-19
CN101274313A (zh) 2008-10-01
TW200916201A (en) 2009-04-16
KR20080088388A (ko) 2008-10-02

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