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JP1711119S - Susceptoring - Google Patents

Susceptoring

Info

Publication number
JP1711119S
JP1711119S JP2021022981F JP2021022981F JP1711119S JP 1711119 S JP1711119 S JP 1711119S JP 2021022981 F JP2021022981 F JP 2021022981F JP 2021022981 F JP2021022981 F JP 2021022981F JP 1711119 S JP1711119 S JP 1711119S
Authority
JP
Japan
Prior art keywords
susceptoring
wafer
article
hold
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021022981F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2021022981F priority Critical patent/JP1711119S/en
Application granted granted Critical
Publication of JP1711119S publication Critical patent/JP1711119S/en
Priority to US29/834,637 priority patent/USD1037186S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタリングである。This article is a susceptor ring used to hold a wafer in a semiconductor manufacturing apparatus or the like.

JP2021022981F 2021-10-22 2021-10-22 Susceptoring Active JP1711119S (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021022981F JP1711119S (en) 2021-10-22 2021-10-22 Susceptoring
US29/834,637 USD1037186S1 (en) 2021-10-22 2022-04-13 Susceptor ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021022981F JP1711119S (en) 2021-10-22 2021-10-22 Susceptoring

Publications (1)

Publication Number Publication Date
JP1711119S true JP1711119S (en) 2022-03-29

Family

ID=80912671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021022981F Active JP1711119S (en) 2021-10-22 2021-10-22 Susceptoring

Country Status (2)

Country Link
US (1) USD1037186S1 (en)
JP (1) JP1711119S (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1094321S1 (en) 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor cover
USD1094320S1 (en) 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor
USD1094322S1 (en) 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor
USD1095473S1 (en) 2022-10-20 2025-09-30 Nuflare Technology, Inc. Susceptor
USD1095471S1 (en) 2022-10-20 2025-09-30 Nuflare Technology, Inc. Susceptor
USD1095472S1 (en) 2022-10-20 2025-09-30 Nuflare Technology, Inc. Susceptor cover
USD1096676S1 (en) 2022-10-20 2025-10-07 Nuflare Technology, Inc. Cover base for susceptors
USD1098057S1 (en) 2022-10-20 2025-10-14 Nuflare Technology, Inc. Susceptor cover

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1741173S (en) * 2022-10-20 2023-04-06 Heaters for heating semiconductor wafers and susceptors
JP1746407S (en) * 2023-01-11 2023-06-15 Susceptor
JP1746403S (en) * 2023-01-11 2023-06-15 Susceptor
JP1746408S (en) * 2023-01-11 2023-06-15 Susceptor
JP1746406S (en) * 2023-01-11 2023-06-15 Susceptor unit
JP1746405S (en) * 2023-01-11 2023-06-15 Susceptor cover
JP1746404S (en) * 2023-01-11 2023-06-15 Susceptor cover base

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099041A (en) * 1977-04-11 1978-07-04 Rca Corporation Susceptor for heating semiconductor substrates
JPH0834187B2 (en) * 1989-01-13 1996-03-29 東芝セラミックス株式会社 Susceptor
US5844205A (en) * 1996-04-19 1998-12-01 Applied Komatsu Technology, Inc. Heated substrate support structure
JPH11343571A (en) * 1998-05-29 1999-12-14 Ngk Insulators Ltd Susceptor
US20030017268A1 (en) * 2001-07-18 2003-01-23 Applied Materials, Inc. .method of cvd titanium nitride film deposition for increased titanium nitride film uniformity
JP4034145B2 (en) * 2002-08-09 2008-01-16 住友大阪セメント株式会社 Susceptor device
DE102005045081B4 (en) * 2004-09-29 2011-07-07 Covalent Materials Corp. susceptor
KR20070093493A (en) * 2006-03-14 2007-09-19 엘지이노텍 주식회사 Susceptor and Semiconductor Manufacturing Equipment
USD600223S1 (en) * 2008-08-07 2009-09-15 Ravinder Aggarwal Susceptor ring
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
JP1648519S (en) * 2018-10-04 2019-12-23
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
USD948463S1 (en) * 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US11764101B2 (en) * 2019-10-24 2023-09-19 ASM IP Holding, B.V. Susceptor for semiconductor substrate processing

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1094321S1 (en) 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor cover
USD1094320S1 (en) 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor
USD1094322S1 (en) 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor
USD1095473S1 (en) 2022-10-20 2025-09-30 Nuflare Technology, Inc. Susceptor
USD1095471S1 (en) 2022-10-20 2025-09-30 Nuflare Technology, Inc. Susceptor
USD1095472S1 (en) 2022-10-20 2025-09-30 Nuflare Technology, Inc. Susceptor cover
USD1096676S1 (en) 2022-10-20 2025-10-07 Nuflare Technology, Inc. Cover base for susceptors
USD1098057S1 (en) 2022-10-20 2025-10-14 Nuflare Technology, Inc. Susceptor cover

Also Published As

Publication number Publication date
USD1037186S1 (en) 2024-07-30

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