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IT1395105B1 - Sensore di accelerazione a tre assi - Google Patents

Sensore di accelerazione a tre assi

Info

Publication number
IT1395105B1
IT1395105B1 ITMI2009A001327A ITMI20091327A IT1395105B1 IT 1395105 B1 IT1395105 B1 IT 1395105B1 IT MI2009A001327 A ITMI2009A001327 A IT MI2009A001327A IT MI20091327 A ITMI20091327 A IT MI20091327A IT 1395105 B1 IT1395105 B1 IT 1395105B1
Authority
IT
Italy
Prior art keywords
acceleration
axis sensor
sensor
axis
Prior art date
Application number
ITMI2009A001327A
Other languages
English (en)
Inventor
Johannes Classen
Lars Tebje
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20091327A1 publication Critical patent/ITMI20091327A1/it
Application granted granted Critical
Publication of IT1395105B1 publication Critical patent/IT1395105B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
ITMI2009A001327A 2008-07-30 2009-07-27 Sensore di accelerazione a tre assi IT1395105B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008040855.7A DE102008040855B4 (de) 2008-07-30 2008-07-30 Dreiachsiger Beschleunigungssensor

Publications (2)

Publication Number Publication Date
ITMI20091327A1 ITMI20091327A1 (it) 2010-01-31
IT1395105B1 true IT1395105B1 (it) 2012-09-05

Family

ID=41461735

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A001327A IT1395105B1 (it) 2008-07-30 2009-07-27 Sensore di accelerazione a tre assi

Country Status (5)

Country Link
US (1) US8333113B2 (it)
CN (1) CN101639487B (it)
DE (1) DE102008040855B4 (it)
IT (1) IT1395105B1 (it)
TW (1) TWI464404B (it)

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DE102009029202B4 (de) * 2009-09-04 2017-05-24 Robert Bosch Gmbh Verfahren zum Herstellen eines mikromechanischen Systems
JP5527019B2 (ja) * 2010-05-28 2014-06-18 セイコーエプソン株式会社 物理量センサーおよび電子機器
KR101904178B1 (ko) 2010-09-18 2018-10-04 페어차일드 세미컨덕터 코포레이션 단일 구동 모드를 가진 미세기계화 모노리식 3축 자이로스코프
CN103221333B (zh) * 2010-09-18 2017-05-31 快捷半导体公司 多晶片mems封装
KR20130052652A (ko) 2010-09-18 2013-05-22 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템을 위한 시일된 패키징
EP2619536B1 (en) 2010-09-20 2016-11-02 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
US8839670B2 (en) 2010-11-24 2014-09-23 Invensense, Inc. Anchor-tilt cancelling accelerometer
CN102147424B (zh) * 2011-03-01 2012-11-28 东南大学 三轴集成硅微谐振式加速度计
US20130042686A1 (en) * 2011-08-17 2013-02-21 Sitronix Technology Corp. Inertia sensing apparatus
DE102012200740B4 (de) * 2011-10-27 2024-03-21 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
US8991251B1 (en) * 2011-11-21 2015-03-31 Western Digital (Fremont), Llc Hybrid capacitive and piezoelectric motion sensing transducer
DE102011057110A1 (de) 2011-12-28 2013-07-04 Maxim Integrated Products, Inc. MEMS-Beschleunigungssensor
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
JP5799929B2 (ja) * 2012-10-02 2015-10-28 株式会社村田製作所 加速度センサ
DE102013208824B4 (de) * 2013-05-14 2025-10-02 Robert Bosch Gmbh Beschleunigungssensor
CN104166016B (zh) 2013-05-16 2016-06-01 中国科学院地质与地球物理研究所 一种高灵敏度三轴mems加速度计及其制造工艺
EP2811460A3 (en) * 2013-06-04 2015-11-11 Technion Research & Development Foundation Limited Creating a synthetic model with organic veracity
FI20135714L (fi) * 2013-06-28 2014-12-29 Murata Manufacturing Co Kapasitiivinen mikromekaaninen kiihtyvyysanturi
US10207916B2 (en) 2014-05-28 2019-02-19 3M Innovative Properties Company MEMS devices on flexible substrate
JP6468167B2 (ja) * 2015-11-03 2019-02-13 株式会社デンソー 力学量センサ
US10393770B2 (en) * 2016-04-28 2019-08-27 Semiconductor Components Industries, Llc Multi-axis accelerometer with reduced stress sensitivity
KR101915954B1 (ko) * 2016-06-29 2018-11-08 주식회사 신성씨앤티 멤스 기반의 3축 가속도 센서
TWI605348B (zh) * 2016-08-22 2017-11-11 Univ Chang Gung Tilt estimation method
US10247753B2 (en) * 2017-02-14 2019-04-02 Nxp Usa, Inc. MEMS device with off-axis shock protection
CN107421630A (zh) * 2017-07-31 2017-12-01 中冶华天南京工程技术有限公司 振动传感器和检测装置
JP2020030067A (ja) * 2018-08-21 2020-02-27 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器、および移動体
US11733263B2 (en) * 2018-09-21 2023-08-22 Analog Devices, Inc. 3-axis accelerometer
JP2022014567A (ja) * 2020-07-07 2022-01-20 セイコーエプソン株式会社 慣性センサー及び慣性計測装置
EP4116717B1 (en) * 2021-07-05 2024-10-23 Murata Manufacturing Co., Ltd. Accelerometer with two seesaws

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US6955086B2 (en) * 2001-11-19 2005-10-18 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor
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JP2004294332A (ja) * 2003-03-27 2004-10-21 Denso Corp 半導体力学量センサ
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TW200519386A (en) * 2003-08-14 2005-06-16 Sensfab Pte Ltd A three-axis accelerometer
US6981416B2 (en) * 2003-11-21 2006-01-03 Chung-Shan Institute Of Science And Technology Multi-axis solid state accelerometer
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US7150250B2 (en) * 2004-07-26 2006-12-19 General Motors Corporation Valve and fueling strategy for operating a controlled auto-ignition four-stroke internal combustion engine
US7121141B2 (en) * 2005-01-28 2006-10-17 Freescale Semiconductor, Inc. Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area
FI119299B (fi) * 2005-06-17 2008-09-30 Vti Technologies Oy Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi
US20070220973A1 (en) 2005-08-12 2007-09-27 Cenk Acar Multi-axis micromachined accelerometer and rate sensor
US7690255B2 (en) * 2006-08-31 2010-04-06 Evigia Systems, Inc. Three-axis inertial sensor and method of forming
US7487661B2 (en) * 2006-10-11 2009-02-10 Freescale Semiconductor, Inc. Sensor having free fall self-test capability and method therefor
ITTO20060774A1 (it) * 2006-10-27 2008-04-28 St Microelectronics Srl Sensore microelettromeccanico avente molteplici valori di fondo scala e di sensibilita'
US8047075B2 (en) * 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
CN201083760Y (zh) * 2007-10-19 2008-07-09 中国电子科技集团公司第十三研究所 三轴集成压阻式加速度传感器
US8020443B2 (en) * 2008-10-30 2011-09-20 Freescale Semiconductor, Inc. Transducer with decoupled sensing in mutually orthogonal directions

Also Published As

Publication number Publication date
TWI464404B (zh) 2014-12-11
TW201011296A (en) 2010-03-16
US20100024554A1 (en) 2010-02-04
DE102008040855B4 (de) 2022-05-25
CN101639487B (zh) 2017-04-19
CN101639487A (zh) 2010-02-03
ITMI20091327A1 (it) 2010-01-31
US8333113B2 (en) 2012-12-18
DE102008040855A1 (de) 2010-02-04

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