IT1394066B1 - Sensore di accelerazione con massa sismica impegnantesi attorno a questo - Google Patents
Sensore di accelerazione con massa sismica impegnantesi attorno a questoInfo
- Publication number
- IT1394066B1 IT1394066B1 ITMI2009A000822A ITMI20090822A IT1394066B1 IT 1394066 B1 IT1394066 B1 IT 1394066B1 IT MI2009A000822 A ITMI2009A000822 A IT MI2009A000822A IT MI20090822 A ITMI20090822 A IT MI20090822A IT 1394066 B1 IT1394066 B1 IT 1394066B1
- Authority
- IT
- Italy
- Prior art keywords
- demanding
- acceleration sensor
- seismic mass
- mass around
- around
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102008001863A DE102008001863A1 (de) | 2008-05-19 | 2008-05-19 | Beschleunigungssensor mit umgreifender seismischer Masse |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ITMI20090822A1 ITMI20090822A1 (it) | 2009-11-20 |
| IT1394066B1 true IT1394066B1 (it) | 2012-05-25 |
Family
ID=41212387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ITMI2009A000822A IT1394066B1 (it) | 2008-05-19 | 2009-05-13 | Sensore di accelerazione con massa sismica impegnantesi attorno a questo |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20090282914A1 (it) |
| DE (1) | DE102008001863A1 (it) |
| FR (1) | FR2931247A1 (it) |
| IT (1) | IT1394066B1 (it) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007047592B4 (de) * | 2007-10-05 | 2022-01-05 | Robert Bosch Gmbh | Beschleunigungssensor |
| DE102008002606B4 (de) | 2008-06-24 | 2020-03-12 | Robert Bosch Gmbh | Mikromechanischer Beschleunigungssensor mit offener seismischer Masse |
| DE102008054553B4 (de) * | 2008-12-12 | 2022-02-17 | Robert Bosch Gmbh | Beschleunigungssensor |
| JP5880877B2 (ja) | 2012-05-15 | 2016-03-09 | 株式会社デンソー | センサ装置 |
| US9316666B2 (en) * | 2012-11-27 | 2016-04-19 | Murata Manufacturing Co., Ltd. | Acceleration sensor having a capacitor array located in the center of an inertial mass |
| US9218065B2 (en) * | 2013-03-11 | 2015-12-22 | Intel Corporation | Stress tolerant MEMS accelerometer |
| GB2523320A (en) * | 2014-02-19 | 2015-08-26 | Atlantic Inertial Systems Ltd | Accelerometers |
| JP6464738B2 (ja) | 2014-12-26 | 2019-02-06 | 株式会社デンソー | 加速度センサ |
| JP6558110B2 (ja) | 2015-07-10 | 2019-08-14 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
| JP6575187B2 (ja) * | 2015-07-10 | 2019-09-18 | セイコーエプソン株式会社 | 物理量センサー、物理量センサー装置、電子機器および移動体 |
| ITUA20162172A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento |
| CN107782916B (zh) * | 2016-08-27 | 2021-07-09 | 深迪半导体(绍兴)有限公司 | 一种三轴加速计 |
| JP6763458B2 (ja) * | 2019-07-17 | 2020-09-30 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19500800A1 (de) | 1994-06-16 | 1995-12-21 | Bosch Gmbh Robert | Beschleunigungssensor |
| US5635640A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
| DE19523895A1 (de) | 1995-06-30 | 1997-01-02 | Bosch Gmbh Robert | Beschleunigungssensor |
| DE19639946B4 (de) | 1996-09-27 | 2006-09-21 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| US6070464A (en) * | 1997-09-05 | 2000-06-06 | Motorola, Inc. | Sensing structure comprising a movable mass and a self-test structure |
| DE19844686A1 (de) * | 1998-09-29 | 2000-04-06 | Fraunhofer Ges Forschung | Mikromechanischer Drehratensensor und Verfahren zur Herstellung |
| DE19938206A1 (de) * | 1999-08-12 | 2001-02-15 | Bosch Gmbh Robert | Mikromechanischer Drehbeschleunigungssensor |
| DE69938658D1 (de) | 1999-09-10 | 2008-06-19 | St Microelectronics Srl | Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur |
| US6393913B1 (en) * | 2000-02-08 | 2002-05-28 | Sandia Corporation | Microelectromechanical dual-mass resonator structure |
| US6401536B1 (en) * | 2000-02-11 | 2002-06-11 | Motorola, Inc. | Acceleration sensor and method of manufacture |
| CN100523821C (zh) | 2002-07-19 | 2009-08-05 | 模拟设备公司 | 加速度计以及在加速度计中减小偏移的方法 |
| DE602004031938D1 (de) | 2004-08-13 | 2011-05-05 | St Microelectronics Srl | Mikroelektromechanische Struktur, insbesondere Beschleunigungssensor, mit verbesserter Unempfindlichkeit gegenüber thermischen und mechanischen Spannungen |
| DE602004023082D1 (de) * | 2004-09-22 | 2009-10-22 | St Microelectronics Srl | Mikro-Elektromechanische Struktur mit Selbstkompensation von durch thermomechanische Spannungen hervorgerufenen thermischen Driften |
| DE102006033636B4 (de) | 2006-07-20 | 2022-08-11 | Robert Bosch Gmbh | Beschleunigungssensor |
| DE102007047592B4 (de) | 2007-10-05 | 2022-01-05 | Robert Bosch Gmbh | Beschleunigungssensor |
-
2008
- 2008-05-19 DE DE102008001863A patent/DE102008001863A1/de not_active Withdrawn
-
2009
- 2009-04-20 US US12/386,612 patent/US20090282914A1/en not_active Abandoned
- 2009-05-07 FR FR0953037A patent/FR2931247A1/fr not_active Withdrawn
- 2009-05-13 IT ITMI2009A000822A patent/IT1394066B1/it active
Also Published As
| Publication number | Publication date |
|---|---|
| FR2931247A1 (fr) | 2009-11-20 |
| DE102008001863A1 (de) | 2009-11-26 |
| ITMI20090822A1 (it) | 2009-11-20 |
| US20090282914A1 (en) | 2009-11-19 |
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