TW200519386A - A three-axis accelerometer - Google Patents
A three-axis accelerometerInfo
- Publication number
- TW200519386A TW200519386A TW093124123A TW93124123A TW200519386A TW 200519386 A TW200519386 A TW 200519386A TW 093124123 A TW093124123 A TW 093124123A TW 93124123 A TW93124123 A TW 93124123A TW 200519386 A TW200519386 A TW 200519386A
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- major surface
- etching
- accelerometer
- axis accelerometer
- Prior art date
Links
- 238000005530 etching Methods 0.000 abstract 4
- 230000000873 masking effect Effects 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
Landscapes
- Weting (AREA)
Abstract
The invention compries a method of fabricating a three-axis accelerometer. A first wafer having a first and a second major surface provided with etching at least two cavities in the first major surface of the first wafer and patterning metal onto the first major surface of the first wafer to form electrical connections for a third accelerometer. A second wafer, etching a portion of a first major surface of the second wafer and bonding the first major surface of the first wafer to the first major surface of the second wafer. The etching and bonding of the surfaces deposit and pattern metallizating, and deposit and pattern a masking layer on the second major surface of the second wafer, defining the shape of a first, a second and third accelerometer. The first and second accelerometers are formed over the cavities etched in the first major surface of the first wafer. Etching the second major surface of the second wafer to form the accelerometer where the first and second accelerometers each include at least two independent sets of the beams. The masking layer from the second major surface of the second wafer is then removed.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG2003004840 | 2003-08-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200519386A true TW200519386A (en) | 2005-06-16 |
Family
ID=57799211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093124123A TW200519386A (en) | 2003-08-14 | 2004-08-11 | A three-axis accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200519386A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI464404B (en) * | 2008-07-30 | 2014-12-11 | Bosch Gmbh Robert | Dreiachsiger beschleunigungssensor |
| TWI464406B (en) * | 2008-08-19 | 2014-12-11 | Bosch Gmbh Robert | Dreiachsiger beschleunigungssensor |
-
2004
- 2004-08-11 TW TW093124123A patent/TW200519386A/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI464404B (en) * | 2008-07-30 | 2014-12-11 | Bosch Gmbh Robert | Dreiachsiger beschleunigungssensor |
| TWI464406B (en) * | 2008-08-19 | 2014-12-11 | Bosch Gmbh Robert | Dreiachsiger beschleunigungssensor |
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