DE102007008568B8 - Halbleitervorrichtung mit IGBT und Diode - Google Patents
Halbleitervorrichtung mit IGBT und Diode Download PDFInfo
- Publication number
- DE102007008568B8 DE102007008568B8 DE102007008568A DE102007008568A DE102007008568B8 DE 102007008568 B8 DE102007008568 B8 DE 102007008568B8 DE 102007008568 A DE102007008568 A DE 102007008568A DE 102007008568 A DE102007008568 A DE 102007008568A DE 102007008568 B8 DE102007008568 B8 DE 102007008568B8
- Authority
- DE
- Germany
- Prior art keywords
- igbt
- diode
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/411—Insulated-gate bipolar transistors [IGBT]
- H10D12/441—Vertical IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
- H10D8/411—PN diodes having planar bodies
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006-049300 | 2006-02-24 | ||
| JP2006049300A JP5011748B2 (ja) | 2006-02-24 | 2006-02-24 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE102007008568A1 DE102007008568A1 (de) | 2007-09-06 |
| DE102007008568B4 DE102007008568B4 (de) | 2012-11-08 |
| DE102007008568B8 true DE102007008568B8 (de) | 2013-01-17 |
Family
ID=38329473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102007008568A Expired - Fee Related DE102007008568B8 (de) | 2006-02-24 | 2007-02-21 | Halbleitervorrichtung mit IGBT und Diode |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8102025B2 (de) |
| JP (1) | JP5011748B2 (de) |
| CN (1) | CN100559589C (de) |
| DE (1) | DE102007008568B8 (de) |
Families Citing this family (69)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070078524A1 (en) * | 2005-09-30 | 2007-04-05 | Balcones Fuel Technology, Inc. | Cuber feeder system and method |
| EP1909332A1 (de) * | 2006-10-05 | 2008-04-09 | ABB Technology AG | Leistungshalbleiteranordnung |
| JP5157247B2 (ja) * | 2006-10-30 | 2013-03-06 | 三菱電機株式会社 | 電力半導体装置 |
| JP4483918B2 (ja) * | 2007-09-18 | 2010-06-16 | 株式会社デンソー | 半導体装置 |
| JP5167741B2 (ja) * | 2007-09-21 | 2013-03-21 | 株式会社デンソー | 半導体装置 |
| JP5186868B2 (ja) * | 2007-10-03 | 2013-04-24 | 株式会社デンソー | 半導体装置及びその製造方法 |
| JP5332175B2 (ja) * | 2007-10-24 | 2013-11-06 | 富士電機株式会社 | 制御回路を備える半導体装置 |
| JP5267036B2 (ja) * | 2007-12-05 | 2013-08-21 | 株式会社デンソー | 半導体装置の製造方法 |
| JP4544313B2 (ja) * | 2008-02-19 | 2010-09-15 | トヨタ自動車株式会社 | Igbtとその製造方法 |
| JP5206541B2 (ja) * | 2008-04-01 | 2013-06-12 | 株式会社デンソー | 半導体装置およびその製造方法 |
| JP4743447B2 (ja) * | 2008-05-23 | 2011-08-10 | 三菱電機株式会社 | 半導体装置 |
| JP2010098189A (ja) * | 2008-10-17 | 2010-04-30 | Toshiba Corp | 半導体装置 |
| JP4947111B2 (ja) * | 2008-12-10 | 2012-06-06 | 株式会社デンソー | 半導体装置の製造方法 |
| US8507352B2 (en) * | 2008-12-10 | 2013-08-13 | Denso Corporation | Method of manufacturing semiconductor device including insulated gate bipolar transistor and diode |
| JP5637175B2 (ja) * | 2008-12-24 | 2014-12-10 | 株式会社デンソー | 半導体装置 |
| JP5045733B2 (ja) * | 2008-12-24 | 2012-10-10 | 株式会社デンソー | 半導体装置 |
| JP5366297B2 (ja) * | 2009-02-10 | 2013-12-11 | 富士電機株式会社 | 半導体装置 |
| JP4877337B2 (ja) * | 2009-02-17 | 2012-02-15 | トヨタ自動車株式会社 | 半導体装置 |
| JP5577628B2 (ja) * | 2009-06-05 | 2014-08-27 | トヨタ自動車株式会社 | 半導体装置 |
| EP2442355B1 (de) | 2009-06-11 | 2014-04-23 | Toyota Jidosha Kabushiki Kaisha | Halbleiterbauelement |
| JP5333342B2 (ja) * | 2009-06-29 | 2013-11-06 | 株式会社デンソー | 半導体装置 |
| JP2011023527A (ja) * | 2009-07-15 | 2011-02-03 | Toshiba Corp | 半導体装置 |
| US9646869B2 (en) * | 2010-03-02 | 2017-05-09 | Micron Technology, Inc. | Semiconductor devices including a diode structure over a conductive strap and methods of forming such semiconductor devices |
| US8507966B2 (en) | 2010-03-02 | 2013-08-13 | Micron Technology, Inc. | Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same |
| US8513722B2 (en) | 2010-03-02 | 2013-08-20 | Micron Technology, Inc. | Floating body cell structures, devices including same, and methods for forming same |
| US9608119B2 (en) | 2010-03-02 | 2017-03-28 | Micron Technology, Inc. | Semiconductor-metal-on-insulator structures, methods of forming such structures, and semiconductor devices including such structures |
| US8288795B2 (en) | 2010-03-02 | 2012-10-16 | Micron Technology, Inc. | Thyristor based memory cells, devices and systems including the same and methods for forming the same |
| JP5678469B2 (ja) * | 2010-05-07 | 2015-03-04 | 株式会社デンソー | 半導体装置 |
| JP2011238771A (ja) * | 2010-05-11 | 2011-11-24 | Hitachi Ltd | 半導体装置 |
| JP6301776B2 (ja) * | 2010-05-26 | 2018-03-28 | 三菱電機株式会社 | 半導体装置 |
| JP5582102B2 (ja) | 2010-07-01 | 2014-09-03 | 株式会社デンソー | 半導体装置 |
| JP5606240B2 (ja) * | 2010-09-22 | 2014-10-15 | 三菱電機株式会社 | 半導体装置 |
| JP5395275B2 (ja) * | 2010-10-29 | 2014-01-22 | パナソニック株式会社 | 半導体素子およびその製造方法 |
| JP5321669B2 (ja) | 2010-11-25 | 2013-10-23 | 株式会社デンソー | 半導体装置 |
| US8502346B2 (en) * | 2010-12-23 | 2013-08-06 | Alpha And Omega Semiconductor Incorporated | Monolithic IGBT and diode structure for quasi-resonant converters |
| US8598621B2 (en) | 2011-02-11 | 2013-12-03 | Micron Technology, Inc. | Memory cells, memory arrays, methods of forming memory cells, and methods of forming a shared doped semiconductor region of a vertically oriented thyristor and a vertically oriented access transistor |
| US8952418B2 (en) | 2011-03-01 | 2015-02-10 | Micron Technology, Inc. | Gated bipolar junction transistors |
| US8519431B2 (en) | 2011-03-08 | 2013-08-27 | Micron Technology, Inc. | Thyristors |
| JP5937413B2 (ja) * | 2011-06-15 | 2016-06-22 | 株式会社デンソー | 半導体装置 |
| US8772848B2 (en) | 2011-07-26 | 2014-07-08 | Micron Technology, Inc. | Circuit structures, memory circuitry, and methods |
| JP5751125B2 (ja) * | 2011-10-20 | 2015-07-22 | 株式会社デンソー | 半導体装置 |
| JP5618963B2 (ja) * | 2011-10-26 | 2014-11-05 | 三菱電機株式会社 | 半導体装置 |
| JP5742711B2 (ja) * | 2011-12-28 | 2015-07-01 | 株式会社デンソー | 半導体装置 |
| JP6022774B2 (ja) * | 2012-01-24 | 2016-11-09 | トヨタ自動車株式会社 | 半導体装置 |
| JP2014103376A (ja) * | 2012-09-24 | 2014-06-05 | Toshiba Corp | 半導体装置 |
| CN102931223B (zh) * | 2012-11-28 | 2015-11-04 | 江苏物联网研究发展中心 | Igbt集电极结构 |
| CN104253151B (zh) * | 2013-06-27 | 2017-06-27 | 无锡华润上华半导体有限公司 | 场截止型反向导通绝缘栅双极型晶体管及其制造方法 |
| CN104253152A (zh) * | 2013-06-28 | 2014-12-31 | 无锡华润上华半导体有限公司 | 一种igbt及其制造方法 |
| CN103489908A (zh) * | 2013-09-16 | 2014-01-01 | 电子科技大学 | 一种能消除负阻效应的rc-igbt |
| CN104465732B (zh) * | 2013-09-22 | 2018-07-06 | 南京励盛半导体科技有限公司 | 一种半导体功率器件的结构 |
| JP6107767B2 (ja) * | 2013-12-27 | 2017-04-05 | トヨタ自動車株式会社 | 半導体装置とその製造方法 |
| DE112014006296B4 (de) * | 2014-01-29 | 2026-01-22 | Mitsubishi Electric Corporation | Leistungshalbleitervorrichtung |
| US9419148B2 (en) * | 2014-03-28 | 2016-08-16 | Stmicroelectronics S.R.L. | Diode with insulated anode regions |
| JP2016029685A (ja) * | 2014-07-25 | 2016-03-03 | 株式会社東芝 | 半導体装置 |
| US9673054B2 (en) | 2014-08-18 | 2017-06-06 | Micron Technology, Inc. | Array of gated devices and methods of forming an array of gated devices |
| US9209187B1 (en) | 2014-08-18 | 2015-12-08 | Micron Technology, Inc. | Methods of forming an array of gated devices |
| US9224738B1 (en) | 2014-08-18 | 2015-12-29 | Micron Technology, Inc. | Methods of forming an array of gated devices |
| JP6261494B2 (ja) | 2014-12-03 | 2018-01-17 | 三菱電機株式会社 | 電力用半導体装置 |
| JP6269860B2 (ja) * | 2014-12-17 | 2018-01-31 | 三菱電機株式会社 | 半導体装置 |
| JP6854654B2 (ja) | 2017-01-26 | 2021-04-07 | ローム株式会社 | 半導体装置 |
| JP6652515B2 (ja) * | 2017-02-09 | 2020-02-26 | 株式会社東芝 | 半導体装置 |
| CN108447903B (zh) * | 2017-02-16 | 2023-07-04 | 富士电机株式会社 | 半导体装置 |
| JP6804379B2 (ja) | 2017-04-24 | 2020-12-23 | 三菱電機株式会社 | 半導体装置 |
| US10396189B2 (en) * | 2017-05-30 | 2019-08-27 | Fuji Electric Co., Ltd. | Semiconductor device |
| TWI695418B (zh) * | 2017-09-22 | 2020-06-01 | 新唐科技股份有限公司 | 半導體元件及其製造方法 |
| JP7102808B2 (ja) * | 2018-03-15 | 2022-07-20 | 富士電機株式会社 | 半導体装置 |
| JP7000971B2 (ja) * | 2018-04-17 | 2022-01-19 | 三菱電機株式会社 | 半導体装置 |
| JP6987015B2 (ja) * | 2018-04-26 | 2021-12-22 | 三菱電機株式会社 | 半導体装置 |
| JP2021128993A (ja) * | 2020-02-13 | 2021-09-02 | サンケン電気株式会社 | 半導体装置およびスイッチングシステム |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5360984A (en) * | 1991-11-29 | 1994-11-01 | Fuji Electric Co., Ltd. | IGBT with freewheeling diode |
| US5859446A (en) * | 1996-02-28 | 1999-01-12 | Hitachi, Ltd. | Diode and power converting apparatus |
| JP2000114550A (ja) * | 1998-10-06 | 2000-04-21 | Hitachi Ltd | ダイオード及び電力変換装置 |
| JP2000340806A (ja) * | 1999-05-27 | 2000-12-08 | Toshiba Corp | 半導体装置 |
| US6177713B1 (en) * | 1998-07-29 | 2001-01-23 | Mitsubishi Denki Kabushiki Kaisha | Free wheel diode for preventing destruction of a field limiting innermost circumferential layer |
| JP2002270857A (ja) * | 2001-03-07 | 2002-09-20 | Toshiba Corp | 半導体装置および電力変換装置 |
| DE10160118A1 (de) * | 2001-04-18 | 2002-10-31 | Mitsubishi Electric Corp | Halbleiterelement |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3321185B2 (ja) * | 1990-09-28 | 2002-09-03 | 株式会社東芝 | 高耐圧半導体装置 |
| JP3447884B2 (ja) * | 1995-03-15 | 2003-09-16 | 株式会社東芝 | 高耐圧半導体素子 |
| FR2751790B1 (fr) * | 1996-07-26 | 1998-11-27 | Sgs Thomson Microelectronics | Assemblage monolithique d'un transistor igbt et d'une diode rapide |
| DE59808468D1 (en) * | 1997-01-31 | 2003-06-26 | Infineon Technologies Ag | Asymmetrischer thyristor |
| JP3502531B2 (ja) * | 1997-08-28 | 2004-03-02 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
| FR2788166B1 (fr) * | 1998-12-31 | 2001-03-09 | St Microelectronics Sa | Interrupteur de puissance a di/dt controle |
| JP4198251B2 (ja) * | 1999-01-07 | 2008-12-17 | 三菱電機株式会社 | 電力用半導体装置およびその製造方法 |
| EP1022785B1 (de) * | 1999-01-25 | 2006-04-05 | STMicroelectronics S.r.l. | Elektronische Halbleiterleistungsanordnung mit integrierter Diode |
| EP1231635A1 (de) * | 2001-02-09 | 2002-08-14 | STMicroelectronics S.r.l. | Herstellungsverfahren eines elektronischen Leistungsbauteils und einer Diode in der gleichen Packung |
| JP3932890B2 (ja) * | 2001-12-27 | 2007-06-20 | 株式会社デンソー | 半導体装置の製造方法 |
| DE10250575B4 (de) * | 2002-10-30 | 2010-04-15 | Infineon Technologies Ag | IGBT mit monolithisch integrierter antiparalleler Diode |
| JP4403366B2 (ja) * | 2003-06-04 | 2010-01-27 | 富士電機デバイステクノロジー株式会社 | 半導体装置およびその製造方法 |
| JP4577480B2 (ja) * | 2003-06-06 | 2010-11-10 | サンケン電気株式会社 | 絶縁ゲート型半導体装置 |
| DE10330571B8 (de) * | 2003-07-07 | 2007-03-08 | Infineon Technologies Ag | Vertikale Leistungshalbleiterbauelemente mit Injektionsdämpfungsmittel im Rand bereich und Herstellungsverfahren dafür |
| JP4791704B2 (ja) * | 2004-04-28 | 2011-10-12 | 三菱電機株式会社 | 逆導通型半導体素子とその製造方法 |
| JP4621708B2 (ja) * | 2007-05-24 | 2011-01-26 | 株式会社東芝 | 半導体装置及びその製造方法 |
| JP5206541B2 (ja) * | 2008-04-01 | 2013-06-12 | 株式会社デンソー | 半導体装置およびその製造方法 |
-
2006
- 2006-02-24 JP JP2006049300A patent/JP5011748B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-16 CN CNB2007100789830A patent/CN100559589C/zh not_active Expired - Fee Related
- 2007-02-21 DE DE102007008568A patent/DE102007008568B8/de not_active Expired - Fee Related
- 2007-02-22 US US11/709,272 patent/US8102025B2/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5360984A (en) * | 1991-11-29 | 1994-11-01 | Fuji Electric Co., Ltd. | IGBT with freewheeling diode |
| US5859446A (en) * | 1996-02-28 | 1999-01-12 | Hitachi, Ltd. | Diode and power converting apparatus |
| US6177713B1 (en) * | 1998-07-29 | 2001-01-23 | Mitsubishi Denki Kabushiki Kaisha | Free wheel diode for preventing destruction of a field limiting innermost circumferential layer |
| JP2000114550A (ja) * | 1998-10-06 | 2000-04-21 | Hitachi Ltd | ダイオード及び電力変換装置 |
| JP2000340806A (ja) * | 1999-05-27 | 2000-12-08 | Toshiba Corp | 半導体装置 |
| JP2002270857A (ja) * | 2001-03-07 | 2002-09-20 | Toshiba Corp | 半導体装置および電力変換装置 |
| DE10160118A1 (de) * | 2001-04-18 | 2002-10-31 | Mitsubishi Electric Corp | Halbleiterelement |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007227806A (ja) | 2007-09-06 |
| CN100559589C (zh) | 2009-11-11 |
| CN101026161A (zh) | 2007-08-29 |
| DE102007008568B4 (de) | 2012-11-08 |
| JP5011748B2 (ja) | 2012-08-29 |
| US8102025B2 (en) | 2012-01-24 |
| US20070200138A1 (en) | 2007-08-30 |
| DE102007008568A1 (de) | 2007-09-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| R018 | Grant decision by examination section/examining division | ||
| R082 | Change of representative |
Representative=s name: WINTER, BRANDL, FUERNISS, HUEBNER, ROESS, KAIS, DE |
|
| R020 | Patent grant now final |
Effective date: 20130209 |
|
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |