CN201206164Y - Folding vacuum device - Google Patents

Abstract

The utility model discloses a convertible vacuum device supplies at least a slice base plate to carry through to include: the device comprises a first cavity unit, a second cavity unit, a vacuum connection unit connected with the first cavity unit and the second cavity unit, a plurality of first targets and a plurality of second targets. The first cavity unit comprises a first inner wall, a first outer wall and a plurality of first cavities formed between the first inner wall and the first outer wall. The second cavity unit comprises a second inner wall, a second outer wall and a plurality of second cavities formed between the second inner wall and the second outer wall. The first targets are respectively arranged on the first inner wall or/and the first outer wall and communicated with the first chamber. The second targets are respectively arranged on the second inner wall or/and the second outer wall and communicated with the second chamber. By means of the folding connection of the first cavity unit and the second cavity unit and the selection and installation design of the first target and the second target, the effects of reducing occupied space and having high production efficiency can be achieved.

Description

Foldable Vacuum Unit

technical field

The utility model relates to a vacuum device, in particular to a foldable vacuum device for coating operation.

Background technique

In the semiconductor, electrical, electronic, and optoelectronic industries, many processes require coating in vacuum devices, and with the different requirements of products, some substrates need to go through multiple coating steps to form layers of various materials. A vacuum device 1 as shown in FIG. 1 has appeared, which can be used to transport multiple substrates 10 arranged continuously. It includes a plurality of hollow cavities 11 arranged in long series, and a vacuum device 1 for driving the substrates 10 to pass through. The delivery unit 12 of the cavity 11 and a plurality of targets 13 respectively installed on one side of the cavity 11 and used for coating the substrate 10 . The number of cavities 11 corresponds to the set number of coating layers, and each cavity 11 has a chamber 111 that can be controlled to open and close.

During coating, the operator discharges the substrate 10 upright on the conveying unit 12, uses the conveying unit 12 to send it into the chamber 11, and passes through the chamber 111 in the direction indicated by the arrow, and the targets 13 are placed on the substrate respectively. 10 is coated with a film, and finally the substrate 10 is sent out. Of course, in actual operation, in order to speed up the manufacturing process, the substrates 10 are generally continuously placed on the conveying unit 12 to continuously perform the coating operation.

Although each target 13 of the above-mentioned vacuum device 1 will be plated with different film layers on the surface of the substrate 10, since the vacuum device 1 is only arranged in a single line, when the number of cavities 11 is large, the extension length of the vacuum device 1 will increase. It is quite long. At this time, the factory building needs to occupy a relatively spacious place to place the vacuum device 1 , which will result in higher cost. In addition, when the number of film layers to be coated on the substrate 10 is greater than the number of cavities 11 provided in the vacuum device 1, or when it is necessary to coat both sides of the substrate 10, the operator must batch coat the The substrate 10 is repeatedly sent into the vacuum device 1 for coating with different materials, which will result in low production efficiency.

Utility model content

The main purpose of the present utility model is to provide a foldable vacuum device which occupies less space and has higher production efficiency.

A foldable vacuum device of the present invention is used for transporting at least one substrate, and includes: a first cavity unit, a second cavity unit, a vacuum connection unit, a plurality of first targets, and a plurality of Second target. The first cavity unit includes a first inner wall and a first outer wall opposite to each other, a first inlet and a first outlet formed at both ends of the first inner wall and the first outer wall, and multiple A first chamber connected in series is formed between the first inlet and the first outlet. The substrate will enter through the first inlet, pass through the first chamber, and then output through the first outlet. The second cavity unit is correspondingly juxtaposed with the first cavity unit, and includes a second inner wall and a second outer wall opposite to each other, and a second inner wall and a second outer wall formed at two ends between the second inner wall and the second outer wall. Two outlets and a second inlet, and a plurality of second chambers connected in series between the second outlet and the second inlet, the second inner wall is adjacent to the first inner wall, and the second outer wall is far away from the first inner wall, The substrate enters through the second entrance, passes through the second chamber, and then exits through the second exit. The vacuum connection unit connects the first chamber unit and the second chamber unit, and includes a first rotary member installed on the side of the first outlet, and a second rotary member installed on the side of the second inlet. A rotary part diverts the substrate output from the first outlet to the second rotary part, and the second rotary part then diverts the substrate into the second inlet. The first targets are installed on the first inner wall or/and the first outer wall respectively and communicate with the first chamber, and are used for coating the substrate. The second targets are installed on the second inner wall or/and the second outer wall respectively and communicate with the second chamber, and are used for coating the substrate.

The beneficial effect of the utility model is that the first and second cavity units are folded into two sections, so the occupied space can be reduced, and the required cost can be reduced. In addition, the first and second target materials can be selected and installed according to needs to improve Cavity utilization achieves the effects of reducing occupied space and high production efficiency.

Description of drawings

Fig. 1 is a device schematic diagram of a conventional vacuum device;

Fig. 2 is a simple schematic diagram of a first preferred embodiment of the foldable vacuum device of the present invention;

Fig. 3 is a simple schematic diagram of a second preferred embodiment of the foldable vacuum device of the present invention;

Fig. 4 is a simple schematic diagram of a third preferred embodiment of the foldable vacuum device of the present invention; and

FIG. 5 is a simple schematic diagram of a fourth preferred embodiment of the foldable vacuum device of the present invention.

Detailed ways

Below in conjunction with accompanying drawing and embodiment the utility model is described in detail:

For convenience of description, in the following embodiments, the same components are denoted by the same reference numerals.

As shown in FIG. 2 , the first preferred embodiment of the foldable vacuum device of the present invention is for conveying a plurality of substrates 2 arranged continuously. Each substrate 2 has an inner surface 21 and an outer surface 22 opposite to each other. The foldable vacuum device includes: a first cavity unit 3 and a second cavity unit 4 arranged in parallel in double lines, a vacuum connection unit 5 connecting the first cavity unit 3 and the second cavity unit 4, a A conveying mechanism 6 for conveying the substrate 2, a plurality of first targets 7 respectively installed on the first chamber unit 3, and a plurality of second targets 8 respectively installed on the second chamber unit 4 .

The first cavity unit 3 includes a first inner wall 31 and a first outer wall 32 that are opposite to each other and extend left and right in a longitudinal direction. A first inlet 33 and a first outlet 34, a plurality of first chambers 35 formed in series between the first inlet 33 and the first outlet 34, and a plurality of chambers 35 respectively installed in two adjacent first chambers. A first valve 36 between the chambers 35 . The first chamber 35 is in a vacuum state. The first valve 36 can be opened or closed by computer control, and can be used to control whether the first chambers 35 are connected or not. In FIG. 2 , the first valve 36 is in an open state.

The second cavity unit 4 has the same structure as the first cavity unit 3 and is correspondingly juxtaposed, and includes a second inner wall 41 and a second outer wall 42 that are opposite to each other and extend left and right in the longitudinal direction. A second outlet 43 and a second inlet 44 between the two ends of the second inner wall 41 and the second outer wall 42, and a plurality of second chambers connected in series between the second outlet 43 and the second inlet 44 are formed. 45, and a plurality of second valves 46 respectively installed between two adjacent second chambers 45. The second inner wall 41 is adjacent to the first inner wall 31 , and the second outer wall 42 is away from the first inner wall 31 . The second chamber 45 is also in a vacuum state, and the second valve 46 is also used to control whether the second chamber 45 is connected or not, which will not be described in detail here.

The vacuum connection unit 5 includes a first rotary member 51 installed on the side of the first outlet 34, a second rotary member 52 installed on the side of the second inlet 44, and a connection between the first rotary member 51 and the second rotary member. The connection cavity 53 between the rotating parts 52 . The connecting chamber 53 has a connecting chamber 531 . The vacuum connection unit 5 further includes a connection target 54 installed on the outside of the connection chamber 53 and communicating with the connection chamber 531 . The first and second rotating members 51 and 52 in this embodiment can be controlled to rotate clockwise, and of course they can also be designed to rotate counterclockwise. In addition, the vacuum connection unit 5 can also omit the installation of the connection target 54 , and can even omit the connection cavity 53 together, so that the first and second rotating members 51 and 52 are in direct rotational contact.

The conveying mechanism 6 includes a first conveying unit 61 that drives the substrate 2 to convey through the first chamber 35 toward a first direction 91 , and a first conveying unit 61 that drives the substrate 2 through the second chamber 45 toward a second direction 92 . Two conveying units 62 , and a third conveying unit 63 that drives the substrate 2 to convey through the connecting chamber 531 in a third direction 93 . The first direction 91 is from the first inlet 33 to the first outlet 34, the second direction 92 is from the second inlet 44 to the second outlet 43 and is parallel and opposite to the first direction 91, and the third direction 93 is from the first The rotating member 51 faces the second rotating member 52 and is perpendicular to the first and second directions 91 , 92 . The first, second, and third conveying units 61, 62, and 63 all include a track (not shown) extending in the long direction, a plurality of rollers (not shown) arranged on the track, and a plurality of rollers driven by the rollers to move and use The carrier (not shown) used to carry the substrate 2, but because the conveying mechanism 6 is not the focus of the improvement of the present invention, it will not be described in detail.

The first targets 7 are respectively mounted on the first outer wall 32 of the first cavity unit 3 and correspondingly communicated with the first chamber 35 for coating the substrate 2 passing through. The first target 7 can be made of different materials, and each first chamber 35 can be provided with a different coating system (not shown) in conjunction with the first target 7 for forming different materials on the substrate 2. film layer. Of course, the number of the first target 7 can also be increased or decreased according to the design, and can even be turned on or off as needed, so as to change the number of coating layers.

The second target material 8 is similar in structure to the first target material 7, and is respectively installed on the second outer wall 42 of the second cavity unit 4 and communicates with the second chamber 45, and is also used for coating on the substrate 2 conveyed through . The second target 8 can be made of different materials, and each second chamber 45 will also be provided with a different coating system (not shown) in conjunction with the second target 8 for forming different materials on the substrate 2. film layer. Similarly, the number of the second target 8 can also be increased or decreased according to the design, and can even be turned on or off as needed, so as to change the number of coating layers.

The operator places the substrate 2 on the left side of the first conveying unit 61, and the first conveying unit 61 will send the substrate 2 into the first cavity unit 3 from the first entrance 33 along the first direction 91, and pass through the first In a chamber 35 , different film layers are plated on the outer surface 22 of the substrate 2 by the first target material 7 , and then output from the first outlet 34 . Then the first rotating member 51 accepts the substrate 2 output from the first outlet 34, and rotates clockwise 90° to transfer the substrate 2 from the first direction 91 to the third direction 93 to the third conveying unit 63, driving the substrate 2 along the The third direction 93 passes through the connecting chamber 531, and another film layer is plated on the outer surface 22 of the substrate 2 by connecting the target material 54, and then the substrate 2 is transported to the second rotary member 52, and the second rotary member 52 will be After rotating clockwise by 90°, the substrate 2 is transferred from the third direction 93 to the second direction 92 and sent to the second conveying unit 62 . Make the substrate 2 enter the second chamber unit 4 through the second entrance 44, pass through the second chamber 45, and coat different film layers on the outer surface 22 of the substrate 2 by the second target material 8, and then the second The outlet 43 is output, and at this time, the outer surface 22 of the substrate 2 can be plated with required film layers in sequence.

Referring to Fig. 3, the second preferred embodiment of the foldable vacuum device of the present invention, the structure of this embodiment is roughly the same as that of the first embodiment, the difference is that the installation position of the second target 8 is changed, so that the second The target material 8 is installed on the second inner wall 41 of the second cavity unit 4 , so that when passing through the first cavity unit 3 , the substrate 2 whose outer surface 22 is coated is transported through the second cavity unit 4 , the second target material 8 will be coated on the inner surface 21 of the substrate 2, so that the inner and outer surfaces 21, 22 of the substrate 2 are coated with a film layer. In this embodiment, the setting of the connection target 54 can be omitted, and of course, it can also be added as needed, and will not be described in detail here.

Referring to Fig. 4, the third preferred embodiment of the foldable vacuum device of the present invention, the structure of this embodiment is similar to that of the first and second embodiments, the difference lies in: increasing the setting of the first and second targets 7, 8 position, the first target 7 is installed on the first inner wall 31 and the first outer wall 32 of the first cavity unit 3, and the second inner wall 41 and the second outer wall 42 of the second cavity unit 4 are also respectively A second target 8 is not installed. When the substrate 2 passes through the first cavity unit 3, the first target material 7 will be coated on the inner and outer surfaces 21, 22 of the substrate 2 respectively, so that the inner and outer surfaces 21, 22 of the substrate 2 are coated with film layer, and when the substrate 2 passes through the second cavity unit 4, the second target material 8 will also be coated on the inner and outer surfaces 21, 22 of the substrate 2, so that the inner and outer surfaces 21, 22 of the substrate 2 Then add different layers as needed. Similarly, in this embodiment, the connection target 54 can be omitted, and of course, it can also be arranged on a single inner side, a single outer side, or both sides of the connecting cavity 53 as needed, and details will not be described here.

Referring to Fig. 5, the fourth preferred embodiment of the folding vacuum device of the present invention, the structure of this embodiment is roughly the same as that of the second embodiment, the difference is that this embodiment increases the installation of the first target material 7, so that The first target material 7 is installed on the first inner wall 31 and the first outer wall 32 of the first cavity unit 3 respectively, so when the substrate 2 passes through the first cavity unit 3, the first target material 7 will be on the substrate 2 Film layers are plated on the inner and outer sides 21, 22 respectively.

Of course, the installation positions and quantities of the first and second targets 7 and 8 of the present invention are not limited to the above-mentioned first to fourth embodiments, and will not be described in detail here. It should be further explained that, of course, the utility model can also be directly arranged as in the third embodiment. When in use, as long as the first and second targets 7 and 8 in different positions are closed according to the required situation, it can achieve the same effect as the first and second targets. The effects of the second and fourth embodiments can even be installed in other different ways.

From the above description, it can be known that the design of the foldable vacuum device of the present invention is to fold the cavity units that originally need to be arranged in a long series into two sections of cavity units 3 and 4, and connect them via the vacuum connection unit 5 , so it can avoid the lack of too long extension length of the vacuum device caused by the single-line extension in the past, and can reduce the occupied space and reduce the required cost. In addition, the utility model can also choose to install the first and second targets 7 and 8 on the first and second cavity units 3 and 4 according to the needs, so that the utility model is more diversified and complete in coating work, Therefore, the utilization rate of the cavity can be improved, the number of times the substrate 2 is sent into the vacuum device can be reduced, and the production efficiency is high. Therefore, the utility model has the effect of reducing the occupied space and high production efficiency, and can indeed achieve the purpose of the utility model. available for industrial use.

Claims (8)

1. convertible vacuum unit, being conducted to few plate base conveying passes through, it is characterized in that comprising: one first cavity unit, corresponding second cavity unit arranged side by side with the first cavity unit, one connect the first cavity unit and the unitary vacuum connector element of second cavity, a plurality of first target that is installed on the first cavity unit, and a plurality of second targets that are installed on the second cavity unit

This first cavity unit comprises inside and outside interval relative a slice first inwall and a slice first outer wall, relatively is formed on one first inlet and one first outlet of first inwall and the first outer wall go-and-retum at interval, and a plurality of be formed on with being connected to each other tandem first enter the mouth and first export between and first chamber that supplies described substrate to pass through;

This second cavity unit comprises that inside and outside interval relative a slice second inwall and a slice second outer wall, interval relatively are formed on one second outlet and one second inlet of second inwall and the second outer wall go-and-retum, and a plurality of be formed on with being connected to each other tandem second outlet enter the mouth with second between and second chamber that passes through of the described substrate of confession, contiguous first inwall of this second inwall, and second outer wall is away from first inwall;

This vacuum connector element comprises that one is installed in the first outlet side and accepts by the substrate of the first outlet output and turn to first revolving meber of sending, and one is installed in the second inlet side and the substrate that first revolving meber is sent here is turned to second revolving meber of sending into second inlet;

Described first target is installed on wherein a slice wall of first inwall and first outer wall respectively and is communicated with first chamber; And

Described second target is installed on wherein a slice wall of second inwall and second outer wall respectively and is communicated with second chamber.

2. convertible vacuum unit as claimed in claim 1 is characterized in that: first target is mounted on first outer wall, and second target is mounted on second outer wall.

3. convertible vacuum unit as claimed in claim 2 is characterized in that: first target also is installed on first inwall, and second target also is installed on second inwall.

4. convertible vacuum unit as claimed in claim 1 is characterized in that: first target is mounted on first outer wall, and second target is mounted on second inwall.

5. convertible vacuum unit as claimed in claim 4 is characterized in that: first target also is installed on first inwall.

6. convertible vacuum unit as claimed in claim 1 is characterized in that: this vacuum connector element comprises that also one is connected between first revolving meber and second revolving meber with what substrate passed through and is connected cavity.

7. convertible vacuum unit as claimed in claim 6 is characterized in that: this connection cavity has one and connects chamber, and this vacuum connector element comprises that also at least one is installed in the connection target that connects on the cavity and be communicated with this connection chamber.

8. convertible vacuum unit as claimed in claim 1, it is characterized in that: also comprise a transfer mechanism that is used to carry described substrate, this transfer mechanism comprises that a drive substrate is towards first supply unit of first direction conveying by described first chamber, a drive substrate is carried second supply unit that passes through described second chamber towards a second direction, and a drive substrate is carried the 3rd supply unit that passes through the vacuum connector element towards a third direction, first direction is towards first outlet by first inlet, second direction be by second inlet towards second outlet and parallel with first direction opposite, third direction then is towards second revolving meber and perpendicular to first by first revolving meber, two directions.

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