TWM636483U - Rotary transfer type vertical coating equipment - Google Patents

Abstract

A rotary transfer type vertical coating equipment includes a plurality of vacuum process chambers, a first rotary chamber, and a second rotary chamber. The vacuum process chambers are respectively arranged on a first axis and a second axis, and can accommodate and transport the object to be plated. The first rotating chamber is arranged on the first axis, and is connected to one of the vacuum process chambers, and can drive the object to be plated to rotate, and can allow the object to be plated to move in and out. The second rotating chamber is arranged on the second On the axis, it is connected to another vacuum process chamber and can drive the object to be plated to rotate and allow the object to be plated to move in and out. Thereby, the number of cavities can be reduced to reduce the space occupied and the space can be easily utilized, and the effect of double-sided coating can be achieved.

Description

Rotary transfer type vertical coating equipment

The present invention relates to a coating equipment, in particular to a rotary transfer type vertical coating equipment.

Referring to Fig. 1, Fig. 2, this film coating equipment is suitable for carrying out double-sided film coating of two kinds of different coating film materials to an object to be plated (not shown in the figure), and comprises a feeding chamber 11 and a feeding chamber 12 that are oppositely arranged, One vacuum degassing chamber 13, two vacuum cleaning chambers 14, four vacuum coating chambers 15, one return channel 16, a plurality of carrying devices 17 that move cyclically in the equipment, and four are respectively arranged in these vacuum coating chambers 15 for coating The target material 18 used, and two cleaning modules 19 which are arranged in the vacuum cleaning chambers 14 and can respectively clean one side of the object to be plated. The vacuum degassing chamber 13, the vacuum cleaning chambers 14, and the vacuum coating chambers 15 are sequentially arranged between the feeding chamber 11 and the discharging chamber 12, and the return channel 16 is connected to the feeding chamber 11 and the There are 12 discharge chambers and are located above.

During operation, after each carrying device 17 moves to the feeding chamber 11, the object to be plated is placed on the carrying device 17, and the carrying device 17 passes through the vacuum degassing chamber 13, the vacuum cleaning chambers in sequence. 14, and in the different vacuum coating chambers 15 with the The target material 18 coats the opposite sides of the object to be plated, and finally, after the carrying device 17 moves to the discharge chamber 12, the object to be plated is removed to complete the double-sided coating process, and the carrying device 17 passes through the The return channel 16 returns to the feeding chamber 11 for the next coating process.

However, since the vacuum cleaning chambers 14 can only be processed in one direction, two vacuum cleaning chambers 14 must be provided to clean the opposite sides of the object to be plated in two opposite directions. When double-sided coating of two different coating materials is to be carried out, since the direction of the coating determines the setting positions of the targets 18, four vacuum coating chambers 15 need to be configured to form a long and narrow pattern, which in turn leads to The occupied area is large, and the remaining space around the long and narrow equipment is difficult to use. The increase in the number of vacuum chambers also results in the consumption of more energy to maintain the vacuum in the vacuum chambers.

In addition, due to the longer length of the return passage 16, it takes longer for the carrying devices 17 to return to the feeding chamber 11 via the return passage 16, so it is necessary to prepare more carrying devices 17 to facilitate uninterrupted production, resulting in higher construction costs and later maintenance costs.

Therefore, the purpose of this new model is to provide a rotary that can reduce floor space, improve production flexibility and production efficiency, reduce maintenance costs, and reduce energy consumption. Transfer-type vertical coating equipment and a coating method for double-sided multilayer films.

Therefore, the rotary transfer type vertical coating equipment of the present invention is suitable for coating at least one object to be plated. The rotary transfer type vertical coating equipment includes a plurality of vacuum process chambers and a rotating device.

The vacuum process chambers are respectively arranged on the first axis and the second axis, and can accommodate and transport the object to be plated along the first axis and the second axis.

The rotating device includes a first rotating chamber and a second rotating chamber.

The first rotating chamber is arranged on the first axis, and includes a rear opening located on the first axis and connected to one of the vacuum process chambers, a side opening located between the first axis and the second axis, and A rotary module capable of accommodating and driving the object to be plated to rotate and having a head end and a tail end, the head end facing the rear opening, the tail end facing the rear opening, and the One of the head end and the tail end is open towards the side, and the object to be plated can move in and out from the head end or the tail end of the rotary module.

The second rotating chamber is arranged on the second axis, and includes a rear opening located on the second axis and connected to another vacuum process chamber, and a rear opening located between the first axis and the second axis and corresponding to the second axis. A side opening of a rotating cavity, and a rotating module capable of accommodating and driving the object to be plated to rotate and having a head end and a tail end. Towards the rear opening, and one of the head end and the tail end faces to the side opening, the object to be plated can move in and out from the head end or the tail end of the rotary module.

The effect of the present invention is that: through the arrangement of the vacuum process chambers, the first rotating chamber and the second rotating chamber, a single vacuum process chamber that can only process in one direction can be used to reverse the opposite direction of the object to be plated. Processing on both sides can improve production flexibility and production efficiency, and can also reduce the number of vacuum process chambers, further reducing energy consumption and maintenance costs required to maintain vacuum. In addition, by processing along the first axis and the second axis Arranged to reduce the length of the whole on the first axis, so as to achieve the effect of reducing the occupied area and making it easy to use the space.

2: Carrying device

21: Vehicle

3: Vacuum process chamber

31: Loading cavity

32: Degassing cavity

33: Clean the chamber

34: The first coating cavity

35: Second coating cavity

36: Buffer cavity

37: Unloading cavity

4: Rotating device

41: The first rotating cavity

411: rear opening

412: front opening

413: side opening

414: Rotation module

415: head end

416: end

417: Outer opening

42: the second rotating cavity

421: rear opening

422: front opening

423: side opening

424: Rotation module

425: head end

426: end

427: Outer opening

43: relay cavity

5: Backflow device

81~86: Steps

91~95: steps

9: Items to be plated

L1: first axis

L2: second axis

L3: third axis

L4: Fourth axis

Other features and effects of the present invention will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a schematic side view illustrating a known coating equipment; Fig. 2 is a diagram of the known coating equipment A schematic diagram of a top view; Fig. 3 is a perspective view illustrating a carrying device and an object to be plated of an embodiment of the novel rotary transfer type vertical coating equipment; Fig. 4 is a top view of the embodiment; Fig. 5 is the implementation Another top view of the example, illustrating that the respective head ends of the two rotating modules are respectively facing the front openings of the two rotating devices; Fig. 6 is another top view of the embodiment, illustrating that the head ends are respectively facing the respective side openings of the rotating devices ; Fig. 7 is a top view, illustrating another configuration of the rotating device of this embodiment; Fig. 8 is a top view, illustrating a first modification example of the new rotary transfer type vertical coating equipment; Fig. 9 is a top view, illustrating A second variation example of the new rotary transfer type vertical coating equipment; Fig. 10 is a top view illustrating a third variation example of the new rotary transfer type vertical coating equipment; Fig. 11 is a top view illustrating the new type A fourth variation example of the rotary transfer type vertical coating equipment; Fig. 12 is a top view illustrating a fifth variation example of the rotary transfer type vertical coating equipment of the present invention; Fig. 13 is a top view illustrating the new rotary transfer type vertical coating equipment A sixth variation example of the load-type vertical coating equipment; FIG. 14 is a flow chart of this embodiment; and FIG. 15 is a flow chart of this embodiment.

Referring to Fig. 3 and Fig. 4, the embodiment of the novel rotary transfer type vertical coating equipment is applicable to a plurality of upright objects to be coated 9, and the objects to be coated 9 may be casings, panel-level fan-out packages (FOPLP) , Wafer-Level Fan-Out Packaging (FOWLP), Embedded Type substrates, coreless substrates, glass substrates, packaging substrates, PCB substrates, wafers or wafer-level packaging and other metal and non-metallic objects. A first axis L1 and a second axis L2 are defined. The rotary transfer type vertical coating equipment includes a carrying device 2 , a plurality of vacuum process chambers 3 , a rotating device 4 , and a reflow device 5 .

In this embodiment, the first axis L1 and the second axis L2 are parallel. However, in other implementation forms, it can also be slightly angled due to the space configuration of the factory building, and it is not limited thereto.

The carrying device 2 includes a plurality of vertically arranged carriers 21 suitable for carrying the object to be plated 9. In this embodiment, each carrier 21 is in the shape of a rectangular frame. In other embodiments, if the object to be plated The structural strength of 9 is relatively high (for example, when the glass substrate itself has a frame), and the carrying device 2 can also be omitted. It should be noted that the number of objects to be plated 9 fixed on each carrier 21 may also be several, and it is not limited thereto.

For the convenience of follow-up explanation, below will be an example with a carrier 21 and an object to be plated 9, and this moment, this object to be plated 9 is fixed on the middle part of this carrier 21, protects this object to be plated 9 by this It is damaged during processing or transportation, and a certain tension is given to the object to be plated 9 to make it resist deformation due to gravity, thereby achieving uniform processing quality. The object to be plated 9 is open in the horizontal direction of the carrier 21 to accept various treatments in the coating process.

The vacuum process chambers 3 are respectively arranged on the first axis L1 and the second axis L2, and can accommodate and transport the carrier 21 and the object to be plated along the first axis L1 and the second axis L2 respectively. 9.

In this embodiment, the number of the vacuum process chambers 3 is eight, and they are respectively a loading chamber 31, two degassing chambers 32, and a cleaning chamber 33 arranged on the first axis L1, And a first coating cavity 34 , a second coating cavity 35 , a buffer cavity 36 , and an unloading cavity 37 are arranged on the second axis L2. Valves (not shown) may be arranged between the vacuum process chambers 3 to maintain a stable vacuum degree in the chambers.

The loading chamber 31 is used for feeding.

The degassing cavities 32 are connected to each other and can carry out vacuum degassing (Degas) to the carrier 21 and the object to be plated 9 entering the inside, and remove the carrier 21 and the object to be plated due to contact with the outside air. Water molecules and gas of plating 9. Production efficiency can be improved by arranging these degassing chambers 32, for example, the carrier 21 and the object to be plated 9 are respectively placed in one of the degassing chambers 32 for 3 minutes and then evacuated to a low vacuum degree, And put it in another degassing cavity 32 for 3 minutes and evacuate it to a high vacuum, so that a total of 6 minutes of degassing time can be accumulated and the time required to establish a vacuum can be dispersed to further achieve a better Process efficiency.

The number of degassing chambers 32 is not limited to two. In addition to increasing the number of degassing chambers 32 to disperse and reduce the time required for each residence, in other implementations, in order to further improve the yield of the process, at least one can also be set before the loading chamber 31 The oven (not shown in the figure), since the object to be plated 9 is transferred from other manufacturing processes to the embodiment of the present invention, may absorb more water vapor due to the longer exposure time to the atmosphere. By baking the object to be plated 9 in the at least one oven for a period of time, it is practically approximately Between 30 minutes and 1 hour, the degassing time required for the object to be plated 9 in the degassing chambers 32 can be effectively reduced, and the number of these degassing chambers 32 can be further reduced or the degassing chambers 32 can not be installed. Air cavity body 32 . In addition, in other implementations, the loading chamber 31 can also be provided with a vacuum degassing function, thereby reducing the number of the degassing chambers 32 or not installing the degassing chamber 32 .

The cleaning chamber 33 is spaced apart from the degassing chambers 32 and is used to clean the object to be plated 9 entering inside. In this embodiment, the process method of plasma cleaning (Plasma) is used.

The first coating cavity 34 and the second coating cavity 35 are spaced apart and used for coating the object 9 to be coated. The first coating cavity 34 and the second coating cavity 35 are made of different materials for coating. In the present embodiment, the first coating chamber 34 is used to plate titanium (Ti) on the object 9 to be plated, and the second coating chamber 35 is used to plate copper on the object 9 to be plated ( Cu), in other implementations, other coating materials can also be selected according to requirements.

In addition, the number of coating chambers can also be increased or decreased according to the number of coating layers. For example, when a thicker copper layer needs to be plated, more than two second coating chambers 35 can be provided.

It can be understood that, in addition to titanium coating, the first coating chamber 34 can also be coated with TiW, Cr, NiCr, Ni, Ta, CuN, Ti/TiN, Ta/TaN, SUS in some implementations. In addition to copper plating, the second coating cavity 35 may also be plated with copper alloy in some implementations. In addition, in different implementations, the first plating The coating types of the film cavity 34 and the second coating cavity 35 can also be interchanged. The type of coating and the number of layers are not a limitation of this model. Users can choose the coating material and configure the number of coating chambers according to the actual coating needs.

It should be further explained that high-efficiency cooling modules can be arranged in the vacuum process chambers 3 in the above-mentioned embodiments, such as cooling pipelines or passing cooling gas into the chamber, so as to effectively control the coating. 9 temperature, and reduce the deformation of the object 9 to be plated, improve product yield.

The buffer chamber 36 is connected to the second coating chamber 35 and is used for transporting and accommodating the carrying device 2 . In this embodiment, since the first coating chamber 34 and the second coating chamber 35 require a higher base vacuum (Base pressure) during the process (the pressure value is about 10 ⁻⁵ ~10 ^{− 8} Torr, usually 10 ^-6 Torr, preferably 10 ^-7 Torr), by setting the buffer cavity 36 can achieve at least the following effects:

1. It is beneficial to gradually reduce the vacuum degree of the object to be plated 9 to the same atmospheric pressure as the outside world, so that when the second coating chamber 35 transports the object to be plated 9 to the buffer chamber 36, no The time required for subsequent re-establishment of the vacuum will be increased due to a large drop in the vacuum.

Second, to achieve the purpose of water vapor isolation. Since the atmospheric humidity of the outside world is about between 40% and 70%, the moisture in the outside world can be prevented from diffusing to the first coating chamber 34 and the second coating chamber 35 by setting the buffer chamber 36, further avoiding It will cause the vacuum degree in the cavity to become poor, avoid the oxidation of the target surface, and avoid the coating caused by the mixing of water and air. The quality deteriorates.

However, in other implementations, if the outside atmospheric humidity has been accurately controlled, the buffer cavity 36 may not be provided, and the present invention is not limited thereto.

The unloading chamber 37 is connected to the buffer chamber 36 and used for discharging.

The rotating device 4 includes a first rotating chamber 41 arranged on the first axis L1, a second rotating chamber 42 arranged on the second axis L2, and a rotating chamber located between the first rotating chamber 41 and the second rotating chamber. Relay chamber 43 between rotating chambers 42 . The first rotating chamber 41 is connected between one of the degassing chambers 32 and the cleaning chamber 33 . The second rotating chamber 42 is connected between the first coating chamber 34 and the second coating chamber 35 . The inside of the rotating device 4 is also in a vacuum state.

Referring to Fig. 4, Fig. 5 and Fig. 6, the first rotating chamber 41 includes a rear opening 411 and a front opening 411 which are arranged oppositely along the first axis L1 and respectively connect one of the degassing chambers 32 and the cleaning chamber 33. The opening 412 , a side opening 413 located between the first axis L1 and the second axis L2 , and a rotating module 414 . The rotating module 414 can accommodate and drive the carrier 21 and the object to be plated 9 to rotate on a vertically extending rotating shaft (not shown), and has a head end 415 and a tail end 416 . The rotary module 414 can face the rear opening 411 with the head end 415 (as shown in FIG. 5, at this moment, the tail end 416 faces the rear opening 411), and the head end 415 faces the side opening 413 (as shown in FIG. 6 ). The carrier 21 and the object to be plated 9 can be obtained from the head end 415 of the rotary module 414 Or the tail end 416 moves in and out.

The second rotating chamber 42 includes a rear opening 421 and a front opening 422 which are oppositely disposed along the second axis L2 and respectively connect the second coating chamber 35 and the first coating chamber 34, and a front opening 422 located on the first axis L2. Between L1 and the second axis L2 corresponds to the side opening 423 of the first rotating cavity 41 and a rotating module 424 . The rotating module 424 can accommodate and drive the carrier 21 and the object to be plated 9 to rotate on a rotating shaft (not shown) extending along the vertical direction, and has a head end 425 and a tail end 426 . The rotary module 424 can face the rear opening 421 with the head end 425 (as shown in FIG. 5, at this moment, the tail end 426 faces the rear opening 421), and the head end 425 faces the side opening 423 (as shown in FIG. 6 ). The carrier 21 and the object to be plated 9 can move in and out from the head end 425 or the tail end 426 of the rotary module 424 .

Preferably, in this embodiment, when the head end 415 of the rotary module 414 of the first rotary cavity 41 faces the rear opening 411 or when the tail end 416 faces the rear opening 411, the object to be plated 9 All are located on the first axis L1. When the head end 425 of the rotating module 424 of the second rotating cavity 42 faces the rear opening 421 or when the tail end 426 faces the rear opening 421 , the object to be plated 9 is located on the second axis L2.

The relay cavity 43 is connected between the side openings 413 , 423 . In this embodiment, the relay cavity 43 is used for accommodating and transporting the carrier 21 and the object 9 to be plated. In other implementations, the relay chamber 43 can also be of relatively short length and only have the function of conveying. then In other implementation aspects, the relay cavity 43 can also be omitted, and it is not limited thereto.

In this embodiment, the first rotating chamber 41 and the second rotating chamber 42 are provided with a motor (not shown) on the outside, and a reduction gear set (not shown) inside, and the motor and the reduction gear set Transmission power is transmitted between them through sealed transmission elements (not shown in the figure), so as to drive the rotary modules 414, 424 to rotate. In other implementations, other devices that can provide power to rotate the carrier 21 can also be selected. Effective components, not limited to this.

More specifically, in this embodiment, the loading chamber 31, the degassing chambers 32, the first rotating chamber 41 and the cleaning chamber 33 are arranged in sequence along the first axis L1; The second axis L2 reversely arranges the first coating chamber 34 , the second rotating chamber 42 , the second coating chamber 35 , the buffer chamber 36 and the unloading chamber 37 in sequence. The loading cavity 31 is adjacent to the unloading cavity 37 .

It is worth mentioning that, in this embodiment, the number of the vacuum process chambers 3 on the first axis L1 and the second axis L2 is the same, and in other implementations, the first axis can also be adjusted as required The number of vacuum process chambers on L1 and the second axis L2. At this time, the configuration of the first and second rotating chambers 41 and 42 is shown in FIG. 7 . Wherein, the side opening 413 of the first rotating cavity 41 and the side opening 423 of the second rotating cavity 42 are arranged at intervals along a third axis L3, and the third axis L3 is in the same shape as the first axis L1 and the second axis L2. an angle.

The return device 5 straddles the first axis L1 and the second axis L2, and is located on opposite sides of the first axis L1 and the second axis L2 from the rotating device 4 , And connect the unloading cavity 37 and the loading cavity 31, for the object to be plated 9 is unloaded from the carrier 21 of the carrier device 2, and then the carrier 21 is reflowed and loaded with a new object to be plated (not shown). Preferably, the reflow device 5 can be integrated with an Equipment Front End Module (EFEM) to achieve the purpose of automatic feeding and discharging.

It should be noted that the vacuum process chambers 3 can be flexibly configured as different functional chambers according to different process requirements, for example, connecting the rear opening 411 of the first rotating chamber 41 and the front opening of the first rotating chamber 41 in sequence. The opening 412, the front opening 422 of the second rotating chamber 42, and the vacuum process chambers 3 of the rear opening 421 of the second rotating chamber 42 are arranged in the following chambers:

1. The degassing chamber 32 , the cleaning chamber 33 , the first coating chamber 34 , and the second coating chamber 35 (same configuration as in this embodiment).

2. The cleaning cavity 33 , the cleaning cavity 33 , the first coating cavity 34 , and the second coating cavity 35 . The purpose is to clean the two opposite sides of the object to be plated 9 in different vacuum process chambers 3 .

3. The cleaning cavity 33 , the first coating cavity 34 , the second coating cavity 35 , and the second coating cavity 35 . The purpose is to increase the film thickness of the coating film by providing two second film coating chambers 35 .

4. The cleaning cavity 33 , the first coating cavity 34 , the second coating cavity 35 , and the first coating cavity 34 . For example, the first coating cavity 34 can be plated stainless steel (SUS), and the second coating cavity 35 can be copper (Cu), thereby The coating layer that can reach SUS-Cu-SUS is applied to, for example, EMI coating.

5. The cleaning cavity 33, the first coating cavity 34, the second coating cavity 35, and a third coating cavity (not shown). For example, the first coating cavity 34 is titanium (Ti), the second coating cavity 35 is nickel vanadium alloy (NiV), and the third coating cavity is gold (Au), silver (Ag ), and one of copper (Cu), which can be applied to crystal back metallization (Back Side Metal) or patterned front side metallization (Front Side Metallization, FSM).

Its variation is not limited to the above-mentioned configurations. For example, in other embodiments, the relay chamber 43 of the rotating device 4 can also be replaced with the first coating chamber 34, which is also used for titanium plating, and the second coating chamber 35 is connected with the second rotating chamber. The front opening 422 of 42 is connected, and is used for nickel-vanadium alloy (NiV) plating, and the third coating chamber (not shown) is connected with the rear opening 421 of the second rotating chamber 42, and is used for gold plating One of (Au), silver (Ag), and copper (Cu). It is not limited to this.

If this object to be plated 9 is divided into two areas to be processed, the A side (not shown) and the B side (not shown in the figure), then the object to be plated 9 will be sequentially by this embodiment: one, installed in the Inside the carrier 21 of the carrying device. 2. Enter the degassing cavities 32 for degassing. 3. Enter the cleaning cavity 33 and clean the surface A. 4. After entering the first rotating cavity 41 and rotating 180°, it returns to the cleaning cavity 33 and cleans the surface B. 5. Enter the first rotating chamber 41 , then enter the second rotating chamber 42 , and then enter the first coating chamber 34 to coat the A surface. 6. Enter the second rotating cavity 42 Rotate 180°, and then make it return to the first coating chamber 34 to coat the B surface. Seventh, enter the second rotating chamber 42, and then enter the second coating chamber 35 to coat the surface B. Eighth, enter the second rotating chamber 42 and rotate 180°, and then make it return to the second coating chamber 35 to coat the A surface. 9. Enter the buffer cavity 36, and then move out the carrier 21 of the carrier device.

It should be noted that although the effect of double-sided coating can be achieved by the rotating module 414 of the first rotating chamber 41 and the rotating module 424 of the second rotating chamber 42 . But this embodiment can still be used simply for single-sided coating. At this time, the rotary module 414 of the first rotary chamber 41 and the rotary module 424 of the second rotary chamber 42 are used for the carrier 21 and the substrate to be plated. The object 9 moves from the first axis L1 to the second axis L2, but not limited thereto.

Referring to FIG. 8 , it is a first modification example of the new rotary transfer type vertical coating equipment. The difference lies in that: the first rotary chamber 41 only has the rear opening 411 (does not have the front opening 411 ) on the first axis L1. opening 412), the second rotary chamber 42 has only the rear opening 421 (without the front opening 422) on the second axis L2, two of the vacuum process chambers 3 are respectively along the first and second The axes L1 , L2 connect to the rear openings 411 , 421 of the first and second rotating chambers 41 , 42 . In this modification example, the vacuum process chambers 3 can be the cleaning chamber 33 and the first coating chamber 34 respectively, or the first coating chamber 34 and the second coating chamber 35 respectively. This is the limit.

Referring to Fig. 9, it is a second modification example of the new rotary transfer type vertical coating equipment, which is similar to the first variation example, the difference lies in: the first rotary chamber 41 and the The relay chamber 43 is omitted between the second rotating chambers 42 , but are directly connected.

Referring to FIG. 10 , it is a third modification example of the new rotary transfer type vertical coating equipment, the difference is that: the front opening 412 of the first rotary chamber 41 is not located on the first axis L1, and the second rotary The front opening 422 of the cavity 42 is not located on the second axis L2. Preferably, the front opening 412 of the first rotating chamber 41, the side opening 413 of the first rotating chamber 41, the front opening 422 of the second rotating chamber 42, and the side opening 423 of the second rotating chamber 42 are along the A fourth axis L4 is collinear. In this way, the advantage of flexible configuration can be achieved.

Referring to Fig. 11, it is a fourth variation of the new rotary transfer type vertical coating equipment, which is similar to the third variation, the difference is that two of the third variations are combined, and one of them is shared Between the vacuum process chamber 3.

Referring to FIG. 12 , it is a fifth modification example of the new rotary transfer type vertical coating equipment, which is similar to the third modification example, the difference is that the first rotary chamber 41 also has a The second rotating cavity 42 also has an outer opening 427 located on the second axis L2. The rotation module 414 of the first rotation cavity 41 can also have the head end 415 facing the outer opening 417 and the tail end 416 facing the outer opening 417 . The rotation module 424 of the second rotation cavity 42 can also have the head end 425 facing the outer opening 427 and the tail end 426 facing the outer opening 427 .

Referring to Fig. 13, it is a sixth variation example of the new rotary transfer type vertical coating equipment, the difference lies in:

The quantity of objects to be plated 9 is at least two, and the carrying device 2 includes at least two straight The carrier 21 is vertically arranged and suitable for carrying individual objects 9 to be plated.

The rotary module 414 of the first rotary chamber 41 can accommodate and drive the carriers 21 and the object to be plated 9 at the same time. The rear opening 411 and the front opening 412 of the first rotating chamber 41 are respectively connected to two vacuum process chambers 3 , and each vacuum process chamber 3 accommodates individual carriers 21 and objects to be plated 9 .

The rotary module 424 of the second rotary chamber 42 can accommodate and drive the carriers 21 and the object to be plated 9 at the same time. The rear opening 421 and the front opening 422 of the second rotating chamber 42 are respectively connected to two vacuum process chambers 3 , and each vacuum process chamber 3 accommodates individual carriers 21 and objects to be plated 9 .

For example: the two vacuum processing chambers 3 connected to the rear opening 411 of the first rotating chamber 41 are degassing chambers 32 , and the two vacuum processing chambers 3 connected to the front opening 412 are cleaning chambers 33 . The two vacuum process chambers 3 connected to the rear opening 421 of the second rotating chamber 42 are the second coating chamber 35, and the two vacuum process chambers 3 connected to the front opening 422 are the first coating chamber 34, thereby It can accommodate, convey, degas, clean, and coat the two carriers 21 and the object to be plated 9 at the same time, thereby achieving the effect of doubling production capacity. However, the configuration method is not limited to this.

In other implementations of this variation (not shown in the figure), the rear opening 411 and the front opening 412 of the first rotating chamber 41 can also be connected to only one vacuum process chamber 3 respectively, and the second rotating chamber 42 The rear opening 421 and the front opening 422 can also be connected to only one vacuum process chamber 3 respectively, at this time, each vacuum process chamber 3 can accommodate two carriers 21 at the same time And the object to be plated 9 is not limited to this.

Referring to Fig. 4, Fig. 14, and Fig. 15, the present invention is used for the coating of double-sided multilayer film, and the flow process includes the following steps:

Step 81 : Transport the object to be plated to one of the vacuum process chambers 3 , and the one of the vacuum process chambers 3 is connected to the first rotating chamber 41 .

Step 82: Perform one of degassing, cleaning and sputtering coating on one side of the object 9 in one of the vacuum process chambers 3 .

Step 83 : transporting the object to be plated 9 to the first rotating chamber 41 , and transporting it back to one of the vacuum process chambers 3 after rotating 180 degrees.

Step 84: Perform the same processing as step 82 on the other side of the object 9 to be plated.

Step 85 : Transport the object to be plated 9 to the first rotating chamber 41 , and after rotating the object to be plated 9 , move the object to be plated 9 out of the first rotating chamber 41 through the side opening 413 .

Step 91 : Transport the object to be plated 9 into the second rotating chamber 42 from the side opening 423 of the second rotating chamber 42 .

Step 92: The second rotating chamber 42 rotates the object to be plated 9, and transports it from the rear opening 421 to the other vacuum process chamber 3, and the object to be plated is placed in the other vacuum process chamber 3 One of the surfaces of the object 9 is subjected to one of the processes of degassing, cleaning and sputter coating.

Step 93: transporting the object to be plated 9 from the other vacuum process chamber 3 to The second rotating chamber 42 transports the object to be plated 9 from the second rotating chamber 42 back to the other vacuum process chamber 3 after the second rotating chamber 42 rotates the object to be plated 9 by 180 degrees.

Step 94 : Perform the same processing as step 92 on the other side of the object to be plated 9 in one of the vacuum process chambers 3 .

Step 95 (Step 86 ): Move the object 9 to be plated into yet another vacuum process chamber 3 .

Wherein, step 95 (step 86) is for step 81 to step 85, the yet another vacuum process chamber 3 may be the cleaning chamber 33, the first coating chamber 34, the second rotating chamber 42, the second One of the two coating chambers 35, the buffer chamber 36, and the unloading chamber 37; for steps 91 to 94, this yet another vacuum process chamber 3 can be the first coating chamber 34, One of the second coating cavity 35 , the buffer cavity 36 , and the unloading cavity 37 , but not limited thereto.

Through the above description, the advantages of the aforementioned embodiments can be summarized as follows:

One, this novel by setting this rotating device 4, makes this cleaning chamber 33 can clean the opposite two sides of this to-be-plated object 9, and this first coating chamber 34 and this second coating chamber 35 can be to the Coating films on the opposite sides of the object to be plated 9 can reduce the number of vacuum process chambers 3, and since the vacuum process chamber 3 must consume a large amount of energy to maintain the vacuum degree, by reducing the number of vacuum process chambers 3, energy consumption can be reduced at the same time, To achieve the effect of energy saving, carbon reduction and operation cost reduction. In addition, compared with the conventional coating equipment, multiple vacuum coating chambers must be set up to achieve the purpose of double-sided coating. Once only one-sided coating is required, The vacuum coating chamber on the other side (the side not to be coated) will be useless. However, when this embodiment is applicable to single-sided coating, there will be no useless first coating cavity 34 or second coating cavity 35 , so as to achieve the advantage of improving production flexibility.

Two, the vacuum process chambers 3 connected to the rotating device 4 can share the first rotating chamber 41 and the second rotating chamber 42, so the number of vacuum chambers can be reduced, and the floor space can be further reduced, thereby improving The use of clean rooms is effective.

3. With the vacuum process chamber 3, the rotating device 4, and the reflow device 5 arranged along the first axis L1 and the second axis L2, it is possible to prevent the equipment from moving between the first axis L1 and the second axis L2. The length in the extending direction is too long to achieve the advantage of being easier to install elastically.

4. The moving path of the carrier 21 of the carrying device 2 is on a horizontal plane, so that the height of the equipment can be lowered, avoiding the equipment being limited by the height of the factory building, and avoiding maintenance difficulties caused by the high equipment height, so as to achieve easy installation and The effect of maintenance.

5. Due to the adjacent loading cavity 31 and the unloading cavity 37, the return path of the carrying device 2 is shortened. In addition to reducing the number of carriers 21 of the carrying device 2 required for the actual operation of the present invention, In addition to reducing the construction cost of the equipment, it can also reduce the energy consumption caused by backflow, and the maintenance cost caused by the loss or maintenance of spare parts. In addition, the shortened return path can also effectively prevent the carrier 21 of the carrying device 2 from absorbing too much water molecules due to long-term exposure to the atmospheric environment, thereby reducing the time required for degassing. Time and energy consumption, to achieve the advantages of energy saving and carbon reduction.

To sum up, the new rotary transfer type vertical coating equipment can indeed achieve the purpose of the new model.

But the above-mentioned ones are only embodiments of the present invention, and should not limit the scope of implementation of the present invention with this. All simple equivalent changes and modifications made according to the patent scope of the present application and the content of the patent specification are still within the scope of the present invention. Within the scope covered by this patent.

2: Carrying device

21: Vehicle

3: Vacuum process chamber

31: Loading cavity

32: Degassing cavity

33: Clean the chamber

34: The first coating cavity

35: Second coating cavity

36: Buffer cavity

37: Unloading cavity

4: Rotating device

41: The first rotating cavity

411: rear opening

412: front opening

413: side opening

414: Rotation module

415: head end

416: end

42: the second rotating cavity

421: rear opening

422: front opening

423: side opening

424: Rotation module

425: head end

426: end

43: relay cavity

5: Backflow device

9: Items to be plated

L1: first axis

L2: second axis

Claims (16)

A rotary transfer type vertical coating equipment is suitable for a vertically arranged object to be plated, defining a first axis and a second axis. The rotary transfer type vertical coating equipment includes: A plurality of vacuum process chambers are respectively arranged on the first axis and the second axis, and are capable of accommodating and transporting the object to be plated along the first axis and the second axis; and A rotating device, comprising: A first rotating chamber is arranged on the first axis, and has a rear opening located on the first axis and connected to one of the vacuum process chambers, a side opening located between the first axis and the second axis, and a rotary module capable of accommodating and driving the object to be plated to rotate and having a head end and a tail end, the rotation module can turn the head end toward the rear opening and the tail end toward the rear opening, and One of the head end and the tail end is open towards the side, and the object to be plated can be moved in and out from the head end or the tail end of the rotary module, and A second rotating chamber is arranged on the second axis, and has a rear opening located on the second axis and connected to another vacuum process chamber, and a rear opening located between the first axis and the second axis and corresponding to the The side opening of the first rotating cavity, and a rotating module that can accommodate and drive the object to be plated to rotate and has a head end and a tail end, and the rotation module can use the head end toward the rear opening, and use the tail end The end faces the rear opening, and one of the head end and the tail end faces the side opening, and the object to be plated can move in and out from the head end or the tail end of the rotary module. The rotary transfer type vertical coating equipment as claimed in claim 1, wherein the first rotary chamber also has a front opening, and two of the vacuum process chambers are respectively connected to the front opening of the first rotary chamber And the rear opening, the head end of the rotary module can also face the front opening, and the tail end can face the front opening. The rotary transfer type vertical coating equipment as claimed in claim 2, wherein the first axis is parallel to the second axis, and the front opening and the rear opening of the first rotary chamber are located on the first axis, And oppositely arranged on two opposite sides of the rotary module. The rotary transfer type vertical coating equipment according to claim 1, claim 2 or claim 3, wherein one of the vacuum process chambers connected to the first rotary chamber is used for cleaning. The rotary transfer type vertical coating equipment according to claim 2 or claim 3, wherein the two vacuum process chambers connected to the first rotary chamber are used for degassing and cleaning respectively. The rotary transfer type vertical coating equipment as claimed in claim 1, wherein the second rotary chamber also has a front opening, and two of the vacuum process chambers are respectively connected to the front opening of the second rotary chamber And the rear opening, the head end of the rotary module can also face the front opening, and the tail end can face the front opening. The rotary transfer type vertical coating equipment as claimed in claim 6, wherein the first axis is parallel to the second axis, and the front opening and the rear opening of the second rotary chamber are located on the second axis, And oppositely arranged on two opposite sides of the rotary module. The rotary transfer type vertical film coating equipment as claimed in claim 1, claim 6 or claim 7, wherein one of the vacuum process chambers connected to the second rotary chamber is used for film coating. The rotary transfer type vertical film coating equipment as claimed in claim 6 or claim 7, wherein the two vacuum process chambers connected to the second rotary chamber are respectively used for titanium plating and copper plating. The rotary transfer type vertical coating equipment according to claim 1, wherein the first rotary chamber also has a front opening and an outer opening, and three of the vacuum process chambers are respectively connected to the first rotary chamber The front opening, the rear opening and the outer opening, the rotary module can also use the head end towards the front opening, the tail end towards the front opening, the head end towards the outer opening, and the tail end end towards the outer opening. The rotary transfer type vertical coating equipment as described in claim 1, wherein the second rotary chamber also has a front opening and an outer opening, and three of the vacuum process chambers are respectively connected to the second rotary chamber The front opening, the rear opening and the outer opening, the rotary module can also use the head end towards the front opening, the tail end towards the front opening, the head end towards the outer opening, and the tail end end towards the outer opening. According to the rotary transfer type vertical coating equipment described in claim 1, the rotating device further includes a relay chamber located between the first rotating chamber and the second rotating chamber, and the relay chamber communicates with the first rotating chamber. The side opening of the rotating chamber and the side opening of the second rotating chamber. The rotary transfer type vertical coating equipment according to claim 1, wherein when the head end of the rotary module of the second rotary chamber faces the rear opening or when the tail end faces the rear opening, the to-be-coated Everything lies on this second axis. The rotary transfer type vertical coating equipment as described in claim 1 is suitable for two vertically arranged objects to be plated, wherein the second rotating chamber of the rotating device can accommodate the objects to be plated at the same time. Rotary transfer type vertical coating equipment as described in claim 14, wherein two of the vacuum process chambers are connected to the rear opening of the second rotary chamber, and each vacuum process chamber accommodates individual objects to be plated . The rotary transfer type vertical coating equipment as described in claim 1, further comprising a backflow device, the backflow device straddles the first axis and the second axis, and is located between the first axis and the second axis with the rotation device opposite sides of the second axis.

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