TWM341704U - Folding vacuum apparatus - Google Patents

Description

M341704 VIII. New description: [New technical field] The present invention relates to a vacuum device, in particular to a folding vacuum device for coating work. [Prior Art] In the semiconductor, motor, electronics, and optoelectronic industries, many processes require coating in a vacuum device, and depending on the requirements of the product, the substrate needs to undergo multiple coating steps to form a plurality of different layers of germanium. ,

For this reason, for example, a vacuum skirt 1 as shown in FIG. 1 has appeared on the market, and At is used for transporting a plurality of substrates 10 in a continuous arrangement, which comprises a plurality of long-chain connected hollow cavities, one for use. a transport unit i 12 that transports the substrate 1 through the chambers 11, and a plurality of tubes are respectively mounted in the chambers ^

A target 13 for coating on the substrate 10 is exemplified. The number of cavities U corresponds to the number of coating layers set, and each chamber U $ has a chamber 11 1 that can be opened and closed. Class I pancreas day f, the operator discharges the substrate on the transport unit 12, and sends it to the cavity u towel by the transport unit it 12 and follows the direction indicated by the arrow (4) in the chamber (1), by the woman 13 The film is deposited on the substrate 1G, and finally the substrate H) is sent out. Of course, in actual operation, in order to speed up the process, the substrate 1G is continuously placed on the transport unit 12 in succession to continuously perform the coating operation. Although each of the targets 13 of the vacuum device 1 is coated with a different film layer on the surface of the substrate 10, since the two devices 1 are arranged only in the early line, when the number of the cavity 11 is large, The length of the extension and the length of the second unit 1 will be equivalent to M341704. At this time, the factory needs to occupy a relatively large space, resulting in a relatively low cost. In addition, when the number of layers to be plated on the substrate 10 is larger than the number of the cavities 11 provided in the vacuum device 1, or when it is required to be coated on both surfaces of the substrate 10, the operator must repeatedly apply the batches in batches. The substrate 1 is repeatedly fed into the vacuum device 1 to perform coating of different materials, which results in low production efficiency. [New content] Therefore, the object of the present invention is to provide a reduction in space consumption and high production efficiency. Vacuum device. Therefore, the novel folding vacuum device is configured to transport at least one substrate, and comprises: a first cavity unit, a second cavity unit, a vacuum connection unit, a plurality of first targets, and a plurality of second Target. The first cavity unit includes a first inlet and a first outlet opposite to the first inner wall and the outer wall, and a first inlet and a first outlet spaced apart from each other between the first inner wall and the first outer wall, and a plurality of A first chamber is formed in series between the first inlet and the first outlet, the substrate stage being accessed by the first inlet, and then outputted by the first outlet through the first chamber. The second cavity unit is juxtaposed with the first cavity unit, and includes a second inner wall and a second inner wall and a second outer wall spaced apart from each other, and a second portion between the inner wall and the first outer wall An outlet and a second inlet, and a plurality of second chambers connected in series between the second outlet and the second inlet, the second inner wall being adjacent to the first inner wall, and the second outer wall being separated from the first inner wall The substrate is accessed by the second inlet, and then passed through the second outlet after the 6 M341704 second chamber. The vacuum connecting unit is connected to the first cavity unit and the second cavity unit 'and includes a first rotating member on the side of the outlet of the female, and a second rotating member mounted on the side of the second inlet. The first rotating member turns the substrate outputting the first outlet to the second rotating member, and the second rotating member turns the substrate into the second inlet.

The first targets are respectively mounted on the first inner wall or/and the first outer wall and communicate with the first chamber for coating on the substrate. The second targets are respectively mounted on the second inner wall or/and the second outer wall and communicate with the second chamber for coating on the substrate. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments. Before the 隹+坷尘 is described in detail, the similar elements in the % and ~ 心 content are indicated by the same number. Example: The first preferred embodiment of the present invention is a - 疋〇 疋〇 疋〇 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 连续 基板 基板 基板 基板 基板 基板1 life Device package ~... Side 22. The folded vacuum "3, one of the first cavity unit 3, the first cavity unit 4, and the i-car 铱卞 弟 一 one cavity connection unit 5 use "' unit 3 and the second cavity The vacuum connection of the body unit 4 is as early as 5, the _1 = mechanism 6 for rotating the substrate respectively mounted on the first cavity unit 3, and the second one mounted on the second cavity unit 4 The first cavity unit 3 includes the inner and outer portions, and the first inner wall 31 and the first outer wall 32 are oppositely formed on the first inner wall 31. a first inlet % and a first outlet 34 at both ends of the first outer wall 32, and a plurality of first chambers 35 connected in series between the first inlet 33 and the first outlet 34, and a plurality of A first valve 36 is mounted between the two adjacent first chambers 35, respectively. The first chambers 35 are all in a vacuum state. The first valve 36 can be turned on or off by computer control.

It can be used to control the connection between the first chambers 35, and the first valve % in Fig. 2 is in an open state. The second cavity unit 4 is identical in structure and corresponding to the first cavity unit 3, and includes a second inner wall 41 and a second outer wall 42 which are oppositely spaced apart from each other and extend left and right. A second outlet 43 and a second inlet 44 at two ends between the second inner wall 41 and the first outer wall 42 are connected to each other to form a first cavity between the second outlet 43 and the second inlet 44. i 45, and a plurality of first valves 46 respectively installed between two adjacent second month to 45. The second inner wall 41 is adjacent to the first inner wall "" and the second outer wall 42 is away from the first inner wall 3. The second chamber is also "vacuum" and the second valve 46 is also used to control the communication between the second chamber 45 and No, it will not be described in detail here. The vacuum connecting unit 5 includes a first rotating member 51 mounted on the side of the first-out σ34, a second rotating member 52' mounted on the side of the second inlet 44, and a first rotating member 51 and a first connecting member A connecting cavity 53 between the two rotating members 52. The connection cavity 53 has a connection chamber 531. The vacuum connection also includes an attachment target 54 on the outer side of the connection chamber 53 and communicating with the connection 8 M341704 ^ chamber 531. The first and second rotary members 51, 52 of this embodiment can be controlled to rotate clockwise, and of course can also be designed to rotate counterclockwise. In addition, the vacuum connecting unit 5 can also omit the arrangement of the connecting target 54, and can even be omitted together with the connecting cavity 53, and the first and second rotating members 51, 52 can be directly in rotational contact. The conveying mechanism 6 includes a driving substrate 2 that conveys in a first direction 91 through the first conveying unit 61 of the first chambers 35, and drives the substrate 2 to pass through the second chamber 92 in a second direction 92. The second conveying unit 62 of the chamber 45, and a driving substrate 2 are conveyed in a third direction 93 through the third conveying unit 63 of the connecting chamber 531. The first direction 91 is from the first inlet toward the first outlet 34, the second direction 92 is from the second inlet 44 toward the second outlet 43 and is parallel to the first direction 91, and the third direction is the first revolution The member 51 faces the second rotating member 52 and is perpendicular to the first and second directions 91 and 92. The first, second and third conveying units 61, 62, 63A include a long-distance extending rail (not shown), and a plurality of units. The roller (not shown) on the road is moved by φ and a plurality of rollers that are driven by the roller and used to carry the substrate 2 (not shown). However, since the conveying mechanism 6 is not the focus of the improvement of the present invention, The first targets 7 are respectively mounted on the first outer portion 32 of the first cavity unit 3 and correspondingly communicate with the first chamber 35 for coating on the substrate 2 that is transported through. The first target material 7 can be made of different materials, and each of the first chambers 35 can be provided with a different coating system (not shown) for the first material 7 to form a film of different materials on the substrate 2. When the number of (4)-Kazaki 7 can also be increased or decreased according to the design, it can even be turned on or off as needed. 9 M341704 The number of layers of the rhodium plated. The second target 8 is similar in structure to the first target 7. The second cavity unit 4 is on the outer wall 42 of the younger brother and is connected to the second chamber. 45, the bucket connection is used for coating 45 on the substrate 2 conveyed through, and each - first two: - two:::: is set to: =:: system (_) 'for forming on the substrate 2 The number of core/different targets 8 can also be increased or decreased according to design, or even turned on or off as needed, thereby changing the number of rhodium plating layers. The operator places the wires 2 on the first conveying unit 6 conveying unit 61. In the first direction 91, the substrate 2 is fed from the first first portion into the first cavity unit 3, and when the first chamber is passed through, the surface of the substrate 2 is borrowed from the outside of the substrate 2 22 is plated with different layers, and then the two outlets 34 are output. Then, the first-rotating member 51 receives the substrate 2' of the output first-outlet 34 and rotates 9 clockwise, and then the substrate 2 is rotated from the first direction to the second direction. Sending to the third transport sheet to 3, driving the substrate 2 along the third-party == connection chamber 531, on the outer side of the substrate 2 by plating the pulse material 54 / plating another film layer, and then transporting the substrate 2 to the second layer Rotary member 52 And the second rotating member 52 will rotate 9 times clockwise. Then the substrate 2 is transferred from the first = 93 to the second direction 92 to the second conveying unit Q. The substrate 2 is entered into the second by the brother 1 into the second. The cavity unit 4, through the second chambers 45, and the second target 8 are plated with different film layers on the outer side 22 of the substrate 2, which are output by the second outlet 43, at this time outside the substrate 2 The side core is secondly plated with the desired film layer. Referring to Fig. 3, a second preferred embodiment of the novel folding vacuum device, 10 M341704, the configuration of this embodiment is substantially the same as that of the first embodiment ' + changing the second (four) 8 The mounting position is such that the second dry material 8 is mounted on the second inner wall 41 of the second cavity unit 4, so that the substrate 2 of the outer side surface 22 (four) is passed through the first cavity unit 3', and is transported through the first When the two chambers are single = 4, the second _ 8 will be on the inner side of the substrate 2? ! The film is recorded so that the inner and outer sides 21, 22 of the substrate 2 are provided with a film layer. Real

The embodiment may omit the setting of the connection (four) 54. Of course, it may be added as needed, and will not be described in detail herein. Referring to FIG. 4, a third preferred embodiment of the present invention is similar to the first and second embodiments, except that the arrangement of the first and second targets 7 and 8 is different. In the position, the first inner wall 31 and the first outer wall 32 of the first cavity unit 3 are mounted with the first female body 7, and the second inner wall 41 and the second outer wall 42 of the second cavity unit 4 are also respectively Do not install the second target 8. When the substrate 2 passes through the first cavity unit 3, the first target 7 is coated on the inner and outer sides 21, 22 of the substrate 2, so that the inner and outer sides 21, 22 of the substrate 2 are plated. a film layer, and when the substrate 2 passes through the second cavity unit 4, the second dry material 8 also respectively deposits a film on the inner and outer sides 21, 22 of the substrate 2, so that the inner and outer sides 21 of the substrate 2, Add different layers on the 22nd as needed. Similarly, the &' can be omitted in the present embodiment. Of course, it can be added to the single inner side or the single outer side or the inner and outer sides of the connecting cavity as needed, and will not be described in detail herein. Referring to FIG. 5, a fourth preferred embodiment of the present invention is similar to the second embodiment. The difference is that: 11 M341704 This embodiment increases the installation of the first target 7, The first target 7 is mounted on the first inner wall 31 of the first cavity 3 and the first outer wall 32, so that when the substrate 2 passes through the first cavity unit 3, the first target 7 will A film layer is plated on each of the inner and outer side surfaces 21 and 22 of the substrate 2.

Of course, the installation positions and the number of the first and second targets 7, 8 of the present invention are not limited to the first to fourth embodiments described above, and will not be described in detail herein. It should be further explained that 'of course, the present invention can also be set directly as in the third embodiment', and the first and second materials 7, 8 which are closed at different positions depending on the required condition, thus reach the first and second. The effects of the four embodiments may even have other different installation methods. It can be seen from the above description that the folding vacuum device of the present invention is designed such that the original 5 is placed on a cavity unit that requires a long string arrangement, and is folded into two segments of the body unit 34' and connected by the vacuum connection unit 5. Therefore, it can be avoided that the conventional single-wire extension will cause the loss of the extension length of the vacuum device to be too long, and the space occupied can be reduced, and the required cost can be reduced. In addition, the present invention is more suitable for the installation of the first and second dry materials 7, 8 on the first and second cavity units 3, 4, so that the new type is more diversified and ... The number of times the sheep has reduced the feeding of the substrate 2 into the vacuum device 'high production efficiency, so the new type has the effect of reducing the space occupied and the production efficiency is high' can indeed achieve the purpose of the new model, so the new type is not only an unprecedented one. Innovation is more available for industry use. The above is only the preferred embodiment of the present invention, and thus, the scope of the present invention is limited, that is, the simple equivalent change of the present invention: the range of interest and the new description Modifications, all still 12 M341704 are covered by this new patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a conventional vacuum device; FIG. 2 is a simplified schematic view of a first preferred embodiment of the folded vacuum device of the present invention; FIG. 3 is a folded vacuum of the present invention. A simplified schematic view of a second preferred embodiment of the apparatus; FIG. 4 is a simplified schematic view of a third preferred embodiment of the folding vacuum apparatus of the present invention; and FIG. 5 is a folding vacuum apparatus of the present invention. A simplified schematic diagram of a fourth preferred embodiment.

13 M341704

[Description of main component symbols] 2...... ...·Substrate 21 ······· · · · Inner side 22••... —Outer side 3... •...First cavity unit 31••... —Inner wall 32• •...——弟外壁33..." •...first entrance 34••... •...first exit 35····.......first chamber 36••... •...first valve 4... •...second Cavity unit 41 ······...the second inner wall 42••...•...the second outer wall 43·····...the second exit 44·····...the second entrance 45••... ...the second chamber 46······...the second valve 5...•...the vacuum connection unit 51····....the first revolving member 52••...the second revolving member 53"... ...connecting the cavity 531... •...connecting the chamber 54••... •...connecting the target 6... • ··delivery mechanism 61 ••... •...the first transport unit 62••...•...the second transport unit 63" ... - Di Er 2 transports early 7... •...first target 8... first light material 91 ••... •...first direction 92••... •... Direction 93 •• ... • ... the third direction 14

Claims (1)

M341704 Nine, the scope of application for patents: 1 · A folding vacuum: ", at least one substrate transported through, and contains a first cavity; ^ early strands, including the inner and outer spacing relative to one wall and a first outer wall, the first end between the first inner wall - the first inner wall and the first outer connecting line are formed in the first port, the first outlet 'and a plurality of each other, the substrate will be tr-inlet and the first The first chamber loss between an outlet is entered by the first inlet, and the second outlet is rotated by the first outlet; the second chamber element is followed by the first cavity: a second inner wall and a second outer wall 2: a pair of first and second inlets and/or an outlet formed between the second inner wall and the second outer wall Forming a first cavity in the second outlet and the second entrance to the second entrance to the second inner wall adjacent to the first inner soil, the outer wall is away from the first inner wall, the substrate will enter the crucible through the second inlet Waiting for the second chamber to be output by the second outlet; -,: ί empty connection And connecting the first cavity unit and the second cavity unit to the first rotating member mounted on the side of the first outlet, and the second rotating member on the side of the second inlet, the first rotating member Wheel: the substrate of the younger brother is turned to the second rotating member, and the second turning turns the substrate to the second inlet; the plurality of first targets are respectively mounted on the first inner wall or/and the outer wall a first chamber is used for the mineral medium on the substrate; and a plurality of second targets are mounted on the second inner wall or/and the second outer 15 M341704 wall and communicate with the second chamber, respectively. A film is deposited on the substrate. 2. The folding vacuum device according to the above application, wherein the vacuum connection unit further comprises a connection cavity connected between the first rotary member and the second rotary member, wherein the substrate is The first rotating member is sent out through the connecting cavity and then sent to the second rotating member. 'Folding vacuum device according to item 2 of the patent application scope', the connection (4) has a connection chamber, and the vacuum connection unit further comprises a connection of the connection chamber to the connection chamber, the connection A target is used to coat the substrate. 4. According to the scope of application patents 〖, 2, further comprising - a transport mechanism for transporting the substrate: two = set includes: driving the substrate to pass through the first direction; the wheel = brother - transport unit, - driving the substrate a second conveying unit facing the second chamber of the second side: passing through the first-in-one conveying unit, the first direction is two out... the first direction is: the second direction is from the second inlet toward the first one The directions are opposite in parallel, and the rotating member is oriented toward the second rotating member and perpendicular to the first::= is the first-stage rotation of the substrate from the first direction to the third direction' and the first returning the substrate is from the third direction Turn to the second direction.