AU2001230982A1 - Wafer bonding techniques to minimize built-in stress of silicon microstructures and micro-mirrors - Google Patents

Wafer bonding techniques to minimize built-in stress of silicon microstructures and micro-mirrors

Info

Publication number: AU2001230982A1
Authority: AU; Australia
Prior art keywords: mirrors; micro; stress; wafer bonding; bonding techniques
Prior art date: 2000-01-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2001230982A

Inventor

Timothy G Slater

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Xros Inc

Original Assignee

Xros Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-01-18

Filing date

2001-01-18

Publication date

2001-07-31

2001-01-18 Application filed by Xros Inc filed Critical Xros Inc

2001-07-31 Publication of AU2001230982A1 publication Critical patent/AU2001230982A1/en

Status Abandoned legal-status Critical Current

Classifications

- H10P90/1914—
- H10W10/181—

AU2001230982A 2000-01-18 2001-01-18 Wafer bonding techniques to minimize built-in stress of silicon microstructures and micro-mirrors Abandoned AU2001230982A1 (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US17632500P	2000-01-18	2000-01-18
US60/176,325		2000-01-18
US71591600A	2000-11-16	2000-11-16
US09/715,916		2000-11-16
PCT/US2001/001758 WO2001054176A1 (en)	2000-01-18	2001-01-18	Wafer bonding techniques to minimize built-in stress of silicon microstructures and micro-mirrors

Publications (1)

Publication Number	Publication Date
AU2001230982A1 true AU2001230982A1 (en)	2001-07-31

Family

ID=26872109

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2001230982A Abandoned AU2001230982A1 (en)	2000-01-18	2001-01-18	Wafer bonding techniques to minimize built-in stress of silicon microstructures and micro-mirrors

Country Status (4)

Country	Link
EP (1)	EP1254479A1 (en)
AU (1)	AU2001230982A1 (en)
CA (1)	CA2397760A1 (en)
WO (1)	WO2001054176A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR100549866B1 (en) *	2001-08-22	2006-02-08	고려대학교 산학협력단	Cancer Treatment and Prevention Agents

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4580568A (en)	1984-10-01	1986-04-08	Cook, Incorporated	Percutaneous endovascular stent and method for insertion thereof
NL8501773A (en) *	1985-06-20	1987-01-16	Philips Nv	METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES
US4902508A (en)	1988-07-11	1990-02-20	Purdue Research Foundation	Tissue graft composition
JPH05136014A (en) *	1991-11-15	1993-06-01	Sumitomo Metal Mining Co Ltd	Method for manufacturing bonded SOI substrate
JPH0774329A (en) *	1993-09-06	1995-03-17	Toshiba Corp	Semiconductor device
US5629790A (en) *	1993-10-18	1997-05-13	Neukermans; Armand P.	Micromachined torsional scanner
US5597410A (en) *	1994-09-15	1997-01-28	Yen; Yung C.	Method to make a SOI wafer for IC manufacturing
US5733337A (en)	1995-04-07	1998-03-31	Organogenesis, Inc.	Tissue repair fabric
US5554389A (en)	1995-04-07	1996-09-10	Purdue Research Foundation	Urinary bladder submucosa derived tissue graft
US5755791A (en)	1996-04-05	1998-05-26	Purdue Research Foundation	Perforated submucosal tissue graft constructs
ES2306841T3 (en)	1996-08-23	2008-11-16	Cook Biotech, Inc.	PROTESIS FOR COLEGENE BASED GRAFT.
CA2274082A1 (en)	1996-12-10	1998-06-18	Purdue Research Foundation	Gastric submucosal tissue as a novel diagnostic tool
DE69734218T2 (en)	1996-12-10	2006-07-06	Purdue Research Foundation, West Lafayette	Tissue graft from the stomach submucosa
WO1998025637A1 (en)	1996-12-10	1998-06-18	Purdue Research Foundation	Biomaterial derived from vertebrate liver tissue

2001
- 2001-01-18 AU AU2001230982A patent/AU2001230982A1/en not_active Abandoned
- 2001-01-18 CA CA002397760A patent/CA2397760A1/en not_active Abandoned
- 2001-01-18 EP EP01903124A patent/EP1254479A1/en not_active Withdrawn
- 2001-01-18 WO PCT/US2001/001758 patent/WO2001054176A1/en not_active Ceased

Also Published As

Publication number	Publication date
WO2001054176A1 (en)	2001-07-26
CA2397760A1 (en)	2001-07-26
EP1254479A1 (en)	2002-11-06
WO2001054176A9 (en)	2003-01-16

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