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WO2008031609A1 - Procédé de connexion ajustée de plaques et module optique fabriqué au moyen de ce procédé - Google Patents

Procédé de connexion ajustée de plaques et module optique fabriqué au moyen de ce procédé Download PDF

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Publication number
WO2008031609A1
WO2008031609A1 PCT/EP2007/008020 EP2007008020W WO2008031609A1 WO 2008031609 A1 WO2008031609 A1 WO 2008031609A1 EP 2007008020 W EP2007008020 W EP 2007008020W WO 2008031609 A1 WO2008031609 A1 WO 2008031609A1
Authority
WO
WIPO (PCT)
Prior art keywords
plate
adhesive
bore
auxiliary element
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/008020
Other languages
German (de)
English (en)
Other versions
WO2008031609A8 (fr
Inventor
Georg Günther
Karlheinz Bartzke
Ulrich Preisser
Hans-Jürgen LÜTZ
Erik Beckert
Steffen Böhme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Carl Zeiss AG
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG, Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Carl Zeiss AG
Publication of WO2008031609A1 publication Critical patent/WO2008031609A1/fr
Publication of WO2008031609A8 publication Critical patent/WO2008031609A8/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Definitions

  • the present invention relates to a method for connecting plates and an optical assembly produced by this method, in particular to their permanent and precise adjustment.
  • FIG. 1 shows an example of an optical assembly according to the prior art.
  • an optical assembly 15 is mounted on a mounting plate 11 via a carrier system 13, 16, 17 and an adjustment device 14.
  • the carrier system consists of two plates 13 and 17 which are adjacent to each other and which are connected to one another via a connecting element 16.
  • an adjustment device 14 On the mounting plate 11 facing away from the sub-plate 13 of the carrier system is an adjustment device 14 on which the optical assembly 15 is mounted.
  • the material-locking connection between the mounting plate 11 and the carrier system takes place in that on the connecting surfaces between the sub-plate 17 and the mounting plate 11 adhesive 12a, 12b is applied thin.
  • Another aspect of the present invention relates to the compensation of temperature expansion differences of different materials used in an assembly. If materials with different coefficients of thermal expansion are bonded together, there is a risk that the compounds could be destroyed in the event of temperature changes as a result of the different expansion of the bonded materials. Bimetallic effects can also lead to misalignment of the optical assembly. According to the state of the art, materials with the same temperature expansion behavior are preferably used to avoid this problem or contact surfaces are produced between the connected parts with the smallest possible dimensions. Also, the splices are distributed over a small area as possible. A general solution to this problem is unknown.
  • the object of the present invention is therefore to connect parts of an optical assembly together and to adjust so that the adjustment is maintained even after the shrinkage of the adhesive.
  • the object of the present invention is furthermore to connect parts of an optical assembly with one another in such a way that they maintain their alignment with one another even if the parts have different thermal expansions and, after bonding, during transport or use, temperatures in the rich from -40 0 C to +70 0 C are exposed.
  • optical assembly according to claim 1 by the method according to claim 24, by the method according to claim 69 and by the use claims 92 and 93.
  • Advantageous developments of the optical assembly according to the invention and of the method according to the invention can be found in the respective dependent claims.
  • the essence of the present invention is that adhesive is applied as thin as possible and arranged so that the delay of the individual splices cancel each other.
  • the parts are not glued directly to each other, but it auxiliary components are used, each having two parts to be joined materially connections. Normally, the parts to be joined have no direct cohesive connection.
  • auxiliary elements for connecting the parts for example two plates, are for this purpose housed in holes in one and / or the other plate to be connected.
  • each auxiliary element one
  • auxiliary element is glued on the one hand to the walls of the bore in which it is housed, and on the other hand, the auxiliary member with the other plate in which it is not housed, is glued to the surface thereof.
  • the auxiliary elements which may be balls or cylinders, for example, thus act as a bridging between the two plates to be joined.
  • the one Plate usually be a mounting plate and the other plate a backing plate. For the panels, materials with low thermal expansion coefficients should be used.
  • the float glass "Borofloat” from Schott is suitable, for example, in the following the method is to be explained by way of example for the connection of a mounting plate to such a carrier plate on which an optical assembly can be mounted Parts or plates can be used together.
  • the two plates are first, advantageously with an adjustment device, a mounting robot or hexapod, firmly connected. But it can also be arranged lying a plate, in which case the other plate is guided by an adjusting device. If the one plate has optical components as a carrier plate of an optical structure, then the guidance of this plate can take place by means of the gripper of an adjustment device, a mounting robot or hexapod, which acts on one or more of the optical components. Since the optical components are firmly connected to the carrier plate, in this way the position of the carrier plate relative to the other plate with which it is to be connected can be adjusted.
  • the mounting plate is first placed so that the gravitational force acts in the direction of its plate surface. It is then brought the carrier plate with the optical structure, for example by means of an adjusting device in the desired position relative to the mounting plate. This is normal mally aligned the optical axis of the optical component according to the optical axis of adjacent components.
  • the support plate will be located next to the mounting plate so that its plate surface faces the mounting plate.
  • the two plates do not necessarily have to be parallel and on top of each other, their angle and distance from each other is determined by the requirements of the adjustment. Normally, the gap that forms between the support plate of the optical assembly and the mounting plate will be less than 0.5 mm.
  • the mounting plate and the carrier plate then form an acute angle.
  • the support plate has holes for the inventive method, in which auxiliary elements can be accommodated.
  • the holes are advantageously perpendicular or approximately perpendicular to the plane of the mounting plate. Particularly favorable is the
  • auxiliary elements are inserted into these holes after adjustment of the two plates to each other so that they rest under their own weight on the lower plate, in this case the mounting plate.
  • the auxiliary elements are preferably selected to fill the bore on most of its cross-sectional area and to apply sufficient weight. If, for example, auxiliary elements with a diameter of 5 mm are used, the diameter of the bore would advantageously be 0.01 mm to 0.02 mm larger, so that a narrow gap of 10 to 20 ⁇ m is created between the auxiliary element and the wall of the bore.
  • Spherical auxiliary elements for example Diameter from 3 mm to 10 mm. The resulting gap may also be 0.02 mm to 0, 1 mm wide.
  • the bore and the auxiliary element which is accommodated in the bore, have the same shape in their cross section.
  • the auxiliary element is guided by the bore when it is inserted into it.
  • the auxiliary element then has the same distance to the wall of the bore on all sides.
  • adhesive is accommodated at those points of the auxiliary element and / or the bore, against which the auxiliary element rests against the bore after insertion. Further, adhesive is accommodated on the auxiliary member and / or the mounting plate so that the auxiliary member, after having been accommodated in the bore, is connected to the mounting plate via an adhesive layer.
  • the splices between the auxiliary element and the wall of the bore are thus advantageously in a direction perpendicular or nearly perpendicular to the axis of the bore, while the splice between auxiliary element and mounting plate lies in the direction of the bore axis. Oriented at the bore axis, the splices are thus perpendicular to each other.
  • the mounting plate and the carrier plate are connected to each other via auxiliary elements, the auxiliary element being connected to the mounting plate and to the carrier plate via adhesive layers.
  • Adhesive layers need not be placed on all joints of the auxiliary elements with the plates. It is quite possible that the auxiliary element is the plates In some places directly touched, especially to be guided by the bore. Adhesive can also be introduced surrounding the contact surface between the plate and the auxiliary element. The influence of the adhesive shrinkage on the adjustment should advantageously remain smaller than 1 micron.
  • the method according to the invention in all variants described can be carried out with many different types of adhesive. It is possible, for example, the use of superglue (cyanoacrylate), but also UV-curing adhesive, whose curing advantageously takes about 1 minute, is suitable for connecting the parts.
  • UV adhesive plates and / or auxiliary elements which are permeable to ultraviolet light are advantageously used.
  • a material for auxiliary elements in this case, for example, sapphire.
  • the adhesive can be cured by irradiating UV light from the side of the carrier plate facing away from the mounting plate through the bore and through the UV-transmissive auxiliary element onto the adhesive layers.
  • the mounting plate or the carrier plate can be designed to be UV-permeable.
  • a UV-impermeable auxiliary element can be arranged in the bore.
  • the adhesive would then be irradiated through the UV transparent panel with ultraviolet light.
  • UV-transparent material for the construction of plates is borofloate in question.
  • the curing of the adhesive is carried out by light of about 400 nm wavelength.
  • the adhesive used for bonding should be as thin as possible to avoid Klebewülste around the splice, which could lead to horizontal and vertical shifts of the auxiliary balls and thus to the DeJusttechnik the optical assembly in its shrinkage.
  • the mounting plate can be provided with holes into which the auxiliary elements are introduced.
  • the mounting plate could be stored on a holder.
  • the support plate would then, e.g. by means of the gripper and an adjusting device, arranged and adjusted from below next to the mounting plate.
  • the auxiliary elements then rest against their own weight on the surface of the carrier plate facing the underside of the mounting plate.
  • one or more adhesive strips can be accommodated in the bore, which reduce the distance between the bore and the auxiliary element over a limited area.
  • the adhesive is then placed between the auxiliary member and the glue bar.
  • the adhesive can be formed, for example, as a small plateau in the wall of the bore.
  • auxiliary elements having various shapes can be used.
  • the auxiliary element has the shape of a sphere, then this results to the wall of the bore an annular contact point. Where the ball abuts the surface of a plate, the contact point is punctiform.
  • the ball can touch the wall of the bore and / or the plate without any intermediate distance, but it can also be formed between the ball and the wall of the bore and the plate surface a small adhesive gap seih, which adhesive. In this case, the sphere would be embedded in the adhesive, as it were.
  • one or more auxiliary elements have the shape of a cylinder.
  • the axis of the cylinder coincides with the axis of the bore.
  • that surface of the cylinder to which the cylinder is connected to a plate surface is slightly bowed outwardly, so that the contact between the cylinder and the plate surface is made similar to the ball.
  • a more or less large layer of adhesive can be produced around the point of contact of the rounded end face with the plate surface.
  • the bonding surface of the cylindrical auxiliary element with the inner wall of the bore need not, as in the case of the sphere, be annular, but rather may also be formed as a surface. As a result, an adhesive bond with significantly higher strength than in the case of the ball can be achieved.
  • the auxiliary elements were loose before their adhesion under their own weight.
  • the auxiliary element can also be actively pressed against one or more adhesive surfaces.
  • a spring in the bore of the support plate are introduced such that it presses the auxiliary element on the mounting plate.
  • the spring is held by an element which is UV permeable, so for example borofloat has.
  • Particularly suitable for this purpose is a plate on which a plurality of springs can be arranged so that they can be pressed in a single operation in several or all holes. With the contact pressure of the adhesive gap between auxiliary element and plate is variable. This adhesive can be used with higher viscosity. This would result in larger adhesive gaps than 0.02 mm.
  • one or more Verlier hymnen can be accommodated at the edge of the bore. These narrow the bore so that the auxiliary element no longer fits through the opening.
  • auxiliary element can also be pressed in other ways than by a spring against the surface of the plate opposite it.
  • a compressed air hose with an auxiliary plate lying behind it is arranged on the side of the plate having the bore, which plate is not provided with the bore. Is the plate in which the bore is housed, thinner than the extension of the auxiliary member in the direction of the bore and projects the auxiliary member on the non-bore plate having the opposite side of the plate, so the auxiliary member by inflating the pressure hose directly against his Glue pad to be pressed with the other plate.
  • a pressure hose can be used, which has holes where it is above a hole. In this way, you can introduce compressed air through the hose into the holes. If the auxiliary element is sufficiently close to the wall of the bore, so that the connection point is completely or at least partially impermeable to air, a force is exerted against the ball by the compressed air.
  • the seal can also be adjusted by the viscosity of the adhesive and acting between the bore wall and auxiliary element capillary forces.
  • the auxiliary plate and the pressure tube are advantageously UV-permeable, so that the adhesive can be cured while the force acts against the auxiliary element.
  • the width of the glue gap can be varied via the pressure.
  • the adhesive can be applied to the surfaces to be bonded by means of a metering device.
  • the inner walls of the bores may also have bulges in which adhesive is introduced before the introduction of the auxiliary element.
  • these adhesive chambers can also be designed so that initially no Adhesive comes into contact with the auxiliary element and the adhesive is only released by the entire assembly is reversed so that the adhesive flows out of the adhesive chamber.
  • an auxiliary element can be used, which, when it has been introduced into the bore, leaves a narrow adhesive gap through which the adhesive can be pressed by the compressed air.
  • the exact dimensioning of the compressed air and the adhesive gap depends on the viscosity of the used
  • Glue off it should be noted that when using a pressure hose or a spring, the auxiliary element can be pressed against its weight against the plate to be joined.
  • the adhesive chambers may also be arranged to take up excess adhesive.
  • auxiliary elements are also conceivable whose cross section has any other shape.
  • the cross section could e.g. elliptical, rectangular, triangular, star-shaped or trapezoidal.
  • the structure therefore has components for compensating temperature expansion differences.
  • the holes may have solid joints that are movable in one direction and stiff in all other directions.
  • three solid joints are used together with a rigid support point planar in one of the plates.
  • the rigid support point can be an auxiliary element introduced into a bore and is advantageously accommodated in the center of the support plate and / or the mounting plate.
  • the solid state joints are also housed in holes in the carrier plate and / or the mounting plate.
  • the solid-state joint can then be accommodated on a third plate, which is arranged in a form-fitting manner on the side of the carrier plate facing away from the mounting plate such that the solid-body joint projects into the bore in the carrier plate.
  • the connection between the solid-state joints and the plates to be joined is in turn not directly produced, but via an auxiliary element according to the principles described above. Should the connection between the solid-state joints and the plates to be joined is in turn not directly produced, but via an auxiliary element according to the principles described above. Should the connection between the
  • the auxiliary elements can be filled prior to assembly and adjustment of the plates in the holes and secured by Verlier Klien against falling out. If, in an advantageous embodiment, three solid-body joints are used together with a rigid support point, then the bores with the solid-state joints are advantageously arranged in a triangle whose center is the rigid one
  • the one-way flexible Solid joints are thereby aligned so that they are movable in the direction of the rigid support point in the plane of the corresponding plate, that is, they are in the direction perpendicular to the direction of the bore, in which they are housed, movable.
  • rigid adhesive dots are used in conjunction with elastic adhesive dots.
  • the rigid adhesive dots are arranged at a small distance, preferably less than 20 mm from each other, while the elastic adhesive dots have a greater distance from each other.
  • the differences in expansion increase towards the edge of the bonded plates, such an arrangement achieves that the rigid adhesive dots are used where the tensions are low, while the elastic adhesive dots can compensate for the larger stresses occurring towards the edge.
  • Particularly advantageous in this case is an arrangement of three rigid and three elastic support points, wherein the three rigid support points form a triangle which lies in the interior of the triangle formed by the three elastic support points.
  • the centers of the two triangles coincide in this case and the degrees defined by an elastic support point and the nearest rigid support meet for all adhesive points in this center.
  • all rigid and elastic adhesive dots should each have the same distance from the center.
  • the side length of the triangle formed by the rigid support points should not exceed 20 mm, because otherwise the stresses for most adhesives become too great. Side lengths smaller than 20 mm are possible if the plates are not too big or too heavy. On the other hand, the side lengths can be up to 100 mm with temperature fluctuations of less than ⁇ 10 0 C or with small expansion differences between the plates.
  • the optical assembly according to the invention has devices that prevent the bonded plates from bending as they expand differently as temperature changes.
  • a device may e.g. be a compensation plate, which is arranged on the side opposite the support plate side of the mounting plate and made of the same material as the carrier plate.
  • the compensation plate is in this case arranged symmetrically to the support plate with respect to the plane of the mounting plate.
  • the compensation plate has the same auxiliary elements in bores in the same places as the carrier plate.
  • the support plate and the compensation plate are made of the same material and constructed analogously, they exert the same forces in the opposite direction on the mounting plate when the temperature changes, so that their effects are compensated.
  • the auxiliary elements in a plate are not further apart than, for example, 20 mm, so that the adhesive bonds are not destroyed during thermal expansion.
  • the mounting plate is thicker than the carrier plate and the compensation plate.
  • Splices acting through temperature expansion is to accommodate an intermediate plate between the carrier plate and the mounting plate.
  • the intermediate plate is connected to the mounting plate via normal splices or via auxiliary elements in the sense described above.
  • the support plate is then arranged on the intermediate plate as it was arranged on the mounting plate in the examples described above.
  • the idea of this arrangement is to avoid the direct contact of two plates with very different thermal expansion coefficients.
  • a material is used for the intermediate plate whose thermal expansion is between that of the mounting plate and that of the support plate.
  • the materials can also be used in reverse order.
  • the bonding between the assembly and the mounting plate is carried out by loose auxiliary elements whose functional surfaces are perpendicular to each other. Due to the relatively small point or line-shaped splices between the auxiliary elements and the plates, the strength of the adhesive bond is not always the highest requirements, such as in case of stress, grown.
  • an advantageous embodiment of the inventive idea is described, which is shrinkage-invariant and at the same time withstands the highest mechanical stresses.
  • the plates are then arranged side by side with plate surfaces facing one another such that the fixedly mounted auxiliary elements protrude into bores in the other plate to be connected, so that a relatively large all-round alignment gap of, for example, 0.5 mm exists in the bore around the auxiliary element. which will generally be uneven and wedge-shaped.
  • auxiliary elements for example, cylinders of eg 10 mm diameter are suitable.
  • the holes then have a diameter, for example, 1 mm larger than the diameter of the auxiliary element.
  • the auxiliary elements may be anchored in the plate or glued to it. The latter is particularly advantageous for use with difficult-to-process materials.
  • the idea of the method according to the invention consists in the fact that the bonding as well as the adjustment is carried out in two steps.
  • the two plates to be joined together are roughly adjusted to each other and a first Vorklebung, advantageously with highly viscous UV adhesive with a shrinkage of only 2%, performed, then the fine adjustment is then made and the two plates finally glued together.
  • the possibility of a fine adjustment after coarse adjustment and Vorklebung is created by the fact that prior to Vorklebung a sleeve surrounding the auxiliary element is disposed in the bore. After the coarse preclurrent adhesive has cured, this sleeve is removed, creating a small gap in the bore. Within this gap, the plates can now be finely adjusted to each other.
  • the narrow gap is filled with adhesive, such as low-viscosity superglue, which finally fixes the position of the plates to be joined to one another after it has hardened.
  • adhesive such as low-viscosity superglue
  • the sleeve which generates the gap for the Feinklebung, there are various possibilities. On the one hand, it can be arranged so that it abuts the auxiliary element circumferentially on this. If the sleeve is thus removed after the curing of the first adhesive, the auxiliary element is initially not in contact with adhesive. On the other hand, the sleeve (or a hose) can be arranged in the bore so that it abuts the auxiliary element comprehensively against the wall of the bore.
  • the first adhesive is then placed between the inner wall of the sleeve or hose and the auxiliary member. If the spacer is removed, the Feinjustierspalt arises adjacent to the wall of the bore.
  • the distance between the auxiliary element and the wall of the bore before the coarse bond for example, 0.4 to 0.5 mm, wherein the auxiliary element is not applied to the wall of the bore.
  • an initially uniform adhesive gap of, for example, 0.1 mm to 1 mm should then remain.
  • the advantage of this method is that the coarse adhesive coating can shrink to its final position during curing and that the resulting de-adjustment can be compensated by the subsequent fine adjustment. Since the Feinklebespalt is significantly narrower than the original distance between the wall of the bore and the auxiliary element and the same size in all directions, the de-adjustment of the assembly by shrinkage of the adhesive of the fine gluing is significantly lower. As in the method described above, here too the functional surfaces, ie the surfaces of the bond, are perpendicular or nearly perpendicular to the plate plane having the bore. According to the invention, the fine adhesive sleeve or the tube before the first bonding Also be introduced so that it rests against the wall of the bore. As a result, no misalignment occurs during shrinkage of the first adhesive, because the adhesive dissolves in this case from the sleeve and forms an approximately 10 micron wide gap.
  • the first and / or second adhesion can also be carried out in this process with superglue and / or UV-curing adhesive and / or cationic UV adhesives.
  • the auxiliary elements and / or the carrier plate and / or the mounting plate are advantageously made of a UV-transmissive material.
  • the auxiliary elements for example, sapphire in question, while the plate can be made of borofloat, for example. If the use of a UV-transparent material is not possible for manufacturing reasons, openings may be accommodated in the carrier plate and / or the mounting plate through which the UV light can be radiated onto the splices.
  • the spacer which is accommodated in the bore surrounding the auxiliary element, can be a simple sleeve or a hose.
  • a material is used which does not bond with the adhesive.
  • the sleeve or tube may be coated on its surface with a polymeric anti-sticking layer or anti-adhesive materials, e.g. Teflon.
  • Teflon a polymeric anti-sticking layer or anti-adhesive materials
  • the spacer is a double-walled sleeve with thin walls of non-adhesive materials, such as, for example, lytnerbe Anlageneten stainless steel foils, which can be inflated with compressed air.
  • the inner and outer diameter of the sleeve should be advantageously varied by the compressed air in the range of 1/10-mm. Due to the elasticity of the adhesive sleeve in the radial direction, it can be achieved here that the adhesive shrinkage in the precoating does not lead to a misalignment of the optical assembly. For this purpose, the strength of the gripper and the adjusting device should be significantly greater than that of the adhesive sleeve.
  • the adhesive sleeve can be removed from the bore after coarse Vorklebung by the compressed air is released.
  • an adhesive cuff can advantageously also be used, which has an inner and an outer film ring with an intermediate thin paraffin layer.
  • a heating wire is embedded, with which the paraffin layer can be melted after Vorklebung so that the sleeve can be removed from the bore.
  • the foil rings do not necessarily have to be closed in an annular manner during assembly, but they can also be conveniently inserted as foil strips into the bore self-tapping and over-lapping and also removed again, the thin paraffin layer already being applied to the inside of the outer foil strip prior to its assembly should be applied to the embedded heating wire.
  • the films can be self-tensing by virtue of their elasticity in seeking the planar and stretched condition that they had prior to loading into the bore.
  • the foils have a thickness of eg 0, 1 mm for this purpose
  • the paraffin layer which melts at about 50 0 C and should be about 100 microns thick, can before installation be poured on the film in the liquid state.
  • the film rings for example, stainless steel with a thickness of, for example, 20 ⁇ m is suitable, whose smooth surface combines neither with the strongly hydrophobic paraffin nor with the plastic of the pre-treatment.
  • constantan wire 10 ⁇ m to 100 ⁇ m, advantageously of 50 ⁇ m diameter, can be used for the heating wire.
  • the wire is looped into the liquid paraffin layer on the foil before assembly.
  • the heat input of the heating wire into the joint gap during the melting process should be so low that the optical assembly is not misaligned by the heating.
  • a power of I W for example, a power of I W.
  • a high-viscosity adhesive is used for the first coarse Vorklebung, while the adhesive used for the fine bonding is thin liquid.
  • the assembly according to the invention can be designed or manufactured as described in one of the following examples.
  • the same or similar components or components are provided in the figures described below with identical reference numerals.
  • Figure 1 shows an optical assembly according to the prior art.
  • Figure 2 shows an optical assembly whose mounting plate and the support plate are connected to each other via spherical auxiliary elements.
  • FIG. 3 a shows, enlarged, a spherical guide arranged in a bore in the carrier plate. ges auxiliary element.
  • Figure 3b shows an enlarged housed in a bore in the mounting plate cylindrical derförmiges auxiliary element with crowned
  • FIG. 4 shows the structure of an optical assembly, wherein the bores with the auxiliary elements are accommodated in the mounting plate.
  • Figure 5 shows how an auxiliary element is pressed against the mounting plate by a spring disposed on an auxiliary plate.
  • FIG. 6 shows the arrangement of a pressure hose which presses an auxiliary element through the carrier plate against the mounting plate.
  • FIG. 7 shows the arrangement of a pressure hose which has a hole through which compressed air presses the auxiliary element against a mounting plate.
  • FIG. 8 shows the construction of an optical assembly which has solid-state joints.
  • Figure 10 shows the construction of an optical assembly with a combination of connections via auxiliary elements and elastic adhesive dots.
  • Figure 11 shows an advantageous arrangement of solid and elastic adhesive dots.
  • Figure 12 shows an optical assembly having a compensation plate.
  • FIG. 13 shows the construction of an optical assembly with an intermediate plate arranged between a carrier plate and a mounting plate.
  • FIG. 14 shows the structure of an optical subassembly with auxiliary elements fixedly arranged on the carrier plate and sleeves arranged around the auxiliary elements for producing a fine gluing gap.
  • FIG. 15 shows the structure of an optical assembly with auxiliary elements fixedly arranged on the carrier plate after a coarse gluing has been carried out and the sleeve has been removed to produce a fine-gluing gap.
  • Figure 16 shows the structure of an optical assembly with fixedly arranged on the support plate auxiliary elements, a coarse bond and a Feinklebung within the bore.
  • Figure 17 shows the result of a two-stage bond, wherein the sleeve for generating the Feinklebespaltes applied to the wall of the bore.
  • Figure 18 shows the structure of an optical assembly, wherein the two-stage bonding was performed in holes which are housed in the support plate.
  • FIG. 19 shows a detail around a bore in which an inflatable cuff is accommodated to produce a fine-adhesive gap.
  • FIG. 20 shows a section around a bore, in which a sleeve with two film layers, an intermediate paraffin layer and a heating device are accommodated to produce a fine-bonding gap.
  • Figure 21 shows the use of a shape memory sleeve which is in the tensioned state.
  • Figure 22 shows the use of a shape memory cuff which is in the relaxed state.
  • FIG. 2 shows the section through an optical subassembly according to the invention.
  • a base 24 in this case is a mounting plate 11.
  • the surface of this flat plate 11 is substantially parallel to the earth's surface.
  • a support plate 22 is arranged, which on its side facing away from the mounting plate 11 carries an optical component 15 which is fixedly connected to the support plate 22.
  • the optical component 15 is in this case held by a gripper 23 on its side facing away from the carrier plate.
  • the gripper arm 23 may be connected to an adjusting device, not shown in the figure. In this way, it is possible to align the position of the carrier plate 22 and the optical components 15 arranged on it with the aid of the gripping arm 23 on the optical axis 28.
  • the support plate 22 has perpendicular to its surface standing bores 25a and 25b, in which auxiliary elements 21a and 21b are housed.
  • a third auxiliary element 21c is also accommodated outside the plane of the figure in a bore, which is not shown.
  • the auxiliary elements 21a, 21b, 21c are glued in their bore 25a, 25b via splices 27a and 27b and 27c and 27d to the wall of the bore.
  • splices 26a, 26b and 26c are accommodated such that the connecting elements 21a, 21b, 21c are firmly connected to the mounting plate 11.
  • the auxiliary elements 21a, 21b, 21c are shaped so that their outline, viewed in the direction of the bore 25a, 25b, runs parallel to the wall of the bore 25a, 25b.
  • the auxiliary element 21a, 21b, 21c is inserted from above, ie from the side of the carrier plate facing away from the earth's surface, into the carrier plate, the auxiliary element is guided by the bore 25 and is only slightly movable in the radial direction.
  • the support plate 22 and the mounting plate 11 are not exactly parallel. Although the bottom of the support plate is facing the top of the mounting plate, the two plates form an acute angle to each other.
  • the auxiliary element 21b lies deeper in the guide 25b assigned to it than the auxiliary element 21a in the opening 25a. While the carrier plate 22 at no point the mounting plate 11 Stir, so are the two plates at the bore 25a but so close together that the auxiliary member 21a on the side facing away from the mounting plate protrudes from the bore of the support plate 22.
  • FIG. 3a shows a section around the bore 25a in the carrier plate 22.
  • the spherical auxiliary element 21a is connected here via layers of adhesive 27a and 27b to the walls of the bore and via an adhesive surface 26a to the mounting plate. If the adhesive layers have UV-curing adhesives, the adhesive spots 27a, 27b and 26a are illuminated with UV light 31 in order to cure the adhesive.
  • the auxiliary spherical member 21a comprises a UV-transmissive material, e.g. Sapphire, up. In this way, the adhesive 27a, 27b and 26a can be cured by irradiation with UV light from the mounting plate 11 facing away from the side of the support plate 22.
  • the mounting plate 11 UV-transparent, so that the irradiation with UV light 31 can be made from below.
  • the material for the plate is e.g. Borofloate in question.
  • the adhesive surfaces 27a and 27b may be in the form of individual adhesive dots, individual adhesive surfaces or individual adhesive lines, but they may also rotate the auxiliary element 21a along its entire contact surface with the wall of the guide 25a.
  • FIG. 3b shows the same section of an optical assembly as FIG. 3a.
  • the auxiliary element 21 used here in the direction of the bore 25 parallel to the wall of the bore extending side surfaces.
  • this auxiliary element 21 is cylindrical, so that when viewed in the direction of the bore a circular cross section is present.
  • the auxiliary element could, for example, also be triangular or rectangular.
  • FIG. 3 b shows that the auxiliary element 21 faces one of the mounting plate 11 facing outwards
  • End face 32 has.
  • the auxiliary element is connected via an adhesive layer 26 to the mounting plate 11. Due to the radius of curvature of the rounded end face 32, the extent of the adhesive surface 26 can be influenced.
  • the auxiliary element 21 shown here has the additional advantage that the splices to the wall of the bore 27 a and 27 b have a significantly larger area than in the case of the ball.
  • Figure 4 shows an optical assembly in which the optical assembly 15 and the support plate 22 are connected from below to the mounting plate 22.
  • the mounting plate 22 bores 25a and 25b and advantageously a third hole outside the plane of the figure, which are perpendicular to the plane of the mounting plate.
  • the mounting plate 11 and the support plate 22 are generally not exactly parallel, but form an acute angle to each other, so that there is a narrow gap varying width between see the two plates.
  • the support plate 22 relative to the mounting plate 11 accordingly Adjusted the optical axis 28, the connecting elements 21a, 21b and 21c in their corresponding guides 25a, 25b and the third, not shown hole occupied, so that they are guided by the bore 25a, 25b in one direction and then on the Support plate 22 rest. Subsequently, fixed connections are made between the connecting elements 21a, 21b, 21c and the walls of the bores 25a, 25b and between the connecting elements 21a, 21b, 21c and the carrier plate 22.
  • adhesive was applied to the later contact surfaces 26a, 26b, 27a-27d before or after insertion of the auxiliary elements 21a, 21b, 21c into the bores 25a, 25b and the third bore (not shown).
  • This can be superglue or even UV-curing adhesive.
  • the latter is irradiated with UV light for curing.
  • some elements made of UV-transparent material, such as sapphire or borofloat, are produced for this purpose. The UV light can then pass through them
  • FIG. 5 shows how, by means of a spring 52, an auxiliary element 21 can be pressed against an opposing plate 11 against or together with its weight.
  • the spring 52 is fastened to an auxiliary plate 51, it also being possible for a plurality of springs 52 to be fastened to the auxiliary plate 51 such that a plurality of auxiliary elements 21 can be pressed against the mounting plate 11 in one work step.
  • the auxiliary plate 51 is arranged parallel to this on the side of the carrier plate 22 opposite the mounting plate 11, so that the springs protrude into the holes and the auxiliary elements press outward.
  • the bore can have one or more anti-loss devices 53 at its edge.
  • Verlier Klin 53 narrow the cross section of the bore 25 in a small area, so that the auxiliary element 21 can not pass this area.
  • the splices 26 and 27a, 27b are made as described in the above examples. If the curing of the adhesive 27a, 27b, 26 take place by irradiation with UV light 31, then the auxiliary plate 51 can have UV-transparent material, such as borofloat.
  • FIG. 6 shows an enlarged detail of an optical assembly according to the invention, wherein the auxiliary ball 21 is pressed by means of a pressure hose 61 from below through the support plate 22 against the mounting plate 11.
  • an auxiliary plate 51 is housed, which presses the pressure hose 61 against the support plate 22 and protruding from its plane in the direction of the pressure hose auxiliary ball 21.
  • the pressing force of the hose against the auxiliary element 21 and thus the pressing force of the auxiliary element 21 against the mounting plate 11 can be adjusted by supplying compressed air 63 through a supply hose 64.
  • the wall of the bore 25 adhesive chambers 62 in which prior to assembly adhesive is introduced, which then flows out, for example, by the action of gravitational force from the adhesive chamber 62 and thereby an adhesive bond 27 between the wall of the bore and the Auxiliary element 21 produces.
  • UV-curing adhesive can also be used here.
  • the auxiliary plate 51, the pressure tube 61 and the auxiliary member 21 must be UV-transparent, so that ultraviolet light 31 can be irradiated on the adhesive 26, 27.
  • the mounting plate 11 UV-transparent, so that the UV irradiation 31 can be performed from above.
  • the advantage of the former design is that those components of the finished optical assembly can be selected which materials are the most functional, without having to worry about whether these materials are UV-transparent. Only the auxiliary element 21 must be permeable to ultraviolet light.
  • Figure 7 shows a section of an optical assembly according to the invention, wherein an auxiliary element 21 is housed in a bore 25 whose depth is so great that the auxiliary element on the opposite side of the support plate 22 does not protrude.
  • the pressure hose 61 can not press directly on the auxiliary element 21 as in the preceding example.
  • the pressure hose where it lies above the bore 25, a hole 71 through which compressed air can flow into the bore 25.
  • the auxiliary element 21 and the adhesive 27a, 27b are now accommodated in the bore 25 in such a way that the auxiliary element 21 fills the bore on its circumference except for a small gap between the auxiliary element 21 and the wall of the bore 25 and, secondly, the adhesive 27a, 27b completely fills the remaining space of the circumference of the bore 25.
  • the auxiliary member 21 thereby closes together with the adhesive 27a, 27b by the latter Viscosity and acting between auxiliary balls and bore wall capillary forces the hole in the direction of the mounting plate 11 airtight.
  • the compressed air 63 flowing through the hole 71 in the pressure hose 61 exerts a force on the auxiliary element 21 in the direction of the mounting plate 11.
  • the compressed air 63 thus pushes the auxiliary element 21 against the adhesive surface 26 between the auxiliary element 21 and the mounting plate 11.
  • Adhesive 27a, 27b wetted.
  • the adhesive chambers can also be used to pick up excess adhesive.
  • the wetting of the auxiliary element with adhesive 27a, 27b can also be caused by the fact that the entire arrangement is reversed, so that adhesive flows out of the adhesive chamber 62 by the action of the force of gravity.
  • auxiliary plate 51, pressure hose 61 and auxiliary element 21 are advantageously made of UV-transparent material.
  • the use of a pressure hose 61 is here, as in the previous example, of course, for mounting the assembly in the reverse position, i. the auxiliary plate 51 and the pressure hose 61 lie above the carrier plate 22, while the mounting plate 11 is arranged below the carrier plate 22.
  • FIG 8 shows an assembly according to the invention, the auxiliary element 21a is mounted in a solid-state joint 81.
  • the fixed connections 26 and 27 are made.
  • the optical assembly is exposed to different temperatures, their constituents will generally expand differently.
  • the mounting plate 11 extends differently from the carrier plate 21, then the splices 26 which connect the auxiliary elements to the mounting plate have a force which is greater, the more different the temperature expansion behavior of the two plates.
  • one or more auxiliary elements 21a can be accommodated in solid-state joints 81, which are elastically yielding in the direction of the occurring stresses.
  • the mobility takes place here by the elasticity of the material.
  • the solid-state joint 81 is in turn accommodated in a bore 25, while the auxiliary element 21a assigned to this bore is accommodated in the solid-state joint 81 such that a narrow adhesive gap arises between the walls of the solid-state joint 81 and the auxiliary element 21a, in which an adhesive connection 27 is produced becomes.
  • Support plate 22 and mounting plate 11 takes place here so first on the connection of the support plate 22 with the solid-state joint 81, which in turn is connected via the adhesive connections 27 with the auxiliary member 21 a, which in turn via a
  • Adhesive 26 is glued to the mounting plate 11.
  • the solid joints can be mounted by snap-in connections in the plate.
  • the solid-state joint 81 is preferably designed to be movable only in one direction, so that thermal stresses can be absorbed in this direction, in the other directions but the necessary stability is ensured.
  • Particularly advantageous is the combination of auxiliary elements 21a, which are mounted in solid joints 81, with such auxiliary elements 21b, which are directly connected to their associated bore 25b. In this way, in the areas where the occurring thermal stresses are low, solid, stable connections can be made, while in such areas where the thermal stresses which occur will be high, elastically mounted adhesive joints can be accommodated.
  • the solid-state joints can be produced, for example, monolithically by wire eroding or milling of titanium or aluminum alloys or of an aluminum extruded profile.
  • the solid-body joint 82 can also be fastened to an additional plate 81, which is on the side of the support plate facing away from the mounting plate 11 to be joined
  • auxiliary elements 21a, 21b, 21c accommodated in solid-state hinges 81a, 81b, 81c, shown in FIG. 9, in conjunction with a fixed auxiliary element 21d is particularly advantageous.
  • the bores 25a, 25b, 25c are arranged in a triangle whose center forms the solid auxiliary element 21d.
  • FIG. 10 shows a further advantageous embodiment of the optical assembly according to the invention.
  • the two plates 11 and 22 to be joined together are connected to one another via a combination of fixed connection points 26 with elastic connection points 101a, 101b.
  • the elastic splices 101a, 101b are adapted to absorb stresses which occur at different temperatures.
  • the fixed connections 26 are advantageously accommodated in areas of the plates which are only subjected to small thermal expansions, while the elastic connections are made in those areas where high stresses can occur when the temperature changes.
  • the mounting plate and the carrier plate 22 form an angle to each other, whereby the distance between the two plates 11 and 22 is not the same width at all adhesive dots 101a, 101b.
  • the elastic splices 101a, 101b have a different thickness depending on their position. If elastic connections 101a, 101b, 101c are used in conjunction with fixed splices 21a, 21b, 21c in this way, preferably three elastic splices 101a, 101b, 101c are used in conjunction with three fixed splices 21a, 21b, 21c as shown in FIG 11 shown arranged.
  • the connection points are in this case arranged in the form of a Y so that the point of connection of the legs of the Y lies in the middle of the carrier plate.
  • each leg of the Y is located on the side facing the center of a solid adhesive point 21a, 21b, 21c and on the side facing away from the center of the leg, an elastic adhesive point 101a, 101b, 101c.
  • the distance of all the fixed joints 21a, 21b, 21c to the center of the Y 111 is the same, and the distance of each elastic glue point 101a, 101b, 101c to the center of the Y 111 is the same.
  • the distance of the fixed adhesive joints 21a, 21b, 21c should not exceed 20 mm to each other.
  • FIG 12 shows an advantageous embodiment of the optical assembly, in which on the side facing away from the support plate 22 of the mounting plate 11, a compensation plate 121 is arranged symmetrically to the support plate 22.
  • This compensation plate 121 is also connected to the support plate 11 via auxiliary elements 122a, 122b, 122c.
  • auxiliary elements 122a, 122b, 122 c are in an associated bore in the counter-plate 121 exactly opposite an auxiliary element 21 a, 21 b, 21 c housed in the support plate 22. It is therefore the exact mirror image of the support plate 22, mirrored to the plane of the mounting plate 11.
  • UV-curing adhesive can be used, it applies to the UV transmission of the used materials described above for the other embodiments of the invention.
  • FIG. 13 shows a further advantageous embodiment of the optical assembly according to the invention.
  • an intermediate plate 131 is arranged to accommodate the thermal stresses between the mounting plate 11 and the support plate 22.
  • the coefficient of thermal expansion of this intermediate plate 131 is between that of the support plate 22 and that of the mounting plate 11.
  • the support plate 22 is connected to the intermediate plate 131 as well as the intermediate plate 22 to the mounting plate 11 in the previous examples.
  • the same arrangements of auxiliary elements, of solid joints and adhesive dots can occur as in the abovementioned embodiments.
  • the adhesive bonds between the intermediate plate 131 and the mounting plate 11 can be designed so that they can accommodate temperature expansion differences.
  • FIGS. 14 to 20 are intended to illustrate, in the following example, an inventive method for connecting a carrier plate 22 to a mounting plate 11.
  • a group of optical elements 15 are arranged, which are to be adjusted by means of a gripper arm 23 corresponding to an optical axis 28.
  • a support plate is now used, on which the auxiliary elements 21a and 21b are firmly housed.
  • These auxiliary elements 21a, 21b can be anchored in the carrier plate 22 or, before the start of the adjustment, e.g. be firmly bonded to the support plate 22 by gluing or soldering.
  • the mounting plate 11 has bores 25a and 25b for this method.
  • the support plate 22 is arranged next to the mounting plate 11 so that each auxiliary element 21a, 21b of the support plate projects into a bore 25a, 25b in the mounting plate 11.
  • a hose 141 or a sleeve 141 is inserted into the respective holes in the respective auxiliary element 21a, 21b.
  • the spacer sleeve 141 can thereby on the
  • Auxiliary element 21a, 21b or on the wall of the bore 25a, 25b abut.
  • a first adhesive 151 is now introduced into the remaining space 142 of FIG. After curing of this first bers 151, the hose 141 is removed from the respective bore.
  • this spacer 141 has nonstick materials such as Teflon or coated with polymeric non-stick layers, so that its surfaces do not bond with the adhesive.
  • a second adhesive 161 is introduced. This establishes a cohesive connection between the first adhesive 151 and the auxiliary element 21a, 21b.
  • the first adhesive 151 as well as the second adhesive 161 may be superglue or UV-curing adhesive.
  • the curing is carried out by irradiation of UV light 31 after the second adjustment step.
  • the mounting plate 11 and / or the support plate 22 UV-permeable for example made of borofloat be designed.
  • auxiliary element 21a, 21b sapphire can also be used here.
  • FIG. 17 shows an optical assembly according to FIG. 16, with the difference that during its production the sleeve 141 did not abut on the auxiliary element 21a, 21b but on the wall of the bore.
  • the first adhesive 151 abuts against the auxiliary element 21a, 21b, while the second adhesive 161 fills the remaining gap between the wall of the bore and the first adhesive 151.
  • Everything said about Figure 16 also applies here.
  • FIG. 18 shows an assembly produced by the method according to the invention.
  • the procedure was analogous to that which was described for the previous figures.
  • the auxiliary elements 21a, 21b are arranged on the mounting plate 11, which project into bores 25a, 25b in the carrier plate 22.
  • a spacer 141 was introduced into the bore 25a, 25b, then the bore 25a, 25b filled with a first adhesive 151, then removed the auxiliary hose 141, the assembly finely adjusted and then a second adhesive 161 in the remaining free spaces within the bore 25 a, 25 b introduced, which was finally cured by irradiation of ultraviolet light 31.
  • the mounting plate 11 may have holes 162 through which the adhesive is irradiated with ultraviolet light 31.
  • an inflatable pressure cuff used as a spacer sleeve 141, an inflatable pressure cuff. This is filled before introduction of the first adhesive 151 via a feed line 191 with compressed air, whereby its diameter in the range of tenths of a millimeter is variable.
  • the adhesive collar 141 should be thin-walled, made of non-adherent materials, such as polymer-coated stainless steel sheets, and have a compressed air cannula.
  • the gripping arm 23 holds the carrier plate 22 so tight that forces which occur due to shrinkage of the first adhesive 151 do not influence the first adjustment, but are absorbed by the compressed-air collar 141. Once the first adhesive 151 has cured, the compressed air is released and the collar 141 is removed from the hole 25. The fine adjustment and the introduction of the second adhesive 161 are now carried out as in the above-described method.
  • a sleeve 141 having a paraffin layer 204 accommodated between two sheets 202, 203 may be used.
  • the sleeve 141 here has an outer film layer 202, an inner film layer 203 and a paraffin layer 204 introduced between the two film layers.
  • a heater 201 is inserted in the paraffin layer 204. With this heating device 201, the paraffin layer 204 can be melted after the introduction of the first adhesive 151, so that the collar 141 can be removed from the bore 25.
  • the film rings 202, 203 are intended to prevent the highly hydrophobic paraffin 204 from reaching the adhesive surfaces of the fine-bonding gap.
  • the foil rings 202 and 203 do not necessarily have to be closed in an annular manner during assembly; they can also be inserted into the bore 25 themselves as foil strips 203, 202 in an exciting and overlapping manner and also removed again, wherein already on the inside of the outer foil strip 202 before its assembly, the thin paraffin layer 204 with the embedded heating wire 201 is applied.
  • the foil strips 202, 203 are rolled up into a cylinder and stretched into the bore. After releasing the film 202, 203 applies elastic to the bore.
  • the paraffin layer 204 advantageously has a
  • the foils 202 and 203 in turn may be, for example, stainless steel foils of 20 microns thickness.
  • For the heating wire 201 for example, constantan wire of approximately 50 ⁇ m in diameter is suitable, which is looped into the liquid paraffin layer 204 on the film 202 prior to assembly.
  • the Vorklebung with the first adhesive 151 can be done by a high-viscosity UV adhesive, the removal of the sleeve 141 following Feinverklebung can be done for example with superglue, which must be protected against the influence of moisture.
  • a mounting plate 11 made of borofloat is used or the mounting plate has openings 162 through which the UV light 31 can be blasted onto the adhesive layers 151, 161.
  • a shape memory sleeve 211 may also be used to form the fine-gauge gap.
  • the sleeve is double-walled with an inner wall 213 and an outer wall 212 designed. At room temperature, the sleeve 211 is relaxed and the inner wall 213 is close to the outer wall 212 at.
  • an intermediate gap 215, which is caused by the memory effect, for example, a Ti 52 Ni 33 CUi 5 -FoUe and by the bimetallic effect is further increased to a molybdenum foil of, for example, 100 ⁇ m in thickness.
  • the sleeve 211 must be electrically insulated from the plate 22 via an insulating layer 214.
  • the sleeve 211 for ventilation of the annular gap 215 has an opening.
  • the sleeve 211 is applied as the sleeves described in the previous examples in the bore 25 on the wall thereof and the auxiliary element 21 surrounding. Subsequently, the Vorklebung is made with a first adhesive 151 and the adhesive 151 cured.
  • the shape memory sleeve 211 can now be cooled so that it relaxes and the inner wall 213 rests against the outer wall 212. If the collar 211 is now removed from the bore, a fine-bonding gap 152 is produced, as in the above-described example for a fine gluing.
  • the other process steps are analogous to those described above.
  • the sleeve 211 can be heated to trigger the memory and the Bimetall bins instead of electricity through a hot air nozzle.
  • the electrical insulating layer 214 between the plate 22 and the sleeve 211 is then not required.
  • FIG. 22 shows the shape memory sleeve 211 in the relaxed state.
  • a first distance 222 and a second distance 221 between the hardened first adhesive 151 and the sleeve 211 are created. Since the sleeve is not fixed to the wall of the bore or to the first Adhesive 151 rests, so it can be pulled without force from the bore 25 in the relaxed state.
  • the gap 221 together with the distance 222 and the area filled by the shape memory sleeve 211 then form a fine-adhesive gap 152.
  • the invention may e.g. can be used to transfer the components of the detection module of a laser scanning microscope, such as color splitter, Pinholeoptik, pinhole and color filter, adjusted to each other on a mounting plate.
  • a laser scanning microscope such as color splitter, Pinholeoptik, pinhole and color filter

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Coupling Of Light Guides (AREA)

Abstract

L'invention concerne un procédé de connexion de plaques et un module optique fabriqué au moyen de ce procédé. Les plaques à connecter (11, 22) sont d'abord disposées les unes à côté des autres et au moins un élément auxiliaire (21a) est logé dans un trou percé (25a) qui lui est affecté, perpendiculaire au plan d'une plaque, au moyen de treuils parallèles dans la direction du trou, de telle manière que l'élément auxiliaire soit en contact avec l'autre plaque. La position des deux plaques est ensuite réglée et une connexion fixe est créée entre les plaques et le ou les éléments auxiliaires au moyen d'agent adhésif (26a, 27a).
PCT/EP2007/008020 2006-09-14 2007-09-14 Procédé de connexion ajustée de plaques et module optique fabriqué au moyen de ce procédé Ceased WO2008031609A1 (fr)

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DE200610043185 DE102006043185B4 (de) 2006-09-14 2006-09-14 Verfahren zum justierten Verbinden von Platten und nach diesem Verfahren hergestellte optische Baugruppe
DE102006043185.5 2006-09-14

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DE102013209819B4 (de) 2013-05-27 2018-01-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Struktur mit daran angeordneten Stegen und Verfahren zur Herstellung derselben
DE102018128863A1 (de) 2018-11-16 2020-05-20 HELLA GmbH & Co. KGaA Verfahren zum Verkleben von zwei lagegenau zueinander angeordneten Bauteilen
DE102019209610A1 (de) * 2019-07-01 2021-01-07 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zum Herstellen einer Klebeverbindung zwischen einer ersten Komponente und einer zweiten Komponente

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DE4113955C1 (en) * 1991-04-29 1992-06-25 Optische Werke G. Rodenstock, 8000 Muenchen, De Securing optical element in appropriate socket - uses several recesses in socket, adjacent to flat side faces of optical element
DE4113956C2 (de) * 1991-04-29 1993-12-23 Rodenstock Optik G Optisches System
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DE10228053B4 (de) * 2002-06-19 2006-06-14 Carl Zeiss Jena Gmbh Element und Verfahren zu seiner Herstellung, bei dem zwei in Bezug zu mindestens einer Justierachse positionierte Körper stoffschlüssig miteinander verbunden sind
JP4565261B2 (ja) * 2002-06-24 2010-10-20 株式会社ニコン 光学素子保持機構、光学系鏡筒及び露光装置
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WO2008031609A8 (fr) 2008-07-03
DE102006043185B4 (de) 2010-05-20

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