WO2008031609A1 - Method for the adjusted connection of plates and optical module produced according to said method - Google Patents

Abstract

The invention relates to a method for connecting plates and to an optical module produced according to said method. The plates (11, 22) to be connected are first arranged next to each other. At least one auxiliary element (21a) is placed in a borehole (25a) associated therewith and perpendicular to the plane of one plate, by means of winches which are parallel to the direction of the borehole, such that the auxiliary element touches the other plate. The position of the two plates in relation to each other is then adjusted and a fixed connection is created between the plates and the at least one auxiliary element by means of adhesive (26a, 27a).

Description

 Method of adjusting plate bonding and optical assembly made by this method

The present invention relates to a method for connecting plates and an optical assembly produced by this method, in particular to their permanent and precise adjustment.

The cohesive connection of an optical assembly with a mounting plate is carried out according to the prior art by thinly applied adhesive on the connecting surfaces and then the surfaces are pressed together until the adhesive has cured. This bond is made by the manufacturer before the optical assembly is delivered to the customer. The adjustment of the structure then takes place at the customer. The adjustment is made here by fine adjustment, which are part of the assembly and the customer must be supplied. These elements belonging to the device cause significant additional costs.

Figure 1 shows an example of an optical assembly according to the prior art. Here, an optical assembly 15 is mounted on a mounting plate 11 via a carrier system 13, 16, 17 and an adjustment device 14. In this case, the carrier system consists of two plates 13 and 17 which are adjacent to each other and which are connected to one another via a connecting element 16. On the mounting plate 11 facing away from the sub-plate 13 of the carrier system is an adjustment device 14 on which the optical assembly 15 is mounted. In the production of this assembly, the material-locking connection between the mounting plate 11 and the carrier system takes place in that on the connecting surfaces between the sub-plate 17 and the mounting plate 11 adhesive 12a, 12b is applied thin. This normally produces a wedge-shaped gap of approximately 0.5 mm in width between the mounting plate 11 and the mounting plate 17 facing the mounting plate of the carrier system. As the adhesive hardens, it shrinks by approximately 2 to 8%, depending on the type of adhesive, which disallows the optical assembly. Since this shrinkage during production by solid

Clamping the parts to be joined in the adjusting device can not be avoided, the optical assembly must be readjusted after curing of the adhesive. This adjustment takes place at the customer using the adjustment device 14 and by adjusting the support system 13, 16, 17 instead. These adjusting devices 14 are an integral part of the finished assembly.

The cost of such an optical design could be significantly reduced if the assembly already The manufacturer could be completely assembled and precisely adjusted. It would then no longer necessary that the customer is supplied with the elaborate adjustment device. Some attempts have already been made in the prior art to construct an optical assembly in such a way that it obtains its fine adjustment when the adhesive shrinks. In DE 102 28 053, for example, it is proposed to avoid the effects of adhesive shrinkage by inserting auxiliary elements into wedge-shaped grooves between the parts to be joined, which roll under their own weight into the correct position and their position there also during shrinkage of the adhesive To keep glue. For this purpose, however, inclined contact surfaces in the components to be joined are necessary. The technical effort to realize oblique contact surfaces is significant.

The Photonik 2/2005, pp. 74 to 75, describes an "adhesive technology for the assembly of micro-optical components." Here, a glass fiber is adjusted to 0.2 μm in front of a diode laser on a chip and fixed by gluing This technique requires, however, that the shrinkage process of the adhesive be known and reproducible exactly This is normally only possible for special applications, but in general this method is not applicable because the parameters used in the adhesive shrinkage are not sufficiently reproducible or can only be reproduced with great effort. The patents US 6,256,118 and DE 197 55 483 show how the adhesive shrinkage can be used to firmly connect two adjacent parts together. However, because of the shrinkage of the adhesive, the method is not suitable for mounting aligned assemblies with gap on a mounting plate.

Another aspect of the present invention relates to the compensation of temperature expansion differences of different materials used in an assembly. If materials with different coefficients of thermal expansion are bonded together, there is a risk that the compounds could be destroyed in the event of temperature changes as a result of the different expansion of the bonded materials. Bimetallic effects can also lead to misalignment of the optical assembly. According to the state of the art, materials with the same temperature expansion behavior are preferably used to avoid this problem or contact surfaces are produced between the connected parts with the smallest possible dimensions. Also, the splices are distributed over a small area as possible. A general solution to this problem is unknown.

The object of the present invention is therefore to connect parts of an optical assembly together and to adjust so that the adjustment is maintained even after the shrinkage of the adhesive.

The object of the present invention is furthermore to connect parts of an optical assembly with one another in such a way that they maintain their alignment with one another even if the parts have different thermal expansions and, after bonding, during transport or use, temperatures in the rich from -40 ⁰ C to +70 ⁰ C are exposed.

The object is achieved by the optical assembly according to claim 1, by the method according to claim 24, by the method according to claim 69 and by the use claims 92 and 93. Advantageous developments of the optical assembly according to the invention and of the method according to the invention can be found in the respective dependent claims.

The essence of the present invention is that adhesive is applied as thin as possible and arranged so that the delay of the individual splices cancel each other. For this purpose, the parts are not glued directly to each other, but it auxiliary components are used, each having two parts to be joined materially connections. Normally, the parts to be joined have no direct cohesive connection.

The auxiliary elements for connecting the parts, for example two plates, are for this purpose housed in holes in one and / or the other plate to be connected. Here is each auxiliary element one

Bore assigned in one or the other plate in which it is housed. The connection of the plates then takes place in that the auxiliary element is glued on the one hand to the walls of the bore in which it is housed, and on the other hand, the auxiliary member with the other plate in which it is not housed, is glued to the surface thereof. The auxiliary elements, which may be balls or cylinders, for example, thus act as a bridging between the two plates to be joined. In the case of an optical assembly, the one Plate usually be a mounting plate and the other plate a backing plate. For the panels, materials with low thermal expansion coefficients should be used. The float glass "Borofloat" from Schott is suitable, for example, in the following the method is to be explained by way of example for the connection of a mounting plate to such a carrier plate on which an optical assembly can be mounted Parts or plates can be used together.

If you want to connect two plates according to the present method, the two plates are first, advantageously with an adjustment device, a mounting robot or hexapod, firmly connected. But it can also be arranged lying a plate, in which case the other plate is guided by an adjusting device. If the one plate has optical components as a carrier plate of an optical structure, then the guidance of this plate can take place by means of the gripper of an adjustment device, a mounting robot or hexapod, which acts on one or more of the optical components. Since the optical components are firmly connected to the carrier plate, in this way the position of the carrier plate relative to the other plate with which it is to be connected can be adjusted.

In an advantageous embodiment of the inventive method, the mounting plate is first placed so that the gravitational force acts in the direction of its plate surface. It is then brought the carrier plate with the optical structure, for example by means of an adjusting device in the desired position relative to the mounting plate. This is normal mally aligned the optical axis of the optical component according to the optical axis of adjacent components. In general, then, the support plate will be located next to the mounting plate so that its plate surface faces the mounting plate. The two plates do not necessarily have to be parallel and on top of each other, their angle and distance from each other is determined by the requirements of the adjustment. Normally, the gap that forms between the support plate of the optical assembly and the mounting plate will be less than 0.5 mm.

The mounting plate and the carrier plate then form an acute angle.

The support plate has holes for the inventive method, in which auxiliary elements can be accommodated. The holes are advantageously perpendicular or approximately perpendicular to the plane of the mounting plate. Particularly favorable is the

Use of at least three holes. In the present embodiment of the method according to the invention these auxiliary elements are inserted into these holes after adjustment of the two plates to each other so that they rest under their own weight on the lower plate, in this case the mounting plate. The auxiliary elements are preferably selected to fill the bore on most of its cross-sectional area and to apply sufficient weight. If, for example, auxiliary elements with a diameter of 5 mm are used, the diameter of the bore would advantageously be 0.01 mm to 0.02 mm larger, so that a narrow gap of 10 to 20 μm is created between the auxiliary element and the wall of the bore. Spherical auxiliary elements, for example Diameter from 3 mm to 10 mm. The resulting gap may also be 0.02 mm to 0, 1 mm wide.

Preferably, the bore and the auxiliary element, which is accommodated in the bore, have the same shape in their cross section. As a result, the auxiliary element is guided by the bore when it is inserted into it. The auxiliary element then has the same distance to the wall of the bore on all sides.

Before or after the insertion of the auxiliary element into the bore, adhesive is accommodated at those points of the auxiliary element and / or the bore, against which the auxiliary element rests against the bore after insertion. Further, adhesive is accommodated on the auxiliary member and / or the mounting plate so that the auxiliary member, after having been accommodated in the bore, is connected to the mounting plate via an adhesive layer.

The splices between the auxiliary element and the wall of the bore are thus advantageously in a direction perpendicular or nearly perpendicular to the axis of the bore, while the splice between auxiliary element and mounting plate lies in the direction of the bore axis. Oriented at the bore axis, the splices are thus perpendicular to each other.

Thus, according to the method of the invention, the mounting plate and the carrier plate are connected to each other via auxiliary elements, the auxiliary element being connected to the mounting plate and to the carrier plate via adhesive layers. Adhesive layers need not be placed on all joints of the auxiliary elements with the plates. It is quite possible that the auxiliary element is the plates In some places directly touched, especially to be guided by the bore. Adhesive can also be introduced surrounding the contact surface between the plate and the auxiliary element. The influence of the adhesive shrinkage on the adjustment should advantageously remain smaller than 1 micron.

The method according to the invention in all variants described can be carried out with many different types of adhesive. It is possible, for example, the use of superglue (cyanoacrylate), but also UV-curing adhesive, whose curing advantageously takes about 1 minute, is suitable for connecting the parts. When UV adhesive is used, plates and / or auxiliary elements which are permeable to ultraviolet light are advantageously used. Particularly suitable as a material for auxiliary elements in this case, for example, sapphire. If an auxiliary element of UV-transparent material is used, the adhesive can be cured by irradiating UV light from the side of the carrier plate facing away from the mounting plate through the bore and through the UV-transmissive auxiliary element onto the adhesive layers. The mounting plate or the carrier plate can be designed to be UV-permeable. In this case, for example, a UV-impermeable auxiliary element can be arranged in the bore. The adhesive would then be irradiated through the UV transparent panel with ultraviolet light. As UV-transparent material for the construction of plates is borofloate in question. In addition, borofloat has the advantage that it has a very small thermal expansion with α = 3.3-10 ^"6 K ^{" 1} as the material for the plates, as a result of which the deJustations of the optical assembly due to temperature changes are low from the outset. Advantageously, the curing of the adhesive is carried out by light of about 400 nm wavelength.

The adhesive used for bonding should be as thin as possible to avoid Klebewülste around the splice, which could lead to horizontal and vertical shifts of the auxiliary balls and thus to the DeJustierung the optical assembly in its shrinkage.

According to the invention, the mounting plate can be provided with holes into which the auxiliary elements are introduced. In this case, the mounting plate could be stored on a holder. The support plate would then, e.g. by means of the gripper and an adjusting device, arranged and adjusted from below next to the mounting plate. The auxiliary elements then rest against their own weight on the surface of the carrier plate facing the underside of the mounting plate. In addition, the above applies.

In an advantageous embodiment of the present invention, one or more adhesive strips can be accommodated in the bore, which reduce the distance between the bore and the auxiliary element over a limited area. The adhesive is then placed between the auxiliary member and the glue bar. The adhesive can be formed, for example, as a small plateau in the wall of the bore. By means of a glue bar it can be avoided that excess adhesive leads to the displacement of the auxiliary element during curing.

According to the invention, auxiliary elements having various shapes can be used. For example, if the auxiliary element has the shape of a sphere, then this results to the wall of the bore an annular contact point. Where the ball abuts the surface of a plate, the contact point is punctiform. Again, the ball can touch the wall of the bore and / or the plate without any intermediate distance, but it can also be formed between the ball and the wall of the bore and the plate surface a small adhesive gap seih, which adhesive. In this case, the sphere would be embedded in the adhesive, as it were.

In a further advantageous embodiment, one or more auxiliary elements have the shape of a cylinder. In this case, the axis of the cylinder coincides with the axis of the bore. Advantageously, that surface of the cylinder to which the cylinder is connected to a plate surface is slightly bowed outwardly, so that the contact between the cylinder and the plate surface is made similar to the ball. As in the case of the ball, in such a crowned end face of the cylinder, a more or less large layer of adhesive can be produced around the point of contact of the rounded end face with the plate surface. The bonding surface of the cylindrical auxiliary element with the inner wall of the bore need not, as in the case of the sphere, be annular, but rather may also be formed as a surface. As a result, an adhesive bond with significantly higher strength than in the case of the ball can be achieved.

In the previously described embodiments of the invention, the auxiliary elements were loose before their adhesion under their own weight. Advantageously, however, the auxiliary element can also be actively pressed against one or more adhesive surfaces. For example, on the side facing away from the mounting plate of Hilfsele- Mentes a spring in the bore of the support plate are introduced such that it presses the auxiliary element on the mounting plate. Advantageously, the spring is held by an element which is UV permeable, so for example borofloat has. Particularly suitable for this purpose is a plate on which a plurality of springs can be arranged so that they can be pressed in a single operation in several or all holes. With the contact pressure of the adhesive gap between auxiliary element and plate is variable. This adhesive can be used with higher viscosity. This would result in larger adhesive gaps than 0.02 mm.

So that the auxiliary element can not fall under its own weight or by the pressing force from the bore, one or more Verliersicherungen can be accommodated at the edge of the bore. These narrow the bore so that the auxiliary element no longer fits through the opening.

The auxiliary element can also be pressed in other ways than by a spring against the surface of the plate opposite it. In an advantageous embodiment of the method according to the invention, a compressed air hose with an auxiliary plate lying behind it is arranged on the side of the plate having the bore, which plate is not provided with the bore. Is the plate in which the bore is housed, thinner than the extension of the auxiliary member in the direction of the bore and projects the auxiliary member on the non-bore plate having the opposite side of the plate, so the auxiliary member by inflating the pressure hose directly against his Glue pad to be pressed with the other plate. If the plate with the bore is wider than the extension of the auxiliary element in the direction of the bore, or if the plate to be joined is so far away from the plate with the bore that the auxiliary element no longer projects beyond the edge of the bore in the direction of the pressure hose, then Also, a pressure hose can be used, which has holes where it is above a hole. In this way, you can introduce compressed air through the hose into the holes. If the auxiliary element is sufficiently close to the wall of the bore, so that the connection point is completely or at least partially impermeable to air, a force is exerted against the ball by the compressed air. The seal can also be adjusted by the viscosity of the adhesive and acting between the bore wall and auxiliary element capillary forces. This force thus pushes the auxiliary element against the plate to be joined. If UV-curing adhesive is used, the auxiliary plate and the pressure tube are advantageously UV-permeable, so that the adhesive can be cured while the force acts against the auxiliary element. As in the case of the spring, the width of the glue gap can be varied via the pressure.

In the method according to the invention, the adhesive can be applied to the surfaces to be bonded by means of a metering device. Advantageously, however, the inner walls of the bores may also have bulges in which adhesive is introduced before the introduction of the auxiliary element. In this way, it is possible that the auxiliary element is wetted with adhesive while it is being introduced into the bore. But these adhesive chambers can also be designed so that initially no Adhesive comes into contact with the auxiliary element and the adhesive is only released by the entire assembly is reversed so that the adhesive flows out of the adhesive chamber. In conjunction with a pressing of the auxiliary element by compressed air, it is particularly advantageous here to arrange the adhesive chambers so that the amount of adhesive applied to the contact surfaces can be controlled by the air pressure of the compressed air. For this purpose, an auxiliary element can be used, which, when it has been introduced into the bore, leaves a narrow adhesive gap through which the adhesive can be pressed by the compressed air. The exact dimensioning of the compressed air and the adhesive gap depends on the viscosity of the used

Glue off. It should be noted that when using a pressure hose or a spring, the auxiliary element can be pressed against its weight against the plate to be joined. The adhesive chambers may also be arranged to take up excess adhesive.

In addition to spherical and cylindrical auxiliary elements, auxiliary elements are also conceivable whose cross section has any other shape. The cross section could e.g. elliptical, rectangular, triangular, star-shaped or trapezoidal.

Due to the transparency to UV light or the low thermal expansion of the mounting plate made of borofloat or glued with her carrier plate of the optical assembly manufacturing reasons, made of aluminum so lead the thermal expansion differences to mechanical stresses in the adhesive bond and bimetallic effects. As a result, the adhesive bonds can be destroyed or the opti- see assembly be misadjusted.

In an advantageous embodiment, the structure therefore has components for compensating temperature expansion differences. For example, the holes may have solid joints that are movable in one direction and stiff in all other directions. Advantageously, in this case three solid joints are used together with a rigid support point planar in one of the plates. As described above, the rigid support point can be an auxiliary element introduced into a bore and is advantageously accommodated in the center of the support plate and / or the mounting plate. The solid state joints are also housed in holes in the carrier plate and / or the mounting plate. The solid-state joint can then be accommodated on a third plate, which is arranged in a form-fitting manner on the side of the carrier plate facing away from the mounting plate such that the solid-body joint projects into the bore in the carrier plate. The connection between the solid-state joints and the plates to be joined is in turn not directly produced, but via an auxiliary element according to the principles described above. Should the

Holes in the solid joints for the Hilfssele- mente not be freely accessible because they are e.g. are covered, the auxiliary elements can be filled prior to assembly and adjustment of the plates in the holes and secured by Verliersicherungen against falling out. If, in an advantageous embodiment, three solid-body joints are used together with a rigid support point, then the bores with the solid-state joints are advantageously arranged in a triangle whose center is the rigid one

Base forms. The one-way flexible Solid joints are thereby aligned so that they are movable in the direction of the rigid support point in the plane of the corresponding plate, that is, they are in the direction perpendicular to the direction of the bore, in which they are housed, movable.

Another way of compensating for stress by thermal expansion differences is the use of rigid adhesive dots in conjunction with elastic adhesive dots. Here, the rigid adhesive dots are arranged at a small distance, preferably less than 20 mm from each other, while the elastic adhesive dots have a greater distance from each other. As the differences in expansion increase towards the edge of the bonded plates, such an arrangement achieves that the rigid adhesive dots are used where the tensions are low, while the elastic adhesive dots can compensate for the larger stresses occurring towards the edge. Particularly advantageous in this case is an arrangement of three rigid and three elastic support points, wherein the three rigid support points form a triangle which lies in the interior of the triangle formed by the three elastic support points. The centers of the two triangles coincide in this case and the degrees defined by an elastic support point and the nearest rigid support meet for all adhesive points in this center. In this case, all rigid and elastic adhesive dots should each have the same distance from the center. Advantageously, the side length of the triangle formed by the rigid support points should not exceed 20 mm, because otherwise the stresses for most adhesives become too great. Side lengths smaller than 20 mm are possible if the plates are not too big or too heavy. On the other hand, the side lengths can be up to 100 mm with temperature fluctuations of less than ± 10 ⁰ C or with small expansion differences between the plates.

Advantageously, the optical assembly according to the invention has devices that prevent the bonded plates from bending as they expand differently as temperature changes. Such a device may e.g. be a compensation plate, which is arranged on the side opposite the support plate side of the mounting plate and made of the same material as the carrier plate. The compensation plate is in this case arranged symmetrically to the support plate with respect to the plane of the mounting plate. The compensation plate has the same auxiliary elements in bores in the same places as the carrier plate.

Thus, since the support plate and the compensation plate are made of the same material and constructed analogously, they exert the same forces in the opposite direction on the mounting plate when the temperature changes, so that their effects are compensated. Advantageously, the auxiliary elements in a plate are not further apart than, for example, 20 mm, so that the adhesive bonds are not destroyed during thermal expansion. As materials for the auxiliary elements are the same question as for those auxiliary elements in the support plate. Advantageously, the mounting plate is thicker than the carrier plate and the compensation plate.

Another beneficial option on the

Splices acting through temperature expansion To reduce forces is to accommodate an intermediate plate between the carrier plate and the mounting plate. For this purpose, the intermediate plate is connected to the mounting plate via normal splices or via auxiliary elements in the sense described above. The

The support plate is then arranged on the intermediate plate as it was arranged on the mounting plate in the examples described above. The idea of this arrangement is to avoid the direct contact of two plates with very different thermal expansion coefficients. Advantageously, therefore, a material is used for the intermediate plate whose thermal expansion is between that of the mounting plate and that of the support plate. In question, for example, for the mounting plate Borofloat with a coefficient of thermal expansion of α = 3.3-10 ^"6 K ^{" 1} , the intermediate plate can steel with a coefficient of thermal expansion of α = ll-10 ^"6 K ^{" 1} , and for the support plate can Aluminum with a thermal expansion coefficient of α = 23-10 ^"6 K ^{" 1} can be used. The materials can also be used in reverse order.

In the variants according to the invention described so far, the bonding between the assembly and the mounting plate is carried out by loose auxiliary elements whose functional surfaces are perpendicular to each other. Due to the relatively small point or line-shaped splices between the auxiliary elements and the plates, the strength of the adhesive bond is not always the highest requirements, such as in case of stress, grown. In the following, an advantageous embodiment of the inventive idea is described, which is shrinkage-invariant and at the same time withstands the highest mechanical stresses. For this purpose, the auxiliary elements on one of the two firmly arranged to be joined plates. The plates are then arranged side by side with plate surfaces facing one another such that the fixedly mounted auxiliary elements protrude into bores in the other plate to be connected, so that a relatively large all-round alignment gap of, for example, 0.5 mm exists in the bore around the auxiliary element. which will generally be uneven and wedge-shaped. As auxiliary elements, for example, cylinders of eg 10 mm diameter are suitable. The holes then have a diameter, for example, 1 mm larger than the diameter of the auxiliary element. The auxiliary elements may be anchored in the plate or glued to it. The latter is particularly advantageous for use with difficult-to-process materials. The idea of the method according to the invention consists in the fact that the bonding as well as the adjustment is carried out in two steps. First, the two plates to be joined together are roughly adjusted to each other and a first Vorklebung, advantageously with highly viscous UV adhesive with a shrinkage of only 2%, performed, then the fine adjustment is then made and the two plates finally glued together. The possibility of a fine adjustment after coarse adjustment and Vorklebung is created by the fact that prior to Vorklebung a sleeve surrounding the auxiliary element is disposed in the bore. After the coarse preclurrent adhesive has cured, this sleeve is removed, creating a small gap in the bore. Within this gap, the plates can now be finely adjusted to each other. Once this fine adjustment has taken place, the narrow gap is filled with adhesive, such as low-viscosity superglue, which finally fixes the position of the plates to be joined to one another after it has hardened. For the arrangement of the sleeve, which generates the gap for the Feinklebung, there are various possibilities. On the one hand, it can be arranged so that it abuts the auxiliary element circumferentially on this. If the sleeve is thus removed after the curing of the first adhesive, the auxiliary element is initially not in contact with adhesive. On the other hand, the sleeve (or a hose) can be arranged in the bore so that it abuts the auxiliary element comprehensively against the wall of the bore. The first adhesive is then placed between the inner wall of the sleeve or hose and the auxiliary member. If the spacer is removed, the Feinjustierspalt arises adjacent to the wall of the bore. Advantageously, the distance between the auxiliary element and the wall of the bore before the coarse bond, for example, 0.4 to 0.5 mm, wherein the auxiliary element is not applied to the wall of the bore. After the coarse bonding, an initially uniform adhesive gap of, for example, 0.1 mm to 1 mm should then remain.

The advantage of this method is that the coarse adhesive coating can shrink to its final position during curing and that the resulting de-adjustment can be compensated by the subsequent fine adjustment. Since the Feinklebespalt is significantly narrower than the original distance between the wall of the bore and the auxiliary element and the same size in all directions, the de-adjustment of the assembly by shrinkage of the adhesive of the fine gluing is significantly lower. As in the method described above, here too the functional surfaces, ie the surfaces of the bond, are perpendicular or nearly perpendicular to the plate plane having the bore. According to the invention, the fine adhesive sleeve or the tube before the first bonding Also be introduced so that it rests against the wall of the bore. As a result, no misalignment occurs during shrinkage of the first adhesive, because the adhesive dissolves in this case from the sleeve and forms an approximately 10 micron wide gap.

The first and / or second adhesion can also be carried out in this process with superglue and / or UV-curing adhesive and / or cationic UV adhesives. If UV adhesive is used, the auxiliary elements and / or the carrier plate and / or the mounting plate are advantageously made of a UV-transmissive material. Again, for the auxiliary elements, for example, sapphire in question, while the plate can be made of borofloat, for example. If the use of a UV-transparent material is not possible for manufacturing reasons, openings may be accommodated in the carrier plate and / or the mounting plate through which the UV light can be radiated onto the splices.

The spacer, which is accommodated in the bore surrounding the auxiliary element, can be a simple sleeve or a hose. Advantageously, however, a material is used which does not bond with the adhesive. Also, the sleeve or tube may be coated on its surface with a polymeric anti-sticking layer or anti-adhesive materials, e.g. Teflon. The hose or sleeve can then be largely free of forces from the bore.

In an advantageous embodiment, the spacer is a double-walled sleeve with thin walls of non-adhesive materials, such as, for example, lytnerbeschichteten stainless steel foils, which can be inflated with compressed air. The inner and outer diameter of the sleeve should be advantageously varied by the compressed air in the range of 1/10-mm. Due to the elasticity of the adhesive sleeve in the radial direction, it can be achieved here that the adhesive shrinkage in the precoating does not lead to a misalignment of the optical assembly. For this purpose, the strength of the gripper and the adjusting device should be significantly greater than that of the adhesive sleeve. The adhesive sleeve can be removed from the bore after coarse Vorklebung by the compressed air is released. As a spacer for the fine gluing, an adhesive cuff can advantageously also be used, which has an inner and an outer film ring with an intermediate thin paraffin layer. In this paraffin layer, a heating wire is embedded, with which the paraffin layer can be melted after Vorklebung so that the sleeve can be removed from the bore. The foil rings do not necessarily have to be closed in an annular manner during assembly, but they can also be conveniently inserted as foil strips into the bore self-tapping and over-lapping and also removed again, the thin paraffin layer already being applied to the inside of the outer foil strip prior to its assembly should be applied to the embedded heating wire. The films can be self-tensing by virtue of their elasticity in seeking the planar and stretched condition that they had prior to loading into the bore. The foils have a thickness of eg 0, 1 mm for this purpose

The paraffin layer, which melts at about 50 ⁰ C and should be about 100 microns thick, can before installation be poured on the film in the liquid state. For the film rings, for example, stainless steel with a thickness of, for example, 20 μm is suitable, whose smooth surface combines neither with the strongly hydrophobic paraffin nor with the plastic of the pre-treatment. For example, constantan wire of 10 μm to 100 μm, advantageously of 50 μm diameter, can be used for the heating wire. The wire is looped into the liquid paraffin layer on the foil before assembly. The heat input of the heating wire into the joint gap during the melting process should be so low that the optical assembly is not misaligned by the heating. In question, for example, a power of I W. Advantageously, a high-viscosity adhesive is used for the first coarse Vorklebung, while the adhesive used for the fine bonding is thin liquid.

The assembly according to the invention can be designed or manufactured as described in one of the following examples. The same or similar components or components are provided in the figures described below with identical reference numerals.

Figure 1 shows an optical assembly according to the prior art.

Figure 2 shows an optical assembly whose mounting plate and the support plate are connected to each other via spherical auxiliary elements.

FIG. 3 a shows, enlarged, a spherical guide arranged in a bore in the carrier plate. ges auxiliary element.

Figure 3b shows an enlarged housed in a bore in the mounting plate cylindrical derförmiges auxiliary element with crowned

Face.

FIG. 4 shows the structure of an optical assembly, wherein the bores with the auxiliary elements are accommodated in the mounting plate.

Figure 5 shows how an auxiliary element is pressed against the mounting plate by a spring disposed on an auxiliary plate.

FIG. 6 shows the arrangement of a pressure hose which presses an auxiliary element through the carrier plate against the mounting plate.

FIG. 7 shows the arrangement of a pressure hose which has a hole through which compressed air presses the auxiliary element against a mounting plate.

FIG. 8 shows the construction of an optical assembly which has solid-state joints.

Figure 9 shows an advantageous arrangement of

Solid joints in the carrier plate.

Figure 10 shows the construction of an optical assembly with a combination of connections via auxiliary elements and elastic adhesive dots. Figure 11 shows an advantageous arrangement of solid and elastic adhesive dots.

Figure 12 shows an optical assembly having a compensation plate.

FIG. 13 shows the construction of an optical assembly with an intermediate plate arranged between a carrier plate and a mounting plate.

FIG. 14 shows the structure of an optical subassembly with auxiliary elements fixedly arranged on the carrier plate and sleeves arranged around the auxiliary elements for producing a fine gluing gap.

FIG. 15 shows the structure of an optical assembly with auxiliary elements fixedly arranged on the carrier plate after a coarse gluing has been carried out and the sleeve has been removed to produce a fine-gluing gap.

Figure 16 shows the structure of an optical assembly with fixedly arranged on the support plate auxiliary elements, a coarse bond and a Feinklebung within the bore.

Figure 17 shows the result of a two-stage bond, wherein the sleeve for generating the Feinklebespaltes applied to the wall of the bore. Figure 18 shows the structure of an optical assembly, wherein the two-stage bonding was performed in holes which are housed in the support plate.

FIG. 19 shows a detail around a bore in which an inflatable cuff is accommodated to produce a fine-adhesive gap.

FIG. 20 shows a section around a bore, in which a sleeve with two film layers, an intermediate paraffin layer and a heating device are accommodated to produce a fine-bonding gap.

Figure 21 shows the use of a shape memory sleeve which is in the tensioned state.

Figure 22 shows the use of a shape memory cuff which is in the relaxed state.

FIG. 2 shows the section through an optical subassembly according to the invention. On a base 24 in this case is a mounting plate 11. The surface of this flat plate 11 is substantially parallel to the earth's surface. On the side facing away from the base 24 of the mounting plate 11, a support plate 22 is arranged, which on its side facing away from the mounting plate 11 carries an optical component 15 which is fixedly connected to the support plate 22. The optical component 15 is in this case held by a gripper 23 on its side facing away from the carrier plate. The gripper arm 23 may be connected to an adjusting device, not shown in the figure. In this way, it is possible to align the position of the carrier plate 22 and the optical components 15 arranged on it with the aid of the gripping arm 23 on the optical axis 28.

The support plate 22 has perpendicular to its surface standing bores 25a and 25b, in which auxiliary elements 21a and 21b are housed. A third auxiliary element 21c is also accommodated outside the plane of the figure in a bore, which is not shown. The auxiliary elements 21a, 21b, 21c are glued in their bore 25a, 25b via splices 27a and 27b and 27c and 27d to the wall of the bore. Where the auxiliary elements 21a, 21b, 21c touch the carrier plate 11, splices 26a, 26b and 26c are accommodated such that the connecting elements 21a, 21b, 21c are firmly connected to the mounting plate 11. The auxiliary elements 21a, 21b, 21c are shaped so that their outline, viewed in the direction of the bore 25a, 25b, runs parallel to the wall of the bore 25a, 25b. Thus, if the auxiliary element 21a, 21b, 21c is inserted from above, ie from the side of the carrier plate facing away from the earth's surface, into the carrier plate, the auxiliary element is guided by the bore 25 and is only slightly movable in the radial direction. In the construction shown, the support plate 22 and the mounting plate 11 are not exactly parallel. Although the bottom of the support plate is facing the top of the mounting plate, the two plates form an acute angle to each other. As a result, the auxiliary element 21b lies deeper in the guide 25b assigned to it than the auxiliary element 21a in the opening 25a. While the carrier plate 22 at no point the mounting plate 11 Stir, so are the two plates at the bore 25a but so close together that the auxiliary member 21a on the side facing away from the mounting plate protrudes from the bore of the support plate 22.

FIG. 3a shows a section around the bore 25a in the carrier plate 22. The spherical auxiliary element 21a is connected here via layers of adhesive 27a and 27b to the walls of the bore and via an adhesive surface 26a to the mounting plate. If the adhesive layers have UV-curing adhesives, the adhesive spots 27a, 27b and 26a are illuminated with UV light 31 in order to cure the adhesive. In the case shown here, the auxiliary spherical member 21a comprises a UV-transmissive material, e.g. Sapphire, up. In this way, the adhesive 27a, 27b and 26a can be cured by irradiation with UV light from the mounting plate 11 facing away from the side of the support plate 22. But it is also possible to make the mounting plate 11 UV-transparent, so that the irradiation with UV light 31 can be made from below. The material for the plate is e.g. Borofloate in question. It should be noted that the adhesive surfaces 27a and 27b may be in the form of individual adhesive dots, individual adhesive surfaces or individual adhesive lines, but they may also rotate the auxiliary element 21a along its entire contact surface with the wall of the guide 25a.

FIG. 3b shows the same section of an optical assembly as FIG. 3a. In contrast to Figure 3a, however, the auxiliary element 21 used here in the direction of the bore 25 parallel to the wall of the bore extending side surfaces. In the simplest case, this auxiliary element 21 is cylindrical, so that when viewed in the direction of the bore a circular cross section is present. However, the auxiliary element could, for example, also be triangular or rectangular. As a further special feature, FIG. 3 b shows that the auxiliary element 21 faces one of the mounting plate 11 facing outwards

End face 32 has. At this spherical end face 32, the auxiliary element is connected via an adhesive layer 26 to the mounting plate 11. Due to the radius of curvature of the rounded end face 32, the extent of the adhesive surface 26 can be influenced. The auxiliary element 21 shown here has the additional advantage that the splices to the wall of the bore 27 a and 27 b have a significantly larger area than in the case of the ball.

Figure 4 shows an optical assembly in which the optical assembly 15 and the support plate 22 are connected from below to the mounting plate 22. In this case, the mounting plate 22 bores 25a and 25b and advantageously a third hole outside the plane of the figure, which are perpendicular to the plane of the mounting plate. If the optical assembly is assembled in this way, first the optical assembly 15, which may be the detection module of a laser scanning microscope, for example, is connected to the carrier plate 22. The assembly of optical assembly 15 and support plate 22 is then arranged by means of a gripper arm 23 so that the support plate 22 is located below the mounting plate 11 adjacent to the mounting plate 11 facing surface. The mounting plate 11 and the support plate 22 are generally not exactly parallel, but form an acute angle to each other, so that there is a narrow gap varying width between see the two plates. Now is the support plate 22 relative to the mounting plate 11 accordingly Adjusted the optical axis 28, the connecting elements 21a, 21b and 21c in their corresponding guides 25a, 25b and the third, not shown hole occupied, so that they are guided by the bore 25a, 25b in one direction and then on the Support plate 22 rest. Subsequently, fixed connections are made between the connecting elements 21a, 21b, 21c and the walls of the bores 25a, 25b and between the connecting elements 21a, 21b, 21c and the carrier plate 22. For this purpose, adhesive was applied to the later contact surfaces 26a, 26b, 27a-27d before or after insertion of the auxiliary elements 21a, 21b, 21c into the bores 25a, 25b and the third bore (not shown). This can be superglue or even UV-curing adhesive. The latter is irradiated with UV light for curing. As in the previously described examples, some elements made of UV-transparent material, such as sapphire or borofloat, are produced for this purpose. The UV light can then pass through them

Elements are irradiated on the splices 27a, 27b, 27c, 27d and 26a and 26b and the splices, not shown.

FIG. 5 shows how, by means of a spring 52, an auxiliary element 21 can be pressed against an opposing plate 11 against or together with its weight. For this purpose, the spring 52 is fastened to an auxiliary plate 51, it also being possible for a plurality of springs 52 to be fastened to the auxiliary plate 51 such that a plurality of auxiliary elements 21 can be pressed against the mounting plate 11 in one work step. For this purpose, the auxiliary plate 51 is arranged parallel to this on the side of the carrier plate 22 opposite the mounting plate 11, so that the springs protrude into the holes and the auxiliary elements press outward. In order to prevent the auxiliary elements from falling out of the bore during the manufacturing process, the bore can have one or more anti-loss devices 53 at its edge. These Verliersicherungen 53 narrow the cross section of the bore 25 in a small area, so that the auxiliary element 21 can not pass this area. The splices 26 and 27a, 27b are made as described in the above examples. If the curing of the adhesive 27a, 27b, 26 take place by irradiation with UV light 31, then the auxiliary plate 51 can have UV-transparent material, such as borofloat.

Figure 6 shows an enlarged detail of an optical assembly according to the invention, wherein the auxiliary ball 21 is pressed by means of a pressure hose 61 from below through the support plate 22 against the mounting plate 11. On the side facing away from the support plate of the pressure hose 61, an auxiliary plate 51 is housed, which presses the pressure hose 61 against the support plate 22 and protruding from its plane in the direction of the pressure hose auxiliary ball 21. The pressing force of the hose against the auxiliary element 21 and thus the pressing force of the auxiliary element 21 against the mounting plate 11 can be adjusted by supplying compressed air 63 through a supply hose 64. In the example shown here, the wall of the bore 25 adhesive chambers 62, in which prior to assembly adhesive is introduced, which then flows out, for example, by the action of gravitational force from the adhesive chamber 62 and thereby an adhesive bond 27 between the wall of the bore and the Auxiliary element 21 produces. As in the previous examples, UV-curing adhesive can also be used here. In this case, the auxiliary plate 51, the pressure tube 61 and the auxiliary member 21 must be UV-transparent, so that ultraviolet light 31 can be irradiated on the adhesive 26, 27. Alternatively, of course, the mounting plate 11 UV-transparent, so that the UV irradiation 31 can be performed from above. However, the advantage of the former design is that those components of the finished optical assembly can be selected which materials are the most functional, without having to worry about whether these materials are UV-transparent. Only the auxiliary element 21 must be permeable to ultraviolet light.

Figure 7 shows a section of an optical assembly according to the invention, wherein an auxiliary element 21 is housed in a bore 25 whose depth is so great that the auxiliary element on the opposite side of the support plate 22 does not protrude. In this case, the pressure hose 61 can not press directly on the auxiliary element 21 as in the preceding example. In order to still be able to press the auxiliary element 21 against its connection point 26 to the mounting plate 11, the pressure hose, where it lies above the bore 25, a hole 71 through which compressed air can flow into the bore 25. The auxiliary element 21 and the adhesive 27a, 27b are now accommodated in the bore 25 in such a way that the auxiliary element 21 fills the bore on its circumference except for a small gap between the auxiliary element 21 and the wall of the bore 25 and, secondly, the adhesive 27a, 27b completely fills the remaining space of the circumference of the bore 25. The auxiliary member 21 thereby closes together with the adhesive 27a, 27b by the latter Viscosity and acting between auxiliary balls and bore wall capillary forces the hole in the direction of the mounting plate 11 airtight. As a result, the compressed air 63 flowing through the hole 71 in the pressure hose 61 exerts a force on the auxiliary element 21 in the direction of the mounting plate 11. The compressed air 63 thus pushes the auxiliary element 21 against the adhesive surface 26 between the auxiliary element 21 and the mounting plate 11. Advantageously, can be housed in the wall of the bore 25 adhesive chambers 62, in which adhesive is filled before the auxiliary member 21 is inserted into the guide 25. Now moves the auxiliary member 21 through the bore 25 through past the adhesive chambers 62, so it is at its bordering on the wall of the guide 25 surfaces

Adhesive 27a, 27b wetted. The adhesive chambers can also be used to pick up excess adhesive. Depending on the configuration of the adhesive chambers 62, the wetting of the auxiliary element with adhesive 27a, 27b can also be caused by the fact that the entire arrangement is reversed, so that adhesive flows out of the adhesive chamber 62 by the action of the force of gravity. If UV-curing adhesive is used, in turn auxiliary plate 51, pressure hose 61 and auxiliary element 21 are advantageously made of UV-transparent material. The use of a pressure hose 61 is here, as in the previous example, of course, for mounting the assembly in the reverse position, i. the auxiliary plate 51 and the pressure hose 61 lie above the carrier plate 22, while the mounting plate 11 is arranged below the carrier plate 22.

Figure 8 shows an assembly according to the invention, the auxiliary element 21a is mounted in a solid-state joint 81. Again, the optical structure 15, wel rather fixedly disposed on the support plate 22, adjusted by means of a gripper 23 relative to the mounting plate 11. Subsequently, the fixed connections 26 and 27 are made. Now, if the optical assembly is exposed to different temperatures, their constituents will generally expand differently. However, if the mounting plate 11 extends differently from the carrier plate 21, then the splices 26 which connect the auxiliary elements to the mounting plate have a force which is greater, the more different the temperature expansion behavior of the two plates. So that the adhesive bonds 26 are not destroyed by these stresses, one or more auxiliary elements 21a can be accommodated in solid-state joints 81, which are elastically yielding in the direction of the occurring stresses. The mobility takes place here by the elasticity of the material. The solid-state joint 81 is in turn accommodated in a bore 25, while the auxiliary element 21a assigned to this bore is accommodated in the solid-state joint 81 such that a narrow adhesive gap arises between the walls of the solid-state joint 81 and the auxiliary element 21a, in which an adhesive connection 27 is produced becomes. The connection between

Support plate 22 and mounting plate 11 takes place here so first on the connection of the support plate 22 with the solid-state joint 81, which in turn is connected via the adhesive connections 27 with the auxiliary member 21 a, which in turn via a

Adhesive 26 is glued to the mounting plate 11. Advantageously, the solid joints can be mounted by snap-in connections in the plate. The solid-state joint 81 is preferably designed to be movable only in one direction, so that thermal stresses can be absorbed in this direction, in the other directions but the necessary stability is ensured. Particularly advantageous is the combination of auxiliary elements 21a, which are mounted in solid joints 81, with such auxiliary elements 21b, which are directly connected to their associated bore 25b. In this way, in the areas where the occurring thermal stresses are low, solid, stable connections can be made, while in such areas where the thermal stresses which occur will be high, elastically mounted adhesive joints can be accommodated. The solid-state joints can be produced, for example, monolithically by wire eroding or milling of titanium or aluminum alloys or of an aluminum extruded profile.

The techniques described in the other examples for UV curing of the adhesive and for pressing of auxiliary elements 21 against one or the other plate 11, 22 and for bonding can of course also be used in conjunction with solid joints 81. If the bore 25a having the solid-body joint 81 does not pierce the plate in which it is housed, and if it forms only a kind of pot, then the solid-body joint 81 can be fixed in the bore 25a at the bottom of the bore 25a.

However, if the bore 25a having the solid-body joint 81 penetrates the support plate 22, then the solid-body joint 82 can also be fastened to an additional plate 81, which is on the side of the support plate facing away from the mounting plate 11 to be joined

22 is connected in parallel to this fixed to the support plate 22. Of course, what is said here also applies to the case where a plurality of bores 25 have solid joints 81. For the use of solid-state hinges 81, the arrangement of auxiliary elements 21a, 21b, 21c accommodated in solid-state hinges 81a, 81b, 81c, shown in FIG. 9, in conjunction with a fixed auxiliary element 21d is particularly advantageous. In this case, the bores 25a, 25b, 25c are arranged in a triangle whose center forms the solid auxiliary element 21d. The solid-state joints 81 a, 81 b, 81 c, which are accommodated in these bores 25 a, 25 b, 25 c, each have a possible direction of movement. This direction of movement is aligned in the direction of the fixed auxiliary element 21d, ie in the direction of the center of the triangle.

FIG. 10 shows a further advantageous embodiment of the optical assembly according to the invention. In this case, the two plates 11 and 22 to be joined together are connected to one another via a combination of fixed connection points 26 with elastic connection points 101a, 101b. The elastic splices 101a, 101b are adapted to absorb stresses which occur at different temperatures. Again, the fixed connections 26 are advantageously accommodated in areas of the plates which are only subjected to small thermal expansions, while the elastic connections are made in those areas where high stresses can occur when the temperature changes. As in the previous embodiments of the optical assembly, the mounting plate and the carrier plate 22 form an angle to each other, whereby the distance between the two plates 11 and 22 is not the same width at all adhesive dots 101a, 101b. As a result, the elastic splices 101a, 101b have a different thickness depending on their position. If elastic connections 101a, 101b, 101c are used in conjunction with fixed splices 21a, 21b, 21c in this way, preferably three elastic splices 101a, 101b, 101c are used in conjunction with three fixed splices 21a, 21b, 21c as shown in FIG 11 shown arranged. The connection points are in this case arranged in the form of a Y so that the point of connection of the legs of the Y lies in the middle of the carrier plate. On each leg of the Y is located on the side facing the center of a solid adhesive point 21a, 21b, 21c and on the side facing away from the center of the leg, an elastic adhesive point 101a, 101b, 101c. The distance of all the fixed joints 21a, 21b, 21c to the center of the Y 111 is the same, and the distance of each elastic glue point 101a, 101b, 101c to the center of the Y 111 is the same. Advantageously, the distance of the fixed adhesive joints 21a, 21b, 21c should not exceed 20 mm to each other.

In addition to the problem of stress on the joints 26 due to thermal stresses, when using sheets of materials having different coefficients of thermal expansion, the

Problem that the plates can bend due to the stresses occurring. Figure 12 shows an advantageous embodiment of the optical assembly, in which on the side facing away from the support plate 22 of the mounting plate 11, a compensation plate 121 is arranged symmetrically to the support plate 22. This compensation plate 121 is also connected to the support plate 11 via auxiliary elements 122a, 122b, 122c. The same applies to the assembly and the arrangement of these auxiliary elements as described in the preceding embodiments. Each of the auxiliary elements 122a, 122b, 122 c is in an associated bore in the counter-plate 121 exactly opposite an auxiliary element 21 a, 21 b, 21 c housed in the support plate 22. It is therefore the exact mirror image of the support plate 22, mirrored to the plane of the mounting plate 11. Also in this structure, UV-curing adhesive can be used, it applies to the UV transmission of the used materials described above for the other embodiments of the invention.

FIG. 13 shows a further advantageous embodiment of the optical assembly according to the invention. In this case, an intermediate plate 131 is arranged to accommodate the thermal stresses between the mounting plate 11 and the support plate 22. Advantageously, the coefficient of thermal expansion of this intermediate plate 131 is between that of the support plate 22 and that of the mounting plate 11. The balance plate

131 is with the mounting plate 11 via glue dots

132 connected. The support plate 22 is connected to the intermediate plate 131 as well as the intermediate plate 22 to the mounting plate 11 in the previous examples. In this case, the same arrangements of auxiliary elements, of solid joints and adhesive dots can occur as in the abovementioned embodiments. The adhesive bonds between the intermediate plate 131 and the mounting plate 11 can be designed so that they can accommodate temperature expansion differences. As materials for the plates come for the support plate such as aluminum with a coefficient of thermal expansion of α = 23-10 ^{~ 6} K ^'1 , for the intermediate plate, for example, steel with a coefficient of thermal expansion of α = ll-10 ^{' s} K ^" l and for the mounting plate For example, borofloate, with a coefficient of thermal expansion of α = 3.3-10 ^{~ 6} K ^'1 in question.

FIGS. 14 to 20 are intended to illustrate, in the following example, an inventive method for connecting a carrier plate 22 to a mounting plate 11. Here, as in the preceding examples, on the support plate 22, a group of optical elements 15 are arranged, which are to be adjusted by means of a gripper arm 23 corresponding to an optical axis 28. However, a support plate is now used, on which the auxiliary elements 21a and 21b are firmly housed. These auxiliary elements 21a, 21b can be anchored in the carrier plate 22 or, before the start of the adjustment, e.g. be firmly bonded to the support plate 22 by gluing or soldering. The mounting plate 11 has bores 25a and 25b for this method. Firstly, the support plate 22 is arranged next to the mounting plate 11 so that each auxiliary element 21a, 21b of the support plate projects into a bore 25a, 25b in the mounting plate 11. Before or after this arrangement, a hose 141 or a sleeve 141 is inserted into the respective holes in the respective auxiliary element 21a, 21b. The spacer sleeve 141 can thereby on the

Auxiliary element 21a, 21b or on the wall of the bore 25a, 25b abut. There now follows a first adjustment of the carrier plate 22 relative to the mounting plate 11 by means of the gripping arm 23, which can be connected to an adjusting device, which is not shown. This creates a free space 142 within the bore.

As shown in FIG. 15, a first adhesive 151 is now introduced into the remaining space 142 of FIG. After curing of this first bers 151, the hose 141 is removed from the respective bore. For this purpose, it is advantageous if this spacer 141 has nonstick materials such as Teflon or coated with polymeric non-stick layers, so that its surfaces do not bond with the adhesive. If the sleeve 141 is removed from the bore 25a, 25b, then, when the sleeve 141 abuts the auxiliary element 21a, 21b, a narrow gap 152 remains between the auxiliary element 21a, 21b and the hardened first adhesive 151 on the wall of the bore 25a, 25b, so this narrow gap 152 is formed between the wall of the bore 25a, 25b and the cured first adhesive 151. It is now the optical assembly with the aid of the gripper 23 adjusted a second time, using as a range for the adjustment of the position of the support plate 22 to the mounting plate 11 only the small space 152 is available.

If the optical axis 28 is aligned as desired, then in the next step, as shown in FIG. 16, a second adhesive 161 is introduced. This establishes a cohesive connection between the first adhesive 151 and the auxiliary element 21a, 21b. The first adhesive 151 as well as the second adhesive 161 may be superglue or UV-curing adhesive. In the case that UV adhesive is used, the curing is carried out by irradiation of UV light 31 after the second adjustment step. In order to allow the irradiation of UV light, the mounting plate 11 and / or the support plate 22 UV-permeable, for example made of borofloat be designed. For the auxiliary element 21a, 21b sapphire can also be used here. But there is also the possibility, in the event that no UV-permeable materials are used are to accommodate openings 162 in the support plate 22, through which the UV light 31 can be blasted onto the adhesives 151 or 161. For this purpose, cationic UV adhesives are suitable.

FIG. 17 shows an optical assembly according to FIG. 16, with the difference that during its production the sleeve 141 did not abut on the auxiliary element 21a, 21b but on the wall of the bore. As a result, the first adhesive 151 abuts against the auxiliary element 21a, 21b, while the second adhesive 161 fills the remaining gap between the wall of the bore and the first adhesive 151. Everything said about Figure 16 also applies here.

FIG. 18 shows an assembly produced by the method according to the invention. The procedure was analogous to that which was described for the previous figures. Here, however, the auxiliary elements 21a, 21b are arranged on the mounting plate 11, which project into bores 25a, 25b in the carrier plate 22. As in the above-described method, a spacer 141 was introduced into the bore 25a, 25b, then the bore 25a, 25b filled with a first adhesive 151, then removed the auxiliary hose 141, the assembly finely adjusted and then a second adhesive 161 in the remaining free spaces within the bore 25 a, 25 b introduced, which was finally cured by irradiation of ultraviolet light 31. If the mounting plate 11 is not made of UV-transparent material, it may have holes 162 through which the adhesive is irradiated with ultraviolet light 31. In an advantageous embodiment of the described method, as shown in Figure 19, used as a spacer sleeve 141, an inflatable pressure cuff. This is filled before introduction of the first adhesive 151 via a feed line 191 with compressed air, whereby its diameter in the range of tenths of a millimeter is variable. The adhesive collar 141 should be thin-walled, made of non-adherent materials, such as polymer-coated stainless steel sheets, and have a compressed air cannula. Advantageously, the gripping arm 23 holds the carrier plate 22 so tight that forces which occur due to shrinkage of the first adhesive 151 do not influence the first adjustment, but are absorbed by the compressed-air collar 141. Once the first adhesive 151 has cured, the compressed air is released and the collar 141 is removed from the hole 25. The fine adjustment and the introduction of the second adhesive 161 are now carried out as in the above-described method.

Instead of a sleeve 141 or a compressed air cuff 141, as shown in FIG. 20, a sleeve 141 having a paraffin layer 204 accommodated between two sheets 202, 203 may be used. The sleeve 141 here has an outer film layer 202, an inner film layer 203 and a paraffin layer 204 introduced between the two film layers. In the paraffin layer 204, a heater 201 is inserted. With this heating device 201, the paraffin layer 204 can be melted after the introduction of the first adhesive 151, so that the collar 141 can be removed from the bore 25. The film rings 202, 203 are intended to prevent the highly hydrophobic paraffin 204 from reaching the adhesive surfaces of the fine-bonding gap. After melting the paraffin layer 204 are the film sleeves 202 and 203 force-free from the bore 25 in the plate pulled out and there is an adhesive gap 152 for the fine bonding. The foil rings 202 and 203 do not necessarily have to be closed in an annular manner during assembly; they can also be inserted into the bore 25 themselves as foil strips 203, 202 in an exciting and overlapping manner and also removed again, wherein already on the inside of the outer foil strip 202 before its assembly, the thin paraffin layer 204 with the embedded heating wire 201 is applied. The foil strips 202, 203 are rolled up into a cylinder and stretched into the bore. After releasing the film 202, 203 applies elastic to the bore. The paraffin layer 204 advantageously has a

Thickness of 100 microns and melts at about 50 ⁰ C. It can be poured onto the film 202 in the liquid state prior to assembly. The foils 202 and 203 in turn may be, for example, stainless steel foils of 20 microns thickness. For the heating wire 201, for example, constantan wire of approximately 50 μm in diameter is suitable, which is looped into the liquid paraffin layer 204 on the film 202 prior to assembly. The Vorklebung with the first adhesive 151 can be done by a high-viscosity UV adhesive, the removal of the sleeve 141 following Feinverklebung can be done for example with superglue, which must be protected against the influence of moisture. For the two-sided irradiation of the UV adhesive with ultraviolet light 31, a mounting plate 11 made of borofloat is used or the mounting plate has openings 162 through which the UV light 31 can be blasted onto the adhesive layers 151, 161. As shown in FIG. 21 and FIG. 22, according to the present invention, a shape memory sleeve 211 may also be used to form the fine-gauge gap. The sleeve is double-walled with an inner wall 213 and an outer wall 212 designed. At room temperature, the sleeve 211 is relaxed and the inner wall 213 is close to the outer wall 212 at. When heating the sleeve 211 to a temperature of about 80 ⁰ C forms between the two rings 212, 213 of the sleeve 211, an intermediate gap 215, which is caused by the memory effect, for example, a Ti ₅₂ Ni ₃₃ CUi ₅ -FoUe and by the bimetallic effect is further increased to a molybdenum foil of, for example, 100 μm in thickness. The molybdenum foil has in this case advantageously have a thermal expansion coefficient of α = 5.2 to 10 ^{~ 6} K ^"1, which under the Ti ₅₂ Ni ₃₃ Cui ₅ -FoHe of α = 16 • 10 ^significant" is ^6. The heating of the sleeve is effected by a current flow of, for example, I = IA, which flows through the heater 211. In this case, the sleeve 211 must be electrically insulated from the plate 22 via an insulating layer 214. Advantageously, the sleeve 211 for ventilation of the annular gap 215 has an opening. In the present method, the sleeve 211 is applied as the sleeves described in the previous examples in the bore 25 on the wall thereof and the auxiliary element 21 surrounding. Subsequently, the Vorklebung is made with a first adhesive 151 and the adhesive 151 cured. The shape memory sleeve 211 can now be cooled so that it relaxes and the inner wall 213 rests against the outer wall 212. If the collar 211 is now removed from the bore, a fine-bonding gap 152 is produced, as in the above-described example for a fine gluing. The other process steps are analogous to those described above. The sleeve 211 can be heated to trigger the memory and the Bimetalleffekts instead of electricity through a hot air nozzle. The electrical insulating layer 214 between the plate 22 and the sleeve 211 is then not required.

FIG. 22 shows the shape memory sleeve 211 in the relaxed state. When the sleeve 211 is released between the wall of the bore and the sleeve, a first distance 222 and a second distance 221 between the hardened first adhesive 151 and the sleeve 211 are created. Since the sleeve is not fixed to the wall of the bore or to the first Adhesive 151 rests, so it can be pulled without force from the bore 25 in the relaxed state. The gap 221 together with the distance 222 and the area filled by the shape memory sleeve 211 then form a fine-adhesive gap 152.

The inventive method and the optical assembly according to the invention have a number of advantages over the prior art: • The fact that the devices for adjustment in

Manufacturers remain, the price of the assembly can be significantly reduced.

• The fact that the auxiliary elements are guided in a bore makes it possible to initially adjust the assembly freely and then to establish a fixed connection in the shortest possible time.

• Due to the almost vertical arrangement of the adhesive surfaces between the auxiliary elements and the walls of the holes to the splices of the auxiliary elements with the plate to be connected relative to the bore axis occurs no appreciable De- Adjustment of the optical assembly by shrinkage of the adhesive during curing. • With a suitable choice of auxiliary elements very large bonds between the components of the optical assembly can be made by large adhesive surfaces without the flexibility would be limited in the adjustment.

The invention may e.g. can be used to transfer the components of the detection module of a laser scanning microscope, such as color splitter, Pinholeoptik, pinhole and color filter, adjusted to each other on a mounting plate.

Claims

claims 1. Optical assembly having a first and a second plate which are arranged adjacent to each other facing flat plate planes, at least one auxiliary element which in an associated, perpendicular to the plane of the second plate plate hole in the second Plate is arranged so that it produces a positive connection between the first and the second plate, wherein the contour of the bore corresponds to the outline of its associated auxiliary element in the direction of the bore and the auxiliary element is connected to the first plate on the surface thereof. 2. An optical assembly according to the preceding claim, characterized in that on the side facing away from the second plate of the first plate, a third plate with the first plate facing surface is disposed adjacent. 3. Optical assembly according to the preceding arrival, characterized in that the first and the third plate are interconnected by at least one splice that the coefficient of thermal expansion of the first plate between the second plate and the third plate is located. 4. Optical assembly according to one of the preceding Claims, characterized in that the at least one auxiliary element is cylindrical is, wherein that surface of the auxiliary element, which faces the first plate, is curved outward and / or that at least one of the auxiliary elements is spherical. 5. Optical assembly according to one of the preceding claims, characterized in that at least one of the at least one Hilfsele- elements and / or the first plate and / or the second plate and / or the third plate is UV permeable. 6. Optical assembly according to one of the preceding claims, characterized in that the first plate and / or the second plate and / or the third plate comprises and / or consists of aluminum and / or borofloat and / or steel. 7. Optical assembly according to one of the preceding claims, characterized in that at least one of the at least one Hilfssele- elements comprises or consists of sapphire. 8. Optical assembly according to one of the preceding claims, characterized in that the connections between the first plate and the at least one auxiliary element and / or the connection between the second plate and the at least one auxiliary element by UV adhesive and / or superglue and / or cationic UV adhesive and / or adhesive on acrylic latbasis and / or epoxy resin are formed as non-positive connections. 9. Optical assembly according to one of the preceding Claims, characterized in that at least one of the at least one Hilfssele- elements in the corresponding bore is connected to a solid state joint. 10. An optical assembly according to the preceding arrival, characterized in that at least one of the solid-state joints in a direction parallel to the plane of the plate in which it is housed, is movable and is rigid in all other directions. 11. Optical assembly according to one of the preceding claims, characterized in that at least one fixed support point is arranged between the first and the second plate. 12. Optical assembly according to one of the preceding claims, characterized in that the first plate and / or the second plate have a total of three holes. 13. Optical assembly according to the preceding claim, characterized in that between the first and the second plate, a rigid support point is arranged and the auxiliary elements are connected in the holes with a solid-state joint and that the solid state pegs are movable in the direction of the rigid base. 14. Optical assembly according to the preceding claim, characterized in that at least one of the at least one rigid support points in the middle of the first and / or second plate is arranged. 15. Optical assembly according to one of claims 10 to 14, characterized in that the solid-state joints are mounted by snap-in connections and / or by gluing in the holes. 16. Optical assembly according to one of the preceding claims, characterized in that between the plates at least one elastic adhesive point is arranged. 17. Optical assembly according to one of the preceding claims, characterized in that between the first and the second plate, the first and the second plate connecting three rigid support points forming a first triangle and three elastic support points forming a second triangle are arranged so that the first triangle lies within the second triangle. 18. Optical assembly according to the preceding claim, characterized in that the sides of the first triangle are between 10 mm and 30 mm long. 19. Optical assembly according to one of the preceding claims, characterized in that the first plate has a significantly greater thickness than the second plate and / or the third plate or that the second plate has a significantly greater thickness than the first and / or the third plate or that the third Plate has a significantly greater thickness than the first and / or the second plate. 20. Optical assembly according to one of the preceding claims, characterized in that the first plate is a carrier plate and the second plate is a mounting plate or that the first plate is a mounting plate and the second plate is a support plate or that the first plate is an intermediate plate, the second Plate is a support plate and the third plate is a mounting plate or that the first plate is an intermediate plate, the second plate is a mounting plate and the third plate is a support plate. 21. Optical assembly according to the preceding claim, characterized in that optical elements are arranged on the carrier plate. 22. Optical assembly according to one of the preceding claims, characterized in that the third plate is a compensation plate, which with respect to the plane of the first plate is arranged symmetrically to the second plate on the side facing away from the second plate of the first plate. 23. An optical assembly according to the preceding claim, characterized in that the compensation plate bores, auxiliary elements and splices on the corresponding elements of the same identical elements of the second plate opposite positions. 24. A method for connecting plates, wherein in a first step, a first plate and a second plate are arranged adjacent to each other facing flat plate planes, and at least one auxiliary element in an associated, perpendicular to the plane of the second plate hole in the direction of Bore parallel walls and a contour corresponding to the outline of the auxiliary member in the direction of the bore contour is accommodated in the second plate so that it is guided by the walls of the bore in the direction of the bore and the second plate facing plate plane of the first plate contacts, in one second step, the position of the first and second plates is adjusted to each other, in a third step between the at least one auxiliary element and the first plate and between the at least one auxiliary element and the walls of the bore at their contact surfaces a firm connection is established, and wherein before first and / or before the second and / or before the third step glue is applied to the resulting contact surfaces between the first plate and the at least one auxiliary element and between the auxiliary element and the walls of the bore. 25. Method according to the preceding claim, characterized in that the second step is carried out before the first step, or in that the first step is carried out before the second step. 26. The method according to any one of the preceding claims, characterized in that the first plate is disposed over the second plate or that the second plate is disposed over the first plate. 27. The method according to any one of the three preceding claims, characterized in that the auxiliary elements are introduced before the third step in the holes so that they are loose under its own weight. 28. The method according to any one of claims 24 to 27, characterized in that three auxiliary elements are housed in three holes. 29. The method according to any one of claims 24 to 28, characterized in that the adjustment of the first and the second plate by means of an adjusting device, preferably, that at least one element to be adjusted is held by a gripper, preferably Preferably, that the adjusting device is controlled by a robot. 30. The method according to any one of claims 24 to 29, characterized in that at least one auxiliary element is used, which is spherical. 31. The method according to any one of claims 24 to 30, characterized in that at least one auxiliary element is used, which is cylindrical. 32. Method according to the preceding claim, characterized in that the surface of the cylindrical auxiliary element facing the first plate is arched outward. 33. The method according to any one of claims 24 to 32, characterized in that at least one auxiliary element is used which has a maximum extent parallel to the plane of the plate which is greater than 1 mm and less than 10 mm, preferably greater than 3 mm and smaller than 8 mm. 34. The method according to any one of claims 24 to 33, characterized in that the first and the second plate are arranged such that a wedge-shaped gap is formed between the two plates. 35. The method according to any one of claims 24 to 34, characterized in that the first and the second plate are arranged such that their distance from each other between see 0.1 mm and 1 mm. 36. The method according to any one of claims 24 to 35, characterized in that an auxiliary element is used whose extension in the direction perpendicular to the direction of the bore is at most 0.02 mm smaller than the diameter of the corresponding bore in the same direction. 37. The method according to any one of claims 24 to 36, characterized in that the adhesive is applied by a metering device. 38. The method according to any one of claims 24 to 37, characterized in that Adhesive is used which cures within 24 hours, preferably that adhesive is used, which cures within one minute. 39. The method according to any one of claims 24 to 38, characterized in that low-viscosity adhesive is used. 40. The method according to any one of claims 24 to 39, characterized in that superglue is used. 41. The method according to any one of claims 24 to 40, characterized in that UV adhesive and / or cationic UV adhesive is used. 42. Method according to the preceding claim, characterized in that the solid compound is prepared in the third step by irradiation with UV light. 43. The method according to any one of claims 24 to 42, characterized in that at least one auxiliary element is used, which is UV-transmissive. 44. The method according to any one of claims 24 to 43, characterized in that at least one auxiliary element is used, which sapphire and / or borosilicate glass comprises or consists thereof. 45. The method according to any one of claims 24 to 44, characterized in that the first and / or second plate Borofloat has up or consists thereof. 46. The method according to any one of claims 24 to 45, characterized in that the first and / or the second plate comprises material with low temperature expansion or consists thereof. 47. The method according to any one of claims 24 to 46, characterized in that the at least one bore has at least one adhesive. 48. The method according to any one of claims 24 to 47, characterized in that the at least one auxiliary element is secured by at least one captive in the bore against falling out. 49. The method according to any one of claims 24 to 48, characterized in that the at least one bore pierces the second plate and, on the side of the second plate facing away from the first side, an auxiliary plate equipped with a spring for at least one bore is arranged during the third step so that the spring presses the auxiliary element through the bore against the first plate , 50. Method according to the preceding claim, characterized in that the auxiliary plate is UV-transparent. 51. The method according to one of the two preceding claims, characterized in that the auxiliary plate borofloat comprises or consists thereof. 52. The method according to any one of claims 24 to 48, characterized in that the at least one bore pierces the second plate and on the first side facing away from the second plate, an auxiliary plate is disposed, and that between the auxiliary plate and the second plate a pressure hose is arranged so that the walls of the pressure hose press against the second plate and against the auxiliary plate. 53. Method according to the preceding claim, characterized in that a pressure hose is used which is UV-permeable. 54. The method according to one of the two preceding claims, characterized in that a UV-permeable and / or Borofloat aufwei- send or existing auxiliary plate is used. 55. The method according to any one of claims 52 to 54, characterized in that the pressure hose is arranged so that it presses the at least one auxiliary element against the first plate. 56. The method according to any one of the four preceding claims, characterized in that a pressure hose is used, which has at least one hole, and the pressure hose is arranged such that the at least one hole is below one of the at least one bore, so that compressed air through the Pressure hose is passed into the bore. 57. Method according to the preceding claim, characterized in that the thickness of the adhesive layer is adjusted by the air pressure imposed on the pressure hose. 58. The method according to any one of claims 24 to 57, characterized in that the at least one auxiliary element and the adhesive are arranged in the corresponding bore, that the bore becomes impermeable to air. 59. The method according to any one of claims 24 to 58, characterized in that in at least one wall of at least one of the holes at least one adhesive chamber is arranged, and that the at least one auxiliary element is introduced into the bore, that it moves past the at least one adhesive chamber. 60. Method according to the preceding claim, characterized in that adhesive is introduced into the adhesive chamber before the introduction of the auxiliary element. 61. The method according to the preceding claim, characterized in that the entire arrangement after the introduction of Adhesive is in the at least one adhesive chamber is reversed, so that adhesive flows from the at least one adhesive chamber in the bore. 62. The method according to any one of claims 24 to 61, characterized in that as a second plate, a plate having at least three holes, which form the corners of a polygon in the plane of the plate is used, wherein the holes each having a solid-state joint, which in one direction is movable parallel to the plane of the second plate and in which in each case an auxiliary element is housed. 63. Method according to the preceding claim, characterized in that a fixed support point is accommodated between the first and the second plate, and the at least one solid-state articulation is arranged so as to be movable in the direction of the fixed support point. 64. The method according to any one of claims 24 to 63, characterized in that between the first and the second plate min- at least one elastic glue dot is accommodated. 65. The method according to any one of claims 24 to 64, characterized in that for the first plate a thicker plate than for the second plate is used or that for the first plate, a thinner plate than for the second plate is used. 66. The method according to any one of claims 24 to 65, characterized in that on the second plate opposite side of the first plate symmetrically to the second plate, a compensation plate is arranged. 67. The method according to the preceding claim, characterized in that a compensation plate is used whose structure corresponds to that of the second plate. 68. The method according to any one of claims 24 to 67, characterized in that a support plate is used as the first plate, which has an adjusted optical assembly, and that a mounting plate is used as the second plate or that as a second plate, a support plate is used, which has an adjusted optical assembly, and that as a first plate, a mounting plate is used. 69. A method for joining plates, wherein in a first step, a first plate, which with at least one, firmly connected, from the Plate plane protruding, auxiliary element is provided, so next to a second plate, which has a hole per auxiliary element arranged In each case, one of the at least one auxiliary elements protrudes into a bore of the second plate and, before or after the placement of the plates, a tubular spacer is arranged such that, after the plates have been arranged between the at least one auxiliary element and the walls of the plates In a second step, the first and second plates are first aligned with each other, in a third step, a first adhesive is introduced into the holes such that it does not match that of the auxiliary elements and the tubular spacer filled space of the bore in the direction of the holes radial direction on at least part of the circumference of the bore and at least part of its depth fills, and in a fourth step, the first adhesive hardens. 70. The method according to the preceding claim, characterized in that the adhesive is introduced in the third step in the bore so that it is not satisfied by the auxiliary elements and the tubular spacer space of the bore on the entire circumference of the bore and at least one Part of their depth fills. 71. The method according to one of the two preceding claims, characterized in that the tubular spacer to the auxiliary element or against the wall of the bore. 72. The method according to any one of the three preceding claims, characterized in that a thin tube or a sleeve is used as a tubular spacer. 73. The method according to any one of claims 69 to 72, characterized in that a tubular spacer is used which has non-stick materials and / or Teflon and / or non-stick layers. 74. Method according to claim 69, characterized in that an inflatable adhesive sleeve is used as the tubular spacer, that the adhesive sleeve is inflated with compressed air before the introduction of the first adhesive and that the compressed air is released after the curing of the first adhesive. 75. The method according to any one of claims 69 to 71, characterized in that is used as a tubular spacer disposed between an inner and an outer layer of film layer of paraffin, in which a heating device is housed, and that the paraffin after curing of the first adhesive is melted. 76. The method according to any one of claims 69 to 71, characterized in that a double-walled shape memory cuff is used as the tubular spacer, which is stretched in the first step, so in that its inner and outer walls are at a first distance from each other, and which is relaxed after the first adhesive has hardened so that its inner and outer walls are at a second distance from each other which is smaller than the first distance. 77. Method according to the preceding claim, characterized in that the shape memory sleeve has a heating device, over which it is stretched or relaxed. 78. The method according to one of the two preceding claims, characterized in that the shape memory cuff Ti_52Ni_33Cu_15 film comprises or consists thereof and / or has a molybdenum foil of preferably 100 microns. 79. The method according to any one of claims 69 to 78, characterized in that the tubular spacer has a wall thickness between 0.05 mm and 0.5 mm. 80. The method according to any one of claims 69 to 79, characterized in that the tubular spacer is removed after the fourth step. 81. The method according to the preceding claim, characterized in that after removing the tubular spacer, the plates are adjusted a second time to each other and that in the developing the columns in the holes a second adhesive is introduced. 82. Method according to the preceding claim, characterized in that the second adhesive is cured after the second adjustment. 83. The method according to any one of claims 69 to 82, characterized in that the first and / or optionally the second adjustment takes place by means of a gripper of an adjusting device. 84. The method according to any one of claims 81 to 83, characterized in that the second adhesive comprises UV adhesive or consists thereof. 85. Method according to the preceding claim, characterized in that the curing of the second adhesive takes place by irradiation of UV light and / or by cationic curing and / or by heat treatment. 86. The method according to any one of claims 69 to 85, characterized in that an auxiliary element is used which is UV-transparent. 87. The method according to any one of claims 69 to 86, characterized in that at least one auxiliary element is used which comprises or consists of sapphire. 88. The method according to any one of claims 69 to 87, characterized in that the first plate and / or the second plate is UV-transmissive. 89. The method according to any one of claims 69 to 88, characterized in that the first and / or second plate borofloat comprises or consists thereof. 90. The method according to any one of claims 69 to 89, characterized in that the first and / or the second plate has openings, and that UV light is irradiated through the openings on the first and / or second adhesive. 91. The method according to any one of claims 69 to 90, characterized in that as the first plate, a support plate having an adjusted optical assembly is used and as a second plate, a mounting plate is used or that as a second plate, a support plate, which is an adjusted optical Assembly is used, and is used as a first plate, a mounting plate. 92. Use of the method according to any one of claims 24 to 68 for the adjusted construction of an optical assembly. 93. Use of the method according to one of claims 69 to 91 for the adjusted construction of an optical assembly.