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WO2003040711A1 - Substrate inspecting device - Google Patents

Substrate inspecting device Download PDF

Info

Publication number
WO2003040711A1
WO2003040711A1 PCT/JP2002/011507 JP0211507W WO03040711A1 WO 2003040711 A1 WO2003040711 A1 WO 2003040711A1 JP 0211507 W JP0211507 W JP 0211507W WO 03040711 A1 WO03040711 A1 WO 03040711A1
Authority
WO
WIPO (PCT)
Prior art keywords
inspecting device
substrate inspecting
gate type
type arm
fixed stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/011507
Other languages
French (fr)
Japanese (ja)
Inventor
Nobuo Fujisaki
Kazuya Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001339938A external-priority patent/JP3929285B2/en
Priority claimed from JP2002000767A external-priority patent/JP2003202209A/en
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to KR1020047006299A priority Critical patent/KR100634652B1/en
Publication of WO2003040711A1 publication Critical patent/WO2003040711A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A substrate inspecting device comprises a fixed stage for placing a subject thereon, a gate type arm disposed astride the subject placed on the fixed stage, and two inspection heads disposed back to back with the horizontal beam of the gate type arm interposed therebetween.
PCT/JP2002/011507 2001-11-05 2002-11-05 Substrate inspecting device Ceased WO2003040711A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020047006299A KR100634652B1 (en) 2001-11-05 2002-11-05 PCB inspection device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001-339938 2001-11-05
JP2001339938A JP3929285B2 (en) 2001-11-05 2001-11-05 Board inspection equipment
JP2002-000767 2002-01-07
JP2002000767A JP2003202209A (en) 2002-01-07 2002-01-07 Substrate inspection device

Publications (1)

Publication Number Publication Date
WO2003040711A1 true WO2003040711A1 (en) 2003-05-15

Family

ID=26624355

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/011507 Ceased WO2003040711A1 (en) 2001-11-05 2002-11-05 Substrate inspecting device

Country Status (4)

Country Link
KR (1) KR100634652B1 (en)
CN (1) CN100368794C (en)
TW (1) TWI264532B (en)
WO (1) WO2003040711A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006292404A (en) * 2005-04-06 2006-10-26 Olympus Corp Visual inspection device
JP2011099875A (en) * 2011-02-18 2011-05-19 Olympus Corp Visual inspection apparatus
CN103487716A (en) * 2013-10-10 2014-01-01 南京华睿川电子科技有限公司 Intelligent testing machine of capacitive screen sensor
ES2649541A1 (en) * 2017-03-21 2018-01-12 Orbita Ingenieria, S.L. System to control the packaging quality of a product

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101166828B1 (en) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 Apparatus for Testing flat panel display device and testing method thereof
KR100844830B1 (en) * 2006-03-24 2008-07-08 에버테크노 주식회사 LCD panel inspection device and method
KR100811544B1 (en) * 2007-04-18 2008-03-07 홍지훈 Flat panel display inspection and defect elimination device
JP5038191B2 (en) * 2008-03-04 2012-10-03 有限会社共同設計企画 Electronic component inspection method and apparatus used therefor
TWI381257B (en) * 2008-07-07 2013-01-01 Race Ahead Technology Co Ltd Substrate-check equipment and checking method
TWI381161B (en) * 2009-04-17 2013-01-01 Favite Inc Four-gantry inspection device
JP5247664B2 (en) * 2009-11-18 2013-07-24 株式会社日立ハイテクノロジーズ Substrate inspection apparatus and measurement operation system thereof
TWI407268B (en) * 2010-07-28 2013-09-01 Au Optronics Corp Work table
SG11201408664YA (en) 2012-06-29 2015-01-29 Rudolph Technologies Inc Flying sensor head
CN102879405B (en) * 2012-09-29 2014-09-24 肇庆中导光电设备有限公司 Compact detection table and detection method using same
CN103915048A (en) * 2013-01-06 2014-07-09 北京京东方光电科技有限公司 Detecting sensor adjusting device and method and substrate detecting device
CN103217443A (en) * 2013-04-02 2013-07-24 苏州长城开发科技有限公司 Inspection device for flexible printed circuit
CN103763910B (en) * 2013-12-31 2016-06-15 埃泰克汽车电子(芜湖)有限公司 A kind of detection device and detection method thereof installing position for safety fuse
CN103837552A (en) * 2014-03-14 2014-06-04 苏州精创光学仪器有限公司 System for detecting apparent defects on protective glass of touch screen
CN106290390B (en) * 2015-05-24 2019-11-26 上海微电子装备（集团）股份有限公司 Defect detecting device and method
CN104914601A (en) * 2015-06-29 2015-09-16 吴中区横泾博尔机械厂 Screen detection device of automatic screen assembly machine
CN105665290A (en) * 2016-04-14 2016-06-15 东莞天龙阿克达电子有限公司 An automatic detection machine for wind protection ring
KR102390357B1 (en) * 2016-06-23 2022-04-22 니폰 덴키 가라스 가부시키가이샤 Glass substrate distortion measurement method and glass substrate distortion measurement apparatus
CN106442560A (en) * 2016-08-23 2017-02-22 汕头大学 Positioning measurement and defect detection method of display screen
CN106896540A (en) * 2017-03-07 2017-06-27 苏州海摩鑫智能装备有限公司 Gantry locating platform
JP2018181931A (en) * 2017-04-05 2018-11-15 株式会社ディスコ Cutting device
CN110308256B (en) * 2018-03-20 2022-07-05 宝山钢铁股份有限公司 Steel plate lower surface periodic defect measuring device
JP7045890B2 (en) * 2018-03-20 2022-04-01 株式会社Ｓｃｒｅｅｎホールディングス Pattern drawing device and pattern drawing method
CN112540262A (en) * 2020-11-18 2021-03-23 广西电网有限责任公司电力科学研究院 Voltage time type feeder automation test system and test method thereof
CN112720384B (en) * 2020-12-21 2022-08-26 苏州科韵激光科技有限公司 Display panel alignment apparatus and display panel alignment method
CN114071882B (en) * 2021-11-03 2024-11-22 西安航天华阳机电装备有限公司 A flexible plate mounting device
CN114166753B (en) * 2021-12-09 2022-08-23 黑龙江职业学院(黑龙江省经济管理干部学院) Glass screen internal damage detection device and method based on image processing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08145901A (en) * 1994-11-21 1996-06-07 Hitachi Electron Eng Co Ltd Foreign metal inspection device for transparent metal thin film substrate
JPH08171057A (en) * 1994-12-19 1996-07-02 Olympus Optical Co Ltd Plural-head microscopic device
JPH08271798A (en) * 1995-03-29 1996-10-18 Olympus Optical Co Ltd Plural-head microscope
JPH1194756A (en) * 1997-09-24 1999-04-09 Olympus Optical Co Ltd Substrate inspecting apparatus
JP2000009661A (en) * 1998-06-26 2000-01-14 Ntn Corp Flat panel inspection device
JP2001519890A (en) * 1995-10-06 2001-10-23 フォトン・ダイナミクス・インコーポレーテッド Techniques for detecting three-dimensional defect locations in transparent structures

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100432359B1 (en) * 1999-09-22 2004-05-20 올림푸스 가부시키가이샤 Parallel mechanism and test apparatus
JP4662482B2 (en) * 2006-06-28 2011-03-30 株式会社キーエンス Laser processing condition setting device, laser processing device, laser processing condition setting method, laser processing condition setting program

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08145901A (en) * 1994-11-21 1996-06-07 Hitachi Electron Eng Co Ltd Foreign metal inspection device for transparent metal thin film substrate
JPH08171057A (en) * 1994-12-19 1996-07-02 Olympus Optical Co Ltd Plural-head microscopic device
JPH08271798A (en) * 1995-03-29 1996-10-18 Olympus Optical Co Ltd Plural-head microscope
JP2001519890A (en) * 1995-10-06 2001-10-23 フォトン・ダイナミクス・インコーポレーテッド Techniques for detecting three-dimensional defect locations in transparent structures
JPH1194756A (en) * 1997-09-24 1999-04-09 Olympus Optical Co Ltd Substrate inspecting apparatus
JP2000009661A (en) * 1998-06-26 2000-01-14 Ntn Corp Flat panel inspection device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006292404A (en) * 2005-04-06 2006-10-26 Olympus Corp Visual inspection device
JP2011099875A (en) * 2011-02-18 2011-05-19 Olympus Corp Visual inspection apparatus
CN103487716A (en) * 2013-10-10 2014-01-01 南京华睿川电子科技有限公司 Intelligent testing machine of capacitive screen sensor
CN103487716B (en) * 2013-10-10 2016-05-18 南京华睿川电子科技有限公司 A kind of capacitance plate functional sheet Intelligent testing test-run a machine
ES2649541A1 (en) * 2017-03-21 2018-01-12 Orbita Ingenieria, S.L. System to control the packaging quality of a product

Also Published As

Publication number Publication date
CN1582393A (en) 2005-02-16
KR100634652B1 (en) 2006-10-13
KR20040063131A (en) 2004-07-12
TW200302345A (en) 2003-08-01
CN100368794C (en) 2008-02-13
TWI264532B (en) 2006-10-21

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