CN1582393A - Substrate inspecting device - Google Patents

Abstract

A substrate inspecting device comprises a fixed stage for placing a subject thereon, a gate type arm disposed astride the subject placed on the fixed stage, and two inspection heads disposed back to back with the horizontal beam of the gate type arm interposed therebetween.

Description

Substrate inspection device

technical field

The present invention relates to a substrate inspection device used for defect inspection of a glass substrate of a flat panel display (FPD) such as a liquid crystal display (LCD) or a large glass substrate such as a color filter.

Background technique

The glass substrates of liquid crystal displays have been increasing in size year by year, and recently, sizes exceeding 1000mm have appeared. This large glass substrate adopts multiple sides such as 9 sides, 6 sides, and 4 sides according to the size of the panel in order to improve the use efficiency of the same panel size.

FIG. 12 is a configuration diagram showing such a conventional board inspection device. This substrate inspection device is described in Japanese Patent Application Laid-Open No. 8-171057. The substrate inspection device is configured such that the unloading object table 203 can move on the base 201 through the guide rail 202 in the Y direction. And it is set so that the upper object stage 205 can move through the guide rail 204 in the X direction on the lower object stage 203 . A large glass substrate 206 is placed on the upper stage 205 .

Furthermore, a bracket 207 is provided on the base 201 , and two optical heads 209 and 210 are provided on the side of the bracket 207 so as to be movable in the X direction via guide rails 208 . Television cameras (TV cameras) 211 and 212 are attached to these optical heads 209 and 210, respectively.

In such a substrate inspection apparatus, the number of surfaces used and the pattern interval are changed according to the size of the large glass substrate 206, so the interval between the optical heads 209 and 210 is appropriately adjusted to match the pattern interval.

After setting the distance between the optical heads 209 and 210, by moving only the lower stage 203 and the upper stage 205, the same part of two adjacent patterns on the large glass substrate 206 is simultaneously observed.

In recent years, the production volume of liquid crystal displays has increased rapidly, and there has been an increasing demand for shortening the measurement interval time required for substrate inspection and reducing the size of the inspection device itself. Furthermore, from the user's point of view, in order to suppress the amount of equipment investment, downsizing of the main body of the inspection device is also required. Along with the increase in size of displays, large glass substrates with a short side dimension exceeding 1000mm have appeared. Therefore, it is also necessary to reduce the size of the inspection device body from the viewpoint of transportation and cost.

Contrary to this point of view, the substrate inspection apparatus described above requires a space that is at least four times the size of the substrate to move the lower stage 203 and the upper stage 205 in the XY directions, and the apparatus body is increased by the size of the space.

FIG. 13 is a diagram showing the structure of a conventional board inspection device of this type. This substrate inspection device is described in Japanese Patent Application Laid-Open No. 11-94756, and the size of the device main body is reduced. In this substrate inspection apparatus, a holder 303 for mounting a large glass substrate 302 is provided on a stage base 301 .

In addition, on both sides of the stage base 301, guide rails 304, 404 are provided respectively, and on these guide rails 304, 304, a gate-shaped microscope lens moving stage 305 is provided so as to be movable in the Y direction. On the horizontal beam 306 of the microscope lens moving table 305, a microscope lens 307 is provided so as to be movable in the X direction.

On the bottom plate of the microscope lens moving stage 305, a transmitted line illuminator 308 is provided. In the microscopic lens 307 , an objective lens 310 and an eyepiece 311 are provided on a microscopic observation unit 309 . In addition, on the microscope lens 307, a macro illumination 312 and an indicator illumination 313 are provided.

On the micro observation unit 309, a TV camera 314 is installed. An observation image of the large glass substrate 302 captured by the TV camera 314 is displayed on a TV monitor 315 . The control unit 316 performs defect position coordinate management and movement control of the microlens moving stage 30 and the microlens 307 .

In such a substrate inspection apparatus, the microlens 307 is linearly moved in the X direction along the microlens moving stage 305 , and the microlens moving stage 305 is linearly moved in the Y direction along the guide rails 304 , 304 . Thereby, with the large glass substrate 302 fixed, the microscope lens 307 can raster-scan the entire surface of the large glass substrate 302 for inspection.

However, in the substrate inspection apparatus shown in FIG. 13 , it is necessary to install the microlens 307 on the microlens moving stage 305 to observe the entire surface of the large glass substrate 302 . Therefore, on the pedestal 301 , it is necessary to provide the movement space A of the microlens moving stage 305 at a position separated from the holder 303 , and the pedestal 301 is enlarged, and the size of the movement space A is increased.

In addition, the measurement interval time required for substrate inspection is required to be shortened, but since a single microscope lens 307 is used to measure a large glass substrate 302 with an angular size of 1000 mm, there is a limit to shortening the measurement interval time.

Fig. 14 is a surface external view of a glass substrate such as a conventional FPD. On the four corners of the glass substrate shown in FIG. 14 , marks 200 for position adjustment in each manufacturing process of FPD and the like are copied. In FIG. 14 , a mark 200 replicated in a predetermined manufacturing process is shown. When accurately replicating the pattern formed on the mask to the resist coated on the substrate, the marks formed on the four corners of the mask are accurately aligned with the marks 200 formed on the four corners of the glass substrate and exposed.

On the downstream side of each manufacturing process, defects such as out-of-focus and chipping of each mark on the glass substrate transported by a conveyor or misalignment of marks are inspected. After that, in the case where there is no defect in these marks or the mark is deviated, it is judged that the copying is good and the position adjustment on the upstream side is accurate.

Four TV cameras are installed on this conveyor, and the marks at the four corners are photographed simultaneously for inspection. However, in this structure, since four TV cameras are provided, the cost becomes high.

Contents of the invention

It is an object of the present invention to provide a substrate inspection device capable of shortening the measurement interval time required for substrate inspection and realizing miniaturization of the device body.

The substrate inspection device of the present invention includes: a stage on which an object to be inspected is placed; a portal arm straddling the object to be inspected placed on the stage, and having a horizontal beam parallel to the surface of the object to be inspected; The two inspection heads sandwich the horizontal beam of the gantry arm and are arranged in a state facing away from each other.

Description of drawings

FIG. 1 is an external perspective view showing the structure of a substrate inspection apparatus according to a first embodiment of the present invention.

Fig. 2 is a side view showing the structure of the substrate inspection apparatus according to the first embodiment of the present invention.

Fig. 3 is a diagram showing a moving state of the inspection head according to the first embodiment of the present invention.

4A and 4B are diagrams showing observation areas in the inspection head according to the first embodiment of the present invention.

5 is a side view showing the structure of a substrate inspection apparatus according to a second embodiment of the present invention.

6 is a side sectional view showing the structure of a substrate inspection apparatus according to a third embodiment of the present invention.

7 is a front view showing the appearance of a substrate inspection apparatus according to a third embodiment of the present invention.

Fig. 8 is a plan view showing the structure of a roller conveyor according to a third embodiment of the present invention.

Fig. 9 is a side view showing each mechanism structure of an orientation mechanism according to a third embodiment of the present invention.

Fig. 10 is a side view showing the structure of the orientation mechanism of the third embodiment of the present invention.

11 is an external perspective view showing the structure of a substrate inspection device according to a fourth embodiment of the present invention.

FIG. 12 is a diagram showing the structure of a conventional substrate inspection device.

FIG. 13 is a diagram showing the structure of a conventional substrate inspection device.

Fig. 14 is a surface appearance view of an embodiment of the present invention and a conventional glass substrate.

Detailed ways

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 and 2 are diagrams showing the structure of a substrate inspection apparatus according to a first embodiment of the present invention, FIG. 1 is an external perspective view, and FIG. 2 is a side view.

In this substrate inspection apparatus, a stage (fixed stage) 3 on which a large glass substrate 2 is placed is fixed on a base 1 . A plurality of substrate pressing members 4 are provided at predetermined positions on the stage 3 . The plurality of substrate pressing members 4 adsorb and hold, for example, the large glass substrate 2 .

Guide rails 6, 6 are provided on the left side and right side of the pedestal 1, respectively. On these guide rails 6, 6, a gate-shaped inspection head moving table (gate-shaped arm) 7 is provided over the stage 3 so as to be movable in the Y direction.

On the horizontal beam 71 of the inspection head moving table 7, two inspection heads 81, 82 are provided in a state of facing away from each other with the horizontal beam 71 in between. These inspection heads 81 and 82 can be moved in the X direction along the horizontal beam 71 by using a motor to rotate a spherical guide provided in the horizontal beam 71 . Various inspection heads can be used as the inspection heads 81 and 82 , for example, inspection heads for magnified observation of defects or patterns, inspection heads for measuring pattern shapes, or inspection heads for spectrophotometry with color filters.

Objective lenses 83, 83 are attached to the inspection heads 81, 82, respectively. On the inspection heads 81, 82, TV cameras 93, 94 are attached via connecting lens barrels 91, 92, respectively.

The inspection heads 81 and 82 are provided so as to be movable in a direction (X direction) perpendicular to the moving direction (Y direction) of the inspection head moving table 7 . The inspection heads 81 and 82 are arranged at predetermined intervals in the same direction as the moving direction of the inspection head moving table 7 across the horizontal beam 71 .

As shown in FIG. 2 , the distance F between the optical axes of the objective lens systems of the inspection heads 81, 82 is set to be not larger than the dimension D of the large glass substrate 2 in the direction in which the inspection heads 81, 82 are arranged (Y direction). 1 in 2.

On the inspection heads 81, 82, the following constituent elements are assembled: an imaging optical system including objective lenses 83, 83 for imaging the images of the large glass substrates 2 respectively held on the stage 3; illumination The optical system illuminates the large glass substrate 2 ; the observation system observes the image of the large glass substrate 2 ; the focusing device focuses on the large glass substrate 2 .

The imaging optical system has a conversion function (rotary converter) and a focusing function (autofocus) of the objective lens 83, the illumination optical system has a reflective illumination function, and the above-mentioned TV cameras 93, 94 are provided on the observation system. The switching function and focusing function of the objective lenses 83 and 83 are motorized, and can be remotely controlled by the control unit 10 .

Each TV camera 93,94 images the observation image of the large glass substrate 2 observed by the inspection head 81,82, respectively, and outputs each image signal. These image signals are sent to the control unit 10 .

In addition, as shown in FIG. 1 , a Y scale 11 is provided on the pedestal 1 , and an X scale 12 is provided on the inspection head moving table 7 . The control unit 10 has a function of managing the position coordinates of the Y scale 11 and the X scale 12 and controlling the movement of the inspection head moving table 7 and the inspection heads 81 and 82 .

In addition, the energy control unit 10 has a function of inputting each image signal output from the TV cameras 93 and 94, selecting (selecting means) one or both of these image signals, and displaying the image signal of the image signal. An observed image of the large glass substrate 2 is displayed on a TV monitor (monitor device) 13 .

In addition, the control unit 10 has a function of controlling the movement of the inspection head moving table 7 and the inspection heads 81 and 82 to move the observation areas of the large glass substrate 2 by the inspection heads 81 and 82 in the XY direction. , so that some of the boundary portions of these observation areas overlap (repeat) each other.

Next, the operation of the substrate inspection apparatus configured as described above will be described. When the large glass substrate 2 is supplied on the stage 3 , the large glass substrate 2 is positioned by the plurality of substrate pressing members 4 and is sucked and held on the stage 3 .

FIG. 3 is a diagram showing a moving state of an inspection head. Thereafter, the control unit 10 turns on the transmitted line lights 14 , 14 , and moves the inspection head moving table 7 and the inspection heads 93 , 94 to the coordinate origin position O shown in FIG. 3 . Thereafter, the control unit 10 controls the inspection head moving table 7 and the inspection heads 81 and 82 to move in the XY direction, and moves the observation positions of the inspection heads 81 and 82 .

That is, the inspection head moving table 7 linearly moves in the Y direction along the guide rails 6 and 6 , and the inspection heads 81 and 82 linearly move in the X direction along the horizontal beam 71 of the inspection head moving table 7 .

At this time, as shown in FIG. 4A and FIG. 4B , each inspection head 81 , 82 moves within each inspection head observation area P ₁ , P ₂ , which is composed of about 1/2 of the entire surface of the large glass substrate 2 . That is, as shown in FIG. 4A, the objective lens 83 of one inspection head 81 moves within the inspection head observation area _P1 , and, as shown in FIG. 4B, the objective lens 83 of the other inspection head 82 moves within the inspection head observation area _P2. move within. Therefore, the inspection head moving table 7 and the inspection heads 81 and 82 move within approximately half of the entire surface of the large glass substrate 2 .

Furthermore, the control unit 10 controls the movement of the inspection head moving table 7 and the inspection heads 81, 82 so that the optical axes of the inspection heads 81, 82 (the optical axes of the objective lenses 83, 83) are within the observation areas of the inspection heads. When moving within P ₁ , P ₂ , at the boundary of these inspection head observation areas P ₁ , P ₂ , parts of the areas P ₁ , P ₂ overlap each other.

At the same time, the TV camera 93 takes an observation image of the large glass substrate 2 in the inspection head observation area P1 observed by the objective lens 83 of the inspection head ₈₁ , and outputs the image signal. At the same time, the TV camera 94 takes an observation image of the large glass substrate 2 in the head observation area _P2 observed with the objective lens 83 of the microlens 82, and outputs an image signal thereof. These image signals are sent to the control unit 10 .

The control unit 10 inputs image signals output from the TV cameras 93 and 94 , selects one or both of these image signals, and displays the observed image of the large glass substrate 2 representing the image signals on the TV monitor 13 . In addition, the control unit 10 inputs both of the image signals output from the TV cameras 93 and 94, divides the screen of the TV monitor 13 into two, and can display the images of the head observation areas _P1 and _P2 on each divided screen. Observation image of large glass substrate 2.

In addition, the control unit 10 reads out the coordinate data of each defect on the large glass substrate 2 extracted by other macroscopic inspection devices, and obtains the position coordinates of the defect part from the data of the Y scale 11 and the X scale 12, The movement of the inspection head moving table 7 and the inspection head 81 is controlled so that the optical axis of the inspection head 81 coincides with the defective portion.

As a result, the defective portion enters the field of view of the objective lens 83 of the inspection head 81 , and the defective portion is enlarged by the objective lens 83 . After that, the enlarged image of the defective portion is captured by the TV camera 93 and displayed on the TV monitor 3 .

In addition, when raster-scanning the entire surface of the large glass substrate 2, the control unit 10 moves the inspection head moving stage 7 in the Y direction and moves the inspection heads 81 and 82 in the X direction. The enlarged image data captured by the TV cameras 93 and 94 of the inspection heads 81 and 82 is input.

After this microscopic observation is completed, when a predetermined instruction is sent to the control unit 10, the inspection head moving table 7 and the inspection heads 81 and 82 return to their initial positions. Thereafter, the inspected large glass substrate 2 is unloaded from the stage 3 , and a new uninspected large glass substrate 2 is placed on the stage 3 .

As described above, the substrate inspection apparatus according to the first embodiment includes: the stage 3 on which the large glass substrate 2 is placed; and the inspection head moving stage 7 straddling the large glass substrate 2 placed on the stage 3 . And set, and be arranged to be able to move to Y direction with respect to stage 3; , and are arranged at predetermined intervals in the same direction as the moving direction of the inspection head moving table 7 in a state where the objective lenses 83 and 83 are positioned outside.

Thus, the inspection head moving table 7 and the two inspection heads 81 and 82 can be housed in the space of the stage 3 plus the space for installing the guide rails 6, and the size of the apparatus body can be reduced to the limit. Specifically, as shown in FIGS. 2 and 3 , the longitudinal dimension S of the device body can be reduced to a dimension slightly larger than the Y-direction dimension D of the large glass substrate 2 . In addition, during the inspection, the inspection heads 81 and 82 do not protrude from the outside of the large glass substrate 2, and space saving in the device installation area can be realized.

In addition, as shown in FIG. 3 , the width S ₂ of the device body can be reduced to a size slightly larger than the width of the large glass substrate 2 plus the width of the two pillars of the inspection head moving table 7 .

In addition, as shown in FIGS. 4A and 4B , the two inspection heads 81 and 82 only need to move within the respective observation areas P ₁ and P ₂ of approximately 1/2 of the entire surface of the large glass substrate 2 . Therefore, compared with the case where only one inspection head is provided, the movement stroke in the Y direction of the inspection head moving table 7 can be shortened to 1/2, and the measurement interval time can be shortened. On the basis of shortening the moving distance of the inspection head moving table 7, by arranging two inspection heads 81, 82 symmetrically back to back on the horizontal beam 71, the horizontal beam of the inspection heads 81, 82 to the inspection head moving table 7 can be improved. The balance of 71 reduces the load on the drive system.

Therefore, not only the rapid increase in liquid crystal display production volume can be met, but also the shortening of the measurement interval time required for substrate inspection can be met, and the user's request for downsizing the device body to suppress equipment investment can be further satisfied.

In addition, the distance F between the optical axes of the objective lens systems of the two inspection heads 81, 82 is set to be not greater than 1/2 of the longitudinal dimension of the large glass substrate 2, and the inspection heads 81, 82 are arranged so as to face each other. right. Thereby, the two inspection heads 81 and 82 do not protrude greatly outside the large glass substrate 2 , that is, the entire surface of the large glass substrate 2 can be reliably observed.

In addition, when moving the two inspection heads 81 and 82 within the respective inspection head observation areas, at the boundary of these inspection head observation areas P ₁ and P ₂ , by making a part of the areas P ₁ and P ₂ mutually overlapping, it is possible to reliably check the boundaries of the head viewing areas P ₁ , P ₂ .

5 is a side view showing the structure of a substrate inspection apparatus according to a second embodiment of the present invention. In FIG. 5, the same parts as those in FIG. 1 are denoted by the same symbols.

FIG. 5 shows the configuration of an optical system when one TV camera is installed. The two inspection heads 81, 82 have the same structure. For example, take an inspection head 81 as an example to illustrate its structure: a reflection illumination 100 is provided, and a half mirror 102 is provided after passing through a lens 101 on the optical path of the reflection illumination light output from the reflection illumination 100 . An objective lens 103 is provided on the reflection optical path of the half mirror 102 . An optical path bending mirror 104 is provided on the path of the transmitted light passing through the half mirror 102 from the objective lens 103 . The structure of the other inspection head 82 is the same as that of the inspection head 81 , so description thereof will be omitted.

Between the respective optical path bending mirrors 104, 104 in these inspection heads 81, 82, an optical path selection mirror (selection means) 105 is provided. The optical path selection mirror 105 is rotated to reflect an image from any one of the inspection heads 81 and 82 to a TV camera 93 after passing through the imaging lens 106 . The TV camera 93 may be installed on one of the inspection heads 81 , 82 .

With such a structure, in each inspection head 81, 82, the reflection illumination light output from the reflection illumination 100 respectively passes through the lenses 101, 101 and enters the half mirrors 102, 102. After being reflected by the mirrors 102, 102, the object lens 103, 103 is irradiated onto the surface of the large glass substrate 2.

The image from the surface of the large glass substrate 2 is incident from the objective lens 103, 103 to the half-mirror 102, 102, and after passing through the half-mirror 102, 102, it is incident on the optical path bending mirror 104, 104, After this reflection, it enters the optical path selection mirror 105 .

The optical path selection mirror 105 is rotated to reflect one of the images from the inspection heads 107 and 108 to one TV camera 93 after passing through the imaging lens 106 . The TV camera 93 takes an incident image from the surface of the large glass substrate 2 and outputs the image signal.

The control unit 10 receives an image signal output from the TV camera 93 , performs image processing on the image signal, and then displays the observed image of the large glass substrate 2 on the TV monitor 13 .

As described above, according to the above-mentioned second embodiment, the image from one of the inspection heads 81 and 82 passes through the imaging lens 106 through the optical path selection mirror 105 and enters one TV camera 93, so it is not necessary to install two TV cameras. , further simplifying the device structure.

In addition, in the above-mentioned first and second embodiments, the case where two inspection heads 81, 82 are provided has been described, but a plurality of inspection heads composed of two inspection heads 81, 82 may be installed so that they can be compared to each other. The inspection head moving table 7 moves. For example, by providing two sets of inspection heads consisting of two inspection heads, the observation area of one inspection head is reduced to approximately 1/4 of the entire surface of the large glass substrate 6, and the measurement interval time can be further shortened.

In addition, the above-mentioned substrate inspection apparatus is not limited to the large glass substrate 6 of a liquid crystal display, and can be applied to defect inspection of a glass substrate of a flat panel display (FPD), a color filter, and the like.

FIG. 6 is a side sectional view showing the appearance of a substrate inspection apparatus according to a third embodiment of the present invention, and FIG. 7 is a front view thereof. This substrate inspection device is installed on a conveyor belt that transports a large glass substrate between two manufacturing processes in an FPD production line.

Over the roller conveyor 101 and on the left and right sides of the base 102 , a gate-type inspection head moving table (gate-type arm) 110 is provided. On the horizontal beam 111 of the inspection head moving table 110, two inspection heads 103, 104 are provided by means of a support member 105, and the two inspection heads 103, 104 are arranged to be connected to The conveyor 101 moves in a direction (X direction) perpendicular to the moving direction (Y direction). These inspection heads 103 and 104 are arranged on the horizontal beam 111 at predetermined intervals to face each other. The inspection heads 103 and 104 are provided so as to be movable in the direction of the arrow (Y direction) relative to the support member 105 by using an actuator such as a linear motor so that the distance L _Y between the objective lenses 106 and 107 on both sides can be adjusted.

The inspection heads 103 and 104 are provided for magnified observation of the marks 200 at the four corners of the glass substrate 108 shown in FIG. 14 . Objective lenses 106 and 107 are attached to the inspection heads 103 and 104 , respectively, and TV cameras 115 and 116 are attached through camera lens barrels 113 and 114 . These inspection heads 103, 104 are assembled with: an imaging optical system including objective lenses 106, 107 for imaging the image of the glass substrate 108 held on the conveyor 101 as described later; an illumination optical system for illuminating the glass substrate 108; The observation system observes the image of the glass substrate 108 ; the focusing device focuses on the glass substrate 108 .

The imaging optical system has a conversion function (rotary converter) and focusing function (autofocus) of the objective lenses 106, 107, the illumination optical system has a reflected illumination function, and the above-mentioned TV cameras 115, 116 are provided on the observation system. The switching function and focusing function of the objective lenses 106 and 107 are motorized and can be remotely controlled by the control unit 117 . Each TV camera 115, 116 captures the observation image of the large glass substrate 108 observed by the inspection head 103, 104, respectively, and outputs each image signal. These image signals are sent to the control unit 117 .

In addition, the control unit 117 has the function of managing the position coordinates of the pulses from the encoder of the motor or performing movement control of the inspection head moving table 110 and the inspection heads 103, 104; The image signal is a function of displaying the image of the glass substrate 108 on a TV monitor (monitoring device) 118 .

FIG. 8 is a plan view showing the structure of the roller conveyor 101 . Support members 120 and 120 on both sides of the roller conveyor 101 rotatably hold a plurality of cylindrical rod-shaped roller support shafts 121 . On each roller support shaft 121, a plurality of rollers 122 are supported at predetermined intervals. One end of each roller support shaft 121 penetrates the support member 120, and a pulley 123 is attached to the end. A belt 124 is hung on each pulley 123 in the Y direction.

In the conveyor 101, the pulley 123 at the end is rotated by a drive mechanism (not shown) constituted by a motor, and the belt 124 is rotated in the Y direction by each pulley 123 . Thereby, since each pulley 123 rotates to a Y direction, the roller 122 rotates with the rotation of each roller support shaft 121, and the glass substrate 108 mounted on the some roller 122 is conveyed to a Y direction.

On the base 102 in the vicinity of the upstream entrance of the conveyor 101, a reflective photoelectric sensor 125 for detecting the arrival of the glass substrate 108 is provided. Two reflective photoelectric sensors 126 and 127 for detecting the arrival of the glass substrate 108 are provided on the base 102 near the downstream exit of the conveyor 101 along the traveling direction (Y direction) of the glass substrate 108 .

Moreover, on the upstream side and the downstream side of the conveyor 101, the orientation mechanisms 41 and 42 which orientate the conveyed glass substrate 108 in the Y direction, respectively, are provided. Orienting mechanisms 41, 42 are composed of two mechanisms 411, 412 and 421, 422, respectively, and between mechanisms 411, 412 and between mechanisms 421, 422 are provided at equal intervals from the center between support members 120, 120, respectively. Each mechanism 411, 412, 421, 422 is constituted by an air cylinder 43 or the like as described later.

Furthermore, on both sides of the conveyor 101, along the support members 120, 120, orientation mechanisms 51, 52 for orienting the glass substrate 108 carried over in the X direction, respectively, are provided. Each orientation mechanism 51, 52 is comprised by the movable plate 511, two pins 512, 512, two sets of air cylinders 513, 513 etc. as mentioned later.

In addition, the motors, photoelectric sensors 125 , 26 , 127 , and the cylinders of the orientation mechanisms 41 , 42 , 51 , 52 are controlled by the control unit 117 .

FIG. 9 is a side view showing the structure of each mechanism 411 , 412 , 421 , 422 of the orientation mechanisms 41 , 42 . In the mechanism of FIG. 9 , a holding member 402 for holding the drive unit 401 is attached to the base 102 . The holding member 402 has a plate shape and is erected on the base 102 , and an air cylinder 403 constituting the driving unit 401 is fixed to a side surface thereof. The air cylinder 403 is attached so that the movable part 404 can move to a Y direction.

In addition, a pressing portion 405 for pressing the edge of the glass substrate 108 is pivotally supported on the side surface of the upper end portion of the holding member 402 so as to be rotatable relative to the side surface. Furthermore, a connecting member 406 is attached to the front end of the movable part 404 of the air cylinder 403, and the connecting member 406 and the pressing part 405 are connected so as to be rotatable relative to each other.

When the glass substrate 108 is not on the conveyor 101 , the movable part 404 of each mechanism 411 , 412 , 421 , 422 is accommodated in the air cylinder 403 , and the protruding piece 4051 of the pressing part 405 retreats below the passage surface a of the glass substrate 108 .

FIG. 10 is a side view showing the structure of the orientation mechanisms 51, 52. In the mechanism of FIG. 10 , two sets of cylinders 513 are installed side by side on the base 102 . The cross section of the movable plate 511 is "L" shape, and the front end of the movable part 514 of each air cylinder 513 is attached to the longitudinal plate 5111. In addition, two pins 512 are rotatably supported at predetermined intervals in the Y direction on the transverse plate 5112 of the movable plate 511 .

When the glass substrate 108 is not on the conveyor 101, the movable parts 514, 514 of the orientation mechanisms 51, 52 are respectively pushed out from the air cylinders 513, 513, and the movable plates 511, 511 equipped with the pins 512, 512 retreat to the support respectively. Part 120, 120 side.

Next, the operation of the device configured as above will be described.

The glass substrate 108 that has been processed in the upstream manufacturing process is conveyed to the upstream inlet of the conveyor 101 by a conveyor not shown, and is passed onto the conveyor 101 . The glass substrate 108 is conveyed along the Y direction on the conveyor 101 by the drive of the motor, and when its front edge reaches the position of the photoelectric sensor 125 , the photoelectric sensor 125 detects that the glass substrate 108 arrives on the conveyor 101 .

Accordingly, when the front edge of the glass substrate 108 reaches the position of the photosensor 126 , the photosensor 216 detects the arrival of the glass substrate 108 . When the photoelectric sensor 126 detects the approach of the glass substrate 108, the control part 117 decelerates the drive of the said motor. Thereby, the glass substrate 108 travels with deceleration in the Y direction. After that, when the front edge of the glass substrate 108 reaches the position of the photosensor 127 , the photosensor 127 detects the arrival of the glass substrate 108 . When the photoelectric sensor 127 detects the approach of the glass substrate 108, the control part 117 stops driving of the said motor. Thereby, the glass substrate 108 stops at the inspection position near the center of the conveyor 101 .

Next, the control unit 117 drives the orientation mechanisms 51 and 52 . At this time, the control unit 117 simultaneously pulls the movable parts 514 of the orientation mechanisms 51 and 52 back into the cylinder 513 . At this time, in each orientation mechanism 51 , 52 , each movable plate 511 , 511 moves toward the center of the conveyor 101 in the X direction. Thus, both side edges of the glass substrate 108 are pressed toward the center of the conveyor 101 by the pins 512 . As a result, the glass substrate 108 is positioned substantially at the center in the X direction on the conveyor 101 .

Next, the control unit 117 drives the orientation mechanisms 41 and 42 . At this time, the control unit 117 simultaneously pushes the respective movable parts 404 of the mechanisms 411 , 412 , 421 , and 422 out of the air cylinder 403 . At this time, in each mechanism 411, 412, 421, 422, with the forward movement of the connecting member 406, each pressing part 40 rotates around the shaft 4050, and the protruding piece 4051 of each pressing part 405 is erected to be approximately in line with perpendicular to face a. Thus, the front edge of the glass substrate 108 is pressed upstream by the protruding pieces 4051 of the mechanisms 421 , 422 , and the rear edge is pressed downstream by the protruding pieces 4051 of the mechanisms 411 , 412 . At this time, the pins 512 in contact with the sides of the glass substrate 108 rotate as the glass substrate 108 moves in the Y direction. As a result, the glass substrate 108 is positioned substantially at the center in the X direction and the Y direction on the conveyor 101 .

Next, when the inspector performs a predetermined operation on the control unit 117, the control unit 117 moves the inspection heads 103, 104 in the X direction along the inspection head moving table 110, and moves the objective lenses 106, 107 of the inspection heads 103, 104 Each mark 200 , 200 is positioned on the glass substrate 108 located on the left side with respect to the moving direction of the conveyor 101 . In addition, the distance between the optical axes of the objective lens 106 and the objective lens 107 is adjusted in advance to match the distance between the two marks 200, 200 aligned in the Y direction. The control unit 117 is input with the Y-direction interval dimension L _Y and the X-direction interval dimension L _X of the four marks 100 formed on the four corners of the glass substrate 108 .

The TV camera 115 captures an image of the upstream mark 200 observed by the objective lens 106 of the inspection head 103 and outputs an image signal thereof. At the same time, the TV camera 116 captures an image of the downstream marker 200 observed by the objective lens 107 of the inspection head 104 and outputs an image signal thereof. These image signals are sent to the control unit 117 .

The control unit 117 inputs the respective image signals output from the respective TV cameras 115 and 116 , and displays the observed images of the respective markers 200 on the TV monitor 118 . The inspector observes the image on the TV monitor 118 to check whether there is a defect or a dimensional error on each mark 200 such as blurring or chipping.

Next, when the inspector performs a predetermined operation on the control unit 117, the control unit 117 moves the inspection heads 103 and 104 along the inspection head moving table 110 by a predetermined interval dimension L _X in the X direction, and makes each inspection head 103 The objective lenses 106, 107 of , 104 are positioned on the respective marks 200, 200 of the glass substrate 108 located on the right side with respect to the moving direction of the conveyor 101.

The TV camera 115 captures an image of the upstream mark 200 observed by the objective lens 106 of the inspection head 103 and outputs an image signal thereof. At the same time, the TV camera 116 captures an image of the downstream marker 200 observed by the objective lens 107 of the inspection head 104 and outputs an image signal thereof. These image signals are sent to the control unit 117 .

The control unit 117 inputs the respective image signals output from the respective TV cameras 115 and 116 , and displays the observed images of the respective markers 200 on the TV monitor 118 . The inspector observes the image on the TV monitor 118 to check whether or not there is a defect such as blurring or chipping on each mark 200 or a mark shift.

After that, when there is no abnormality in all the marks on the glass substrate 108 , the inspector performs a predetermined operation on the control unit, and the control unit 117 drives the alignment mechanisms 51 , 52 . At this time, the control unit 117 simultaneously pushes the movable parts 514 of the mechanisms 51 and 52 out of the air cylinder 513 . At this time, in each orientation mechanism 51 , 52 , each movable plate 511 , 511 moves toward the support member 120 , 120 side in the X direction. Accordingly, each pin 512 retreats from both sides of the glass substrate 108 .

Next, the control unit 117 drives the orientation mechanisms 41 and 42 . At this time, the control unit 117 pulls the movable parts 404 of the mechanisms 411 , 412 , 421 , and 422 back into the cylinder 403 at the same time. At this time, in each mechanism 411, 412, 421, 422, as the connecting member 406 moves rearward, the pressing part 405 rotates around the shaft 4050, and the protruding piece 4051 of the pressing part 405 retreats below the passing surface a.

Thereafter, the control unit 117 drives the motor again. Thereby, the glass substrate 108 moves to the manufacturing process of the downstream side on the conveyor 101. As shown in FIG.

In addition, when any mark of the glass substrate 108 has an abnormality, the inspector withdraws the glass substrate 108 from the conveyor 101 .

In addition, in the case of inspecting marks on glass substrates 108 of different sizes, by moving the inspection heads 103, 104 a certain distance relative to the supporting member 105, and inputting the four marks 200 of the glass substrate 108 to the control section, the conveyor 101 to correspond to the location information.

In addition, if the X-direction spacing and the Y-direction spacing of the marks on the various glass substrates 108 are registered in the memory of the control unit 117 from the design data, only by inputting the type information of the glass substrate to the control unit 117 , the distance between the objective lenses 106 and 107 of the inspection heads 103 and 104 in the Y direction and the moving distance of the inspection heads 103 and 104 in the X direction can be automatically set.

As described above, according to the above-mentioned third embodiment, while the glass substrate is waiting on the roller conveyor, it is possible to inspect the mark of the adjustment position, and the mark of the position adjustment can be simultaneously carried out by two inspection heads, so that the time can be shortened. Processing time, where the roller conveyor is used to carry glass substrates in the manufacturing process. In addition, by controlling the two inspection heads by a predetermined distance in one direction (X direction), each inspection head can be easily adjusted in position on the marks at the four corners.

In addition, glass substrates of various sizes can be handled by only adjusting the distance between two inspection heads and the moving distance in the X direction.

Furthermore, by positioning the glass substrate conveyed by the roller conveyance at the inspection position, the two inspection heads can be accurately positioned on each mark.

That is, according to the glass substrate inspection apparatus of the third embodiment described above, defect determination or inspection of at least four corner marks on the target substrate transported by the roller conveyor from the upstream manufacturing process is performed in a short time with an inexpensive structure. For dimensional measurement, the above-mentioned target substrate can be flowed to the downstream manufacturing process.

In addition, by positioning the object substrate on the roller tree hole mark, the two inspection heads are accurately positioned on each object mark. In addition, substrates of various sizes can be handled only by adjusting the moving distance of the two inspection heads in the horizontal beam direction and the distance between the two inspection heads.

Furthermore, the above-mentioned inspection of the four-corner marks on the glass substrate is not limited to the substrate inspection device with the structure shown in the above-mentioned third embodiment, and the movable inspection head shown in the above-mentioned first and second embodiments can also be used. The substrate inspection device with the structure of the moving table is implemented.

At this time, the inspection heads 81 and 82 are provided so as to be movable in the direction of the arrow (Y direction) relative to the horizontal beam 71 by an actuator such as a linear motor so that the distance between the objective lenses 83 and 83 on both sides can be adjusted. Thereby, the Y-direction spacing dimension of the mark is matched with the spacing dimension of the objective lenses 83, 83, and two marks arranged side by side in the Y-direction can be inspected. Thereafter, the other two marks can be inspected by moving the inspection heads 81 and 82 by a predetermined distance in the X direction.

11 is an external perspective view showing the structure of a substrate inspection device according to a fourth embodiment of the present invention. In FIG. 11, the same parts as those in FIG. 1 are marked with the same symbols.

A support member 97 is provided on the horizontal beam 71 of the inspection head moving table 7 , and TV cameras 93 and 94 are attached as inspection heads to both ends of the support member 97 sandwiching the horizontal beam 71 . Camera heads 95, 96 are attached to the TV cameras 93, 94, respectively. The supporting member 97 provided with the TV cameras 93 and 94 is movable in the X direction along the horizontal beam 71 integrally with an unillustrated motor via an unillustrated guide rail provided under the horizontal beam 71 .

Thus, in the substrate inspection apparatus of the fourth embodiment described above, by arranging the two TV cameras 93 and 94 at predetermined intervals in the same direction as the moving direction of the inspection head moving table 7, any position on the surface of the glass substrate can be inspected. Partially shot.

In addition, this invention is not limited to each said embodiment, In the range which does not change the summary, it can deform suitably and implement.

Industrial availability

According to the present invention, it is possible to provide a substrate inspection device that shortens the measurement interval time required for substrate inspection and realizes miniaturization of the device body.

claims

(Amended in accordance with Article 19 of the Treaty)

1. (After modification) A substrate inspection device, characterized in that it has:

The stage is used to place the object to be inspected;

a portal arm spanning the object to be inspected placed on the stage, and having a horizontal beam parallel to the surface of the object to be inspected;

The two inspection heads sandwich the horizontal beam of the gantry arm and are arranged in a state facing away from each other.

2. (After modification) The substrate inspection apparatus according to claim 1, characterized in that,

Each of the inspection heads has a horizontally elongated inspection head body, an objective lens is installed under the front end of the inspection head body, and an illumination optical system is assembled on the inspection head body extending to the rear of the objective lens. , a focusing device, and other components, and the objective lenses of the inspection heads are arranged to face each other outwardly with the horizontal beam sandwiched between them.

3. (After modification) The substrate inspection apparatus according to claim 1, characterized in that,

The portal arm is movable in a direction perpendicular to the horizontal beam relative to the object table;

The two inspection heads are provided so as to be movable in a direction along the horizontal beam of the gantry, and are arranged at predetermined intervals in the same direction as the moving direction of the gantry.

4. The substrate inspection apparatus according to claim 1, wherein:

The distance between the inspection optical axes of the two inspection heads is less than or equal to 1/2 of the size of the object to be inspected in the direction in which the inspection heads are arranged.

5. The substrate inspection device according to claim 1, comprising:

Two camera devices, respectively installed on the two inspection heads;

a selection unit for selecting at least one of the two cameras;

The display unit receives an image signal output from the imaging device selected by the selection unit, and displays an image of the subject.

6. The substrate inspection device according to claim 1, comprising:

a selection unit that selects one of the observation images from the two inspection heads;

an imaging device for photographing the observation image selected by the selection unit;

The display unit receives an image signal output from the imaging device and displays an image of the subject.

7. The substrate inspection apparatus according to claim 1, wherein:

Parts of observation regions corresponding to the object under inspection when the two inspection heads are moved respectively overlap each other.

8. The substrate inspection apparatus according to claim 1, wherein:

The two inspection heads each consist of a TV camera.

9. (After modification) The substrate inspection apparatus according to claim 1, characterized in that,

The object stage is composed of a conveyor that conveys the object to be inspected with predetermined marks formed on at least four corners;

The two inspection heads are arranged to be movable along the horizontal beam of the portal arm in a direction perpendicular to the conveying direction of the object to be inspected, and in the same direction as the moving direction of the object to be inspected. Arranged at specified intervals in the direction of

Also have:

two camera units, respectively arranged on the two inspection heads, to photograph the mark on the object to be inspected;

The control unit controls the two inspection heads to move only a predetermined distance at the same time, uses the two imaging units to capture the respective marks at the set positions, and displays the observed images of the respective marks on the display unit.

10. (After modification) The substrate inspection apparatus according to claim 9, characterized in that,

A positioning mechanism is provided for positioning the object to be inspected at a predetermined inspection position on the conveyor.

11. The substrate inspection apparatus according to claim 9, wherein:

The two inspection heads are disposed on a support member movable along the horizontal beam of the portal arm facing away from each other, and are arranged to be movable so that the distance between the two inspection heads can be adjusted.

Claims (11)

1. A substrate inspection device, characterized in that it has: Fixed table, carrying the object to be inspected; a portal arm configured to straddle the object to be inspected placed on the fixed table; The two inspection heads sandwich the horizontal beam of the gantry arm and are arranged in a state facing away from each other. 2. The substrate inspection apparatus according to claim 1, wherein: Each of the inspection heads includes constituent elements from the inspection optical axis to the side of the horizontal beam. 3. The substrate inspection apparatus according to claim 1, wherein: The portal arm can move in one direction relative to the fixed platform; The two inspection heads are provided so as to be movable in a direction perpendicular to the moving direction of the portal arm, and are arranged at predetermined intervals in the same direction as the moving direction of the portal arm. 4. The substrate inspection apparatus according to claim 1, wherein: The distance between the inspection optical axes of the two inspection heads is less than or equal to 1/2 of the size of the object to be inspected in the direction in which the inspection heads are arranged. 5. The substrate inspection device according to claim 1, comprising: Two camera devices, respectively installed on the two inspection heads; a selection unit for selecting at least one of the two cameras; The display unit receives an image signal output from the imaging device selected by the selection unit, and displays an image of the subject. 6. The substrate inspection device according to claim 1, comprising: a selection unit for selecting one of the observation images from the two inspection heads; an imaging unit for capturing the observation image selected by the selection unit; The display unit receives an image signal output from the imaging unit and displays an image of the subject. 7. The substrate inspection apparatus according to claim 1, wherein: Parts of observation areas corresponding to the object to be inspected when the two inspection heads are moved respectively overlap each other. 8. The substrate inspection apparatus according to claim 1, wherein: The two inspection heads each consist of a TV camera. 9. The substrate inspection apparatus according to claim 1, wherein: The fixed table is composed of a roller conveyor that conveys the object to be inspected with predetermined marks formed on at least four corners; The two inspection heads are arranged to be movable along the horizontal beam of the gantry arm in a direction orthogonal to the moving direction of the inspected object, and in the same direction as the moving direction of the inspected object. Arranged at specified intervals in the direction of Also has: two camera units, respectively arranged on the two inspection heads, to photograph the mark on the object to be inspected; The control unit controls the two inspection heads to move only a predetermined distance at the same time, uses the two imaging units to capture the respective marks at the set positions, and displays the observed images of the respective marks on the display unit. 10. The substrate inspection apparatus according to claim 9, wherein: A positioning unit is provided for positioning the object to be inspected at a predetermined inspection position on the fixed table. 11. The substrate inspection apparatus according to claim 9, wherein: The two inspection heads are disposed on a support member movable along the horizontal beam of the portal arm facing away from each other, and are arranged to be movable so that the distance between the two inspection heads can be adjusted.

Images