TWM665260U - Laser defect detection system - Google Patents

Abstract

The present invention provides a laser defect detection system, including a control device, a base, a plurality of laser detection devices and a plurality of light sensing devices. The base supports the object to be tested. Each laser detection device includes a laser light source and a laser pump. The laser detection device is located on one side of the object to be tested and emits a first laser beam toward the detection part of the object to be tested. Each light sensing device includes a light sensing module and an imaging module. Each light sensing device is used to receive the reflected light of the corresponding first laser beam reflected by the detection part of the object to be tested, or to receive the penetrating light of the first laser beam passing through the detection part of the object to be tested. In each light sensing device, the light sensing module transmits a light signal to the imaging module, and the imaging module forms an optical image according to the light signal.

Description

Laser Defect Inspection System

The invention relates to a defect detection system, and in particular to a laser detection semiconductor defect detection system.

Technology is advancing with each passing day, and semiconductor manufacturing processes are becoming more and more sophisticated. The yield of chips and packaging structures used in electronic devices has a huge impact on the performance of electronic devices. Therefore, defect detection of chips or packaging structures is very important. Given the small size and large quantity of today's chips or packaging structures, it is difficult to detect whether they have defects.

Therefore, how to improve the detection effect and efficiency of the objects to be tested (such as chips, wafers or dies) through the improvement of detection technology and further improve the yield of the process has become one of the important issues that the industry wants to solve.

The present invention provides a laser defect detection system, including a control device, a base, a plurality of laser detection devices and a plurality of photosensitive devices. The base supports the object to be tested. The plurality of laser detection devices are electrically connected to the control device, each of which includes a laser light source and a laser pump. The laser detection device is located on one side of the object to be tested and emits a first laser beam toward a detection portion of the object to be tested. The plurality of photosensitive devices are electrically connected to the control device, each of which includes a photosensitive module and an imaging module. Each photosensitive device is used to receive reflected light of the corresponding first laser beam reflected by the detection portion of the object to be tested, or to receive penetrating light of the first laser beam passing through the detection portion of the object to be tested. In each photosensitive sensing device, the photosensitive module transmits a light signal to the imaging module, and the imaging module forms an optical image according to the light signal.

According to a feasible implementation scheme, at least one of the multiple light sensing modules is a photoelastic sensor, and the optical image formed by the corresponding image module is a stress distribution characteristic image.

According to a feasible implementation scheme, at least one of the multiple light sensing modules is a light wavefront sensor, and the optical image formed by the corresponding image module is a waveform image.

According to a feasible implementation scheme, the laser defect detection system also includes a laser processing device, there are multiple objects to be tested, the laser processing device emits a second laser beam to the multiple objects to be tested to connect or weld the multiple objects to be tested, wherein the time point of emitting the second laser beam is the same as the time point of emitting the first laser beam.

According to a feasible implementation scheme, the laser defect detection system further includes a laser processing device, which emits a second laser beam to the object to be tested to cut the object to be tested, wherein the time point of emitting the second laser beam is the same as the time point of emitting the first laser beam.

According to a feasible implementation scheme, the laser defect detection system further includes a laser processing device, which emits a second laser beam to the object to be tested to perform surface modification on the object to be tested, wherein the time point of emitting the second laser beam is the same as the time point of emitting the first laser beam.

According to a feasible implementation scheme, the laser defect detection system further includes an image capture device and an electrical connection control device, wherein the image capture device is used to capture an image of the detection part of the object to be detected.

According to a feasible implementation scheme, the control device includes an analysis module, an image capture device captures multiple images of a shadow portion of the detection part that does not receive each first laser beam, the analysis module receives the multiple images, judges and calculates the defects and probabilities of the shadow portion based on the multiple images; or compensates for the multiple images, and judges and calculates the defects and probabilities of the shadow portion.

According to a feasible implementation scheme, the laser defect detection system further includes a plurality of laser moving devices and a plurality of transfer devices. The plurality of laser moving devices are electrically connected to the control device and are respectively connected to each laser detection device, and each laser moving device is used to move the corresponding laser detection device in three-dimensional space. The plurality of transfer devices are electrically connected to the control device and are respectively connected to a plurality of light sensing devices, and each transfer device is used to move the corresponding light sensing device in three-dimensional space.

According to a feasible implementation scheme, each moving device includes a steering module for changing the emission angle of the first laser beam emitted by the laser detection device.

One of the beneficial effects of the invention is that the laser defect detection system provided by the invention can be realized by "a plurality of laser detection devices electrically connected to the control device, each laser detection device including a laser light source and a laser pump, the laser detection device being located at one side of the object to be detected and emitting a first laser beam toward the detection part of the object to be detected" and "a plurality of light sensing devices electrically connected to the control device, each light sensing device including a light sensing module and an imaging module, each light sensing device being used to receive the corresponding first laser beam through the object to be detected The technical scheme of "receiving the reflected light reflected by the detection part of the object to be tested, or receiving the penetrating light of the first laser beam passing through the detection part of the object to be tested, in each photosensitizing device, the photosensing module transmits the light signal to the imaging module, and the imaging module forms an optical map according to the light signal" enables multiple photosensing modules to respectively receive the reflected light from the object to be tested or the penetrating light passing through the object to be tested, and finally form multiple optical maps to judge various defects of the object to be tested. In this way, the defects of the object to be tested can be accurately grasped to improve the accuracy of defect detection.

One of the beneficial effects of the invention is that, in the laser defect detection system provided by the invention, at least one of the multiple light sensing modules is a photoelastic sensor, and the optical image formed by the corresponding imaging module is a stress distribution characteristic image. In some embodiments, at least one is an optical wavefront sensor, and the optical image formed by the corresponding imaging module is a waveform image. In this way, the user can detect various parts of the object to be tested through sensing modules with different optical principles, and comprehensively detect the defects of the object to be tested, so as to improve the accuracy of defect detection.

One of the beneficial effects of the present invention is that the laser defect detection system provided by the present invention can achieve the following technical solutions: "the laser defect detection system further includes a laser processing device, there are multiple or at least one object to be detected, and the laser processing device emits a second laser beam to the object to be detected for processing, such as welding, cutting or surface modification" and "the time of emission of the second laser beam is the same as the time of emission of the first laser beam". In this way, the laser defect detection system can process the object to be detected while performing defect detection, and can take into account the efficiency of both the process and the detection.

One of the beneficial effects of the present invention is that the laser defect detection system provided by the present invention can monitor the detection status of the detection part of the object to be detected in real time during the detection process through the technical solution of "the image capture device is electrically connected to the control device, and the image capture device is used to capture the image of the detection part of the object to be detected".

Furthermore, according to an embodiment, the control device includes an analysis module, and the image capture device captures multiple images of a shadow portion of the detection portion that does not receive each first laser beam. The analysis module receives the multiple images and determines and calculates the defects and probabilities of the shadow portion based on the multiple images; or compensates the multiple images and determines and calculates the defects and probabilities of the shadow portion. In this way, the image of the detection portion of the object to be detected that does not receive the first laser beam can be compensated, and the defects or problems that may exist in the detection portion can be further determined, so that the user can grasp the defects or problems in the detection process.

One of the beneficial effects of the present invention is that the laser defect detection system provided by the present invention, through the technical solution of "the laser defect detection system also includes multiple laser moving devices and multiple transfer devices. The multiple laser moving devices are electrically connected to the control device and are respectively connected to each laser detection device, and each laser moving device is used to move the corresponding laser detection device in three-dimensional space. The multiple transfer devices are electrically connected to the control device and are respectively connected to the multiple light sensing devices, and each transfer device is used to move the corresponding light sensing device in three-dimensional space", corresponding to the object to be tested, the laser detection device can project a first laser beam to the object to be tested by moving, and the light sensing device can receive each reflected light or transmitted light by moving, so that the defect problem of the object to be tested can be fully grasped and the accuracy of detection can be improved.

Furthermore, according to one embodiment, the moving device includes a steering module for changing the emission angle of the first laser beam emitted by the laser detection device. In this way, the laser detection device can also move (rotate the laser head) or change the angle of projecting the first laser beam with respect to a specific part (specific position) of the object to be tested, so as to ensure that the system obtains information about defects in that part of the object to be tested, thereby improving the accuracy of defect detection.

In order to further understand the features and technical content of this work, please refer to the following detailed description and diagrams of this work. However, the diagrams provided are only used for reference and explanation and are not used to limit this work.

The following is an explanation of the implementation of the "laser defect detection system" disclosed in this creation through specific concrete embodiments. Technical personnel in this field can understand the advantages and effects of this creation from the content disclosed in this manual. This creation can be implemented or applied through other different specific embodiments, and the details in this manual can also be modified and changed based on different viewpoints and applications without departing from the concept of this creation. In addition, the drawings of this creation are only for simple schematic illustrations and are not depicted based on actual dimensions. Please note in advance. The following implementation will further explain the relevant technical content of this creation in detail, but the disclosed content is not intended to limit the scope of protection of this creation.

Please refer to FIG. 1, which is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention. The laser defect detection system Z1 includes a control device 2, a base 4, a plurality of laser detection devices 6, and a plurality of light sensing devices 8. The base 4 supports the object to be tested (not shown). The plurality of laser detection devices 6 are electrically connected to the control device 2, and each laser detection device 6 includes a laser light source 61 and a laser pump 62. The laser detection device 6 is located on one side of the object to be tested and emits a first laser beam toward the detection part of the object to be tested. A plurality of light sensing devices 8 are electrically connected to the control device 2. Each light sensing device 8 includes a light sensing module 81 and an imaging module 82. Each light sensing device 8 is used to receive reflected light of a corresponding first laser beam reflected from a detection portion of the object to be measured, or to receive penetrating light of the first laser beam passing through the detection portion of the object to be measured. In each light sensing device 8, the light sensing module 81 transmits a light signal to the imaging module 82, and the imaging module 82 forms an optical image according to the light signal.

The control device 2 is, for example, a computer host. According to some embodiments, the base 4 is a mobile base having a driving motor. According to some other embodiments, the base 4 includes a conveyor belt on which a plurality of objects to be tested are carried. According to some embodiments, the base 4 has a hollow portion corresponding to the objects to be tested, or is a support frame or base made of a light-transmitting material. Transparent materials are, for example, glass or sapphire.

In some embodiments, at least one of the multiple light sensing modules 81 is a photoelastic sensor, and the optical image formed by the corresponding imaging module 82 is a stress distribution characteristic image. In some embodiments, at least one of the multiple light sensing modules 81 is an optical wavefront sensor, and the optical image formed by the corresponding imaging module 82 is a waveform image. In other words, the user can set light sensing modules 81 with different optical detection principles according to the detection purpose to obtain more comprehensive detection information of the object to be detected.

According to some embodiments, the object to be tested is, for example, a wafer, a chip, or a die. According to some other embodiments, the object to be tested may be a package (finished product or semi-finished product). According to some other embodiments, the object to be tested 1 is located on a substrate (such as a circuit board), and the substrate is supported by a base 4. The detection part is, for example, a surface, a hole, a through-hole (via), or a welding structure (welding area), and the present invention is not limited thereto. Through an optical image (such as a stress distribution characteristic image or a waveform image), the user can view the stress distribution of the detection part to determine whether the object to be tested is a good product, for example, the "stress distribution" is divided into a good product area, a stress generating area, and an NG area. The NG area may have defects such as cracks, uneven surfaces, or detachment of welding structures. In this way, the problem to be solved can be found for the defective part according to the stress distribution.

Taking vias (TGV or TSV) as an example, common defects include burrs on the inner wall, unevenness, deviation of the via hole, wrong angle between the via hole and the substrate, the via hole not penetrating the substrate, incorrect size or shape, etc. The stress distribution can be used to distinguish which of the above defects it may be, and find a solution to the problem in the process.

Please refer to Figure 2, which is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention. In this embodiment, the laser defect detection system Z2 also includes a laser processing device 7 (having a laser light source 71 and a laser pump 72). The objects to be tested may be multiple or one. When there are multiple objects to be tested, the laser processing device 7 emits a second laser beam to the objects to be tested to connect or weld multiple objects to be tested. The time point of emission of the second laser beam is the same as the time point of emission of the first laser beam. In some embodiments, the laser processing device 7 emits a second laser beam to multiple or one objects to be tested to perform surface modification on the objects to be tested. In another embodiment, the laser processing device 7 emits a second laser beam to the object to be tested to cut the object to be tested. In other words, the laser detection device 6 and the laser processing device 7 of the present invention can operate synchronously, processing the object to be tested on the one hand, and detecting the object to be tested on the other hand, thereby improving the efficiency of the process and detection.

Please refer to FIG. 3, which is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention. In this embodiment, the laser defect detection system Z3 further includes an image capture device 9, which is electrically connected to the control device 2, and the image capture device 9 is used to capture an image of the detection part of the object to be detected. The image capture device 9 is, for example, a camera or a video recorder. By setting up the image capture device 9, the detection status of the detection part of the object to be detected can be monitored in real time during the detection process.

According to the embodiment shown in FIG3 , the control device 2 includes an analysis module 21, and the image capture device 9 captures a plurality of images of the shadow portion of the detection part that does not receive the first laser beam. The analysis module 21 receives the plurality of images, and judges and calculates the defects and probabilities of the shadow portion based on the plurality of images; or compensates the plurality of images, and judges and calculates the defects and probabilities of the shadow portion. The image capture device 9 captures the shadowed portion of the detection part of the object to be detected, especially the portion that cannot receive the first laser beam. The analysis module 21 can judge the possible defects of the shadow portion and the probability of the occurrence of the defect through deep learning. The analysis module 21 can further judge and calculate the defects and probabilities of the shadow portion through compensating images. In this way, the accuracy of defect detection can be improved.

Please refer to FIG. 4 , which is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention. In this embodiment, the laser defect detection system Z4 further includes a plurality of moving devices 102 and a plurality of transfer devices 104. The plurality of moving devices 102 are electrically connected to the control device 2 and are respectively connected to each laser detection device 6, and each moving device 102 is used to move the corresponding laser detection device 6 in three-dimensional space. The plurality of transfer devices 104 are electrically connected to the control device 2 and are respectively connected to a plurality of light sensing devices 8, and each transfer device 104 is used to move the corresponding light sensing device 8 in three-dimensional space. Through the moving device 102, the laser detection device 6 can be moved in three-dimensional space, so that the first laser beam can be emitted to a specific detection part in the object to be detected. On the other hand, since the transfer module can drive the light sensing device 8 to move in three-dimensional space, the light sensing device 8 can move to the position of the reflected light reflected by the first laser beam from the detection part of the object to be tested, or the position of the penetrating light passing through the detection part of the object to be tested, and accurately generate light signals after receiving these light beams, so that the optical image generated by the imaging module 82 can fully present the defects of the object to be tested, thereby improving the accuracy of defect detection.

According to the embodiment shown in FIG. 4 , each mobile device 102 includes a steering module 1021 for changing the angle of the first laser beam emitted by the laser detection device 6. Through the steering module 1021, the user can change the angle of the first laser beam projected by the laser detection device 6, for example, changing the direction of the laser head facing the object to be detected. In this way, the first laser beam can be projected to a specific part of the object to be detected.

It should be noted that the wavelength of the first laser beam emitted by the laser detection device 6 of the present invention can be adjusted according to the detection distance (the distance between the laser detection device 6 and the object to be detected) and the characteristics of the required detection part (such as the above-mentioned cracks, holes, perforations, bonds, uneven surfaces, etc.), and the present invention is not limited. The wavelength of the first laser beam emitted by the laser detection device 6 of the present invention can also be adjusted according to the different materials of the object to be detected.

[Beneficial Effects of Embodiments]

One of the beneficial effects of the invention is that the laser defect detection system provided by the invention can be realized by "a plurality of laser detection devices electrically connected to the control device, each laser detection device including a laser light source and a laser pump, the laser detection device being located at one side of the object to be detected and emitting a first laser beam toward the detection part of the object to be detected" and "a plurality of light sensing devices electrically connected to the control device, each light sensing device including a light sensing module and an imaging module, each light sensing device being used to receive the corresponding first laser beam through the object to be detected The technical scheme of "receiving the reflected light reflected by the detection part of the object to be tested, or receiving the penetrating light of the first laser beam passing through the detection part of the object to be tested, in each photosensitizing device, the photosensing module transmits the light signal to the imaging module, and the imaging module forms an optical map according to the light signal" enables multiple photosensing modules to respectively receive the reflected light from the object to be tested or the penetrating light passing through the object to be tested, and finally form multiple optical maps to judge various defects of the object to be tested. In this way, the defects of the object to be tested can be accurately grasped to improve the accuracy of defect detection.

One of the beneficial effects of the invention is that, in the laser defect detection system provided by the invention, at least one of the multiple light sensing modules is a photoelastic sensor, and the optical image formed by the corresponding imaging module is a stress distribution characteristic image. In some embodiments, at least one is an optical wavefront sensor, and the optical image formed by the corresponding imaging module is a waveform image. In this way, the user can detect various parts of the object to be tested through sensing modules with different optical principles, and comprehensively detect the defects of the object to be tested, so as to improve the accuracy of defect detection.

One of the beneficial effects of the present invention is that the laser defect detection system provided by the present invention can achieve the following technical solutions: "the laser defect detection system further includes a laser processing device, there are multiple or at least one object to be detected, and the laser processing device emits a second laser beam to the object to be detected for processing, such as welding, cutting or surface modification" and "the time of emission of the second laser beam is the same as the time of emission of the first laser beam". In this way, the laser defect detection system can process the object to be detected while performing defect detection, and can take into account the efficiency of both the process and the detection.

One of the beneficial effects of the present invention is that the laser defect detection system provided by the present invention can monitor the detection status of the detection part of the object to be detected in real time during the detection process through the technical solution of "the image capture device is electrically connected to the control device, and the image capture device is used to capture the image of the detection part of the object to be detected".

Furthermore, according to an embodiment, the control device includes an analysis module, and the image capture device captures multiple images of a shadow portion of the detection portion that does not receive each first laser beam. The analysis module receives the multiple images and determines and calculates the defects and probabilities of the shadow portion based on the multiple images; or compensates the multiple images and determines and calculates the defects and probabilities of the shadow portion. In this way, the image of the detection portion of the object to be detected that does not receive the first laser beam can be compensated, and the defects or problems that may exist in the detection portion can be further determined, so that the user can grasp the defects or problems in the detection process.

One of the beneficial effects of the present invention is that the laser defect detection system provided by the present invention, through the technical solution of "the laser defect detection system also includes multiple laser moving devices and multiple transfer devices. The multiple laser moving devices are electrically connected to the control device and are respectively connected to each laser detection device, and each laser moving device is used to move the corresponding laser detection device in three-dimensional space. The multiple transfer devices are electrically connected to the control device and are respectively connected to the multiple light sensing devices, and each transfer device is used to move the corresponding light sensing device in three-dimensional space", corresponding to the object to be tested, the laser detection device can project a first laser beam to the object to be tested by moving, and the light sensing device can receive each reflected light or transmitted light by moving, so that the defect problem of the object to be tested can be fully grasped and the accuracy of detection can be improved.

Furthermore, according to one embodiment, the moving device includes a steering module for changing the emission angle of the first laser beam emitted by the laser detection device. In this way, the laser detection device can also move (rotate the laser head) or change the angle of projecting the first laser beam with respect to a specific part (specific position) of the object to be tested, so as to ensure that the system obtains information about defects in that part of the object to be tested, thereby improving the accuracy of defect detection.

The above disclosed contents are only the preferred feasible embodiments of the present invention and do not limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the instructions and diagrams of the present invention are included in the scope of the patent application of the present invention.

Z1-Z4: Laser defect detection system 2: Control device 21: Analysis module 4: Base 6: Laser detection device 61: Laser light source 62: Laser pump 7: Laser processing device 71: Laser light source 72: Laser pump 8: Photosensitive device 81: Photosensitive module 82: Image module 9: Image capture device 102: Moving device 1021: Turning module 104: Transfer device

FIG1 is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention.

FIG. 2 is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention.

FIG3 is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention.

FIG4 is a schematic diagram of the laser defect detection system architecture of an embodiment of the present invention.

Z1: Laser defect detection system

2: Control device

4: Base

6: Laser detection device

61:Laser light source

62: Laser Pump

8: Light sensing device

81: Light sensing module

82: Image module

Claims (10)

A laser defect detection system, comprising: a control device; a base, supporting an object to be tested; a plurality of laser detection devices, electrically connected to the control device, each of the laser detection devices comprising a laser light source and a laser pump, the laser detection device being located at one side of the object to be tested, emitting a first laser beam toward a detection portion of the object to be tested; and A plurality of light sensing devices are electrically connected to the control device, each of which includes a light sensing module and an imaging module. Each of the light sensing devices is used to receive a reflected light of the corresponding first laser beam reflected by the detection part of the object to be detected, or to receive a penetrating light of the first laser beam passing through the detection part of the object to be detected. In each of the light sensing devices, the light sensing module transmits a light signal to the imaging module, and the imaging module forms an optical image according to the light signal. In the laser defect detection system as described in claim 1, at least one of the multiple light sensing modules is a photoelastic sensor, and the optical image formed by the corresponding imaging module is a stress distribution characteristic image. As described in claim 1, the laser defect detection system, wherein at least one of the multiple light sensing modules is an optical wavefront sensor, and the optical image formed by the corresponding imaging module is a waveform diagram. The laser defect detection system as described in claim 1 further includes a laser processing device, wherein there are multiple objects to be tested, and the laser processing device emits a second laser beam to the multiple objects to be tested to connect or weld the multiple objects to be tested, wherein the time point of emitting the second laser beam is the same as the time point of emitting the first laser beam. The laser defect detection system as described in claim 1 further includes a laser processing device, which emits a second laser beam to the object to be tested to cut the object to be tested, wherein the time point of emission of the second laser beam is the same as the time point of emission of the first laser beam. The laser defect detection system as described in claim 1 further includes a laser processing device, which emits a second laser beam to the object to be tested to perform surface modification on the object to be tested, wherein the time when the second laser beam is emitted is the same as the time when the first laser beam is emitted. The laser defect detection system as described in claim 1 further includes an image capture device electrically connected to the control device, wherein the image capture device is used to capture an image of the detection portion of the object to be detected. A laser defect detection system as described in claim 7, wherein the control device includes an analysis module, the image capture device captures multiple images of a shadow portion of the detection portion that does not receive each of the first laser beams, the analysis module receives the multiple images, and determines and calculates the defects and probabilities of the shadow portion based on the multiple images; or compensates the multiple images and determines and calculates the defects and probabilities of the shadow portion. The laser defect detection system as described in claim 1 further comprises: A plurality of laser moving devices electrically connected to the control device and respectively connected to each of the laser detection devices, each of the laser moving devices being used to move the corresponding laser detection device in a three-dimensional space; and A plurality of transfer devices electrically connected to the control device and respectively connected to the plurality of light sensing devices, each of the transfer devices being used to move the corresponding light sensing device in the three-dimensional space. A laser defect detection system as described in claim 9, wherein each of the moving devices includes a steering module for changing an emission angle of the first laser beam emitted by the laser detection device.

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