TWI868184B - Glass substrate conveying device, laminated glass manufacturing device and manufacturing method - Google Patents

Abstract

The glass substrate 1 conveying device 11 of the present invention comprises: a roll-out roller 21 configured to roll out the glass substrate 1 having flexibility; a take-up roller 41 configured to take up the glass substrate 1; and a first driving roller 22 disposed between the roll-out roller 21 and the take-up roller 41 in the conveying direction of the glass substrate 1 and configured to be provided with power for conveying the glass substrate 1. The first drive roller 22 is configured such that, when the glass substrate 1 and the first drive roller 22 are in contact, the non-contact surface 52 of the glass substrate 1 opposite to the contact surface 51 in contact with the surface of the first drive roller 22 does not contact other conveying members (clamping roller 44). The surface of the first drive roller 22 has a maximum height roughness Rz of 0.8 μm or less.

Description

Glass substrate conveying device, laminated glass manufacturing device and manufacturing method

The present invention relates to a glass substrate conveying device, a laminated glass manufacturing device and a manufacturing method, and more specifically, to a glass substrate conveying device, a laminated glass manufacturing device having the conveying device, and a laminated glass manufacturing method using the manufacturing device.

Conventionally, there is known an apparatus which forms various functional layers on a substrate while conveying the substrate in a roll-to-roll manner.

For example, a device is proposed that uses a clamping mechanism for the substrate to transport a resin substrate (for example, refer to the following patent document 1). The clamping mechanism of patent document 1 has a driving roller composed of a metal roller and a clamping roller (pressing roller) composed of a rubber roller. In the clamping mechanism of patent document 1, the substrate is clamped by the driving roller and the clamping roller, the driving roller rotates, and the clamping roller presses the substrate against the driving roller, thereby transporting the substrate without the driving roller idling. [Prior art document] [Patent document]

[Patent Document 1] Japanese Patent Publication No. 2014-49624

[The problem the invention is trying to solve]

In recent years, research has been conducted on using thin glass substrates as substrates with excellent heat resistance to replace resin substrates.

However, thin glass substrates are more fragile than resin substrates. Therefore, if the thin glass substrate contacts the driving roller and the clamping roller from both sides in the thickness direction, there is a possibility of damage. If the thin glass substrate is damaged, it is impossible to transport the thin glass substrate in a roll-to-roll manner.

Furthermore, in this specification, "damage" refers to the thin glass substrate being torn throughout its thickness direction, which is different from the "scratch" described below.

The present invention provides a glass substrate conveying device, a laminated glass manufacturing device and a manufacturing method that can suppress damage to the glass substrate and can reliably convey the glass substrate. [Technical means for solving the problem]

The present invention (1) comprises a glass substrate conveying device, which comprises: a roll-out roller configured to roll out a glass substrate having flexibility; a take-up roller configured to take up the glass substrate; and a drive roller, which is arranged between the roll-out roller and the take-up roller in the conveying direction of the glass substrate and is configured to be provided with a power for conveying the glass substrate; and the drive roller is configured such that, when the glass substrate and the drive roller are in contact, a non-contact surface of the glass substrate on the opposite side to a contact surface in contact with a surface of the drive roller does not contact other conveying members, and the surface of the drive roller has a maximum height roughness Rz of 0.8 μm or less.

In the glass substrate conveying device, when the driving roller is in contact with the glass substrate and the driving roller, the non-contact surface of the glass substrate opposite to the contact surface in contact with the surface of the driving roller does not contact other conveying members. Therefore, damage to the glass substrate in contact with the driving roller can be suppressed. Therefore, the glass substrate can be conveyed reliably between the unwinding roller and the winding roller.

Furthermore, the surface of the drive roller has a relatively small maximum height roughness Rz of less than 0.8 μm, so the surface of the drive roller can be in close contact with the glass substrate and can suppress sliding relative to the glass substrate (idle rotation of the drive roller). Therefore, the tension applied to the glass substrate can be controlled, and the rotation of the drive roller can be accurately converted into the conveyance of the glass substrate, thereby further accurately conveying the glass substrate.

The present invention (2) comprises a manufacturing device for laminated glass, which comprises: a conveying device as in (1); and a film forming device, which is arranged between the above-mentioned unwinding roller and the above-mentioned winding roller in the above-mentioned conveying direction and is configured to place a functional layer on the above-mentioned glass substrate under vacuum.

Since the conveying device for the laminated glass substrate is equipped with the above-mentioned conveying device and film forming device, damage to the glass substrate can be suppressed and the functional layer can be provided on the glass substrate. Therefore, the laminated glass can be manufactured reliably.

The present invention (3) includes a method for manufacturing laminated glass, which is a method for manufacturing laminated glass using the laminated glass manufacturing device as described in (2), and comprises the following steps: unwinding the glass substrate from the unwinding roller; transporting the glass substrate by the driving roller; placing the functional layer on the glass substrate under vacuum by the film forming device; and taking up the laminated glass having the glass substrate and the functional layer by the taking-up roller.

The manufacturing method of laminated glass can suppress the damage of the glass substrate by using the above-mentioned laminated glass conveying device, and the functional layer is arranged on the glass substrate, so that the laminated glass can be manufactured reliably. [Effect of the invention]

The glass substrate conveying device of the present invention can suppress damage to the glass substrate and can reliably convey the glass substrate.

According to the manufacturing device and manufacturing method of the laminated glass of the present invention, damage to the glass substrate can be suppressed and the functional layer can be arranged on the glass substrate.

1. Conveying film forming device Referring to FIG1, a conveying film forming device of one embodiment of the manufacturing device of the present invention is described.

The conveying film-forming device 10 shown in FIG1 conveys a glass substrate 1 while providing a transparent conductive layer (an example of a functional layer) 2 (see FIG2C ) on one surface 51 in the thickness direction thereof, thereby manufacturing a transparent conductive glass (an example of a laminated glass) 3. Specifically, the conveying film-forming device 10 peels off a first protective material 5 from a conveying substrate 4 (described below) in a roll form and conveys the glass substrate 1 alone, then provides a transparent conductive layer 2 on the glass substrate 1 to manufacture the transparent conductive glass 3, then laminates a second protective material 6 on the transparent conductive glass 3 and winds it into a roll form.

The conveying film-forming device 10 includes a conveying device 11, a sputtering device (an example of a film-forming device) 12, and a cooling device 13. Furthermore, the conveying device 11 includes a roll-out section 14, a destaticizing section 15, and a take-up section 16. Furthermore, the destaticizing section 15 includes a first destaticizing section 17 and a second destaticizing section 18. The conveying film-forming device 10 includes a roll-out section 14, a first destaticizing section 17, a sputtering device 12, a cooling device 13, a second destaticizing section 18, and a take-up section 16 in order from the upstream side in the conveying direction (hereinafter, abbreviated as the "upstream side") toward the downstream side in the conveying direction (hereinafter, abbreviated as the "downstream side"). The following describes them in detail.

The unwinding unit 14 is disposed at the most upstream side in the conveying device 11. The unwinding unit 14 unwinds the long conveying substrate 4. The unwinding unit 14 includes an unwinding roller 21, a first driving roller (an example of a driving roller) 22, a protective material taking-up roller 23, and an unwinding casing 24.

The roll-shaped conveying substrate 4 is placed on the unwinding roller 21. That is, the conveying substrate 4 is long in the conveying direction and is wound on the surface (circumference) of the unwinding roller 21. The unwinding roller 21 is a cylindrical member having a rotation axis that rotates in the conveying direction and extending in the width direction. Furthermore, in the present embodiment, the following various rollers (roll-out roller 21, 1st to 2nd driving rollers (22, 40), protective material take-up roller 23, 1st to 4th guide rollers (26, 28, 31, 38), protective material guide roller 43, 1st to 2nd cooling rollers (34, 35), take-up roller 41, protective material roll-out roller 42, clamping roller 44) are all cylindrical components, that is, they have a rotation axis that rotates along the conveying direction and extend in the width direction (a direction orthogonal to the conveying direction and the thickness direction).

The unwinding roller 21 is configured to be driven by an external power and rotate in the direction of the arrow shown in FIG. 1 .

The first drive roller 22 is disposed on the downstream side of the unwinding roller 21. The first drive roller 22 is configured to be externally provided with a power for conveying the glass substrate 1. Thus, the first drive roller 22 rotates in the direction of the arrow shown in FIG. 1 based on the external power. Specifically, a gear (not shown) is provided at the end of the rotation shaft of the first drive roller 22, and a motor (not shown) is connected to the gear for rotating the first drive roller 22 in the direction of the arrow. The first drive roller 22 rotates by the driving force of the motor.

Thereby, the first driving roller 22 transports the glass substrate 1 of the transport substrate 4 placed on the unwinding roller 21 to the first destaticizing section 17 .

Furthermore, the first driving roller 22 is different from the second driving roller 40 (described below) arranged adjacent to the clamping roller 44, and is configured such that when the first driving roller 22 is in contact with one surface (contact surface) 51 (see FIG. 2B ) in the thickness direction of the glass substrate 1, the other surface (non-contact surface) 52 (see FIG. 2B ) in the thickness direction of the glass substrate 1 is not in contact with other conveying components (clamping roller 44, etc.).

The material of the first driving roller 22 is not particularly limited, and examples thereof include metal, resin, ceramic, etc., and preferably metal.

The surface of the first driving roller 22 is flat, and specifically, has a maximum height roughness Rz of 0.8 μm or less.

In addition, the maximum height roughness Rz of the surface of the first driving roller 22 is measured based on JIS B 0601 (2009).

If the maximum height roughness Rz of the surface of the first drive roller 22 exceeds 0.8 μm, the surface of the first drive roller 22 cannot be suppressed from sliding relative to the glass substrate 1, that is, the first drive roller 22 idles relative to the glass substrate 1. Therefore, the tension applied to the glass substrate 1 cannot be controlled, and the rotation of the material of the first drive roller 22 cannot be reliably converted into the conveyance of the glass substrate 1, so that the glass substrate 1 cannot be conveyed.

The surface of the first driving roller 22 preferably has a maximum height roughness Rz of 0.5 μm or less, more preferably 0.3 μm or less. The surface of the first driving roller 22 preferably has a maximum height roughness Rz of 0.001 μm or more, for example.

If the maximum height roughness Rz of the surface of the first drive roller 22 is below the upper limit, the surface of the first drive roller 22 can be suppressed from sliding relative to the glass substrate 1, the tension applied to the glass substrate 1 can be controlled, and the first drive roller 22 can be suppressed from idling relative to the glass substrate 1. Therefore, the rotation of the material of the first drive roller 22 can be reliably converted into the conveyance of the glass substrate 1, so that the glass substrate 1 can be further reliably conveyed.

When the maximum height roughness Rz of the surface of the first driving roller 22 is equal to or greater than the above lower limit, the glass substrate 1 can be reliably conveyed.

In order to set the surface of the first driving roller 22 to the above-mentioned maximum height roughness Rz, for example, the surface of the driving roller 22 is flattened. The flattening process is not particularly limited, and examples thereof include electroplating, electroless plating, and polishing. Alternatively, the first driving roller 22 having the surface of the above-mentioned maximum height roughness Rz may be prepared in advance.

The protective material take-up roller 23 is disposed near the unwinding roller 21. The protective material take-up roller 23 peels (leaves) the first protective material 5 from the conveying substrate 4 and takes up the first protective material 5. The protective material take-up roller 23 is configured to be driven by an external power and rotate in the direction of the arrow shown in FIG. 1 .

The roll-out housing 24 accommodates the roll-out roller 21, the first drive roller 22 and the protective material take-up roller 23 therein. The roll-out housing 24 is configured so that the interior thereof is adjusted to a vacuum state. Specifically, a vacuum pump (not shown) is connected to the roll-out housing 24 to discharge the air inside thereof to the outside. Furthermore, in this specification, the so-called vacuum state refers to, for example, a state in which the air pressure is below 0.1 Pa, preferably below 1×10 ^-3 Pa.

The first destaticizing section 17 is disposed on the downstream side of the unwinding section 14 so as to be adjacent to the unwinding section 14. The first destaticizing section 17 removes static electricity from the glass substrate 1. The first destaticizing section 17 includes a first destaticizing motor 25, a first guide roller 26, and a first destaticizing housing 27.

The first anti-static machine 25 reduces the charge on the glass substrate 1. The first anti-static machine 25 is disposed downstream of the first drive roller 22 and upstream of the first guide roller 26. Examples of the first anti-static machine 25 include a scotoma discharge type anti-static machine and an ionizing radiation type anti-static machine.

The first guide roller 26 guides the glass substrate 1 conveyed from the first drive roller 22 through the first destaticizer 25 to the second guide roller 28 of the sputtering device 12. The first guide roller 26 is disposed downstream of the first destaticizer 25 and upstream of the second guide roller 28.

The material of the first guide roller 26 is not particularly limited, and examples thereof include metal, resin, ceramic, etc., and preferably metal.

The surface of the first guide roller 26 has a maximum height roughness Rz of, for example, 1.0 μm or more, preferably 2 μm or more, more preferably 5 μm or more, and further preferably 10 μm or more, and has a maximum height roughness Rz of, for example, preferably 100 μm or less, more preferably 50 μm or less, and further preferably 30 μm or less.

If the surface of the first guide roller 26 is greater than the above lower limit, the glass substrate 1 can be effectively prevented from adhering to the surface of the first guide roller 26. Therefore, it is not necessary to apply a large tension to the glass substrate 1 being transported, and the first guide roller 26 can reliably guide the glass substrate 1.

On the other hand, if the surface of the first guide roller 26 is equal to or smaller than the above upper limit, scratches on the surface (one surface and the other surface in the thickness direction) of the glass substrate 1 can be suppressed.

In order to set the maximum height roughness Rz of the surface of the first guide roller 26, for example, a first guide roller 26 having a flat surface is prepared, and then the surface of the first guide roller 26 is roughened (roughened). The roughening treatment is not particularly limited. Specific examples of the roughening treatment include, for example, thermal spraying (for example, the formation of a thermal spray film as described in Japanese Patent Laid-Open No. 2017-0665189, etc.), electroless plating (for example, the formation of a thermal spray film as described in Japanese Patent Laid-Open No. 2016-103138, etc.), sandblasting, etching, etc. Alternatively, the first guide roller 26 having a surface having the above-mentioned maximum height roughness Rz in advance may be prepared.

The first anti-static housing 27 accommodates the first anti-static motor 25 and the first guide roller 26 therein. The first anti-static housing 27 is configured so that the interior thereof is adjusted to a vacuum state.

The sputtering device 12 is disposed on the downstream side of the first destaticizing section 17 so as to be adjacent to the first destaticizing section 17. The sputtering device 12 performs sputtering on the glass substrate 1 in the film forming area 33 to form a transparent conductive layer 2 (see FIG. 2C).

The sputtering device 12 includes a second guide roller 28 , a sputtering target 29 , a heater 30 , a third guide roller 31 , and a sputtering housing 32 .

The second guide roller 28 guides the glass substrate 1 conveyed by the first guide roller 26 to the film forming area 33. The second guide roller 28 is disposed on the downstream side of the first guide roller 26 and on the upstream side of the sputtering target 29. The configuration of the second guide roller 28 is the same as that of the first guide roller 26.

The sputtering target 29 is a raw material of the transparent conductive layer 2. The sputtering target 29 is disposed opposite to the glass substrate 1 at a distance from the downstream side of the second guide roller 28 and the upstream side of the third guide roller 31. The sputtering target 29 faces one surface 51 of the glass substrate 1 in the thickness direction.

As the material of the sputtering target 29, for example, there can be listed metal oxides containing at least one metal selected from the group consisting of In, Sn, Zn, Ga, Sb, Nb, Ti, Si, Zr, Mg, Al, Au, Ag, Cu, Pd, and W. Specifically, there can be listed indium-containing oxides such as indium-tin composite oxide (ITO), antimony-containing oxides such as antimony-tin composite oxide (ATO), etc., preferably, there can be listed indium-containing oxides, and more preferably, there can be listed ITO.

The heater 30 heats the glass substrate 1 and the transparent conductive glass 3 obtained therefrom. The heater 30 is disposed at a distance from the glass substrate 1 on the downstream side of the second guide roller 28 and the upstream side of the third guide roller 31. The heater 30 is disposed opposite to the sputtering target 29 with respect to the glass substrate 1. The heater 30 faces the other side 52 of the glass substrate 1 in the thickness direction.

The film forming area 33 is divided in the middle of the conveying direction of the second guide roller 28 and the third guide roller 31. In the film forming area 33, a sputtering target 29 and a heater 30 are arranged.

The third guide roller 31 guides the glass substrate 1 (specifically, the transparent conductive glass 3 having the glass substrate 1 and the transparent conductive layer 2 in the thickness direction) (see FIG. 2C ) after film formation to the first cooling roller 34 of the cooling device 13. The third guide roller 31 is arranged on the downstream side of the sputtering target 29 and the upstream side of the first cooling roller 34 (described below). The structure of the third guide roller 31 is the same as that of the first guide roller 26.

The sputtering housing 32 accommodates the second guide roller 28, the sputtering target 29, the heater 30, and the third guide roller 31. The sputtering housing 32 constitutes a film forming chamber including a film forming area 33. The sputtering housing 32 is constructed in such a way that the inside thereof is adjusted to a vacuum state. Furthermore, although not shown, the sputtering device 12 is equipped with other elements (anode, cathode, Ar gas introduction device, etc.) for performing sputtering. As the sputtering device 12, specifically, for example, a diode type sputtering device, an electron cyclotron resonance type sputtering device, a magnetron type sputtering device, an ion beam type sputtering device, etc. can be listed.

The cooling device 13 is disposed downstream of the sputtering device 12 in such a manner as to be adjacent to the sputtering device 12. The cooling device 13 cools the transparent conductive glass 3 heated by the sputtering device 12. The cooling device 13 includes a first cooling roller 34, a second cooling roller 35, and a cooling housing 36.

The first cooling roller 34 is disposed on the upstream side in the cooling device 13. The second cooling roller 35 is disposed on the downstream side of the first cooling roller 34. The first cooling roller 34 and the second cooling roller 35 are respectively configured to rotate in the arrow direction shown in FIG. 1 by being driven by an external power or the like.

The surface temperature of the first cooling roller 34 and the second cooling roller 35 is, for example, 280° C. or less, preferably 150° C. or less, and is, for example, maintained at 40° C. or more, preferably 100° C. or more.

The cooling housing 36 accommodates the first cooling roller 34 and the second cooling roller 35 therein. The cooling housing 36 is configured so that the interior thereof is adjusted to a vacuum state.

The second destaticizing section 18 is disposed on the downstream side of the cooling device 13 so as to be adjacent to the cooling device 13. The second destaticizing section 18 removes static electricity from the transparent conductive glass 3. The second destaticizing section 18 includes a second destaticizing motor 37, a fourth guide roller 38, and a second destaticizing housing 39.

The second anti-static machine 37 reduces the charge on the glass substrate 1. The second anti-static machine 37 is disposed on the downstream side of the second cooling roller 35 and the upstream side of the fourth guide roller 38. The structure of the second anti-static machine 37 is the same as that of the first anti-static machine 25.

The fourth guide roller 38 guides the transparent conductive glass 3 conveyed from the second cooling roller 35 through the second destaticizing motor 37 to the second drive roller 40 of the take-up section 16. The fourth guide roller 38 is disposed downstream of the second destaticizing motor 37 and upstream of the second drive roller 40. The fourth guide roller 38 has the same structure as the first guide roller 26.

The second anti-static housing 39 accommodates the second anti-static motor 37 and the fourth guide roller 38 therein. The second anti-static housing 39 is configured so that the interior thereof is adjusted to a vacuum state.

The take-up unit 16 is disposed at the most downstream side in the conveying device 11, and is disposed downstream of the second anti-static motor 37 in a manner adjacent to the second anti-static motor 37. The take-up unit 16 takes up the transparent conductive glass 3 together with the second protective material 6 (see FIG. 2D). The take-up unit 16 includes a second driving roller 40, a take-up roller 41, a protective material take-out roller 42, a protective material guide roller 43, a clamping roller 44, and a take-up housing 45.

The second drive roller 40 is disposed downstream of the fourth guide roller 38 and upstream of the take-up roller 41. The second drive roller 40 is configured to be externally provided with a power for conveying the transparent conductive glass 3 including the glass substrate 1. Thus, the second drive roller 40 rotates in the direction of the arrow shown in FIG. 1 based on the external power. Thus, the second drive roller 40 conveys the transparent conductive glass 3 to the take-up roller 41.

However, the second driving roller 40 is configured such that the other surface 54 in the thickness direction of the second protective material 6 contacts the clamping roller 44 while the second driving roller 40 contacts the one surface 53 in the thickness direction of the transparent conductive glass 3. That is, the second driving roller 40 and the clamping roller 44 constitute a clamping mechanism.

The maximum height roughness Rz of the surface of the second driving roller 40 is not particularly limited. The maximum height roughness Rz of the surface of the second driving roller 40 is, for example, greater than the maximum height roughness Rz of the surface of the first driving roller 22, and specifically, exceeds 0.8 μm.

The take-up roller 41 takes up the laminate 7 (described below) of the transparent conductive glass 3 and the second protective material 6 conveyed between the second drive roller 40 and the clamping roller 44. The take-up roller 41 is configured to be driven by an external power and rotate in the direction of the arrow shown in FIG. 1 .

The protective material unwinding roller 42 is arranged near the take-up roller 41. A second protective material 6 in a roll is placed on the protective material unwinding roller 42. That is, the second protective material 6 which is long in the conveying direction is wound on the surface of the protective material unwinding roller 42. The protective material unwinding roller 42 is configured to be driven by an external power and rotate in the direction of the arrow shown in FIG. 1. The protective material unwinding roller 42 unwinds the second protective material 6 to the protective material guide roller 43.

The protective material guide roller 43 guides the second protective material 6 rolled out from the protective material roll-out roller 42 to the clamp roller 44. The protective material guide roller 43 is disposed midway between the protective material roll-out roller 42 and the clamp roller 44 in the conveying direction.

The clamping roller 44 and the second driving roller 40 together laminate the second protective material 6 on the transparent conductive glass 3. The clamping roller 44 is disposed opposite to the second driving roller 40. The clamping roller 44 is configured so that its surface can sandwich and laminate the transparent conductive glass 3 and the second protective material 6 with the surface of the second driving roller 40. The material of the clamping roller 44 can be, for example, an elastic body such as rubber.

The reel housing 45 accommodates the second driving roller 40, the reeling roller 41, the protective material reeling roller 42, the protective material guide roller 43 and the clamping roller 44. The reel housing 45 is configured so that the inside thereof is adjusted to a vacuum state.

2. Method for manufacturing transparent conductive glass With reference to FIG. 1 and FIG. 2A to FIG. 2D , a method for manufacturing transparent conductive glass 3 using a conveying film-forming device 10 is described. The manufacturing method of transparent conductive glass 3 comprises: a preparation step of preparing a transfer substrate 4; a stripping step of stripping a first protective material 5 from a glass substrate 1; a transfer step of transferring the glass substrate 1 by first to second drive rollers (22, 40); a guiding step of guiding the glass substrate 1 by first to fourth guide rollers (26, 28, 31, 38); a film forming step of placing a transparent conductive layer 2 on the glass substrate 1 under vacuum; a cooling step of cooling the transparent conductive glass 3; and a winding step of winding the transparent conductive glass 3 onto a winding roller 41. Each step is described in detail below.

First, the substrate 4 is prepared to be transported on the unwinding roller 21 (preparation step). Specifically, the substrate 4 is prepared to be transported and placed on the unwinding roller 21.

The transport substrate 4 is a glass substrate with a protective material. Specifically, it has a glass substrate 1 and a first protective material 5 in sequence on the other side in the thickness direction (see FIG. 2A ). The transport substrate 4 is long in the transport direction and is rolled into a roll. Such a roll-shaped transport substrate 4 can use a known or commercially available one.

The glass substrate 1 has a film shape (including a sheet shape) and is formed of transparent glass. Examples of the glass include alkali-free glass, sodium glass, borosilicate glass, and aluminosilicate glass.

The glass substrate 1 has flexibility.

On the other hand, the mechanical strength of the glass substrate 1 is generally low (fragile), and the distance L between both ends at the time of fracture in the bending test measured below is, for example, 15 mm or less, or 20 mm or less.

As shown in FIG4 , specifically, the glass substrate 1 is cut into a length of 120 mm, and both ends in the length direction are clamped in the clamping parts 82 of two jigs 81 arranged opposite to each other at a distance. Then, the two jigs 81 are slowly brought closer to each other, and the length L between the two clamping parts 82 when the glass substrate 1 is broken is obtained as the distance L between the two ends when breaking.

The other side 52 in the thickness direction of the glass substrate 1 is flat. Specifically, the other side 52 in the thickness direction of the glass substrate 1 has a maximum height roughness Rz of, for example, 1 μm or less, further, 0.1 μm or less, further, 0.01 μm or less, and further, has a maximum height roughness Rz of, for example, 0.0001 μm or more. Similar to the other side 52, the one side 51 in the thickness direction of the glass substrate 1 is flat and has the above-mentioned maximum height roughness Rz.

The thickness of the glass substrate 1 is, for example, 250 μm or less, preferably 200 μm or less, more preferably 150 μm or less, further preferably 100 μm or less, and, for example, 10 μm or more, preferably 40 μm or more.

As such a glass substrate 1, a commercially available product can be used, for example, G-leaf series (manufactured by Nippon Electric Glass Co., Ltd.) and the like can be used.

The first protective material 5 prevents damage to the glass substrates 1 due to contact between each other when the rolled glass substrate 1 is unrolled. The first protective material 5 has a film shape and is disposed on the other surface 52 of the glass substrate 1 in the thickness direction.

Examples of the first protective material 5 include a film with an adhesive, a spacer paper, and the like.

The film with adhesive has a polymer film and an adhesive layer in the thickness direction.

Examples of the polymer film include polyester films (polyethylene terephthalate films, polybutylene terephthalate films, polyethylene naphthalate films, etc.), polycarbonate films, olefin films (polyethylene films, polypropylene films, cycloolefin films, etc.), acrylic films, polyether sulfone films, polyarylate films, melamine films, polyamide films, polyimide films, cellulose films, and polystyrene films.

The adhesive layer is a pressure-sensitive adhesive layer, for example, an acrylic adhesive layer, a rubber adhesive layer, a silicone adhesive layer, a polyester adhesive layer, a polyurethane adhesive layer, a polyamide adhesive layer, an epoxy adhesive layer, a vinyl alkyl ether adhesive layer, a fluorine adhesive layer, etc.

Examples of the spacer paper include woodfree paper, Japanese paper, kraft paper, glassine paper, synthetic paper, and coated paper.

The thickness of the first protective material 5 is, for example, not less than 10 μm, preferably not less than 30 μm, and, for example, not more than 1000 μm, preferably not more than 500 μm.

Next, the film-forming conveyor 10 is operated. Specifically, all the housings (the unwinding housing 24, the first destaticizing housing 27, the sputtering housing 32, the cooling housing 36, the second destaticizing housing 39, and the reeling housing 45) are evacuated, and all the driving rollers (the unwinding roller 21, the first and second driving rollers (22, 40), the protective material reeling roller 23, the first and second cooling rollers (34, 35), the reeling roller 41, and the protective material unwinding roller 42) are driven and rotated. Furthermore, the destaticizing section 15 (the first destaticizing machine 25 and the second destaticizing machine 37), the cooling device 13, the sputtering device 12, etc. are also operated. Thus, the substrate 4 is transported to the downstream side (transportation step), and the stripping step, the film forming step, the cooling step, and the winding step are sequentially performed. Furthermore, the guiding step is performed by the rotation of all the guide rollers (the first guide roller 26, the second guide roller 28, the third guide roller 31, the fourth guide roller 38), the protective material winding roller 23, the protective material unwinding roller 42, the protective material guide roller 43, and the clamping roller 44.

Specifically, in the unwinding section 14, the conveying substrate 4 is unwound from the unwinding roller 21. At this time, the first protective material 5 is peeled off from the glass substrate 1 (peeling step). The first protective material 5 is rolled up onto the protective material rolling roller 23. On the other hand, the glass substrate 1 is conveyed to the first destaticizing section 17 (refer to FIG. 2B ) by the first driving roller 22 alone (conveying step). In a state where one surface 51 of the glass substrate 1 in the thickness direction is in contact with the first driving roller 22, the other surface 52 of the glass substrate 1 in the thickness direction (non-contact surface 52) is not in contact with other components. Even if the glass substrate 1 is charged due to contact with the first driving roller 22 , static electricity can be removed by operating the first antistatic machine 25 of the first antistatic unit 17 .

Next, the glass substrate 1 is guided to the sputtering device 12 by the first guide roller 26 (guiding step).

Next, in the sputtering device 12, the glass substrate 1 is guided to the film forming area 33 by the second guide roller 28 (guiding step). In the film forming area 33, the glass substrate 1 is sputtered. Specifically, as sputtering, there can be cited diode sputtering method, electron cyclotron resonance sputtering method, magnetron sputtering method, ion beam sputtering method, etc. The air pressure during sputtering (i.e., the air pressure of the film forming area 33) is vacuum, preferably less than 1.0 Pa, and more preferably less than 0.5 Pa.

Thus, in the film forming area 33, the transparent conductive layer 2 is formed on one surface 51 of the glass substrate 1 in the thickness direction, thereby manufacturing a transparent conductive glass 3 having the glass substrate 1 and the transparent conductive layer 2 in sequence on one side in the thickness direction (see FIG. 2C ) (film forming step).

Furthermore, the transparent conductive glass 3 is heated by the heater 30 simultaneously with the sputtering.

The surface temperature of the transparent conductive glass 3 heated by the heater 30 is, for example, 200° C. or higher, preferably 300° C. or higher, more preferably 400° C. or higher, and, for example, 800° C. or lower, preferably 600° C. or lower. Thus, when the material of the transparent conductive layer 2 is ITO, the transparent conductive layer 2 can be crystallized at a high temperature simultaneously with the formation of the transparent conductive layer 2, thereby improving the conductivity of the transparent conductive layer 2.

Thereafter, the transparent conductive glass 3 is guided to the cooling device 13 by the third guide roller 31 (guiding step).

In the cooling device 13, the transparent conductive glass 3 sequentially contacts the first cooling roller 34 and the second cooling roller 35 to be cooled (cooling step).

The surface temperature of each cooling roller (34, 35) is, for example, 280°C or less, preferably 150°C or less, and, for example, 40°C or more.

At this time, from the viewpoint of increasing the contact area between the transparent conductive glass 3 and the cooling rollers 34 and 35 (and thus improving the cooling efficiency), the transparent conductive glass 3 is conveyed so that the line segment connecting the rotation axis of the first cooling roller 34 and the rotation axis of the second cooling roller 35 intersects.

At this time, the other side 52 of the glass substrate 1 of the transparent conductive glass 3 in the thickness direction directly contacts the second cooling roller 35. On the other hand, the one side 53 of the transparent conductive layer 2 of the transparent conductive glass 3 in the thickness direction directly contacts the first cooling roller 34. Thereafter, the transparent conductive glass 3 is transferred from the cooling device 13 to the second destaticizing section 18.

At this time, even if the other surface 52 in the thickness direction of the transparent conductive glass 3 (the other surface 52 in the thickness direction of the glass substrate 1) is charged due to friction with the second cooling roller 35, the static electricity can be removed by the operation of the second antistatic motor 37 of the second antistatic unit 18. Furthermore, since the transparent conductive layer 2 is conductive, the one surface 53 in the thickness direction of the transparent conductive glass 3 (the one surface 53 in the thickness direction of the transparent conductive layer 2) is usually not charged even if it is rubbed with the first cooling roller 34.

Thereafter, the transparent conductive glass 3 is guided to the take-up section 16 by the fourth guide roller 38 (guiding step).

In the take-up section 16 , the second protective material 6 is unwound from the protective material unwinding roller 42 , guided by the protective material guide roller 43 , and conveyed to the clamping roller 44 .

On the other hand, the transparent conductive glass 3 and the second protective material 6 pass through between the second driving roller 40 and the clamping roller 44 , and the second protective material 6 is laminated to the other surface 52 of the transparent conductive glass 3 in the thickness direction.

When one surface 53 of the transparent conductive glass 3 of the laminate 7 in the thickness direction contacts the second driving roller 40, the other surface 54 (contact surface 54) of the second protective material 6 in the laminate 7 in the thickness direction contacts the clamping roller 44 (is pressed).

Thereafter, the transparent conductive glass 3 and the second protective material 6 are rolled up onto the roll 41 (rolling step). Specifically, a laminate 7 (see FIG. 2D ) having the transparent conductive glass 3 and the second protective material 6 disposed on the other surface 52 in the thickness direction (the surface 52 opposite to the transparent conductive layer 2) is rolled up. The laminate 7 has the second protective material 6, the glass substrate 1, and the transparent conductive layer 2 in order on one side in the thickness direction.

3. Uses of transparent conductive glass The transparent conductive glass 3 is used, for example, in optical devices such as image display devices. When the transparent conductive glass 3 is provided in an image display device (specifically, an image display device having an image display element such as an LCD (liquid crystal display) module or an organic EL module), the transparent conductive glass 3 is used, for example, as a substrate for a touch panel, an anti-reflection substrate, etc., preferably as a substrate for a touch panel. As the form of the touch panel, various methods such as an optical method, an ultrasonic method, an electrostatic capacitance method, and a resistive film method can be listed, and it is particularly suitable for use in an electrostatic capacitance method touch panel.

4. Effect of an embodiment In addition, in the conveying device 11, when the first drive roller 22 is in contact with the glass substrate 1 and the first drive roller 22, the non-contact surface 52 of the glass substrate 1 opposite to the contact surface 51 in contact with the surface of the first drive roller 22 does not contact other conveying components (clamping roller 44, etc.). That is, the first drive roller 22 does not constitute a clamping mechanism. Therefore, damage to the glass substrate 1 contacting the first drive roller 22 can be suppressed. Therefore, the glass substrate 1 can be reliably conveyed between the unwinding roller 21 and the winding roller 41.

Furthermore, the surface of the first driving roller 22 has a relatively small maximum height roughness Rz of 0.8 μm or less, so the surface of the first driving roller 22 can be in close contact with the glass substrate 1, and the sliding relative to the glass substrate 1 can be suppressed. Specifically, the idling of the first driving roller 22 can be suppressed. Therefore, the tension applied to the glass substrate 1 can be controlled, and the rotation of the first driving roller 22 can be reliably converted into the conveyance of the glass substrate 1, so that the glass substrate 1 can be further reliably conveyed.

Since the conveying film-forming apparatus 10 includes the conveying apparatus 11 and the sputtering apparatus 12, damage to the sputtering apparatus 12 can be suppressed and the transparent conductive layer 2 can be placed in the sputtering apparatus 12. Therefore, the transparent conductive glass 3 can be reliably manufactured.

Since the method for manufacturing the transparent conductive glass 3 uses the conveying film-forming apparatus 10 , damage to the glass substrate 1 can be suppressed, and the transparent conductive layer 2 can be provided on the glass substrate 1 , thereby reliably manufacturing the transparent conductive glass 3 .

4. Variations In the following variations, the same reference symbols are used for the same components and steps as those in the above-mentioned embodiment, and their detailed descriptions are omitted. In addition, unless otherwise specified, each variation can exert the same effects as the above-mentioned embodiment. Furthermore, an embodiment and its variations can be appropriately combined.

In one embodiment, the first driving roller 22 contacts one surface 51 of the glass substrate 1 in the thickness direction, but although not shown, it may contact another surface 52 of the glass substrate 1 in the thickness direction. In this case, the one surface 51 of the glass substrate 1 in the thickness direction does not contact other conveying members (clamping rollers 44, etc.).

Furthermore, the number of the first driving rollers 22 may be plural.

3, as an example of the conveying device of the present invention, the following conveying device 8 can also be illustrated: it does not have the sputtering device 12 and the first to fourth guide rollers (26, 28, 31, 38) (refer to FIG. 1) but has a take-off roller 21, a take-up roller 41, and a first drive roller 22 arranged therebetween.

In the embodiment shown in FIG. 1 and FIG. 2 , the transparent conductive layer 2 is exemplified as the functional layer, but the functional layer may be, for example, a hard coating layer, an optical adjustment layer, a metal layer (for example, a non-transparent conductive layer such as a copper layer), etc., although not shown. In addition, the functional layer may be one layer or two or more layers.

In the embodiment shown in FIG. 1 , a sputtering device 12 is illustrated as a film forming device, but although not illustrated, vacuum film forming devices such as a vacuum evaporation device and a chemical evaporation device may also be cited. [Embodiment]

The following are examples and comparative examples to illustrate the present invention in more detail. Furthermore, the present invention is not limited to any of the examples and comparative examples. In addition, the specific numerical values such as the blending ratio (ratio), physical property values, and parameters used in the following descriptions can be replaced by the upper limit (defined as a value "below" or "less than") or lower limit (defined as a value "above" or "exceeding") of the corresponding blending ratio (ratio), physical property values, and parameters recorded in the above-mentioned "Implementation Method".

Example 1 Prepare the film-forming transport device 10 described in one embodiment.

The maximum height roughness Rz of the first driving roller 22 was measured based on JIS B 0601 (2009) and the result was 0.2 μm.

Next, a conveying substrate 4 having a G-leaf (manufactured by Nippon Electric Glass Co., Ltd.) with a thickness of 50 μm, a maximum height roughness Rz of 0.001 μm on the other side 52 in the thickness direction, and a first protective material 5 arranged on the other side 52 in the thickness direction is placed on the unwinding roller 21 as a glass substrate 1 (preparation step).

Then, the peeling step, the film forming step, the cooling step, and the winding step are sequentially performed. Furthermore, the conveying step is performed by the first driving roller 22, and the guiding step is performed by the first to fourth guide rollers (26, 28, 31, 38).

In the film forming step, a transparent conductive layer 2 made of ITO and having a thickness of 130 nm is formed on one surface 51 of the glass substrate 1 in the thickness direction.

Example 2 The maximum height roughness Rz of the surface of the first driving roller 22 is changed according to Table 1. Otherwise, the treatment is performed in the same manner as in Example 1.

Comparative Examples 1 to 3 Examples 1 to 3 were compared to Table 1, except that the maximum height roughness Rz of the surface of the first driving roller 22 was changed. The glass substrate 1 was transported in the same manner as in Example 1.

However, the glass substrate 1 is not in close contact with the first driving roller 22, and the first driving roller 22 is idle, and the tension applied to the glass substrate 1 cannot be controlled, so the glass substrate 1 cannot be conveyed. As a result, the transparent conductive layer 2 cannot be formed, and further, the laminate 7 cannot be obtained, and further, the laminate 7 cannot be rolled up by the take-up roller 41.

Comparative Example 4 A clamping roller is arranged near the first driving roller 22, and the clamping mechanism is formed by the clamping roller. Except for this, the same method as in Example 1 is used. In the clamping mechanism, the first driving roller 22 and the clamping roller clamp the glass substrate 1 from both sides in the thickness direction.

However, the glass substrate 1 is damaged due to the above-mentioned clamping.

[Evaluation] <Conveying of glass substrate> The conveying of glass substrates in each of Example 1 to Comparative Example 3 was evaluated according to the following criteria. ○: The sliding of the first drive roller 22 relative to the glass substrate 1 was suppressed, and the glass substrate 1 could be conveyed while the tension applied thereto was controlled. ×: The first drive roller 22 slid relative to the glass substrate 1. The tension applied to the glass substrate 1 could not be controlled, and the glass substrate 1 could not be accurately conveyed.

<Damage of glass substrate> The damage of the glass substrate 1 of each of Example 1 to Comparative Example 4 was evaluated according to the following criteria. ○: The glass substrate 1 was not damaged. ×: The glass substrate 1 was damaged.

[Table 1] Table 1 Embodiments, Comparative Examples Embodiment 1 Embodiment 2 Comparison Example 1 Comparison Example 2 Comparison Example 3 Comparison Example 4 Whether there is a clamping roller without without without without without have Maximum height roughness of the first driving roller Rz (μm) 0.2 0.5 1 2.5 20 0.2 Transport of glass substrates ○ ○ × ^* × ^* × ^* - Damage to glass substrate ○ ○ ○ ○ ○ × * Sliding (idling of the first driving roller)

Furthermore, the above invention is provided as an exemplary embodiment of the present invention, but it is only an example and cannot be interpreted as limiting. Variations of the present invention that are clearly understood by a person skilled in the art are included in the scope of the following patent application.

1: Glass substrate 2: Transparent conductive layer 3: Transparent conductive glass 4: Conveying substrate 5: First protective material 6: Second protective material 7: Laminated body 8: Conveying device 10: Conveying film forming device 11: Conveying device 12: Sputtering device 13: Cooling device 14: Unwinding unit 15: Antistatic unit 1 6: Take-up section 17: 1st anti-static section 18: 2nd anti-static section 21: Take-up roller 22: 1st drive roller 23: Protective material take-up roller 24: Take-up shell 25: 1st anti-static machine 26: 1st guide roller 27: 1st anti-static shell 28: 2nd guide roller 29: Sputtering target 30: Heating machine 31: 3rd guide roller 32: Sputtering shell 33: Film forming area 34: 1st cooling roller 35: 2nd cooling roller 36: Cooling shell 37: 2nd anti-static motor 38: 4th guide roller 39: 2nd anti-static shell 40: 2nd driving roller 41: Take-up roller 42: Protective material take-out roller 43: Protective material Guide roller 44: Clamping roller 45: Rolling shell 51: One side in the thickness direction (glass substrate) (one example of contact surface) 52: The other side in the thickness direction (glass substrate) (one example of non-contact surface) 53: One side in the thickness direction of conductive glass 54: The other side in the thickness direction of the second protective material 81: Jig 82: Clamping part

FIG1 shows a conveying film-forming device of one embodiment of the manufacturing device of the present invention. FIG2A to FIG2D are cross-sectional views of the conveyed objects conveyed by the conveying film-forming device of FIG1 , FIG2A shows the first protective material and the glass substrate unrolled from the unrolling roller, FIG2B shows the glass substrate conveyed to the first driving roller, FIG2C shows the glass substrate and the transparent conductive layer conveyed to the cooling device, and FIG2D shows the second protective material, the transparent conductive layer and the glass substrate taken up by the taking-up roller. FIG3 shows a variation of the conveying device of the present invention. FIG4 shows two jigs used in the bending test of the glass substrate.

1: Glass substrate

3: Transparent conductive glass

4: Transporting substrate

5: 1st protective material

6: Second protective material

7: Laminated body

10: Transport film forming device

11: Transport device

12: Sputtering device

13: Cooling device

14: Rolling out section

15: Remove static electricity

16: Rolling section

17:1st anti-static part

18: Second static electricity removal section

21: Roll out roller

22: 1st drive roller

23: Protective material take-up roller

24: Roll out the outer shell

25: No. 1 anti-static machine

26: 1st guide roller

27: No. 1 Anti-static Housing

28: Second guide roller

29: Splash-plated target

30:Heating machine

31: The third guide roller

32: Splash-plated outer shell

33: Film forming area

34: 1st cooling roller

35: Second cooling roller

36: Cooling the shell

37: Second anti-static machine

38: 4th guide roller

39: Second anti-static housing

40: Second drive roller

41: Roller

42: Protective material roll-out roller

43: Protective material guide roller

44: Clamp Roller

45: Roll up the outer shell

Claims (3)

A glass substrate conveying device is characterized in that it comprises: a roll-out roller configured to roll out a glass substrate having flexibility; a protective material roll-out roller configured to roll out a protective material; a take-up roller configured to roll up a conveying substrate having the glass substrate and the protective material; a first driving roller and a second driving roller, which are arranged between the roll-out roller and the upper driving roller in the conveying direction of the glass substrate. The glass substrate is provided with a driving roller between the take-up rollers and the clamping roller, which is arranged adjacent to and opposite to the second driving roller; the first driving roller is arranged between the unwinding roller and the second driving roller in the conveying direction, and the second driving roller is arranged between the first driving roller and the take-up roller in the conveying direction. The protective material and the glass substrate are separately conveyed to the second driving roller. The glass substrate and the protective material conveyed to the second driving roller are passed between the second driving roller and the clamping roller. The conveyed substrate having the glass substrate and the protective material is taken up by the take-up roller. The first driving roller is configured to be between the glass substrate and the driving roller. In the state of the moving roller contact, the non-contact surface of the glass substrate opposite to the contact surface in contact with the surface of the driving roller does not contact other conveying components. The surface of the first driving roller has a maximum height roughness Rz of less than 0.8μm, and the maximum height roughness Rz of the surface of the second driving roller exceeds the maximum height roughness Rz of the surface of the first driving roller. A manufacturing device for laminated glass, characterized by comprising: a conveying device as in claim 1; and a film forming device, which is arranged between the unwinding roller and the taking-up roller in the conveying direction and is configured to place a functional layer on the glass substrate under vacuum. A method for manufacturing laminated glass, characterized in that: it is a method for manufacturing laminated glass using the laminated glass manufacturing device as in claim 2, and comprises the following steps: unrolling the glass substrate from the unrolling roller; transporting the glass substrate by the first driving roller; placing the functional layer on the glass substrate under vacuum by the film forming device; and taking up the laminated glass having the glass substrate and the functional layer by the taking-up roller.