TWI858033B - Glass substrate conveying device, laminated glass manufacturing device, and laminated glass manufacturing method - Google Patents

Abstract

The conveying device 11 for the glass substrate 1 includes: a take-out roller 21, which takes out the conveying substrate 4 including the glass substrate 1 and the first protective material 5; a protective material take-up roller 23, which takes up the first protective material 5 from the glass substrate 1; a take-up roller 41, which is arranged on the downstream side of the conveying direction of the take-out roller 21 and takes up the glass substrate 1; and a destaticizing section 15, which is arranged between the take-out roller 21 and the take-up roller 41.

Description

Glass substrate conveying device, laminated glass manufacturing device, and laminated glass manufacturing method

The present invention relates to a glass substrate conveying device, a laminated glass manufacturing device, and a laminated glass manufacturing method.

In recent years, as a flexible substrate for optical films in image display devices such as liquid crystal displays and organic EL (electroluminescence) displays, thin glass substrates are gradually being used from the perspective of heat resistance. Specifically, transparent conductive glass formed by forming a transparent conductive layer such as indium tin oxide (ITO) on a thin glass substrate is used as a touch panel film.

In order to mass produce such optical films, a roll-to-roll method is adopted. That is, a long and flexible thin glass substrate is transported by a drive roller or a guide roller, and a functional layer such as a transparent conductive layer is formed by sputtering, and finally, the laminated glass with the functional layer is rolled into a roll (see patent document 1). [Prior technical document] [Patent document]

[Patent Document 1] Japanese Patent Publication No. 2014-109073

[The problem the invention is trying to solve]

However, in Patent Document 1, the functional layer is heated at a high temperature of 400° C. or higher during film formation, so the thin glass substrate being conveyed is conveyed and film formed without being coated with a protective material, etc. That is, the thin glass substrate is conveyed and film formed alone.

Therefore, the thin glass substrate is in direct contact with the roller. Compared with the previous plastic substrate, the surface of the thin glass substrate is smoother, so it is easy to produce a phenomenon of close adhesion with the roller. As a result, when the thin glass substrate is separated from the roller, there is a concern that the thin glass substrate will be damaged.

The present invention provides a glass substrate conveying device that suppresses damage to the glass substrate, a laminated glass manufacturing device, and a laminated glass manufacturing method. [Technical means for solving the problem]

The present invention [1] includes a glass substrate conveying device, which is a conveying device for conveying a flexible glass substrate and comprises: a first roller, which rolls out a conveying substrate having the glass substrate and a protective material; a second roller, which takes up the protective material from the glass substrate; a third roller, which is arranged on the downstream side of the conveying direction of the first roller and takes up the glass substrate; and a destaticizing section, which is arranged between the first roller and the third roller.

According to the glass substrate conveying device, a destaticizing section is provided between the first roller and the third roller, so that the charge on the glass substrate can be removed. Therefore, when the glass substrate contacts the guide roller or other rollers, the glass substrate and the rollers can be prevented from being closely attached (adhered) to each other due to the charge. Therefore, when the glass substrate and the rollers are separated, the load on the glass substrate can be reduced, and the damage of the glass substrate can be prevented.

The present invention [2] includes the glass substrate conveying device as described in [1], which further includes a driving roller, and the above-mentioned antistatic part is arranged on the downstream side of the driving roller in the conveying direction.

According to the glass substrate conveying device, the driving roller is provided, so that the glass substrate can be conveyed reliably and continuously. In addition, the destaticizing section is arranged on the downstream side of the driving roller, so that the glass substrate charged by contact with the driving roller can be destaticized, and as a result, the damage of the glass substrate caused by the driving roller can be suppressed.

The present invention [3] includes a manufacturing device for laminated glass, which comprises: a conveying device as described in [1] or [2]; and a film forming device, which is arranged between the above-mentioned first roller and the above-mentioned third roller, and sets a functional layer on the above-mentioned glass substrate under vacuum.

According to the conveying device for laminated glass substrate, the conveying device and the film forming device are provided, so that the functional layer can be provided on the glass substrate while suppressing damage to the glass substrate. Therefore, laminated glass can be manufactured reliably.

The present invention [4] includes a manufacturing device for laminated glass as described in [3], wherein the above-mentioned destaticizing section has a first destaticizing section and a second destaticizing section, the above-mentioned first destaticizing section is arranged on the upstream side of the conveying direction of the above-mentioned film-forming device, and the above-mentioned second destaticizing section is arranged on the downstream side of the conveying direction of the above-mentioned film-forming device.

According to the conveying device for laminated glass, a destaticizing section (first destaticizing section or second destaticizing section) is provided on the upstream side and downstream side of the film forming device, so that the charging of the glass substrate before and after the film forming can be suppressed. Therefore, the damage of the glass substrate can be more reliably suppressed.

The present invention [5] includes a method for manufacturing laminated glass, which sequentially comprises: a preparation step, which is to prepare a transfer substrate having a flexible glass substrate and a protective material; a stripping step, which is to strip the protective material from the glass substrate; and a film forming step, which is to set a functional layer on the glass substrate under vacuum; and a destaticizing step for destaticizing the glass substrate before and/or after the film forming step.

According to the manufacturing method of the laminated glass, the glass substrate can be destaticized, thereby removing the charge on the glass substrate. Therefore, the adhesion of the glass substrate and the roller when they are in contact can be suppressed, and the load when they are separated can be reduced. Therefore, the damage of the glass substrate can be suppressed, and the functional layer can be provided on the glass substrate. As a result, the laminated glass can be reliably manufactured.

The present invention [6] includes a method for manufacturing a laminated glass as described in [5], wherein the above-mentioned destaticization step is performed at least before the above-mentioned film forming step.

According to the manufacturing method of the laminated glass, the glass substrate is destaticized before film formation, thereby suppressing damage to the glass substrate before film formation.

The present invention [7] includes a method for manufacturing a laminated glass as described in [5] or [6], wherein the above-mentioned destaticization step is performed before and after the above-mentioned film forming step.

According to the manufacturing method of the laminated glass, a destaticizing step is performed both before and after the film forming step, thereby suppressing the charging of the glass substrate before and after the film forming step. Therefore, the damage of the glass substrate can be more reliably suppressed. [Effect of the invention]

According to the glass substrate conveying device of the present invention, the glass substrate can be conveyed while suppressing the damage of the glass substrate. Also, according to the laminated glass manufacturing device and the manufacturing method using the same of the present invention, the laminated glass can be manufactured while suppressing the damage of the glass substrate.

1. Conveying film forming device With reference to FIG1 , a conveying film forming device 10 as one embodiment of the manufacturing device of the present invention will be described.

The conveying film-forming device 10 shown in FIG1 conveys a glass substrate 1 and provides a transparent conductive layer (an example of a functional layer) 2 on one side in the thickness direction thereof to manufacture a transparent conductive glass (an example of a laminated glass) 3. Specifically, the conveying film-forming device 10 peels off a first protective material 5 (an example of a protective material) from a roll-shaped conveying substrate 4 and conveys the glass substrate 1 alone, then provides a transparent conductive layer 2 on the glass substrate 1 to manufacture a transparent conductive glass 3, then laminates a second protective material 6 on the transparent conductive glass 3 and winds it into a roll.

The conveying film-forming device 10 includes a conveying device 11, a sputtering device (an example of a film-forming device) 12, and a cooling device 13. The conveying device 11 includes a roll-out section 14, a destaticizing section 15, and a take-up section 16. The destaticizing section 15 includes a first destaticizing section 17 and a second destaticizing section 18. Specifically, the conveying film-forming device 10 includes a roll-out section 14, a first destaticizing section 17, a sputtering device 12, a cooling device 13, a second destaticizing section 18, and a take-up section 16 in order from the upstream side in the conveying direction (hereinafter, abbreviated as the "upstream side") toward the downstream side in the conveying direction (hereinafter, abbreviated as the "downstream side"). These will be described in detail below.

The unwinding unit 14 is disposed at the most upstream side of the conveying device 11 and unwinds the long conveying substrate 4.

The unwinding section 14 includes an unwinding roller (an example of a first roller) 21 , a first driving roller (an example of a driving roller) 22 , a protective material taking-up roller (an example of a second roller) 23 , and an unwinding housing 24 .

The roll-shaped conveying substrate 4 is provided on the unwinding roller 21. That is, the conveying substrate 4 which is long in the conveying direction is wound around the circumference of the unwinding roller 21. The unwinding roller 21 is a cylindrical member having a rotation axis rotating in the conveying direction and extending in the width direction. Furthermore, in this specification, the following various rollers (rolling-out roller 21, 1st to 2nd driving rollers (22, 40), protective material taking-up roller 23, 1st to 5th guide rollers (26, 28, 31, 38, 43), 1st to 2nd cooling rollers (34, 35), taking-up roller 41, protective material rolling-out roller 42, clamping roller 44) are all cylindrical components having a rotating axis rotating in the conveying direction and extending in the width direction.

Furthermore, the unwinding roller 21 is driven by an external power and is configured to be rotatable in the direction of the arrow shown in Fig. 1. That is, the configurations of the unwinding roller 21 and the driving roller are described in detail in the first driving roller 22.

The first driving roller 22 applies a driving force to roll the glass substrate 1 of the substrate conveying unit 4 provided on the unwinding roller 21 toward the downstream side. That is, the glass substrate 1 is unwound from the unwinding roller 21 and conveyed to the first destaticizing section 17.

The first drive roller 22 is driven by an external power and is configured to rotate in the direction of the arrow shown in FIG. 1 . Specifically, a gear (not shown) is provided at the end of the rotation shaft of the first drive roller 22, and a motor (not shown) is connected to the gear to rotate the first drive roller 22 in the direction of the arrow. The first drive roller 22 rotates by the driving force of the motor.

The protective material take-up roller 23 peels off the first protective material 5 from the conveying substrate 4 and takes up the first protective material 5. The protective material take-up roller 23 is arranged near the unwinding roller 21. The protective material take-up roller 23 is a driving roller, which is driven by an external power and is configured to be rotatable in the direction of the arrow shown in FIG. 1 .

The unwinding housing 24 accommodates the unwinding roller 21, the first driving roller 22 and the protective material taking-up roller 23 therein.

The roll-out casing 24 is configured to be able to adjust its interior to a vacuum state. Specifically, a vacuum pump (not shown) is connected to the roll-out casing 24 to discharge the air inside to the outside. In this specification, the vacuum state refers to, for example, a state where the air pressure is below 0.1 Pa, preferably below 1×10 ^-3 Pa.

The first destaticizing section 17 is disposed on the downstream side of the unwinding section 14 so as to be adjacent to the unwinding section 14. The first destaticizing section 17 destaticizes the glass substrate 1.

The first anti-static unit 17 includes a first anti-static motor 25 , a first guide roller 26 , and a first anti-static housing 27 .

The first anti-static machine 25 reduces the charge on the glass substrate 1. The first anti-static machine 25 is disposed on the downstream side of the first driving roller 22 and the upstream side of the first guide roller 26.

Examples of the first anti-static machine 25 include a stun discharge type anti-static machine and an ionizing radiation type anti-static machine.

The corona discharge type antistatic machine ionizes air by corona discharge and brings the ionized air into contact with the glass substrate 1, thereby performing antistatic treatment. The corona discharge type antistatic machine may be, for example, a voltage application type or a self-discharge type.

The ionizing radiation type destaticizer performs destaticization by bringing ionizing radiation such as soft X-rays, α particles, and ultraviolet rays into contact with the glass substrate 1 .

The first guide roller 26 guides the glass substrate 1 conveyed from the first drive roller 22 through the first destaticizer 25 to the second guide roller 28 of the sputtering device 12. The first guide roller 26 is disposed downstream of the first destaticizer 25 and upstream of the second guide roller 28.

The first anti-static housing 27 accommodates the first anti-static motor 25 and the first guide roller 26 therein. The first anti-static housing 27 is configured so that the interior thereof can be adjusted to a vacuum state.

The sputtering device 12 is disposed on the downstream side of the first destaticizing section 17 so as to be adjacent to the first destaticizing section 17. The sputtering device 12 performs sputtering on the glass substrate 1 in the film forming area 33 (film forming chamber) to form the transparent conductive layer 2.

The sputtering device 12 includes a second guide roller 28 , a sputtering target 29 , a heater 30 , a third guide roller 31 , and a sputtering cover 32 .

The second guide roller 28 guides the glass substrate 1 conveyed by the first guide roller 26 to the film forming area 33. The second guide roller 28 is disposed on the downstream side of the first guide roller 26 and on the upstream side of the sputtering target 29.

The sputtering target 29 is a raw material of the transparent conductive layer 2. The sputtering target 29 is disposed opposite to the glass substrate 1 at a downstream side of the second guide roller 28 and at an upstream side of the third guide roller 31 with a space therebetween.

Examples of the material of the sputtering target 29 include metal oxides containing at least one metal selected from the group consisting of In, Sn, Zn, Ga, Sb, Nb, Ti, Si, Zr, Mg, Al, Au, Ag, Cu, Pd, and W.

Specifically, for example, an oxide containing indium such as indium-tin composite oxide (ITO), for example, an oxide containing antimony such as antimony-tin composite oxide (ATO), etc. can be cited. Preferably, an oxide containing indium can be cited, and more preferably, ITO can be cited.

The heater 30 heats the glass substrate 1 or the transparent conductive glass 3 obtained later. The heater 30 is disposed at a distance from the glass substrate 1 on the downstream side of the second guide roller 28 and the upstream side of the third guide roller 31. The heater 30 is disposed on the opposite side of the sputtering target 29 with respect to the glass substrate 1.

The film forming area 33 is divided into a portion between the second guide roller 28 and the third guide roller 31 in the conveying direction, and a sputtering target 29 and a heater 30 are arranged in the film forming area 33 .

The third guide roller 31 guides the film-formed glass substrate 1 (ie, the transparent conductive glass 3) to the first cooling roller 34 of the cooling device 13. The third guide roller 31 is disposed downstream of the sputtering target 29 and upstream of the first cooling roller 34 (described below).

The sputtering housing 32 accommodates the second guide roller 28, the sputtering target 29, the heater 30, and the third guide roller 31. The sputtering housing 32 is configured so that the inside thereof can be adjusted to a vacuum state.

Furthermore, the sputtering device 12 is not shown in the figure, but is equipped with other components for performing sputtering (anode, cathode, Ar gas introduction mechanism, etc.).

Specific examples of the sputtering apparatus 12 include a dipole sputtering apparatus, an electron cyclotron resonance sputtering apparatus, a magnetron sputtering apparatus, and an ion beam sputtering apparatus.

The cooling device 13 is disposed on the downstream side of the sputtering device 12 so as to be adjacent to the sputtering device 12. The cooling device 13 cools the transparent conductive glass 3 heated in the sputtering device 12.

The cooling device 13 includes a first cooling roller 34 , a second cooling roller 35 , and a cooling housing 36 .

The first cooling roller 34 is disposed on the upstream side in the cooling device 13, and the second cooling roller 35 is disposed on the downstream side of the first cooling roller 34. In addition, the first cooling roller 34 and the second cooling roller 35 are also driving rollers.

The surface temperature of the first cooling roller 34 and the second cooling roller 35 is configured to be maintained at, for example, 280° C. or less, preferably 150° C. or less, and, for example, 40° C. or more, preferably 100° C. or more.

The cooling housing 36 accommodates the first cooling roller 34 and the second cooling roller 35 therein. The cooling housing 36 is configured so that the interior thereof can be adjusted to a vacuum state.

The second destaticizing section 18 is disposed on the downstream side of the cooling device 13 so as to be adjacent to the cooling device 13. The second destaticizing section 18 destaticizes the transparent conductive glass 3.

The second anti-static unit 18 includes a second anti-static motor 37 , a fourth guide roller 38 , and a second anti-static cover 39 .

The second anti-static machine 37 reduces the charge on the glass substrate 1. The second anti-static machine 37 is disposed downstream of the second cooling roller 35 and upstream of the third guide roller 31. As specific examples of the second anti-static machine 37, the same ones as the first anti-static machine 25 can be cited.

The fourth guide roller 38 guides the transparent conductive glass 3 conveyed from the second cooling roller 35 through the second destaticizing motor 37 to the second drive roller 40 of the take-up section 16. The fourth guide roller 38 is disposed downstream of the second destaticizing motor 37 and upstream of the second drive roller 40.

The second anti-static housing 39 accommodates the second anti-static motor 37 and the fourth guide roller 38 therein. The second anti-static housing 39 is configured so that the interior thereof can be adjusted to a vacuum state.

The take-up unit 16 is disposed on the most downstream side in the conveying device 11, and is disposed on the downstream side of the second anti-static machine 37 so as to be adjacent to the second anti-static machine 37. The take-up unit 16 takes up the transparent conductive glass 3 together with the second protective material 6.

The winding section 16 includes a second driving roller 40 , a winding roller (an example of a third roller) 41 , a protective material unwinding roller 42 , a fifth guide roller 43 , a clamping roller 44 , and a winding case 45 .

The second driving roller 40 applies a driving force to roll the transparent conductive glass 3 conveyed from the second destaticizing section 18 toward the downstream side. That is, the second driving roller 40 guides the transparent conductive glass 3 to the take-up roller 41.

The take-up roller 41 takes up the laminate 7 of the transparent conductive glass 3 and the second protective material 6 conveyed between the fifth guide roller 43 and the clamping roller 44. The take-up roller 41 is also a driving roller.

The protective material unwinding roller 42 is provided with a rolled second protective material 6. That is, the second protective material 6 which is long in the conveying direction is wound around the peripheral surface of the protective material unwinding roller 42. The protective material unwinding roller 42 is a driving roller, and unwinds the second protective material 6 to the fifth guide roller 43.

The fifth guide roller 43 guides the second protective material 6 rolled out from the protective material roll-out roller 42 to the clamping roller 44. The fifth guide roller 43 is disposed midway between the protective material roll-out roller 42 and the clamping roller 44 in the conveying direction.

The clamping roller 44 and the second driving roller 40 together laminate the second protective material 6 on the transparent conductive glass 3. The clamping roller 44 and the second driving roller 40 are disposed facing each other with a small gap therebetween.

The reeling case 45 accommodates the second driving roller 40, the reeling roller 41, the protective material reeling roller 42, the fifth guide roller 43 and the clamping roller 44. The reeling case 45 is configured so that the inside thereof can be adjusted to a vacuum state.

2. Manufacturing method of transparent conductive glass Referring to FIG1 and FIG2, the method of manufacturing transparent conductive glass 3 using the conveying film forming device 10 is described. The manufacturing method of transparent conductive glass 3 sequentially comprises: a preparation step, which is to prepare the conveying substrate 4; a stripping step, which is to strip the first protective material 5 from the glass substrate 1; a first destaticization step, which is to destaticize the glass substrate 1; a film forming step, which is to set the transparent conductive layer 2 on the glass substrate 1 under vacuum; a cooling step, which is to cool the transparent conductive glass 3; a second destaticization step, which is to destaticize the transparent conductive glass 3; and a winding step, which is to wind the transparent conductive glass 3 onto the winding roller 41. Each step is described in detail below.

First, the unwinding roller 21 is prepared to be transported with the substrate 4 (preparation step). Specifically, the unwinding roller 21 is prepared to be transported with the substrate 4 and is placed on the unwinding roller 21.

The conveying substrate 4 has a glass substrate 1 and a first protective material 5 in the thickness direction (see FIG. 2A ). That is, the conveying substrate 4 is a glass substrate with a protective material. The conveying substrate 4 is long in the conveying direction and is rolled into a roll. Such a roll-shaped conveying substrate 4 can use a known or commercially available one.

The glass substrate 1 has a film shape (including a sheet shape) and is formed of transparent glass. Examples of the glass include alkali-free glass, sodium glass, borosilicate glass, and aluminosilicate glass.

The glass substrate 1 has flexibility, and has a thickness of, for example, 250 μm or less, preferably 100 μm or less, and, for example, 10 μm or more, preferably 40 μm or more.

The first protective material 5 prevents damage caused by contact between the glass substrates 1 when the rolled glass substrate 1 is unrolled. The first protective material 5 has a film shape and is disposed on one surface of the glass substrate 1 in the thickness direction.

Examples of the first protective material 5 include an adhesive film, a spacer paper, and the like.

The film with adhesive has a polymer film and an adhesive layer in the thickness direction.

Examples of the polymer film include polyester films (polyethylene terephthalate films, polybutylene terephthalate films, polyethylene naphthalate films, etc.), polycarbonate films, olefin films (polyethylene films, polypropylene films, cycloolefin films, etc.), acrylic films, polyether sulfone films, polyarylate films, melamine films, polyamide films, polyimide films, cellulose films, and polystyrene films.

The adhesive layer is a pressure-sensitive adhesive layer, for example, an acrylic adhesive layer, a rubber adhesive layer, a silicone adhesive layer, a polyester adhesive layer, a polyurethane adhesive layer, a polyamide adhesive layer, an epoxy adhesive layer, a vinyl alkyl ether adhesive layer, a fluorine adhesive layer, etc.

Examples of the spacer paper include wood-based paper, Japanese paper, kraft paper, glass paper, synthetic paper, and coated paper.

The thickness of the first protective material 5 is, for example, not less than 10 μm, preferably not less than 30 μm, and, for example, not more than 1000 μm, preferably not more than 500 μm.

Next, the film-forming conveyor 10 is operated. Specifically, all the housings (the unwinding housing 24, the first antistatic housing 27, the second antistatic housing 39, and the take-up housing 45) are adjusted to be vacuum, and all the driving rollers (the unwinding roller 21, the first and second driving rollers (22, 40), the protective material take-up roller 23, the first to fifth guide rollers (26, 28, 31, 38, 43), the first and second cooling rollers (34, 35), the take-up roller 41, the protective material unwinding roller 42, and the clamping roller 44)) are driven to rotate. Furthermore, the destaticizing section 15 (the first destaticizing machine 25 and the second destaticizing machine 37), the cooling device 13, the sputtering device 12, etc. are also operated. Thus, the substrate 4 is conveyed to the downstream side, and the stripping step, the first destaticizing step, the film forming step, the cooling step, the second destaticizing step, and the winding step are sequentially performed.

Specifically, in the unwinding section 14, the conveying substrate 4 is unwound from the unwinding roller 21. At this time, the first protective material 5 is peeled off from the glass substrate 1 of the conveying substrate 4. The first protective material 5 is taken up by the protective material taking-up roller 23, and the glass substrate 1 is conveyed toward the first driving roller 22 alone (see FIG. 2B).

Thereafter, the glass substrate 1 is directly contacted with the first driving roller 22 in the thickness direction and is transported from the unwinding section 14 to the first destaticizing section 17. At this time, the glass substrate 1 is charged in the thickness direction due to the driving force and friction of the first driving roller 22.

In the first destaticizing section 17, the glass substrate 1 is destaticized by the operation of the first destaticizing machine 25. That is, the amount of electricity carried by the glass substrate 1 is reduced. At this time, the first destaticizing section 17 performs destaticization from one side of the glass substrate 1 in the thickness direction, so as to destaticize the entire thickness direction of the glass substrate 1.

Thereafter, the destaticized glass substrate 1 is guided to the first guide roller 26 and transported to the sputtering device 12 .

In the sputtering device 12, the glass substrate 1 is guided by the second guide roller 28 and transported to the film forming area 33. In the film forming area 33, the glass substrate 1 is sputtered.

The sputtering process is performed by supplying gas and applying voltage from a power source to accelerate gas ions and irradiate the sputtering target 29 , sputtering target material from the surface of the sputtering target 29 , and depositing the target material on the surface of the glass substrate 1 .

Specifically, as the sputtering method, there can be mentioned a dipole sputtering method, an electron cyclotron resonance sputtering method, a magnetron sputtering method, an ion beam sputtering method, and the like.

As the gas used for sputtering (i.e., the gas to be introduced into the film forming area 33), for example, an inert gas such as argon (Ar) can be cited. Preferably, a reactive gas such as oxygen can be used in combination.

The air pressure during sputtering (i.e., the air pressure in the film forming area 33) is vacuum, preferably less than 1.0 Pa, and more preferably less than 0.5 Pa.

Thus, in the film forming area 33, the transparent conductive layer 2 is formed on one surface in the thickness direction of the glass substrate 1, thereby obtaining the transparent conductive glass 3 (see FIG. 2C).

Furthermore, the transparent conductive glass 3 is heated by the heater 30 simultaneously with the sputtering.

The heating temperature is, for example, 300° C. or higher, preferably 400° C. or higher, and, for example, 800° C. or lower, preferably 600° C. or lower. Thus, when the transparent conductive layer 2 is an ITO layer, the ITO layer can be crystallized at a high temperature while being formed, thereby improving conductivity.

Thereafter, the transparent conductive glass 3 is guided to the third guide roller 31 and transported to the cooling device 13 .

In the cooling device 13, the transparent conductive glass 3 sequentially contacts the first cooling roller 34 and the second cooling roller 35 to be cooled.

The surface temperature of each cooling roller (34, 35) is, for example, 280°C or less, preferably 150°C or less, and, for example, 40°C or more.

At this time, from the viewpoint of increasing the contact area between the transparent conductive glass 3 and the cooling rollers 34 and 35 (and thus improving the cooling efficiency), the transparent conductive glass 3 is conveyed between the first cooling roller 34 and the second cooling roller 35 so as to cross the opposing direction thereof. That is, the transparent conductive glass 3 is conveyed so that one radial end of the first cooling roller 34 is in contact with the other radial end of the second cooling roller 35.

At this time, the other side of the transparent conductive glass 3 in the thickness direction of the glass substrate 1 is in direct contact with the second cooling roller 35, and is transported from the cooling device 13 to the second destaticizing section 18. At this time, due to the driving force and friction of the second cooling roller 35, the other side of the transparent conductive glass 3 in the thickness direction (the surface on the glass substrate 1 side) is charged.

Thereafter, the cooled transparent conductive glass 3 is transported to the second destaticizing section 18.

In the second destaticizing section 18, the transparent conductive glass 3 is destaticized by the operation of the second destaticizing machine 37. That is, the amount of electricity carried by the glass substrate 1 of the transparent conductive glass 3 is reduced. At this time, the second destaticizing section 18 destaticizes from the other side in the thickness direction of the transparent conductive glass 3, so as to destaticize the other side in the thickness direction of the transparent conductive glass 3 (the surface on the glass substrate 1 side).

Thereafter, the destaticized transparent conductive glass 3 is guided to the fourth guide roller 38 and transported to the take-up section 16 .

In the take-up section 16 , the second protective material 6 is unwound from the protective material unwinding roller 42 , guided to the fifth guide roller 43 , and conveyed to the clamping roller 44 .

On the other hand, the transparent conductive glass 3 and the second protective material 6 pass through between the second driving roller 40 and the clamping roller 44, and the second protective material 6 is laminated on the transparent conductive glass 3 in the thickness direction.

Thereafter, the transparent conductive glass 3 and the second protective material 6 are taken up on the take-up roll 41. Specifically, the laminate 7 (see FIG. 2D ) having the transparent conductive glass 3 and the second protective material 6 disposed on the other side in the thickness direction (the surface opposite to the transparent conductive layer 2) is wound into a roll.

3. Application of transparent conductive glass The transparent conductive glass 3 is used, for example, in optical devices such as image display devices. When the image display device (specifically, an image display device having an LCD (Liquid Crystal Display) module, an organic EL module, or other image display element) has the transparent conductive glass 3, the transparent conductive glass 3 is used, for example, as a substrate for a touch panel, an anti-reflection substrate, etc., preferably as a substrate for a touch panel. As the form of the touch panel, various methods such as optical method, ultrasonic method, electrostatic capacitance method, and resistive film method can be listed, and it is particularly suitable for use in an electrostatic capacitance touch panel.

Furthermore, the transport device 11 in the transport film-forming device 10 includes a take-out roller 21 , a protective material take-up roller 23 , a take-up roller 41 , and a destaticizing section 15 .

Therefore, the charge on the surface of the glass substrate 1 can be removed. Therefore, when the glass substrate 1 contacts other rollers such as the first guide roller 26, the glass substrate 1 can be prevented from sticking to other rollers due to the charge. Therefore, when the glass substrate 1 is separated from other rollers, the load on the glass substrate 1 can be reduced, and the damage of the glass substrate 1 can be prevented.

Furthermore, the conveying device 11 further includes the first drive roller 22, so that the glass substrate 1 can be conveyed reliably and continuously. Furthermore, the first destaticizer 25 is disposed on the downstream side of the first drive roller 22, so that the glass substrate 1 charged due to contact with the first drive roller 22 can be destaticized, and as a result, damage to the glass substrate 1 caused by the first drive roller 22 can be suppressed.

In particular, if the first drive roller 22 is in direct contact with the smooth surface of the glass substrate 1, static electricity is easily generated on the surface of the glass substrate 1 due to friction caused by the rotation of the first drive roller 22. Therefore, by arranging the first antistatic unit 17 immediately after the first drive roller 22, the charge of the glass substrate 1 can be immediately and reliably reduced. On the other hand, in the transparent conductive glass 3, in terms of the contact between the transparent conductive layer 2 and the first cooling roller 34 (drive roller), the transparent conductive layer 2 is not as smooth as the glass surface and static electricity is not easily generated. Therefore, it is not particularly necessary to arrange the antistatic unit immediately after the first cooling roller 34 (drive roller) in contact with the transparent conductive layer 2. On the other hand, if the second destaticizing unit 18 is disposed immediately after the second cooling roller 35 (driving roller) in contact with the glass substrate 1, damage to the glass substrate 1 caused by charging can be effectively suppressed.

Furthermore, the transport film forming apparatus 10 includes a transport apparatus 11 and a sputtering apparatus 12 .

Therefore, the transparent conductive layer 2 can be provided on the glass substrate 1 while suppressing damage to the glass substrate 1. Therefore, the transparent conductive glass 3 can be reliably manufactured.

Furthermore, the destaticizing section 15 includes a first destaticizing section 17 and a second destaticizing section 18 . The first destaticizing section 17 is provided on the upstream side of the sputtering device 12 , and the second destaticizing section 18 is provided on the downstream side of the sputtering device 12 .

Therefore, the glass substrate 1 or the transparent conductive glass 3 can be prevented from being charged before and after the formation of the transparent conductive layer 2. Therefore, the glass substrate 1 or the transparent conductive glass 3 can be prevented from being damaged more reliably, and the transparent conductive glass 3 can be manufactured reliably.

The manufacturing method of the transparent conductive glass 3 sequentially comprises: a preparation step, which is to prepare a conveying substrate 4 having a glass substrate 1 and a first protective material 5; a peeling step, which is to peel off the first protective material 5 from the glass substrate 1; and a film forming step, which is to set a transparent conductive layer 2 on the glass substrate 1 under vacuum; and before and after the film forming step, a destaticizing step for destaticizing the glass substrate 1 is provided.

Therefore, the adhesion between the glass substrate 1 and the roller when in contact can be suppressed, and the load when they are separated can be reduced. Therefore, the transparent conductive layer 2 can be provided on the glass substrate 1 while suppressing the damage of the glass substrate 1. As a result, the transparent conductive glass 3 can be reliably manufactured.

In particular, the destaticizing step is performed before and after the film forming step. Therefore, the glass substrate 1 or the transparent conductive glass 3 can be prevented from being charged before and after the transparent conductive layer 2 is formed. Therefore, the damage of the glass substrate 1 or the transparent conductive glass 3 can be more reliably prevented, and the transparent conductive glass 3 can be reliably manufactured.

4. Variations The following describes variations of one embodiment shown in FIG. 1. These variations also have the same effects as the above-mentioned embodiment.

(1) In the embodiment shown in FIG. 1 , two destaticizing sections 15 are arranged before and after the sputtering device 12. That is, the destaticizing step is performed before and after the film forming step. For example, although not shown, the destaticizing section 15 may include only the first destaticizing section 17 or only the second destaticizing section 18. That is, the destaticizing step may be performed only as a step before the sputtering film forming step or only as a step after the sputtering film forming step.

A preferred embodiment is shown in Fig. 1. In this embodiment, the static electricity generated by the contact with the driving rollers arranged before and after the sputtering device 12 can be de-staticized at any time, thereby reliably suppressing the damage of the glass substrate 1 caused by the static electricity.

(2) In the embodiments shown in FIG. 1 and FIG. 2 , a transparent conductive glass 3 is exemplified as the laminated glass, that is, a transparent conductive layer 2 is exemplified as the functional layer. For example, although not shown, the functional layer may be a hard coating layer, an optical adjustment layer, a metal layer (for example, a non-transparent conductive layer such as a copper layer), etc. Furthermore, the functional layer may be a single layer or may be two or more layers.

(3) In the embodiment shown in FIG. 1 , a sputtering apparatus 12 is exemplified as the film forming apparatus. For example, although not shown, vacuum film forming apparatuses such as a vacuum evaporation apparatus and a chemical evaporation apparatus can be exemplified.

Furthermore, the above invention provides an exemplary embodiment of the present invention, but this is only an example and cannot be interpreted in a limiting sense. Variations of the present invention that are obvious to those skilled in the art are included in the scope of the following patent application. [Industrial Applicability]

The glass substrate conveying device and the laminated glass manufacturing device are used for manufacturing laminated glass.

1: Glass substrate 2: Transparent conductive layer 3: Transparent conductive glass 4: Conveying substrate 5: First protective material 6: Second protective material 7: Laminated body 10: Conveying film forming device 11: Conveying device 12: Sputtering device 13: Cooling device 14: Unwinding unit 15: Antistatic unit 16: Take-up unit 17: First antistatic unit 18: Second antistatic unit 21: Unwinding roller 22: First driving roller 23: Protective material take-up roller 24: Unwinding shell 25 :1st anti-static machine 26:1st guide roller 27:1st anti-static cover 28:2nd guide roller 29:Sputtering target 30:Heating machine 31:3rd guide roller 33:Film forming area 34:1st cooling roller 35:2nd cooling roller 36:Cooling cover 37:2nd anti-static machine 38:4th guide roller 39:2nd anti-static cover 40:2nd driving roller 41:Taking roller 42:Protective material unloading roller 43:5th guide roller 44:Clamping roller 45:Taking cover

FIG1 shows an embodiment of the conveying film-forming device of the present invention. FIG2A-D show cross-sectional views of the conveyed object conveyed by the conveying film-forming device of FIG1 , FIG2A shows the conveyed object (i.e., the conveyed substrate) at the stage of being wound around the unwinding roller, FIG2B shows the conveyed object (i.e., the glass substrate alone) at the stage of being transported from the unwinding roller to the first driving roller, FIG2C shows the conveyed object (i.e., the transparent conductive glass) at the stage of being transported from the film-forming area to the cooling device, and FIG2D shows the conveyed object (i.e., the laminate of the transparent conductive glass and the second protective material) at the stage of being wound around the fifth guide roller to the take-up roller.

1: Glass substrate

3: Transparent conductive glass

4: Transporting substrate

5: 1st protective material

6: Second protective material

7: Laminated body

10: Transport film forming device

11: Transport device

12: Sputtering device

13: Cooling device

14: Rolling out section

15: Remove static electricity

16: Rolling section

17:1st anti-static part

18: Second static electricity removal section

21: Roll out the roller

22: 1st drive roller

23: Protective material take-up roller

24: Roll out the shell

25: No. 1 anti-static machine

26: 1st guide roller

27: No. 1 anti-static cover

28: Second guide roller

29: Splash-plated target

30:Heating machine

31: The third guide roller

32: Splash-plated cover

33: Film forming area

34: 1st cooling roller

35: Second cooling roller

36: Cooling shell

37: Second anti-static machine

38: 4th guide roller

39: Second anti-static cover

40: Second drive roller

41: Roller

42: Protective material roll-out roller

43: 5th guide roller

44: Clamp Roller

45: Roll up cover

Claims (6)

A glass substrate conveying device is characterized in that: it is a conveying device for conveying a flexible glass substrate, and is equipped with: a first roller, which rolls out a conveying substrate having the glass substrate and a protective material; a second roller, which rolls up the protective material from the glass substrate; a third roller, which is arranged on the downstream side of the conveying direction of the first roller and rolls up the glass substrate; a destaticizing section, which is arranged between the first roller and the third roller; and a driving roller, which is arranged between the first roller and the destaticizing section in the conveying direction and conveys the glass substrate. A manufacturing device for laminated glass is characterized by further comprising: a conveying device as in claim 1; and a film forming device, which is arranged between the first roller and the third roller, and sets a functional layer on the glass substrate under vacuum. As in claim 2, the manufacturing device for laminated glass, wherein the above-mentioned destaticizing section comprises a first destaticizing section and a second destaticizing section, the above-mentioned first destaticizing section is arranged on the upstream side in the conveying direction of the above-mentioned film-forming device, and the above-mentioned second destaticizing section is arranged on the downstream side in the conveying direction of the above-mentioned film-forming device. A method for manufacturing laminated glass is characterized by sequentially comprising: a preparation step, which is to prepare a transfer substrate having a flexible glass substrate and a protective material; a stripping step, which is to strip the protective material from the glass substrate; and a film forming step, which is to set a functional layer on the glass substrate under vacuum; before and/or after the film forming step, a destaticizing step for destaticizing the glass substrate; and after the stripping step and before the destaticizing step, the glass substrate is transported by a driving roller. The manufacturing method of laminated glass as claimed in claim 4, wherein the above-mentioned destaticization step is implemented at least before the above-mentioned film forming step. A method for manufacturing laminated glass as claimed in claim 5, wherein the destaticizing step is performed before and after the film forming step.