TWI853065B - Expansion device - Google Patents

Abstract

[Topic] Even when expanding the expansion pieces of multiple workpiece units in succession, the slack of the expansion pieces of the expanded workpiece unit can be eliminated to prevent chip damage, and poor cooling of the workpiece unit to be expanded next can be suppressed. [Solution] A sheet expansion device 1 comprises: a frame holding unit 20, an annular frame holding a workpiece unit; a cooling table 30, including an abutment surface 31, and abutting against the expansion sheet of the workpiece unit held by the frame holding unit 20; an expansion unit 40, expanding the expansion sheet; a heating unit 50, having a hot air spraying portion 52, which sprays hot air to the expansion sheet between the outer peripheral side of the workpiece and the inner peripheral edge of the annular frame; and a bending plate 90, which is arranged between the workpiece and the hot air spraying portion 52 and has a spray outlet for spraying air toward the workpiece to prevent the hot air sprayed from the hot air spraying portion 52 from entering.

Description

Expansion device

The present invention relates to a film expansion device.

A known processing method is to irradiate a wafer having components formed on the front side with laser light to form a modified layer inside along a predetermined dividing line, and to expand an expansion sheet (dicing tape) attached to the wafer to thereby separate the wafer into individual chips using the modified layer as a fracture base.

The wafer is attached with a DAF (Die Attach Film) for fixing the separated components to a substrate, etc., and the DAF is separated into individual chips by expanding the expansion sheet. In this case, a method has been proposed in which, when separating the DAF, in order to improve the separation of the DAF, which is a ductile material, for example, the expansion sheet corresponding to the area of the DAF is brought into contact with a cooling plate to cool the DAF (for example, refer to Patent Document 1).

On the other hand, a method has been proposed in which, in order to prevent the expanded expansion sheet from being loosened and causing damage to adjacent chips, hot air is sprayed on the expansion sheet between the outer periphery of the workpiece and the inner periphery of the frame to heat and shrink the expansion sheet after expansion (for example, refer to Patent Document 2). [Known Technical Document] [Patent Document]

[Patent Document 1] Japanese Patent Publication No. 2006-049591 [Patent Document 2] Japanese Patent Publication No. 2011-077482

[Problems to be solved by the invention] However, when the method disclosed in Patent Document 2 shrinks the expansion sheet, if hot air is sprayed, the surrounding of the cooling plate will also be heated. Therefore, when the method disclosed in Patent Document 2, for example, continuously expands the expansion sheet of multiple workpiece units, after the expansion sheet of the first workpiece unit is expanded and heated and shrunk, there is a concern that the DAF cannot be sufficiently cooled when the expansion sheet of the next workpiece unit is expanded. When the method disclosed in Patent Document 2 cannot cool the DAF sufficiently, there is a concern that the DAF cannot be broken into individual chips.

The present invention is made in view of this problem, and its purpose is to provide an expansion device that can eliminate the looseness of the expansion sheets of the expanded workpiece unit to prevent chip damage even when the expansion sheets of multiple workpiece units are continuously expanded, and can suppress poor cooling of the workpiece unit to be expanded next.

[Technical means for solving the problem] In order to solve the above-mentioned problem and achieve the purpose, the expansion sheet device of the present invention is to expand the expansion sheet of a workpiece unit composed of a workpiece, an expansion sheet adhered to the workpiece, and an annular frame adhered to the outer peripheral side of the expansion sheet, and is characterized by having: a frame holding means for holding the annular frame of the workpiece unit; a cooling table including an abutment surface corresponding to the size of the workpiece and abutting against the annular frame held by the frame holding means; The expansion piece of the workpiece unit; expansion means, which expands the expansion piece adhered to the annular frame held by the frame holding means; heating means, which has a hot air spraying part, and the hot air spraying part faces the expansion piece between the outer peripheral side of the workpiece and the inner peripheral edge of the annular frame and sprays hot air; and hot air intrusion prevention means, which is arranged between the workpiece and the hot air spraying part and has a nozzle for spraying gas toward the workpiece, so as to prevent the hot air sprayed from the hot air spraying part from entering.

The expansion device may also be such that the hot air entry prevention means faces the workpiece and is formed to have a size corresponding to that of the abutment surface, and includes a curved surface that is curved so that the distance between the workpiece and the workpiece becomes greater from the peripheral side of the workpiece toward the central side, and the nozzle is formed on the curved surface, thereby forming air accumulation between the curved surface and the workpiece.

[Effect of the invention] The invention of this application can exert the following effects: even when the expansion pieces of multiple workpiece units are continuously expanded, the slack of the expansion pieces of the expanded workpiece units can be eliminated to prevent chip damage, and the poor cooling of the workpiece unit to be expanded next can be suppressed.

The method for implementing the present invention (implementation method) is described in detail with reference to the drawings. The present invention is not limited to the contents of the implementation method described below. In addition, the constituent elements described below include those that can be thought of by a person with ordinary knowledge in the field and are substantially the same. Furthermore, the constituent elements described below can be appropriately combined. In addition, various omissions, substitutions, or changes can be made without departing from the scope of the subject matter of the present invention.

[Implementation method 1] The sheet expansion device of implementation method 1 of the present invention is described based on the drawings. FIG. 1 is a perspective view showing an example of a workpiece unit that is a processing object of the sheet expansion device of implementation method 1. FIG. 2 is a cross-sectional view schematically showing an example of the structure of the sheet expansion device of implementation method 1. FIG. 3 is a cross-sectional view schematically showing a bending plate, etc. of the sheet expansion device shown in FIG. 2.

The expansion sheet device of the embodiment 1 is a device for dividing the workpiece 201 of the workpiece unit 200 shown in Figure 1 into individual chips 202. In the embodiment 1, the workpiece unit 200 of the processing object is as shown in Figure 1, and has: the workpiece 201; the expansion sheet 210, which is attached to the workpiece 201; and the annular frame 211, to which the outer peripheral side of the expansion sheet 210 is attached.

The workpiece 201 is a wafer such as a semiconductor wafer or an optical element wafer in a circular plate shape with a substrate 203 made of silicon, sapphire, gallium arsenide or silicon carbide (SiC). As shown in FIG. 1 , the workpiece 201 has elements 206 formed in each region divided by a plurality of predetermined dividing lines 205 intersecting each other on the front surface 204. The workpiece 201 has an expansion sheet 210 attached to the back surface 207 behind the front surface 204, and a ring frame 211 attached to the periphery of the expansion sheet 210. The laser beam having a wavelength penetrating the substrate 203 is irradiated from the back surface 207 along the predetermined dividing lines 205, and a modified layer 208 is formed inside the substrate 203 along the predetermined dividing lines 205 as a dividing starting point.

The workpiece 201 is divided into individual chips 202 along the predetermined dividing lines 205 with the modified layer 208 as the dividing starting point. The chip 202 includes a part of a substrate 203 and a device 206 formed on the front surface of the substrate 203.

In addition, the modified layer 208 refers to a region whose density, refractive index, mechanical strength and other physical properties are different from the surrounding areas, and examples thereof include a melt-treated region, a crack region, an insulation-damaged region, a refractive index-changed region and a region that is a mixture of the above regions.

The expansion piece 210 is formed into a disk shape having a diameter larger than the outer diameter of the workpiece 201, and is made of a stretchable resin and has a thermal shrinkage property that shrinks when heated.

In addition, in the first embodiment, the workpiece unit 200 has a circular plate-shaped DAF (Die Attach Film) 212 attached between the back side 207 of the substrate 203 of the workpiece 201 and the expansion sheet 210. The DAF 212 is an adhesive film for die bonding used to fix the chip 202 to other chips or substrates. In the first embodiment, the DAF 212 is formed into a circular plate shape having a diameter larger than the outer diameter of the workpiece 201 and smaller than the inner diameter of the ring frame 211. The DAF 212 is divided into each individual chip. In the divided chip 202, the DAF is attached to the back side 207 of the substrate 203 of the chip 202.

The expansion device 1 of the embodiment 1 is a device that expands the expansion sheet 210 of the workpiece unit 200, and simultaneously divides the workpiece 201 into individual chips 202, and divides the DAF 212 into each chip 202. As shown in FIG. 2 , the expansion device 1 includes: a chamber 10; a frame holding unit 20, which is a frame holding means; a cooling table 30; an expansion unit 40, which is an expansion means; a heating unit 50, which is a heating means; and a control unit 100, which is a control means.

The chamber 10 is formed in a box shape and accommodates the frame holding unit 20, the cooling stage 30, the expansion unit 40 and the heating unit 50 as a heating means. The chamber 10 is provided with an opening 12 in the side wall 11, and the workpiece unit 200 is taken in and out through the opening 12. In addition, the opening 12 is opened and closed by the opening door 13.

The frame holding unit 20 is a ring-shaped frame 211 that holds and fixes the workpiece unit 200. The frame holding unit 20 has a frame mounting plate 21 and a frame pressing plate 22. The frame mounting plate 21 is formed into a ring shape whose inner diameter is slightly smaller than the inner diameter of the ring-shaped frame 211 and larger than the outer diameter of the workpiece 201 and the DAF 212, and whose outer diameter is slightly larger than the outer diameter of the ring-shaped frame 211, and whose upper surface 23 is parallel to the horizontal direction and is flat. The frame mounting plate 21 is a ring-shaped frame 211 on which the workpiece unit 200 is mounted.

In addition, the frame mounting plate 21 is provided to be freely raised and lowered by the lifting cylinder 42 of the expansion unit 40. The frame mounting plate 21 is mounted on the front end of the rod 45 of the lifting cylinder 42, and is raised and lowered in the chamber 10 by the extension and contraction of the rod 45. In the first embodiment, the frame mounting plate 21 is raised by the lifting cylinder 42, and its upper surface 23 shown in FIG. 2 rises from a position substantially parallel to the lower edge of the opening 12 in the horizontal direction.

The frame pressing plate 22 is formed into a circular ring whose inner diameter is smaller than the inner diameter of the frame mounting plate 21 and larger than the outer diameter of the workpiece 201 and the DAF 212, and whose outer diameter is slightly larger than the outer diameter of the annular frame 211, and whose lower surface 24 is parallel to the horizontal direction and flat. The frame pressing plate 22 is arranged at a position coaxial with the frame mounting plate 21, and in the first embodiment, it is arranged above the frame mounting plate 21. In the first embodiment, the frame pressing plate 22 is arranged such that the lower surface 24 is arranged at a position roughly parallel to the opening 12 in the horizontal direction, and is arranged at a distance from the frame mounting plate 21 located below. In the first embodiment, the frame pressing plate 22 is supported by the sliding support member 25 in the chamber 10 so as to be freely raised and lowered. In the first embodiment, the lower surface 24 of the frame pressing plate 22 shown in FIG. 2 is supported by the sliding support member 25 so as to be able to rise from a position arranged substantially parallel to the opening 12 in the horizontal direction.

The frame holding unit 20 carries the annular frame 211 of the workpiece unit 200 inserted into the chamber 10 through the opening 12 on the upper surface 23 of the frame mounting plate 21 positioned below by the lifting cylinder 42. The frame holding unit 20 raises the frame mounting plate 21 with the annular frame 211 carried on the upper surface 23 by the lifting cylinder 42 to sandwich the outer peripheral side of the annular frame 211 and the expansion sheet 210 between the frame mounting plate 21 and the frame pressing plate 22, and while holding the annular frame 211, the frame mounting plate 21 and the frame pressing plate 22 rise from the position where they sandwich the outer peripheral side of the annular frame 211 and the expansion sheet 210. In addition, in Embodiment 1, the frame holding unit 20 is provided with a sealing member 26 which seals the expansion piece 210 all around the lower surface 24 of the frame pressing plate 22 .

In addition, in the first embodiment, a compressed air blow-out port 63 is provided on the inner peripheral side of the sealing member 26 of the lower surface 24 of the frame pressing plate 22 of the frame holding unit 20. The compressed air blow-out port 63 is supplied with compressed air from a compressed air supply source 62 via a supply path 60, a vortex tube 64 and a switch valve 61 provided inside the frame pressing plate 22. The compressed air blow-out port 63 is provided over the entire circumference of the frame pressing plate 22.

The cooling table 30 includes a contact surface 31 corresponding to the size of the workpiece 201 and is in contact with the expansion piece 210 of the workpiece unit 200 including the annular frame 211 held by the frame holding unit 20. The cooling table 30 includes: a thick circular plate-shaped table body 32; a cooling unit 33, the cooling table body 32; and a table lifting unit 34.

In the first embodiment, the table body 32 is made of aluminum alloy, has an outer diameter smaller than the inner diameter of the frame pressing plate 22, and is arranged at a position coaxial with the frame pressing plate 22 on the inner periphery of the frame pressing plate 22. The lower surface of the table body 32 is a contact surface 31 having an outer diameter corresponding to the outer diameter of the size of the workpiece 201. In the first embodiment, the outer diameter of the table body 32 is equal to the outer diameter of the DAF 212, so that the outer diameter of the contact surface 31 on the lower surface corresponds to the outer diameter of the size of the workpiece 201. The abutting surface 31 of the table body 32 faces the back surface 207 of the workpiece 201 via the expansion piece 210 and the DAF 212 of the workpiece unit 200 held by the annular frame 211 by the frame holding unit 20 .

In addition, a plurality of suction holes 35 are opened on the contact surface 31 of the worktable main body 32, and the suction holes 35 are connected to a suction source 72 such as an ejector through a suction path 70 and a switch valve 71 provided in the worktable main body 32. The worktable main body 32 is sucked by the suction source 72 through the suction holes 35 through the suction path 70 and the switch valve 71, and the back side 207 of the workpiece 201 can be sucked and held on the contact surface 31 through the expansion sheet 210 and the DAF 212.

In the first embodiment, the cooling unit 33 is provided at the center of the upper surface of the table body 32, and cools the table body 32 and the contact surface 31. In the first embodiment, the cooling unit 33 is a piston cooler that can cool the table body 32, but in the present invention, it is not limited to a piston cooler.

The table lifting unit 34 is composed of a motor (not shown), a ball screw rotated by the motor, etc., and moves the table body 32 and the cooling unit 33 up and down in the chamber 10.

In addition, in the first embodiment, the workbench body 32 and the cooling unit 33 of the cooling workbench 30 are covered by the workbench cover 36. The workbench cover 36 is a member for keeping the workbench body 32 cool. In the embodiment, it is coaxially arranged with the workbench body 32 and the cooling unit 33 and integrally comprises: a cylindrical large-diameter cylindrical portion 37 that is spaced apart from the outer peripheral surface of the workbench body 32 and covers the outer peripheral surface; an annular ring portion 38 whose outer edge is connected to the large-diameter cylindrical portion 37 and is spaced apart from the upper surface of the workbench body 32 and covers the upper surface; and a cylindrical small-diameter cylindrical portion 39 that is connected to the inner edge of the annular portion 38 and is spaced apart from the outer peripheral surface of the cooling unit 33 and covers the outer peripheral surface. The workbench cover 36 is raised and lowered integrally with the workbench body 32 and the cooling unit 33 by the lifting unit 34.

In addition, in the first embodiment, compressed air is supplied from a compressed air supply source 82 between the cooling table 30 and the table cover 36 via a supply path 80 and a switch valve 81.

The expansion unit 40 expands the expansion sheet 210 attached to the ring frame 211 held by the frame holding unit 20. The expansion unit 40 includes an expansion drum 41 fixed to the chamber 10 and a lifting cylinder 42 for lifting the frame mounting plate 21.

The expansion drum 41 has a cylindrical drum portion 43. The drum portion 43 is formed so that its inner diameter is larger than the outer diameter of the large diameter cylindrical portion 37 of the table cover 36 and its outer diameter is smaller than the inner diameter of the frame pressing plate 22. The drum portion 43 is arranged on the outer peripheral side of the large diameter cylindrical portion 37 of the table body 32 and on the inner peripheral side of the frame pressing plate 22, and is arranged coaxially with the frame holding unit 20 and the cooling table 30. A cylindrical rolling member 44 is mounted at the lower end of the expansion drum 41, and the rolling member 44 is arranged on the same plane as the lower surface 24 of the frame pressing plate 22 located below and is arranged to be rotatable around the axis.

The heating unit 50 heats and contracts the expansion sheet 210 between the outer periphery of the workpiece 201 of the workpiece unit 200 and the inner periphery of the annular frame 211. The workpiece unit 200 is held by the frame holding unit 20 and the expansion sheet 210 is expanded. The heating unit 50 includes a heating plate 51, a plurality of hot air spraying parts 52, and a baffle plate 53.

The heating plate 51 is formed into a disk shape with an outer diameter equal to the inner diameter of the frame pressing plate 22, and is arranged on the inner peripheral side of the frame mounting plate 21 and coaxially with the frame holding unit 20 and the cooling unit 33. The upper surface of the heating plate 51 is parallel to the horizontal direction and is arranged below the lower surface of the frame mounting plate 21 located below. The heating plate 51 is rotated around the axis by the heating plate rotating motor 54 installed in the chamber 10.

The plurality of hot air spraying parts 52 face the expansion piece 210 between the outer peripheral side of the workpiece 201 of the workpiece unit 200 held by the frame holding unit 20 and expanded by the expansion piece 210 and the inner peripheral edge of the ring frame 211, and spray hot air 300 (as shown in FIG. 7). The plurality of hot air spraying parts 52 are arranged at equal intervals in the circumferential direction on the outer edge of the upper surface of the heating plate 51, and face the expansion piece 210 between the outer peripheral side of the workpiece 201 of the workpiece unit 200 held by the frame holding unit 20 and expanded by the expansion piece 210 and the inner peripheral edge of the ring frame 211.

The hot air spraying part 52 includes: a bottomed cylindrical spraying part body 521 with an opening at the top; a coil heater 522, which is a heating part accommodated in the spraying part body 521; and an air supply source 525, which supplies air in the spraying part body 521 through a supply path 523 and a switch valve 524. The coil heater 522 is switched off and thus supplied with power from a DC power source to generate heat. The hot air spraying part 52 is switched on and off and the air supply source 525 supplies air to the spraying part body 521, and the supplied air is heated by the coil heater 522 and the hot air 300 is sprayed from the opening.

The baffle plate 53 is formed in a disk shape with an outer diameter slightly smaller than the inner diameter of the frame mounting plate 21, and is disposed on the inner circumference of the frame mounting plate 21 above the hot air spraying portion 52 and coaxially with the frame holding unit 20 and the cooling unit 30. The baffle plate 53 is rotated around the axis by a baffle rotating motor 55 mounted on the heating plate 51. In addition, the baffle plate 53 is provided with an opening 56 at the outer edge to expose the hot air spraying portion 52.

As described above, in the sheet expanding device 1 of the first embodiment, the cooling table 30 is disposed above the workpiece unit 200 held by the frame holding unit 20 , and the heating unit 50 is disposed below the workpiece unit 200 .

The control unit 100 controls the components of the expansion device 1 respectively so that the processing action on the workpiece 200 is implemented on the expansion device 1. In addition, the control unit 100 is a computer having the following devices: an operation processing device having a microprocessor such as a CPU (central processing unit); a memory device having a memory such as a ROM (read only memory) or a RAM (random access memory); and an input-output interface device. The operation processing device of the control unit 100 performs operation processing according to a computer program stored in the memory device, and outputs a control signal for controlling the expansion device 1 to the components of the expansion device 1 through the input-output interface device.

The control unit 100 is connected to a display unit (not shown) and an input unit (not shown). The display unit is composed of a liquid crystal display device that displays the state or image of the processing operation, etc. The input unit is used when the operator logs the processing content information, etc. The input unit is composed of at least one of an external input device such as a touch panel and a keyboard provided on the display unit.

In addition, the sheet expansion device 1 has a bent plate 90 as a means for preventing hot air from intruding. The bent plate 90 is disposed between the workpiece 201 of the workpiece unit 200 held in the frame holding unit 20 and the plurality of hot air ejection parts 52, and has an ejection port 91 shown in FIG. 3 that ejects gaseous air toward the workpiece 201, and is a member for suppressing the intrusion of hot air ejected from the hot air ejection part 52. The bent plate 90 is formed in a circular plate shape having an outer diameter substantially equal to the abutment surface 31 of the worktable body 32 of the cooling worktable 30, is coaxially disposed with the frame holding unit 20 and the cooling worktable 33, and is mounted on the upper surface of the baffle plate 53.

The bending plate 90 is mounted on the upper surface of the baffle plate 53 so as to face the workpiece 201 of the workpiece unit 200 held by the frame holding unit 20. The bending plate 90 has an outer diameter substantially equal to that of the abutting surface 31 of the worktable body 32 of the cooling worktable 30, thereby being formed to have a size corresponding to the abutting surface 31. In addition, the bending plate 90 has an outer diameter substantially equal to that of the abutting surface 31 of the worktable body 32 of the cooling worktable 30, thereby being arranged on the inner peripheral side of the baffle plate 53 than the hot air spraying portion 52 on the heating plate 51.

In the first embodiment, the thickness of the curved plate 90 is constant, and the curved plate 90 is formed to have a curve so that the distance from the workpiece 201 to the center of the workpiece unit 200 held by the frame holding unit 20 increases from the outer peripheral side to the center of the workpiece 201 held by the frame holding unit 20. Therefore, the upper surface of the curved plate 90 is a curved surface 92 having a curve so that the distance from the workpiece 201 to the center of the workpiece unit 200 held by the frame holding unit 20 increases. In this way, the curved plate 90 includes the curved surface 92.

In the first embodiment, the nozzle 91 is provided at the center of the curved plate 90 as shown in FIG3, and air is supplied from the air supply source 95 through the supply source 93 and the switch valve 94. The air supplied from the air supply source 95 and ejected from the nozzle 91 gathers between the curved surface 92 and the workpiece 201 because the curved surface 92 of the curved plate 90 is bent in the above manner, thereby suppressing the hot air 300 ejected from the hot air ejection portion 52 from intruding between the curved surface 92 and the workpiece 201.

Next, this specification will explain the processing action of the expansion device 1. FIG4 is a cross-sectional view schematically showing a state in which an annular frame of a workpiece unit is mounted on the frame mounting plate of the expansion device shown in FIG2. FIG5 is a cross-sectional view schematically showing a state in which the frame holding unit of the expansion device shown in FIG4 fixes the annular frame. FIG6 is a cross-sectional view schematically showing a state in which the frame mounting plate shown in FIG5 is raised and the expansion sheet is expanded. FIG7 is a cross-sectional view schematically showing a state in which the expansion sheet shown in FIG6 is heated and contracted.

The sheet expansion device 1 of the above structure starts processing after the control unit 100 registers the processing content information and receives the processing start instruction. During the processing, the sheet expansion device 1 allows the frame mounting plate 21 to descend and positions the abutment surface 31 of the workbench body 32 of the cooling workbench 30 at a position higher than the lower surface 24 of the frame pressing plate 22. The sheet expansion device 1 closes the switch valves 61, 71, 81, 94, 524, and cools the workbench body 32 with the cooling unit 33, and closes the switch to supply power from the DC power supply to the coil heater 522. When the coil heater 522 is heated, the opening 12 is opened by the switch door 13. The sheet expansion device 1 allows the workpiece to be inserted into the chamber 10 through the opening 12 . As shown in FIG. 4 , a ring-shaped frame 211 of the workpiece unit 200 inserted into the chamber 10 is placed on the upper surface 23 of the frame mounting plate 21 .

The sheet expansion device 1 closes the opening 12 by the switch door 13, opens the switch valves 61 and 81, blows out compressed air from the compressed air blowing port 63, and supplies compressed air from the compressed air supply source 82 between the workbench body 32, the cooling unit 33, and the workbench cover 36. The sheet expansion device 1 extends the rod 45 of the lifting cylinder 42 to raise the frame mounting plate 21, and at the same time, lowers the workbench body 32 of the cooling workbench 30 by the workbench lifting unit 34.

The expansion sheet device 1 is as shown in FIG. 5 , which clamps and holds the outer peripheral side of the annular frame 211 and the expansion sheet 210 between the frame pressing plate 22 and the frame mounting plate 21 located below, and positions the abutting surface 31 on the same plane as the lower surface of the sealing member 26 so as to be close to the DAF 212 adhered to the expansion sheet 210.

The expansion sheet device 1 further raises the frame mounting plate 21 and at the time when the expansion sheet 210 contacts the abutting surface 31, the workbench body 32 of the cooling workbench 30 is raised by the workbench lifting unit 34. In addition, when the expansion sheet 210 contacts the abutting surface 31, the DAF 212 is cooled by the cooling unit 33 through the expansion sheet 210 and the workbench body 32.

In the expansion sheet device 1, the frame pressing plate 22 is pressed and raised by the annular frame 211 and the frame mounting plate 21, and the lower surface 24 of the frame pressing plate 22 is raised to a position higher than the lower end of the rolling member 44, and the abutting surface 31 of the worktable body 32 of the cooling worktable 30 is positioned on the same plane as the lower end of the rolling member 44 by the worktable lifting unit 34. In this way, as shown in FIG6 , the expansion sheet 210 of the workpiece unit 200 held by the frame holding unit 20 abuts against the rolling member 44, and the expansion sheet 210 is expanded in the surface direction. As a result of the expansion, the extension force acts radially on the expansion sheet 210.

Thus, when the tensile force of the expansion sheet attached to the back surface 207 of the workpiece 201 acts radially, the workpiece 201 is divided into individual chips 202 along the predetermined dividing line 205 with the modified layer 208 as a reference point because the modified layer 208 is formed along the predetermined dividing line 205. In addition, when the workpiece 201 is divided into individual chips 202, the force in the expansion direction acting from the expansion sheet 210 is concentrated between the chips 202, and the workpiece 201 is divided into each individual chip 202. When the rod 45 of the lifting cylinder 42 is completely extended, the expansion device 1 opens the switch valve 71, and the workpiece 201 is sucked and held through the expansion sheet 210 at the contact surface 31 of the worktable body 32 of the cooling worktable 30, that is, it is divided into individual chips 202.

The sheet expansion device 1 shortens the rod 45 of the lifting cylinder 42 to lower the frame mounting plate 21 and the frame pressing plate 22 together, and at the same time, the worktable body 32 of the cooling worktable 30 and the like are lowered together with the frame mounting plate 21 by the worktable lifting unit 34. As shown in FIG. 7 , the sheet expansion device 1 closes the switch valve 61 to stop the compressed air blown out from the compressed air blowing port 63, and opens the switch valve 94 to supply air between the curved surface 92 of the curved plate 90 and the workpiece 201 attracted and held by the contact surface 31 of the worktable body 32 of the cooling worktable 30. Furthermore, the sheet expansion device 1 opens the switch valve 524, and while the hot air 300 is ejected from the hot air ejection portion 52, the heating plate 51 is rotated by the heating plate rotating motor 54.

Then, the expansion sheet device 1 moves the expansion sheet 210 away from the rolling member 44 while lowering the frame mounting plate 21, etc., so that the expansion sheet 210 is temporarily expanded and the slack portion generated between the outer peripheral side of the workpiece 201 and the inner peripheral edge of the annular frame 211 is blown with hot air 300 all around to heat and shrink the slack portion.

In addition, the sheet expansion device 1 supplies air from the air supply source 95 between the curved plate 90 and the workpiece 201 when the expansion sheet 210 between the outer peripheral side of the workpiece 201 and the inner peripheral edge of the annular frame 211 is heated and contracted. Therefore, the curved plate 90 includes the curved surface 92, and the nozzle 91 is formed on the curved surface 92, so that the air collection 301 where the air supplied from the air supply source 95 is collected is formed between the curved surface 92 and the workpiece 201. The sheet expansion device 1 suppresses the invasion of the hot air 300 into the air collection 301 by forming the air collection 301, that is, suppresses the hot air 300 from heating the workpiece 201 and cooling the contact surface 31 of the worktable body 32 of the worktable 30. In this way, the bending plate 90 prevents the hot air 300 ejected from the hot air ejecting portion 52 from intruding between the bending plate 90 and the workpiece 201 .

The expansion device 1 closes the switch valves 71, 81, 94, 524 after the rod 45 of the lifting cylinder 42 is shortened, and the opening 12 is opened by the switch door 13, so that the workpiece 201 is divided into individual chips 202 and the DAF 212 is divided into each individual chip 202. The workpiece unit 200 in which the workpiece 201 is divided into individual chips 202 and the DAF 212 is divided into each individual chip 202 is carried out of the chamber 10. After the expansion sheet 210 is expanded, the expansion sheet 210 is heated and contracted in a state of being attracted and held on the abutting surface 31 of the worktable body 32 of the cooling worktable 30, so that the divided chips 202 can be prevented from rubbing against each other. In addition, the wafer expansion device 1 repeats the steps shown in FIG. 4 to FIG. 7 to sequentially and continuously process a plurality of workpiece units 200 to separate the workpiece 201 into individual chips 202 and to separate the DAF into each individual chip 202 .

As described above, the sheet expansion device 1 of the first embodiment includes the bending plate 90 as a hot air intrusion prevention means, which prevents the hot air 300 ejected from the hot air ejection portion 52 from intruding between the bending plate 90 and the workpiece 201. Therefore, the sheet expansion device 1 can prevent the hot air 300 from entering the area where the worktable 30 cools the workpiece 201, that is, between the worktable body 32 and the bending plate 90, thereby preventing the air temperature in this area from rising; and can cool the DAF 212 attached to the back side 207 of the next workpiece 201, thereby preventing poor cooling of the workpiece 201 and the DAF 212 when the expansion sheet 210 is expanded. As a result, the expansion device 1 can achieve the following effects: even when the expansion sheets 210 of a plurality of workpiece units 200 are continuously expanded, the slack of the expansion sheets 210 of the expanded workpiece units 200 can be eliminated to prevent damage to the chip 202, and poor cooling of the workpiece unit 200 to be expanded next can be suppressed, thereby suppressing the occurrence of poor segmentation.

In addition, in the expansion device 1 of embodiment 1, the curved plate 90 includes a curved surface 92, and an air ejection outlet 91 is formed on the curved surface 92, and an air gathering 301 is formed between the curved surface 92 and the workpiece 201, thereby preventing hot air 300 from intruding between the curved surface 92 and the workpiece 201.

In addition, the expansion sheet device 1 of embodiment 1 opens the switch valve 81 when the expansion sheet 210 is heated and contracted, and the compressed air supplied from the compressed air supply source 82 is supplied between the workbench body 32 of the cooling workbench 30 and the cooling unit 33 and the workbench cover 36. Therefore, the compressed air supplied from the compressed air supply source 82 flows around the air gathering 301, thereby suppressing the hot air 300 from invading the air gathering 301.

[Variation] The following describes a variation of the first embodiment of the present invention according to the drawings. FIG8 is a cross-sectional view schematically showing a configuration example of the variation of the first embodiment. In FIG8 , the same reference numerals are used for the same parts as those of the first embodiment, and description thereof is omitted.

The expansion sheet device 1-1 of the modified example of the embodiment 1 is configured in the same manner as the expansion sheet device 1 of the embodiment 1, wherein a cooling table 30 without a table cover 36 and an expansion drum 41-1 are arranged below the workpiece unit 200 held by the frame holding unit 20, and a heating unit 50 is arranged above the workpiece unit 200, and the expansion drum 41-1 is mounted on the extension rod 47 of the drum cylinder 46 by fixing the frame pressing plate 22 and rises together with the cooling table 30 to a position above the upper surface 23 of the frame mounting plate 21, thereby expanding the expansion sheet 210. In addition, the chamber 10 is omitted in FIG. 8 .

Since the expansion device 1 of the modified example has the bending plate 90 equipped with a means for preventing hot air from entering, it is possible to prevent the hot air 300 from entering between the worktable body 32 and the bending plate 90 and causing the air temperature in this area to rise. Similar to the first embodiment, the following effects can be achieved: even when the expansion sheets 210 of a plurality of workpiece units 200 are continuously expanded, the slack of the expansion sheets 210 of the expanded workpiece units 200 can be eliminated to prevent damage to the chip 202, and poor cooling of the workpiece unit 200 to be expanded next can be suppressed, thereby suppressing the occurrence of poor segmentation.

In addition, the present invention is not limited to the above-mentioned embodiments. That is, various modifications can be made and implemented within the scope of the main purpose of the present invention. In addition, in Embodiment 1, although the frame pressing plate 22 of the frame holding unit 20 is set to be freely raised and lowered, in the present invention, the frame pressing plate 22 of the frame holding unit 20 can also be fixed to the chamber 10.

In the first embodiment, although the modified layer 208 as the starting point of division is formed on the workpiece 201 along the predetermined division line 205, the present invention is not limited to the modified layer 208. In the present invention, the workpiece 201 may be cut or laser etched before the expansion of the expansion device 1 to be divided into individual wafers 202 along the predetermined division line 205, or the workpiece 201 may be cut or laser etched to form a concave processing groove from the front surface 204 along the predetermined division line 205. In the first embodiment, although the workpiece unit 200 includes the workpiece 201 and the DAF 212, the present invention is not limited thereto, and may include one of the workpiece 201 and the DAF 212 but not the other.

1: Expansion sheet device 20: Frame holding device (frame holding means) 30: Cooling table 31: Contact surface 40: Expansion unit (expansion means) 50: Heating unit (heating means) 52: Hot air spraying unit 90: Bending plate (hot air ingress prevention means) 92: Spray outlet 92: Bending surface 200: Workpiece unit 201: Workpiece 210: Expansion sheet 211: Ring frame 300: Hot air 301: Air gathering

FIG. 1 is a perspective view showing an example of a workpiece unit to be processed by the sheet expansion device of embodiment 1. FIG. 2 is a cross-sectional view schematically showing an example of the structure of the sheet expansion device of embodiment 1. FIG. 3 is a cross-sectional view schematically showing a bending plate, etc. of the sheet expansion device shown in FIG. 2. FIG. 4 is a cross-sectional view schematically showing a state where an annular frame of the workpiece unit is mounted on the frame mounting plate of the sheet expansion device shown in FIG. 2. FIG. 5 is a cross-sectional view schematically showing a state where the frame holding unit of the sheet expansion device shown in FIG. 4 fixes the annular frame. FIG. 6 is a cross-sectional view schematically showing a state where the frame mounting plate shown in FIG. 5 is raised and the expansion sheet is expanded. FIG7 is a cross-sectional view schematically showing the state of heating and shrinking the expansion sheet shown in FIG6. FIG8 is a cross-sectional view schematically showing a configuration example of an expansion sheet device of a modified example of implementation method 1.

1: Expansion device

10: Chamber

11: Side wall

12: Open mouth

13: Open and close the door

20: Frame holding unit (frame holding means)

21: Frame mounting plate

22: Frame pressure plate

23: Upper surface of the frame mounting plate

24: Lower surface of the frame pressing plate

25: Sliding support member

26: Sealing components

30: Cooling table

31: Butt surface

32: Workbench body

33: Cooling unit

34: Workbench lifting unit

35: Suction hole

36: Workbench cover

37: Large diameter cylindrical part

38: Ring part

39: Small diameter cylindrical part

40: Expansion unit (expansion means)

41: Expansion drum

42: Cylinder for lifting

43: Drum part

44: Rolling member

45: Rod

50: Heating unit (heating means)

51: Heating plate

52: Hot air spraying section

521: Jet unit body

522: Coil heater

523: Supply Road

524:Switch valve

525: Air supply source

53:Block

54: Motor for heating plate rotation

55: Motor for baffle rotation

56: Opening

60: Supply Road

61:Switch valve

62: Compressed air supply source

63: Compressed air blowing outlet

64: Vortex tube

70: Attraction Road

71:Switch valve

72: Attraction source

80: Supply Road

81:Switch valve

82: Compressed air supply source

90: Bending plate (means to prevent hot air from entering)

92: Curved surface

100: Control unit

Claims (3)

A sheet expansion device expands the expansion sheet of a workpiece unit composed of a workpiece, an expansion sheet adhered to the workpiece, and an annular frame adhered to the outer peripheral side of the expansion sheet, and comprises: a frame holding means for holding the annular frame of the workpiece unit; a cooling table including an abutting surface corresponding to the size of the workpiece and abutting against the expansion sheet of the workpiece unit including the annular frame held by the frame holding means; an expansion means for expanding the expansion sheet adhered to the annular frame held by the frame holding means; a heating means having a heat A hot air spraying part, the hot air spraying part faces the expansion piece between the outer peripheral side of the workpiece and the inner peripheral edge of the annular frame and sprays hot air; a hot air intrusion prevention means, arranged between the workpiece and the hot air spraying part, and having a spray outlet for spraying gas toward the workpiece, preventing the hot air sprayed from the hot air spraying part from entering; and a workbench cover, covering the outer periphery of the cooling workbench, and the heating means sprays hot air to the expansion piece between the outer peripheral side of the workpiece and the inner peripheral edge of the annular frame, and blows out compressed air from between the cooling workbench and the heating means. The expansion sheet device as described in claim 1, wherein, while the cooling table cools the bonding film between the workpiece and the expansion sheet, while the expansion means expands the expansion sheet, the table cover blows out the compressed air from between the cooling table and the frame holding means, and the frame holding means blows out the compressed air from the blowing outlets provided all around. A sheet expansion device as described in claim 1 or 2, wherein the hot air entry prevention means faces the workpiece and is formed to have a size corresponding to the abutment surface, and includes a curved surface that is curved so that the distance between the workpiece and the workpiece becomes farther from the peripheral side of the workpiece to the central side, and the nozzle is formed on the curved surface, thereby forming air accumulation between the curved surface and the workpiece.