TWI844685B - Flange system - Google Patents

Abstract

Provides a flange mechanism that attracts less dirt than ever before into a fixed connection path.

A flange mechanism is provided for mounting a cutting blade having a mounting hole in the center and a cutting edge in the outer periphery on a main shaft serving as a rotating shaft. The flange mechanism comprises: a cylindrical boss portion, the front side of which is inserted into the mounting hole of the cutting blade and the main shaft is fixed on the rear side; and a flange portion, which extends radially from the rear side of the boss portion and has a supporting surface on the front surface for the cutting blade to abut. The supporting surface is provided with a suction hole for attracting and fixing the cutting blade, and a connecting passage for connecting the suction hole with a suction source. The connecting passage is provided with a switching valve which is also connected to a fluid supply source and can switch the connection with the fluid supply source and the suction source, and the aforementioned fluid supply source is a fluid for supplying cleaning to the connecting passage.

Description

Flange system

The present invention relates to a flange mechanism for mounting a cutting blade.

The following technology is known: a connection passage connected to a suction source is provided on a flange mounted on a main shaft, and a negative pressure is generated in a space between the flange and a base of a cutting blade or a pressing flange for pressing the cutting blade, so as to mount the cutting blade on the main shaft (see patent documents 1, 2 and 3).

Prior art literature Patent Literature

Patent document 1: Japanese Patent Publication No. 2018-075688

Patent document 2: Japanese Patent Publication No. 2018-144168

Patent document 3: Japanese Patent Publication No. 2015-023222

In the case of suction fixing the cutting blade, there is a problem of waste entering the suction fixing connection path. If the connection path becomes dirty, it will not be able to be sucked normally, and there is a concern that the cutting blade will fall off during processing and cause damage to the processed object.

This invention is made in view of the above-mentioned problems, and its purpose is to provide a flange mechanism that can reduce the dirt attracted to the fixed connection path more than before.

In order to solve the above-mentioned problems and achieve the purpose, the flange mechanism of the present invention is a flange mechanism in which a cutting blade having a mounting hole in the center and a cutting edge in the outer periphery is mounted on a main shaft serving as a rotating shaft. The flange mechanism is characterized in that: a cylindrical boss portion is inserted into the mounting hole of the cutting blade on the front side, and the main shaft is fixed on the rear side; and a flange portion is formed from the rear side of the boss portion. The side extends in the radial direction, and has a support surface on the front surface for the cutting blade to abut. In addition, the support surface has a suction hole for sucking and fixing the cutting blade, and a connecting passage for connecting the suction hole with a suction source. The connecting passage has a switching valve that is also connected to a fluid supply source and can switch the connection with the fluid supply source and the suction source. The aforementioned fluid supply source is a fluid for cleaning supplied to the connecting passage.

Furthermore, in order to solve the above-mentioned problems and achieve the purpose, the flange mechanism of the present invention is a flange mechanism in which a disc-shaped cutting blade having a mounting hole at the center is mounted on a main shaft serving as a rotating shaft, and is characterized in that: it has: a cylindrical boss portion, the front side of which is inserted into the mounting hole of the cutting blade, and the main shaft is fixed on the rear side; a fixed flange portion, which extends radially from the rear side of the boss portion, and has a front surface for the cutting blade to abut against. The supporting surface of the pressing flange has a recess or hole installed on the convex seat and holds the cutting blade between the fixed flange. The supporting surface has a suction hole for sucking and fixing the pressing flange, and a connecting passage for connecting the suction hole with a suction source. The connecting passage has a switching valve that is also connected to a fluid supply source and can switch the connection with the fluid supply source and the suction source. The fluid supply source is a fluid for cleaning the connecting passage.

The invention of this application can reduce the pollution attracted by fixed connecting passages more than before.

1,1-2,1-3: flange mechanism

2,32,62: convex seat

3: Flange

3-1,33-1,63-1,71-1: Support surface

3-2,33-2: Annular concave part

3-3,4-2,33-3,34-2,63-4,64-2: Suction hole

4,34,64: cylindrical part

4-1: Periphery

5,35,41,65,124-3,224-1,324-1: Installation hole

6,36,66: Connecting roads

10: Rotary joint

11: Cylindrical convex seat

12,71: flange

13: Accommodation hole

14: Pipe fittings

15: Mounting hole

17: Switching valve

18: Attraction source

19: Fluid supply source

20,50,80: flange system

30,60: Mounting seat

33,63: Fixed flange

34-1,64-1: annular groove

40,70: Press the flange

42: 1st support surface

43: Engagement convex part

44: Second support surface

63-2: Annular groove

63-3: Ring-shaped convex part

71-2: End face

71-3: Circular concave part

72: Cap part

100: Cutting device

110: Workbench

111: Keep the face

120,220,320: cutting unit

121,221,321: Spindle housing

121-1,221-1,321-1: End

121-2,122-1,322-1: screw holes

122,222,322: Main axis

124,224,324: Cutting blades

124-1: Base

124-2: Cutting edge

125: Blade cover

128,328: Gasket

129,329:Screws

130:Y-axis moving unit

140: Z-axis moving unit

150: Washing unit

160: Film box

170: Control unit

200: Workpiece

201: Front

202: Split the scheduled line

203: Devices

204: Back

210: Adhesive tape

211: Ring frame

222-1: Threaded groove

229: Tighten the nut

X,Y,Z: Direction

FIG1 is a three-dimensional diagram showing an example of the structure of a cutting device having a flange mechanism of embodiment 1.

FIG2 is an exploded perspective view showing an example of the structure of a cutting unit having a flange mechanism of embodiment 1.

FIG3 is a cross-sectional view showing an example of the structure of a cutting unit having a flange mechanism of embodiment 1.

FIG4 is an exploded perspective view showing an example of the structure of a cutting unit having a flange mechanism of embodiment 2.

FIG5 is a cross-sectional view showing an example of the structure of a cutting unit having a flange mechanism of embodiment 2.

FIG6 is an exploded perspective view showing an example of the structure of a cutting unit having a flange mechanism of embodiment 3.

FIG7 is a cross-sectional view showing an example of the structure of a cutting unit having a flange mechanism of embodiment 3.

The form used to implement the invention

The form (implementation form) used to implement the present invention is described in detail with reference to the drawings. The present invention is not limited by the contents described in the following implementation form. In addition, the constituent elements described below include constituent elements that can be easily conceived by a person with ordinary knowledge in the relevant technical field or are substantially the same. In addition, the constituent elements described below can be appropriately combined. In addition, various constituent elements can be omitted, replaced or changed without departing from the gist of the present invention.

[Implementation form 1]

The flange mechanism 1 of the embodiment 1 of the present invention is described according to the drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device 100 having the flange mechanism 1 of the embodiment 1. FIG. 2 is an exploded perspective view showing a configuration example of a cutting unit 120 having the flange mechanism 1 of the embodiment 1. FIG. 3 is a cross-sectional view showing a configuration example of a cutting unit 120 having the flange mechanism 1 of the embodiment 1.

The flange mechanism 1 of the embodiment 1 constitutes the cutting device 100 shown in FIG. 1. The cutting device 100 is a device for cutting a workpiece 200. In the embodiment 1, the workpiece 200 cut by the cutting device 100 is a wafer such as a semiconductor wafer or an optical device wafer in a circular plate shape with a base material such as silicon, sapphire, or gallium. The workpiece 200 has a device 203 formed in an area demarcated by a plurality of predetermined dividing lines 202 formed in a grid shape on a flat front surface 201. The workpiece 200 has an adhesive tape 210 attached to the back surface 204 on the back side of the front surface 201, and a ring frame 211 is installed on the outer edge of the adhesive tape 210. Furthermore, in the present invention, the workpiece 200 may also be a rectangular package substrate, a ceramic plate, or a glass plate having a plurality of devices sealed by resin.

As shown in FIG1 , the cutting device 100 includes a workpiece 200 that is attracted and held by a holding surface 111 and that can be rotated around an axis by a rotary drive source, a cutting unit 120 that performs cutting processing on the workpiece 200 held on the workpiece 110, an unillustrated X-axis moving unit that moves the workpiece 200 in the X-axis direction, a Y-axis moving unit 130 that moves the cutting unit 120 in the Y-axis direction, and a Z-axis moving unit 140 that moves the cutting unit 120 in the Z-axis direction. In addition, the cutting device 100 has a cleaning unit 150 for cleaning the workpiece 200 after cutting, a sheet cassette 160 for accommodating the workpiece 200 before and after cutting, a transport unit (not shown) for transporting the workpiece 200 between the sheet cassette 160, the work clamp 110 and the cleaning unit 150, and a computer, i.e., a control unit 170, for controlling each component.

The cutting device 100 causes the conveying unit to take out a workpiece 200 from the sheet magazine 160 and place it on the holding surface 111 of the work clamp 110. The cutting device 100 attracts and holds the workpiece 200 on the holding surface 111 of the work clamp 110, and supplies cutting water to the workpiece 200 from the cutting unit 120, while the work clamp 110 and the cutting unit 120 are moved relatively along the predetermined dividing line 202 by the X-axis moving unit, the rotation drive source, the Y-axis moving unit 130, and the Z-axis moving unit 140, and the cutting unit 120 cuts the predetermined dividing line 202 of the workpiece 200. After the cutting device 100 cuts all the predetermined dividing lines 202 of the workpiece 200, the workpiece 200 is cleaned by the cleaning unit 150 and then placed in the sheet cassette 160.

As shown in FIG. 2 , the cutting unit 120 of the cutting device 100 includes a main shaft housing 121 formed in a cylindrical shape and provided so as to be movable in the Y-axis direction and the Z-axis direction by means of a Y-axis moving unit 130 and a Z-axis moving unit 140, and a main shaft 122 provided in the main shaft housing 121 so as to be rotatable around an axis parallel to the Y-axis direction. As shown in FIG. 1 , the cutting unit 120 includes a cutting blade 124 fixed to the front end of the main shaft 122, a blade cover 125, a rotary joint 10 shown in FIG. 2 and FIG. 3 connected to a suction source 18 (see FIG. 3 ) for sucking the cutting blade 124 toward the main shaft 122, and a flange mechanism 1 for sucking and fixing the cutting blade 124 to the front end of the main shaft 122 by the suction force from the rotary joint 10.

The spindle 122 is rotatably supported by the spindle housing 121. The front end of the spindle 122 protrudes outward from one end of the spindle housing 121. A motor (not shown) for rotating the spindle 122 is connected to the base end of the spindle 122. As shown in FIG. 2, the front end of the spindle 122 is formed into a cone shape with the outer diameter gradually decreasing toward the front end. The spindle 122 is freely accommodated in the spindle housing 121 in a rotatable manner around the axis with the front end exposed.

The cutting blade 124 is fixed to the front end of the spindle 122 through the flange mechanism 1, and is rotated by the spindle 122 serving as a rotating shaft, thereby cutting the workpiece 200. As shown in FIG2 , in the embodiment 1, the cutting blade 124 is a so-called hub-type blade, and has a disc-shaped base 124-1 formed of a metal such as an aluminum alloy and having a mounting hole 124-3 and formed in an annular shape, and an annular cutting edge 124-2 provided on the outer periphery of the base 124-1 and protruding from the outer periphery of the base 124-1.

The mounting hole 124-3 is a hole for fixing the cutting blade 124 to the flange mechanism 1. The cutting blade 124-2 is formed by abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a binder (bonding material) such as metal or resin, and is formed to a predetermined thickness. As shown in FIG. 3, the cutting blade 124-2 is fixed to the outer periphery of the side surface of the flat side of the base 124-1, and protrudes from the outer edge of the base 124-1 toward the outer periphery.

As shown in FIG1 , the blade cover 125 is configured as follows: fixed to the spindle housing 121, and covering the top of the cutting blade 124 and at least one side in the X-axis direction, and supplying the machining fluid, i.e., cutting water, to the cutting blade 124 and the workpiece 200 during the cutting process through a cutting water nozzle installed at the lower end.

As shown in FIG. 2 and FIG. 3 , the rotary joint 10 has a cylindrical boss portion 11, a flange portion 12 integrally formed on the outer periphery of the cylindrical boss portion 11, a receiving hole 13 formed on the inner side of the cylindrical boss portion 11, a pipe 14 having one end connected to the receiving hole 13, and a plurality of mounting holes 15 formed on the flange portion 12.

The rotary joint 10 is fixed to the end 121-1 on the front side of the spindle housing 121 by inserting a plurality of screws into the respective mounting holes 15 and screwing and locking them into the respective screw holes 121-2 formed at the end 121-1 on the front side of the spindle housing 121 at positions corresponding to the respective mounting holes 15.

As shown in FIG3 , the inner diameter of the receiving hole 13 is almost the same as the outer diameter of the cylindrical portion 4 of the flange mechanism 1 described later, and the outer periphery 4-1 of the cylindrical portion 4 is fitted without gap in a manner that allows rotation around the Y axis. The connecting hole in the receiving hole 13 that is connected to one end of the pipe 14 is connected to the suction hole 4-2 of the cylindrical portion 4 described later at a predetermined rotation angle as the outer periphery 4-1 of the cylindrical portion 4 rotates around the Y axis.

As shown in FIG3 , the other end of the pipe 14 is selectively connected to the suction source 18 and the fluid supply source 19 through the switching valve 17. The switching valve 17 is electrically connected to the control unit 170 shown in FIG1 in a manner that can communicate with the control unit 170, and the control unit 170 can control the action of switching the connection destination of the pipe 14 between the suction source 18 and the fluid supply source 19.

The suction source 18 sucks and fixes the cutting blade 124 by sucking the gas inside the connecting passage 6 described later. The fluid supply source 19 removes dirt from the connecting passage 6 by supplying the fluid for cleaning the connecting passage 6 inside the connecting passage 6.

As shown in Figures 2 and 3, the flange mechanism 1 includes: a cylindrical boss portion 2 extending in the front-rear direction, i.e., the Y-axis direction; a disc-shaped flange portion 3 extending outward from the rear side, i.e., the +Y direction side, of the boss portion 2 in the radial direction of the boss portion 2 and formed integrally; and a cylinder portion 4 protruding from the rear side of the flange portion 3 and formed integrally. The flange mechanism 1 is configured such that the boss portion 2, the flange portion 3, and the cylinder portion 4 overlap each other with their respective center axes and face the Y-axis direction.

The flange mechanism 1 has a mounting hole 5 formed on the inner side. The mounting hole 5 is formed into a tapered shape in a manner that the inner diameter gradually decreases toward the front end, and the base end side is fitted into the outer periphery of the front end of the main shaft 122 without a gap. The flange mechanism 1 is fixed to the front end of the main shaft 122 by inserting a screw 129 into the mounting hole 5 through a washer 128, and screwing and locking it into the screw hole 122-1 formed at the front end of the main shaft 122.

The boss portion 2 can be installed on the base 124-1 of the cutting blade 124. Specifically, as shown in Figures 2 and 3, the boss portion 2 can be inserted into the installation hole 124-3 of the base 124-1 of the cutting blade 124, and the base 124-1 of the cutting blade 124 can be supported from the inner peripheral side of the installation hole 124-3 with the outer peripheral side.

As shown in Figures 2 and 3, the cylindrical portion 4 has an outer periphery 4-1 and a plurality of suction holes 4-2 arranged on the outer periphery 4-1 and arranged at predetermined intervals in the circumferential direction. The cylindrical portion 4 is fitted into the receiving hole 13 without a gap in a manner that allows rotation around the Y axis.

The flange portion 3 has: an annular support surface 3-1 formed on the radial outer side of the surface facing the front side; and an annular recess 3-2 formed around the outer periphery of the convex seat portion 2 on the radial inner side of the surface facing the front side. As shown in FIG. 3, the support surface 3-1 is provided for the back side (rear side) of the base 124-1 of the cutting blade 124, that is, the surface side in the +Y direction, and supports the abutted surface side.

As shown in FIG3, the annular recess 3-2 is formed to be more recessed toward the +Y direction than the supporting surface 3-1. As shown in FIG2 and FIG3, a suction hole 3-3 is formed in the annular recess 3-2. As shown in FIG3, the suction hole 3-3 is connected to the suction source 18 and the fluid supply source 19 in a mutually switchable manner through the connecting passage 6 formed in the flange portion 3 of the flange mechanism 1 and the inner part of the cylindrical portion 4, the suction hole 4-2 of the cylindrical portion 4, the pipe 14 of the rotary joint 10, and the switching valve 17.

When the suction hole 3-3 is connected to the suction source 18, the back side of the base 124-1 of the cutting blade 124 is sucked toward the support surface 3-1 by the suction force from the rotating joint 10, thereby sucking and fixing the cutting blade 124. When the suction hole 3-3 is connected to the fluid supply source 19, the cleaning fluid is supplied from the rotating joint 10, thereby removing and cleaning the dirt on the annular recess 3-2 and the back side of the base 124-1 of the cutting blade 124 together with the dirt on the connecting passage 6.

The flange mechanism 1, the rotary joint 10, the switching valve 17, the suction source 18 and the fluid supply source 19 constitute the flange system 20 of the embodiment 1. The flange system 20 is formed by connecting the suction hole 3-3 and the connecting passage 6 of the flange part 3 in the flange mechanism 1 with the suction source 18 through the rotary joint 10 and the switching valve 17, thereby forming a suction fixing mode in which the back side of the base 124-1 that fixes the cutting blade 124 is sucked and fixed by the support surface 3-1 of the flange part 3. The flange system 20 is connected to the suction hole 3-3 of the flange part 3 in the flange mechanism 1 and the connecting passage 6 and the fluid supply source 19 through the rotary joint 10 and the switching valve 17, thereby becoming a cleaning mode for removing and cleaning the dirt in the connecting passage 6. The flange system 20 switches between the suction fixed mode and the cleaning mode by switching the switching valve 17. Furthermore, the cleaning mode is performed in a state where the cutting blade 124 has been removed.

Furthermore, although the flange system 20 is composed of a swivel joint 10 in this embodiment, the present invention is not limited thereto, and other structures that replace the swivel joint 10 can also be used to connect and communicate the connecting passage 6 with the switching valve 17.

In this embodiment, although the suction hole 3-3 is formed in the annular recess 3-2, the present invention is not limited thereto, and may also be formed, for example, in the step area between the support surface 3-1 and the annular recess 3-2 or at a position on the outer periphery of the boss portion 2 that opens toward the annular recess 3-2.

Since the flange mechanism 1 of the embodiment 1 has the above structure, it can be switched to the suction fixed mode and the cleaning mode by switching the switching valve 17. The aforementioned suction fixed mode is a mode in which the suction hole 3-3 and the connecting passage 6 are connected to the suction source 18, and the aforementioned cleaning mode is a mode in which the suction hole 3-3 and the connecting passage 6 are connected to the fluid supply source 19. Therefore, the flange mechanism 1 of the embodiment 1 will play the following effect: by cleaning the suction fixed connecting passage 6, the dirt of the suction fixed connecting passage 6 can be reduced more than before.

[Implementation form 2]

The flange mechanism 1-2 of the embodiment 2 of the present invention is described according to the drawings. FIG. 4 is an exploded perspective view showing a configuration example of a cutting unit 220 having the flange mechanism 1-2 of the embodiment 2. FIG. 5 is a cross-sectional view showing a configuration example of a cutting unit 220 having the flange mechanism 1-2 of the embodiment 2. In addition, FIG. 4 and FIG. 5 are the same as the embodiment 1, and the same symbols are added to the same parts and the description is omitted.

As shown in FIG. 4 , the cutting unit 220 of the second embodiment includes a spindle housing 221 and a spindle 222. The spindle housing 221 is movably disposed in the Y-axis direction and the Z-axis direction almost the same as the first embodiment, and the spindle 222 is rotatably disposed in the spindle housing 221 around an axis parallel to the Y-axis direction. Furthermore, the cutting unit 220 of the second embodiment is as shown in FIG. 4, and has a cutting blade 224 fixed to the front end of the main shaft 222, a blade cover 125 similar to the first embodiment, a rotary joint 10 connected to a suction source 18 for sucking the cutting blade 224 toward the main shaft 222, and a flange mechanism 1-2 of the second embodiment that sucks the cutting blade 224 to the front end of the main shaft 222 by suction from the rotary joint 10.

The spindle housing 221 and spindle 222 of embodiment 2 are the spindle housing 121 and spindle 122 of embodiment 1, and the shape and the like are changed in response to the change of the installation object to the flange mechanism 1-2 and the cutting blade 224 of embodiment 2, and the basic structure is the same as that of embodiment 1.

The cutting blade 224 is fixed to the front end of the spindle 222 through the flange mechanism 1-2, and is rotated by the spindle 222 serving as a rotating shaft, thereby cutting the workpiece 200. In the second embodiment, the cutting blade 224 is a so-called hubless blade, and as shown in FIG. 4, is disc-shaped (ring-shaped), and has a hole in the center for fixing the cutting blade 224 to the flange mechanism 1-2, i.e., a mounting hole 224-1. The cutting blade 224 is formed of the same material as the cutting edge 124-2 of the cutting blade 124 of the first embodiment, and has the same predetermined thickness.

In the second embodiment, the rotary joint 10 is fixed to the end 221-1 of the front end side of the spindle housing 221 in the same way as in the first embodiment. In the second embodiment, the receiving hole 13 of the rotary joint 10 is as shown in FIG5, and the inner diameter is almost the same as the outer diameter of the cylindrical portion 34 of the flange mechanism 1-2 described later, and the outer periphery of the cylindrical portion 34 is fitted without gap in a manner that can rotate around the Y axis. The connecting hole in the receiving hole 13 connected to one end of the pipe 14 is connected to the suction hole 34-2 through the annular groove 34-1 of the cylindrical portion 34 described later at a predetermined rotation angle as the outer periphery of the cylindrical portion 34 rotates around the Y axis.

As shown in Fig. 4 and Fig. 5, the flange mechanism 1-2 of the embodiment 2 has a mounting seat 30 and a pressing flange portion 40. The mounting seat 30 has: a cylindrical boss portion 32 extending in the front-rear direction, i.e., the Y-axis direction; a disc-shaped fixed flange portion 33 extending outward from the rear side of the boss portion 32, i.e., the +Y direction side, in the radial direction of the boss portion 32 and formed integrally; and a cylindrical portion 34 protruding from the rear side of the fixed flange portion 33 and formed integrally. The mounting seat 30 is configured in the Y-axis direction by overlapping the boss portion 32, the fixed flange portion 33, and the cylindrical portion 34 with their respective center axes overlapping each other.

The mounting seat 30 has a mounting hole 35 formed on the inner side. The mounting hole 35 is formed into a tapered shape with the inner diameter gradually decreasing toward the front end from the base end side, and is fitted into the outer periphery of the front end of the spindle 222 without gap. The mounting seat 30 is fixed to the front end of the spindle 222 by inserting the front end of the spindle 222 into the mounting hole 35, and screwing and locking the locking nut 229 having a threaded groove formed on the inner periphery into the threaded groove 222-1 formed at the front end of the spindle 222 from the front, i.e., the -Y direction side.

As shown in FIG. 4 and FIG. 5 , the boss portion 32 is inserted into the mounting hole 41 of the pressing flange portion 40 described later, and supports the pressing flange portion 40 from the inner peripheral side of the mounting hole 41 on the outer peripheral side.

As shown in Figures 4 and 5, the cylindrical portion 34 has an annular groove 34-1 provided on the outer circumference, and a plurality of suction holes 34-2 provided on the annular groove 34-1 and arranged at predetermined intervals in the circumferential direction. The cylindrical portion 34 is fitted into the receiving hole 13 without gap in a manner that allows rotation around the Y axis. Furthermore, the annular groove 34-1 may be omitted, and only the suction holes 34-2 may be formed.

The fixed flange portion 33 has: an annular support surface 33-1 formed on the radial outer side of the surface facing the front side; and an annular recess 33-2 formed around the outer periphery of the convex seat portion 32 on the radial inner side of the surface facing the front side. As shown in FIG. 5, the annular recess 33-2 is formed to be more recessed in the +Y direction than the support surface 33-1.

The pressing flange portion 40 is a member that presses the cutting blade 224 by covering the cutting blade 224 disposed on the boss portion 32 of the mounting seat 30 from the front side and installing it to the boss portion 32.

Specifically, the pressing flange 40 is formed with a mounting hole 41 on the inner side as shown in FIG. 4 and FIG. 5. The mounting hole 41 is fitted into the outer periphery of the boss portion 32 of the mounting seat 30 without any gap. The pressing flange 40 is installed and fixed to the boss portion 32 of the mounting seat 30 by inserting the boss portion 32 of the mounting seat 30 into the mounting hole 41 and being attracted toward the rear side, i.e., the +Y direction side, by the attraction force from the rotating joint 10.

As shown in FIG. 5 , the pressing flange 40 has a mating protrusion 43 formed at the center of the back side (rear side), i.e., the +Y direction side, a first annular supporting surface 42 formed on the radial outer side of the mating protrusion 43, and a second annular supporting surface 44 contacting the inner diameter of the cutting blade at the periphery of the mating protrusion 43. The mating protrusion 43 of the pressing flange 40 is a step portion formed between the supporting surface 33-1 and the annular recess 33-2 in the fixed flange 33 of the mounting seat 30. The mating protrusion 43 can be mated in the step portion between the supporting surface 33-1 and the annular recess 33-2.

The flange mechanism 1-2 of the embodiment 2 is to insert the convex seat portion 32 of the mounting seat 30 and the mounting hole 41 of the pressing flange portion 40 into the mounting hole 224-1 of the cutting blade 224 in this order, and to make the engaging convex portion 43 engage in the step portion between the supporting surface 33-1 and the annular recess 33-2, thereby clamping the cutting blade 224 between the supporting surface 33-1 and the first supporting surface 42.

As shown in FIG. 4 and FIG. 5 , a suction hole 33-3 is formed in the annular recess 33-2. As shown in FIG. 5 , the suction hole 33-3 is connected to the suction source 18 and the fluid supply source 19 in a mutually switchable manner through the connecting passage 36 formed in the fixed flange portion 33 and the inner part of the cylindrical portion 34 of the flange mechanism 1-2, the annular groove 34-1 and the suction hole 34-2 of the cylindrical portion 34, the pipe 14 of the rotary joint 10, and the switching valve 17.

When the suction hole 33-3 is connected to the suction source 18 in a state where the cutting blade 224 is sandwiched between the support surface 33-1 and the first support surface 42, the second support surface 44 on the back side of the pressing flange 40 is attracted toward the annular recess 33-2 by the suction force from the rotating joint 10, thereby pressing the back side of the cutting blade 224 toward the support surface 33-1 through the first support surface 42 of the pressing flange 40, thereby indirectly attracting and fixing the cutting blade 224. When the suction hole 33-3 is connected to the fluid supply source 19, the cleaning fluid is supplied from the rotating joint 10, thereby removing and cleaning the dirt in the annular recess 33-2 together with the dirt in the connecting passage 36.

The flange mechanism 1-2, the rotary joint 10, the switching valve 17, the suction source 18 and the fluid supply source 19 constitute the flange system 50 of the embodiment 2. The flange system 50 is formed into a suction fixing mode in which the back side of the fixed cutting blade 224 is sucked by the support surface 33-1 of the fixed flange part 33 by connecting the suction hole 33-3 and the connecting passage 36 of the fixed flange part 33 in the flange mechanism 1-2 with the suction source 18 through the rotary joint 10 and the switching valve 17. The flange system 50 is connected to the suction hole 33-3 of the fixed flange part 33 in the flange mechanism 1-2 and the connecting passage 36 and the fluid supply source 19 through the rotary joint 10 and the switching valve 17, thereby becoming a cleaning mode for removing and cleaning the dirt in the connecting passage 36. The flange system 50 switches between the suction fixing mode and the cleaning mode by switching the switching valve 17. Furthermore, the cleaning mode is performed in a state where the cutting blade 224 has been removed.

Furthermore, although the flange system 50 is composed of a swivel joint 10 in this embodiment, the present invention is not limited thereto, and other structures that replace the swivel joint 10 can also be used to connect and communicate the connecting passage 36 with the switching valve 17.

In this embodiment, although the suction hole 33-3 is formed in the annular recess 33-2, the present invention is not limited thereto, and may also be formed in the step area between the support surface 33-1 and the annular recess 33-2, for example.

Since the flange mechanism 1-2 of the embodiment 2 has the above structure, it can be switched to the suction fixed mode and the cleaning mode by switching the switching valve 17. The suction fixed mode is a mode in which the suction hole 33-3 and the connecting passage 36 are connected to the suction source 18, and the cleaning mode is a mode in which the suction hole 33-3 and the connecting passage 36 are connected to the fluid supply source 19. Therefore, the flange mechanism 1-2 of the embodiment 2 has the following effect in the same manner as the flange mechanism 1 of the embodiment 1: by cleaning the suction fixed connecting passage 36, the dirt of the suction fixed connecting passage 36 can be reduced more than before.

[Implementation form 3]

The flange mechanism 1-3 of the embodiment 3 of the present invention is described according to the drawings. FIG. 6 is an exploded perspective view showing a configuration example of a cutting unit 320 having the flange mechanism 1-3 of the embodiment 3. FIG. 7 is a cross-sectional view showing a configuration example of a cutting unit 320 having the flange mechanism 1-3 of the embodiment 3. In addition, FIG. 6 and FIG. 7 are the same as the embodiments 1 and 2, and the description thereof is omitted by attaching the same symbols to the same parts.

As shown in FIG6 , the cutting unit 320 of embodiment 3 includes a spindle housing 321 and a spindle 322. The spindle housing 321 is movably arranged in the Y-axis direction and the Z-axis direction almost the same as embodiments 1 and 2, and the spindle 322 is rotatably arranged in the spindle housing 321 around an axis parallel to the Y-axis direction. Furthermore, the cutting unit 320 of the embodiment 3 is as shown in FIG6, and has a cutting blade 324 fixed to the front end of the main shaft 322, a blade cover 125 similar to the embodiment 1, and a rotary joint 10 connected to a suction source 18 for sucking the cutting blade 324 toward the main shaft 322, and a flange mechanism 1-3 of the embodiment 3 that sucks the cutting blade 324 to the front end of the main shaft 322 by suction from the rotary joint 10.

The spindle housing 321 and spindle 322 of embodiment 3 are the spindle housing 121 and spindle 122 of embodiment 1, and the shape and the like are changed in response to the change of the object to be installed to the flange mechanism 1-3 and the cutting blade 324 of embodiment 3, and the basic structure is the same as that of embodiment 1.

The cutting blade 324 is fixed to the front end of the main shaft 322 through the flange mechanism 1-3, and is rotated by the main shaft 322 serving as a rotating axis, thereby cutting the workpiece 200. The cutting blade 324 is a so-called hubless blade similar to the cutting blade 224 of the embodiment 2, and has a mounting hole 324-1.

In the third embodiment, the rotary joint 10 is fixed to the end 321-1 of the front end side of the spindle housing 321 in the same manner as in the first and second embodiments. In the third embodiment, the receiving hole 13 of the rotary joint 10 is as shown in FIG. 7, and the inner diameter is almost the same as the outer diameter of the cylindrical portion 64 of the flange mechanism 1-3 described later, and the outer periphery of the cylindrical portion 64 is fitted without gap in a manner that can rotate around the Y axis. The connecting hole in the receiving hole 13 that is connected to one end of the pipe 14 is connected to the suction hole 64-2 through the annular groove 64-1 of the cylindrical portion 64 described later at a predetermined rotation angle as the outer periphery of the cylindrical portion 64 rotates around the Y axis.

As shown in Figures 6 and 7, the flange mechanism 1-3 of the embodiment 3 has a mounting seat 60 and a pressing flange portion 70. The mounting seat 60 has: a cylindrical boss portion 62 extending in the front-rear direction, i.e., the Y-axis direction; a disc-shaped fixed flange portion 63 extending outward from the rear side of the boss portion 62, i.e., the +Y direction side, toward the radial direction of the boss portion 32 and formed integrally; and a cylindrical portion 64 protruding from the rear side of the fixed flange portion 63 and formed integrally. The mounting seat 60 is configured in the Y-axis direction by overlapping the boss portion 62, the fixed flange portion 63, and the cylindrical portion 64 with their respective center axes overlapping each other.

The mounting seat 60 has a mounting hole 65 formed on the inner side. The mounting hole 65 is formed in a conical shape with the inner diameter gradually decreasing toward the front end, and the base end side is fitted into the outer periphery of the front end of the main shaft 322 without gap. The mounting seat 60 can be fixed to the front end of the main shaft 322 by inserting the screw 329 into the mounting hole 65 through the washer 328, and screwing and locking it into the screw hole 322-1 formed at the front end of the main shaft 322.

As shown in FIG6 and FIG7, the boss portion 62 is fitted into the circular recess 71-3 of the pressing flange portion 70 described later, and supports the pressing flange portion 70 from the inner circumference of the circular recess 71-3 with the outer circumference.

As shown in FIG6 and FIG7, the cylindrical portion 64 has an annular groove 64-1 similar to the annular groove 34-1 of the second embodiment, and a plurality of suction holes 64-2 similar to the plurality of suction holes 34-2 of the second embodiment. Furthermore, the annular groove 64-1 may be omitted, and only the suction holes 64-2 may be formed.

The fixed flange portion 63 has an annular support surface 63-1, an annular groove 63-2 and an annular convex portion 63-3 as shown in FIG7. The support surface 63-1 is formed in an annular shape on the radial outer side of the surface of the fixed flange portion 63 facing the front side. The annular convex portion 63-3 is formed around the outer periphery of the convex seat portion 62 on the radial inner side of the surface of the fixed flange portion 63 facing the front side. The annular groove 63-2 is formed to cover the area between the support surface 63-1 and the annular convex portion 63-3.

As shown in FIG. 7 , the annular groove 63-2 is formed by being recessed further toward the +Y direction than the supporting surface 63-1. The annular protrusion 63-3 is formed by being protruded further toward the -Y direction than the supporting surface 63-1.

The pressing flange portion 70 is a member that presses the cutting blade 324 by covering the cutting blade 324 disposed on the boss portion 62 of the mounting seat 60 from the front side and installing it to the boss portion 62.

Specifically, as shown in FIG. 6 and FIG. 7 , the pressing flange portion 70 includes a flange portion 71 and a cap portion 72. The flange portion 71 is formed in a disc shape, and the outer diameter is formed to be the same size as the fixed flange portion 63. The cap portion 72 is formed in a disc shape in a manner of covering the mounting hole formed in the center of the flange portion 71 from the front side, which is the same as the mounting hole 41 of the embodiment 2.

As shown in FIG. 7 , the pressing flange 70 has a supporting surface 71-1, an end surface 71-2, and a circular recess 71-3. The supporting surface 71-1 is formed in an annular shape on the radially outer side of the back side (rear side) of the flange 71, i.e., the +Y direction side. The end surface 71-2 is formed in an annular shape radially inwardly of the supporting surface 71-1 on the back side of the flange 71. The circular recess 71-3 is formed in a cylindrical shape by the inner peripheral surface of the mounting hole of the flange 71 and the back side surface of the cap 72. The supporting surface 71-1 is formed to protrude in the +Y direction more than the end surface 71-2. The circular recess 71-3 is formed by being recessed further in the -Y direction than the end surface 71-2.

The circular recess 71-3 of the pressing flange 70 is fitted into the outer periphery of the boss 62 of the mounting seat 60 without any gap. The pressing flange 70 is installed and fixed to the boss 62 of the mounting seat 60 by fitting the boss 62 of the mounting seat 60 into the circular recess 71-3 and being attracted toward the rear side, i.e., the +Y direction side, by the attraction force from the rotating joint 10.

By installing and fixing the pressing flange portion 70 to the convex seat portion 62 of the mounting seat 60, the supporting surface 63-1 and the supporting surface 71-1 will face each other in the Y-axis direction, and the annular groove 63-2 and the annular convex portion 63-3 and the end surface 71-2 will face each other in the Y-axis direction.

The flange mechanism 1-3 of the embodiment 3 is to fit the mounting hole 324-1 of the cutting blade 324 into the outer peripheral surface of the annular protrusion 63-3 of the mounting seat 60, and to mount and fix the pressing flange portion 70 to the protrusion portion 62 of the mounting seat 60 from the front side of the cutting blade 324, thereby clamping the cutting blade 324 between the supporting surface 63-1 and the supporting surface 71-1.

As shown in Fig. 6 and Fig. 7, a suction hole 63-4 is formed in the annular protrusion 63-3. As shown in Fig. 7, the suction hole 63-4 is connected to the suction source 18 and the fluid supply source 19 in a mutually switchable manner through the connecting passage 66 formed in the fixed flange portion 63 and the inner part of the cylindrical portion 64 of the flange mechanism 1-3, the annular groove 64-1 and the suction hole 64-2 of the cylindrical portion 64, the pipe 14 of the swivel joint 10, and the switching valve 17.

When the suction hole 63-4 is connected to the suction source 18 in a state where the cutting blade 324 is sandwiched between the support surface 63-1 and the support surface 71-1, the end surface 71-2 of the back side of the pressing flange 70 is attracted toward the annular protrusion 63-3 by the suction force from the rotating joint 10, thereby pressing the back side of the cutting blade 324 toward the supporting surface 63-1 through the supporting surface 71-1 of the pressing flange 70, and indirectly attracting and fixing the cutting blade 324. When the suction hole 63-4 is connected to the fluid supply source 19, the cleaning fluid is supplied from the rotating joint 10, thereby removing and cleaning the dirt on the annular protrusion 63-3 and the dirt on the connecting passage 66.

The flange mechanism 1-3, the rotary joint 10, the switching valve 17, the suction source 18 and the fluid supply source 19 constitute the flange system 80 of the embodiment 3. The flange system 80 is formed into a suction fixing mode in which the back side of the fixed cutting blade 324 is sucked by the support surface 63-1 of the fixed flange part 63 by connecting the suction hole 63-4 and the connecting passage 66 of the fixed flange part 63 in the flange mechanism 1-3 with the suction source 18 through the rotary joint 10 and the switching valve 17. The flange system 80 is connected to the suction hole 63-4 of the fixed flange part 63 in the flange mechanism 1-3 and the connecting passage 66 and the fluid supply source 19 through the rotary joint 10 and the switching valve 17, thereby becoming a cleaning mode for removing and cleaning the dirt in the connecting passage 66. The flange system 80 switches between the suction fixing mode and the cleaning mode by switching the switching valve 17. Furthermore, the cleaning mode is performed in a state where the cutting blade 324 has been removed.

Furthermore, although the flange system 80 is composed of a swivel joint 10 in this embodiment, the present invention is not limited thereto, and other structures that replace the swivel joint 10 can also be used to connect and communicate the connecting passage 66 with the switching valve 17.

In this embodiment, although the suction hole 63-4 is formed in the annular protrusion 63-3, the present invention is not limited thereto, and may also be formed, for example, on the outer periphery of the boss portion 62 at a position opening toward the annular protrusion 63-3.

Since the flange mechanism 1-3 of the embodiment 3 has the above-mentioned structure, it can be switched to the suction fixed mode and the cleaning mode by switching the switching valve 17. The aforementioned suction fixed mode is a mode in which the suction hole 63-4 and the connecting passage 66 are connected to the suction source 18, and the aforementioned cleaning mode is a mode in which the suction hole 63-4 and the connecting passage 66 are connected to the fluid supply source 19. Therefore, the flange mechanism 1-3 of the embodiment 3 and the flange mechanism 1 of the embodiment 1 and the flange mechanism 1-2 of the embodiment 2 have the following effects: by cleaning the suction fixed connecting passage 66, the dirt of the suction fixed connecting passage 66 can be reduced more than before.

Furthermore, the present invention is not limited to the above-mentioned embodiments. In other words, various modifications can be made and implemented without departing from the main points of the present invention.

1: Flange mechanism

2: Boss part

3: Flange

3-1: Support surface

3-2: Annular concave part

3-3: Suction hole

4: Cylindrical part

4-1: Periphery

4-2: Suction hole

5,124-3: Mounting hole

6: Connecting roads

10: Rotary joint

11: Cylindrical convex seat

12: flange

13: Accommodation hole

14: Pipe fittings

17: Switching valve

18: Attraction source

19: Fluid supply source

20: Flange system

120: Cutting unit

121: Spindle housing

121-1: End

122: Main axis

122-1: Screw hole

124: Cutting blade

124-1: Base

124-2: Cutting edge

128: Gasket

129: Screws

X,Y,Z: Direction

Claims (2)

A flange system, which at least has a flange mechanism, a switching valve, a suction source and a fluid supply source, wherein the flange mechanism installs a cutting blade having a mounting hole in the center and a cutting edge in the outer periphery on a main shaft serving as a rotating shaft, and the flange mechanism comprises: a cylindrical boss portion, the front side of which is inserted into the mounting hole of the cutting blade, and the main shaft is fixed on the rear side; and a flange portion, which extends radially from the rear side of the boss portion and has a The support surface is provided for the cutting blade to abut against, and the support surface is provided with a suction hole for sucking and fixing the cutting blade, and a connecting passage for connecting the suction hole with the suction source, the connecting passage is connected with the suction source through the switching valve, and is further connected with the fluid supply source through the switching valve, and the connection between the connecting passage and the fluid supply source and the suction source can be switched by switching the switching valve, and the aforementioned fluid supply source supplies the fluid for cleaning the connecting passage. A flange system, which at least has a flange mechanism, a switching valve, a suction source and a fluid supply source, wherein the flange mechanism installs a disc-shaped cutting blade having a mounting hole at the center on a main shaft serving as a rotating shaft, and the flange mechanism has: a cylindrical boss portion, the front side of which is inserted into the mounting hole of the cutting blade, and the main shaft is fixed on the rear side; a fixed flange portion, which extends radially from the rear side of the boss portion, and has a support surface on the front surface for the cutting blade to abut; and a pressing flange portion, which has a mounting hole. The concave portion or hole is provided in the convex seat portion, and the cutting blade is clamped between the fixed flange portion. In addition, the support surface is provided with a suction hole for sucking and fixing the pressing flange portion, and a connecting passage for connecting the suction hole with the suction source. The connecting passage is connected with the suction source through the switching valve, and is further connected with the fluid supply source through the switching valve. The connection between the connecting passage and the fluid supply source and the suction source can be switched by switching the switching valve. The aforementioned fluid supply source supplies the fluid for cleaning the connecting passage.